METHOD FOR THE 3-DIMENSIONAL MEASUREMENT OF A SAMPLE WITH A MEASURING SYSTEM COMPRISING A LASER SCANNING MICROSCOPE AND SUCH MEASURING SYSTEM
    111.
    发明公开
    METHOD FOR THE 3-DIMENSIONAL MEASUREMENT OF A SAMPLE WITH A MEASURING SYSTEM COMPRISING A LASER SCANNING MICROSCOPE AND SUCH MEASURING SYSTEM 审中-公开
    方法用激光扫描显微镜和这样的测量系统测量系统样品的三维测量

    公开(公告)号:EP2798443A1

    公开(公告)日:2014-11-05

    申请号:EP12709691.5

    申请日:2012-01-05

    Applicant: Femtonics Kft.

    CPC classification number: G01B11/24 G01B9/04 G06F3/01 G06F3/011 G06F3/0346

    Abstract: The invention relates to a method for the 3-dimensional measurement of a sample with a measuring system having a 3-dimensional measuring space and comprising a laser scanning microscope, characterised by—providing the measuring system with a 3-dimensional virtual reality device,—creating the 3-dimensional virtual space of the measuring space using the 3-dimensional virtual reality device,—allowing for selecting an operation in the virtual space,—providing real-time unidirectional or bidirectional connection between the measuring space and the virtual space such that an operation selected in the virtual space is performed in the measuring space and data measured in the measuring space is displayed in the virtual space. The invention further relates to a measuring system for the 3-dimensional measurement of a sample, the measuring system having a 3-dimensional measuring space and comprising a laser scanning microscope, characterised by further comprising a 3-dimensional virtual reality device for displaying a 3-dimensional virtual space of the measuring space, and a real-time unidirectional or bidirectional connection is provided between the laser scanning microscope and the 3-dimensional virtual reality device.

    Method and measuring system for scanning multiple regions of interest
    112.
    发明公开
    Method and measuring system for scanning multiple regions of interest 有权
    Verfahren und Messsystem zum Abtasten mehrfacher相关者Bereiche

    公开(公告)号:EP2187252A1

    公开(公告)日:2010-05-19

    申请号:EP08462011.1

    申请日:2008-12-31

    Applicant: Femtonics Kft.

    CPC classification number: G02B21/0036 G02B21/365 G02B26/101 G02B26/105

    Abstract: The invention relates to a method for carrying out measurements on at least one region of interest within a sample via a laser scanning microscope having focusing means for focusing a laser beam and having electro-mechano-optic deflector for deflecting the laser beam, the method comprising:
    - providing a scanning trajectory for the at least one region of interest;
    - providing a sequence of measurements and the corresponding scanning trajectories;
    - providing cross-over trajectories between the scanning trajectories of two consecutive measurements;
    - deflecting the laser beam via the electro-mechano-optic means for moving a focus spot of the focused laser beam along a scanning trajectory at an average scanning speed; and
    - deflecting the laser beam via the electro-mechano-optic means for moving the focus spot of the laser beam along a cross-over trajectory at a cross-over speed having a maximum, the maximum of the cross-over speed being higher than the average scanning speed.
    The invention further relates to a measuring system for implementing the method according to the invention

    Abstract translation: 本发明涉及一种用于通过具有聚焦装置的激光扫描显微镜对样品内的至少一个感兴趣区域进行测量的方法,所述聚焦装置用于聚焦激光束并具有用于偏转激光束的电机械光学偏转器,该方法包括 : - 为所述至少一个感兴趣区域提供扫描轨迹; - 提供测量序列和相应的扫描轨迹; - 在两个连续测量的扫描轨迹之间提供交叉轨迹; - 通过电机械光学装置偏转激光束,用于以平均扫描速度沿着扫描轨迹移动聚焦激光束的聚焦点; 以及 - 通过所述电机械光学装置使所述激光束偏转,以使所述激光束的聚焦点沿着具有最大值的交叉速度的交叉轨迹移动,所述交叉速度的最大值高于 平均扫描速度。 本发明还涉及一种用于实现根据本发明的方法的测量系统

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