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公开(公告)号：KR100916618B1
公开(公告)日：2009-09-14
申请号：KR1020070060033
申请日：2007-06-19
Applicant: 한국과학기술원
Abstract: 본 발명은 반사광측정법에 근거한 분산 백색광 간섭법을 이용한 박막 두께 및 형상측정방법에 관한 것이다. 본 발명은 간섭광의 간섭무늬를 획득하여 상기 박막의 파장에 따른 광강도분포를 획득하는 단계; 획득된 파장에 따른 광강도분포를 통해 절대반사율을 구하는 단계; 절대반사율에 의해 박막의 두께(d)값을 구하는 단계; 합성간섭광의 간섭무늬로부터 두께 및 형상에 의한 제 1위상변화값을 추출하는 단계; 제 1위상변화값에 포함된 두께에 의한 제 2위상변화값을 추출하는 단계; 제 1위상변화값에서 상기 제 2위상변화값을 보상하여 형상에 의한 제 3위상변화값을 구하는 단계; 및 제 3위상변화값에서 형상(h)값을 구하는 단계를 포함하는 것을 특징으로 한다. 따라서, 본 발명은 초박막의 두께 및 형상에 대한 빠른 측정이 가능하고, 외부 환경이나 진동에 둔감한 것을 특징으로 한다.
반사광측정법, 분산 백색광 간섭법, 박막의 두께 및 형상 측정-
公开(公告)号：KR100631060B1
公开(公告)日：2006-10-04
申请号：KR1020050092978
申请日：2005-10-04
Applicant: 한국과학기술원
Abstract: 본 발명은 백색광 간섭계를 이용한 투명박막의 두께 및 형상을 측정하는 장치 및 방법에 관한 것이다. 본 발명은 간섭광을 주파수별로 분광시킨 후 주파수별 제 1간섭무늬를 획득하고 합성간섭광을 주파수별로 분광시킨 후 주파수별 제 2간섭무늬를 획득한다. 제 1간섭무늬를 통해 박막의 두께로 인해 생성되는 위상을 얻고 위상으로부터 박막의 두께정보만을 획득한다. 제 2간섭무늬로부터 위상을 구하고, 박막두께정보가 포함된 박막표면정보를 획득한다. 박막두께정보를 이용해 박막두께정보가 포함된 박막표면정보로부터 박막의 표면정보를 획득한다. 따라서, 본 발명은 별도의 구동 장치 없이 실시간 측정과 한번의 측정으로 한 점 또는 한 선에 대한 처리가 가능하고 외부 진동에 강인한 효과가 있다.
분산형, 간섭계, 백색광,-
Patent Agency Ranking
公开(公告)号：KR1020040001098A
公开(公告)日：2004-01-07
申请号：KR1020020036183
申请日：2002-06-27
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B9/0201 , G01B2290/30 , G01B2290/35
Abstract: PURPOSE: A phase transition diffraction grating interferometer and a measuring method thereof are provided to measure an object by adopting an interference pattern obtained from an optical system to a phase transition algorithm. CONSTITUTION: A light source(43) radiates light through a lens(53) and an aperture(63). A lens(73) makes parallel light and lens(83) allows parallel light to be focused on a reflective diffraction grating(103). Light incident into the reflective diffraction grating(103) is split into several parts. One of them is reference light(233) and other light(223) forwards to an object to be measured. Light passing through a lens(113) and an iris(123) forms an image on an image obtaining device(23). The image obtaining device(23) includes a CCD camera. A CPU(13) controls a phase transition driver so as to allow the phase transition to apply a signal to a phase transition generator(153).
Abstract translation: 目的：提供一种相变衍射光栅干涉仪及其测量方法，通过采用从光学系统获得的干涉图案到相变算法来测量物体。 构成：光源（43）通过透镜（53）和光圈（63）辐射光。 透镜（73）使得平行光和透镜（83）允许平行光聚焦在反射衍射光栅（103）上。 入射到反射衍射光栅（103）中的光被分成若干部分。 其中一个是参考光（233）和其他光（223）转发到要测量的对象。 通过透镜（113）和光圈（123）的光在图像获取装置（23）上形成图像。 图像获取装置（23）包括CCD照相机。 CPU（13）控制相变驱动器，以允许相变将信号施加到相变发生器（153）。
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公开(公告)号：KR100400100B1
公开(公告)日：2003-09-29
申请号：KR1020010027983
申请日：2001-05-22
Applicant: 한국과학기술원
IPC: B01L99/00
CPC classification number: B01L7/00
Abstract: Disclosed are a device and a method for making an experiment on temperature characteristic of material. The device includes a small volume thermostat for maintaining temperature uniformly and an interferometer for measuring a length change according to a temperature change of a measured fragment. Material, which maintains inside temperature of the thermostat uniformly, is disposed around the thermostat. The material maintains temperature uniformly for a long time when phase is changed. A hole is formed in a front surface of the thermostat to allow beam to be transmitted, thereby measuring the length change of the measured fragment inside the thermostat. By measuring the length change in a noncontact way when beam is transmitted through the hole, the temperature characteristic of the material is tested according to temperature.
