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    양방향 마이크로전기기계소자 및 기계적 크리프 감소 방법
    114.
    发明公开
    양방향 마이크로전기기계소자 및 기계적 크리프 감소 방법 无效
    具有双向元件的MEMS器件

    公开(公告)号：KR1020100041710A

    公开(公告)日：2010-04-22

    申请号：KR1020097027214

    申请日：2008-06-26

    Applicant: 알카텔-루센트 유에스에이 인코포레이티드

    Inventor： 가스패리안아르만 ,  게이츠존반아타 ,  시몬마리아엘리나

    IPC: B81B3/00

    CPC classification number: H01H1/0036 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2201/031 ,  H01H37/00 ,  H01H2001/0047 ,  H01H2037/008 ,  H01H2061/006 ,  H01H2061/008

    Abstract: The present invention provides a bi-directional microelectromechanical element, a microelectromechanical switch including the bi-directional element, and a method to reduce mechanical creep in the bi-directional element. In one embodiment, the bi-directional microelectromechanical element includes a cold beam having a free end and a first end connected to a cold beam anchor. The cold beam anchor is attached to a substrate. A first beam pair is coupled to the cold beam by a free end tether and is configured to elongate when heated thereby to a greater temperature than a temperature of the cold beam. A second beam pair is located on an opposing side of the cold beam from the first beam pair and is coupled to the first beam pair and the cold beam by the free end tether. The second beam pair is configured to elongate when heated thereby to the greater temperature.

    Abstract translation: 本发明提供一种双向微电子机械元件，包括双向元件的微机电开关，以及减少双向元件中机械蠕变的方法。 在一个实施例中，双向微机电元件包括​​具有自由端的冷梁和连接到冷束锚的第一端。 冷梁锚附接到基板。 第一束对通过自由端系绳连接到冷束，并且被构造成在被加热时延伸到比冷束的温度更大的温度。 第二光束对位于与第一光束对的冷光束的相对侧上，并且通过自由端系绳耦合到第一光束对和冷光束。 第二束对被配置成在被加热时延长到更高的温度。

    ＭＥＭＳ 액추에이터
    116.
    发明公开
    ＭＥＭＳ 액추에이터 无效
    MEMS执行器

    公开(公告)号：KR1020060017499A

    公开(公告)日：2006-02-23

    申请号：KR1020057020130

    申请日：2004-04-15

    Applicant: 심플러 네트웍스, 인코포레이티드

    Inventor： 메나르,스테파네 ,  라송드,노르망 ,  빌레네브,쟝-끌로드

    IPC: B81B7/02 ,  B81C1/00 ,  B81B3/00 ,  B81B7/00

    CPC classification number: H01H61/04 ,  B81B3/0024 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/051 ,  B81B2203/053 ,  F03G7/06 ,  H01H2001/0047 ,  H01H2001/0078 ,  H01H2061/006 ,  H01H2061/008

    Abstract: The MEMS cantilever actuator (10) is designed to be mounted on a substrate (12). The actuator (10) comprises an elongated hot arm member (20) having two spaced-apart portions (22), each provided at one end with a corresponding anchor pad (24) connected to the substrate (12). The portions (22) are connected together at a common end (26) that is opposite the anchor pads (24). It further comprises an elongated cold arm member (30) adjacent to and substantially parallel of the hot arm member (20), the cold arm member (30) having at one end an anchor pad (32) connected to the substrate (12), and a free end (34) that is opposite the anchor pad (32) thereof. A dielectric tether (40) is attached over the common end (26) of the portions (22) of the hot arm member (20) and the free end (34) of the cold arm member (30). This actuator (10) allows improving the performance, reliability and manufacturability of MEMS switches (100).

