Integrated SMO gas sensor module
    111.
    发明授权

    公开(公告)号:US09810653B2

    公开(公告)日:2017-11-07

    申请号:US14334572

    申请日:2014-07-17

    CPC classification number: G01N27/12 G01N27/123 G01N27/125 G01N27/128

    Abstract: Miniature resistive gas detectors incorporate thin films that can selectively identify specific gases when heated to certain characteristic temperatures. A solid state gas sensor module is disclosed that includes a gas sensor, a heater, and a temperature sensor, stacked over an insulating recess. The insulating recess is partially filled with a support material that provides structural integrity. The solid state gas sensor module can be integrated on top of an ASIC on a common substrate. With sufficient thermal insulation, such a gas detector can be provided as a low-power component of mobile electronic devices such as smart phones. A method of operating a multi-sensor array allows detection of relative concentrations of different gas species by either using dedicated sensors, or by thermally tuning the sensors to monitor different gas species.

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