Abstract translation: 公开了一种用于对材料的温度特性进行实验的装置和方法。 该装置包括用于均匀保持温度的小体积恒温器和用于根据测量片段的温度变化来测量长度变化的干涉仪。 维持恒温器内部温度均匀的材料置于恒温器周围。 当相变时，材料长时间保持温度均匀。 在恒温器的前表面形成孔以允许传送光束，从而测量恒温器内测量片段的长度变化。 通过测量光束通过孔时非接触方式下的长度变化，根据温度测试材料的温度特性。
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公开(公告)号：KR1020020088910A
公开(公告)日：2002-11-29
申请号：KR1020010027983
申请日：2001-05-22
Applicant: 한국과학기술원
IPC: B01L99/00
CPC classification number: B01L7/00
Abstract: PURPOSE: Provided are a method and an apparatus for stabilizing the length of engineering material by using the heat-physical property of gallium, which can be used in laboratories needing accurate measurement and length stabilization. CONSTITUTION: The apparatus for making an experiment on the temperature property of material comprises the gallium covering a thermostat, heating plates(40) applying heat to the gallium, temperature sensors(50) for measuring the temperature of the gallium, and a central control unit. And the method for making the experiment on the temperature property of material comprises the steps of: sensing the temperature of the gallium; comparing and judging if the sensed temperature is a fixed temperature; applying heat to the gallium by applying a voltage to the heating plates(40) if the sensed temperature is lower than the fixed temperature; cutting the heat supply by cutting the applied voltage if the sensed temperature is higher than the fixed temperature.
Abstract translation: 目的：提供一种通过使用镓的热物理性质稳定工程材料长度的方法和装置，其可用于需要精确测量和长度稳定的实验室中。 构成：用于对材料的温度特性进行实验的装置包括覆盖恒温器的镓，向镓施加热量的加热板（40），用于测量镓的温度的温度传感器（50）和中央控制单元 。 并且对材料的温度特性进行实验的方法包括以下步骤：感测镓的温度; 比较和判断感测温度是否为固定温度; 如果感测到的温度低于固定温度，则通过向加热板（40）施加电压来向镓施加热量; 如果检测到的温度高于固定温度，则通过切割施加的电压来切断供热。
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116.发明公开
公开(公告)号：KR1020000061037A
公开(公告)日：2000-10-16
申请号：KR1019990009808
申请日：1999-03-23
Applicant: 한국과학기술원
IPC: G01B9/02
CPC classification number: G01B11/0675 , G01B9/02057 , G01B9/02083 , G01B9/02084 , G01B9/0209 , G01N21/45
Abstract: PURPOSE: Methods for measuring a 3-D thickness profile and a refractive index of a transparent thin film by white-light scanning interferometry and a recording medium thereof are provided to precisely measure a 3-D thickness profile and a thickness value of a transparent thin film at any position. CONSTITUTION: A method for measuring a 3-D thickness profile of a transparent thin film by white-light scanning interferometry includes the steps of computing a phase graph by performing a fourier transform after obtaining an interference signal(S1302), modeling objects to measure and computing a mathematical phase graph from the modeling results(S1303), and measuring profile and thickness values by setting an error function using the phase values obtained in the first and second steps and applying an optimization technique(S1304-S1308).
Abstract translation: 目的：提供通过白光扫描干涉测量法和其记录介质测量3-D厚度分布和透明薄膜的折射率的方法，以精确测量3-D厚度分布和透明薄片的厚度值 电影在任何位置。 构成：通过白光扫描干涉法测量透明薄膜的3-D厚度分布的方法包括以下步骤：通过在获得干涉信号之后执行傅立叶变换（S1302），建模对象进行测量和 从建模结果（S1303）计算数学阶段图，并通过使用在第一和第二步骤中获得的相位值设置误差函数并应用优化技术来测量轮廓和厚度值（S1304-S1308）。
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公开(公告)号：KR100269267B1
公开(公告)日：2000-10-16
申请号：KR1019970072162
申请日：1997-12-23
IPC: H04N13/00
Abstract: PURPOSE: A method for projection type moire using a phase transition grating and a system for the same are provided to improve measuring resolvability by applying a phase transition method to a projection type moire. CONSTITUTION: A projection grating(30) and a reference grating(31) are used as one couple. A relative distance between the projection grating(30) and the reference grating(31) is set up. Gratings of n couples are formed on one quartz glass by using a semiconductor lithography method. A phase transition grating(40) is manufactured by forming grating of n couples. The phase transition is obtained by using the phase transition grating(40).
Abstract translation: 目的：提供一种使用相变光栅的投射型莫尔条纹及其系统，以通过将相变法应用于投射型波纹来提高测量可分辨性。 构成：使用投影光栅（30）和参考光栅（31）作为一对。 设置投影光栅（30）和参考光栅（31）之间的相对距离。 通过使用半导体光刻方法，在一个石英玻璃上形成n个对的格栅。 通过形成n对的光栅来制造相变光栅（40）。 通过使用相变光栅（40）获得相变。
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