    Abstract translation: MEMS悬臂致动器（10）设计成安装在基板（12）上。 致动器（10）包括具有两个间隔开的部分（22）的细长的热臂构件（20），每个部分（22）的一端设置有连接到基板（12）的相应的锚固垫（24）。 部分（22）在与锚垫（24）相对的共同端（26）处连接在一起。 其还包括与热臂构件（20）相邻并且基本平行的细长的冷臂构件（30），冷臂构件（30）在一端具有连接到衬底（12）的锚垫（32） 和与其固定垫（32）相对的自由端（34）。 介质系绳（40）安装在热臂构件（20）的部分（22）和冷臂构件（30）的自由端（34）的共同端部（26）上。 该致动器（10）允许改善MEMS开关（100）的性能，可靠性和可制造性。

    MEMS SWITCH AND METHOD FOR MANUFACTURING SAME
    118.
    发明申请
    MEMS SWITCH AND METHOD FOR MANUFACTURING SAME 审中-公开
    MEMS开关及其制造方法

    公开(公告)号：WO2012011703A3

    公开(公告)日：2012-03-29

    申请号：PCT/KR2011005260

    申请日：2011-07-18

    Applicant: KOMICO LTD ,  CHOI JEONG-DUCK ,  YUK HYUN-MI ,  CHOI JIN-SIK ,  PARK CHANG-HYUN

    Inventor： CHOI JEONG-DUCK ,  YUK HYUN-MI ,  CHOI JIN-SIK ,  PARK CHANG-HYUN

    IPC: H01H59/00 ,  B81B3/00

    CPC classification number: H01H59/0009 ,  B81B3/007 ,  B81B2201/014 ,  B81B2203/0118 ,  B81B2203/019

    Abstract: According to the MEMS switch and the method for manufacturing same of the present invention, the MEMS switch includes a substrate, a first terminal formed on the substrate, a second terminal formed on the substrate and being spaced a predetermined interval from the first terminal, a conductive support formed on the second terminal, a conductive driving beam connected to the support in a cantilever form and extending parallel to the substrate to allow one end thereof to be disposed above the first terminal and to contact the first terminal when same is bent by an externally applied impact. Accordingly, a micro-sized switch may be manufactured and stable operation of the switch is possible.

    Abstract translation: 根据本发明的MEMS开关及其制造方法，MEMS开关包括基板，形成在基板上的第一端子，形成在基板上并与第一端子隔开规定间隔的第二端子， 形成在所述第二端子上的导电支撑件，导电驱动梁，其以悬臂形式连接到所述支撑件并且平行于所述基板延伸，以允许其一端设置在所述第一端子上方并且当其相对于所述第一端子弯曲时与所述第一端子接触 外部施加冲击。 因此，可以制造微型开关，并且开关的稳定操作是可能的。

    MEMS DEVICES
    119.
    发明申请
    MEMS DEVICES 审中-公开
    MEMS器件

    公开(公告)号：WO2010100622A1

    公开(公告)日：2010-09-10

    申请号：PCT/IB2010/050939

    申请日：2010-03-04

    Applicant: NXP B.V. ,  GOOSENS, Martijn ,  SUY, Hilco ,  STEENEKEN, Peter,Gerard ,  VAN BEEK, Jozef, Thomas, Martinus

    Inventor： GOOSENS, Martijn ,  SUY, Hilco ,  STEENEKEN, Peter,Gerard ,  VAN BEEK, Jozef, Thomas, Martinus

    IPC: B81B3/00

    CPC classification number: B81B3/0078 ,  B81B2201/014 ,  B81B2201/016 ,  H01G5/011 ,  H01G5/16

    Abstract: A MEMS device comprises first and second opposing electrode arrangements (22,28), wherein the second electrode arrangement (28) is electrically movable to vary the electrode spacing between facing sides of the first and second electrode arrangements. At least one of the facing sides has a non-flat surface with at least one peak and at least one trough. The height of the peak and depth of the trough is between 0.01t and 0.1t where t is the thickness of the movable electrode.

    Abstract translation: MEMS器件包括第一和第二相对电极布置（22,28），其中第二电极布置（28）可电可移动以改变第一和第二电极布置的相对侧之间的电极间距。 至少一个相对侧具有具有至少一个峰和至少一个槽的非平坦表面。 槽的高度和深度在0.01t到0.1t之间，其中t是可动电极的厚度。

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