公开(公告)号：US20100025206A1

公开(公告)日：2010-02-04

申请号：US12518690

申请日：2007-12-10

Applicant: Peter G. Steeneken

Inventor： Peter G. Steeneken

IPC: H01H59/00 ,  H01H11/00

CPC classification number: H01H59/0009 ,  B81B3/0056 ,  B81B2201/016 ,  B81C2201/017 ,  Y10T29/49105

Abstract: The present invention relates to MEMS device that comprises a first electrode, and a second electrode suspended with a distance to the first electrode with the aid of a suspension structure. The MEMS device further comprises at least one deformation electrode. The second electrode or the suspension structure or both are plastically deformable upon application of an electrostatic deformation force via the deformation electrode. This way, variations in the off-state position of the second electrode that occur during fabrication of different devices or during operation of a single device can be eliminated.

Abstract translation: 本发明涉及一种MEMS器件，其包括第一电极和借助于悬挂结构悬挂至第一电极一定距离的第二电极。 MEMS器件还包括至少一个变形电极。 当通过变形电极施加静电变形力时，第二电极或悬架结构或两者均可塑性变形。 这样，可以消除在制造不同装置期间或在单个装置的操作期间发生的第二电极的截止状态位置的变化。

公开(公告)号：US07610814B2

公开(公告)日：2009-11-03

申请号：US11794807

申请日：2006-02-02

Applicant: Gatien Fleury ,  Pierre-Louis Charvet

Inventor： Gatien Fleury ,  Pierre-Louis Charvet

IPC: G01N3/00

CPC classification number: B81C1/00666 ,  B81B2201/016 ,  B81C2201/0167

Abstract: The micromechanical device comprises a mobile beam attached via the two ends thereof to a rigid frame comprising two arms each having two ends. The ends of an arm are respectively secured to the two ends of the mobile beam. Each arm has a middle part arranged between the two ends of the corresponding arm. A rear face of the middle part of each arm is attached to a base support. The frame comprises at least one stressed element enabling the state of stress of the beam to be adjusted. The stressed element can be centered between the front face and the rear face of the corresponding arm. The frame can comprise pairs of front and rear stressed elements arranged facing one another respectively on the front face and on the rear face of the arms.

Abstract translation: 微机械装置包括通过其两端连接到包括两个臂的刚性框架的移动梁，每个臂具有两个端部。 臂的端部分别固定到移动梁的两端。 每个臂具有布置在相应臂的两端之间的中间部分。 每个臂的中部的后表面附接到基座支撑件。 该框架包括至少一个应力元件，其能够调节梁的应力状态。 应力元件可以在相应臂的前表面和后表面之间居中。 框架可以包括分别在臂的前表面和后表面上相对排列的一对前和后应力元件。

公开(公告)号：US20080148864A1

公开(公告)日：2008-06-26

申请号：US11794807

申请日：2006-02-02

Applicant: Gatien Fleury ,  Pierre-Louis Charvet

Inventor： Gatien Fleury ,  Pierre-Louis Charvet

IPC: G01N3/00 ,  G01N3/08

CPC classification number: B81C1/00666 ,  B81B2201/016 ,  B81C2201/0167

Abstract: The micromechanical device comprises a mobile beam attached via the two ends thereof to a rigid frame comprising two arms each having two ends. The ends of an arm are respectively secured to the two ends of the mobile beam. Each arm has a middle part arranged between the two ends of the corresponding arm. A rear face of the middle part of each arm is attached to a base support. The frame comprises at least one stressed element enabling the state of stress of the beam to be adjusted. The stressed element can be centered between the front face and the rear face of the corresponding arm. The frame can comprise pairs of front and rear stressed elements arranged facing one another respectively on the front face and on the rear face of the arms.

Abstract translation: 微机械装置包括通过其两端附接到包括两个臂的刚性框架的移动梁，每个臂具有两个端部。 臂的端部分别固定到移动梁的两端。 每个臂具有布置在相应臂的两端之间的中间部分。 每个臂的中部的后表面附接到基座支撑件。 该框架包括至少一个应力元件，其能够调节梁的应力状态。 应力元件可以在相应臂的前表面和后表面之间居中。 框架可以包括分别在臂的前表面和后表面上相对排列的一对前和后应力元件。

公开(公告)号：US20070217120A1

公开(公告)日：2007-09-20

申请号：US11685369

申请日：2007-03-13

Applicant: Jean-Michel Sallese ,  Didier Bouvet

Inventor： Jean-Michel Sallese ,  Didier Bouvet

IPC: H01G5/01

CPC classification number: H01G5/16 ,  B81B3/0054 ,  B81B2201/016 ,  H01H59/0009 ,  H01H2001/0042

Abstract: A microelectrical device comprising two generally parallel electrodes (20,21) at least one of which is movable, and at least one of the electrodes comprising a layer of a semiconductor presenting space charge characteristics. The electrodes have a closed position an open position. A spring effect biases the movable electrode (21) towards the open position. When the movable electrode (21) is closed by a first voltage pulse (P1) a sufficiently high space charge density (10) is generated to hold the movable electrode (21) closed. When zero voltage is applied the movable electrode (21) is held closed by the built in space charge until the application of a second voltage pulse (P2) which decreases the space charge in the semiconductor (10) to allow the movable electrode(s) to be moved to the open position by the spring effect.

Abstract translation: 一种微电子装置，包括两个大致平行的电极（20,21），其中至少一个电极是可移动的，并且所述电极中的至少一个包括呈现空间电荷特性的半导体层。 电极具有闭合位置的打开位置。 弹簧效应将可动电极（21）朝向打开位置偏压。 当可动电极（21）被第一电压脉冲（P 1）闭合时，产生足够高的空间电荷密度（10）以保持可动电极（21）闭合。 当施加零电压时，可动电极（21）由内置空间电荷保持闭合，直到施加减小半导体（10）中的空间电荷的第二电压脉冲（P 2），以允许可动电极 ）通过弹簧效应移动到打开位置。

公开(公告)号：US20070024401A1

公开(公告)日：2007-02-01

申请号：US11385700

申请日：2006-03-22

Applicant: Jun-o Kim ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Sang-hun Lee

Inventor： Jun-o Kim ,  Sang-wook Kwon ,  Che-heung Kim ,  Jong-seok Kim ,  Hee-moon Jeong ,  Young-tack Hong ,  Sang-hun Lee

IPC: H01P1/10

CPC classification number: H01P1/127 ,  B81B3/0013 ,  B81B2201/016 ,  H01H59/0009

Abstract: An RF MEMS switch having asymmetrical spring rigidity. The RF MEMS switch has supporting members spaced apart in a certain interval on a substrate, a membrane being a motion member suspended by plural spring members extended on both sides of the membrane, and a bottom electrode being a contact surface on an upper surface of the substrate facing a bottom surface of the membrane, wherein the plural spring members placed on opposite sides of the membrane have asymmetrical rigidity, and a portion of the membrane on a side of stronger spring rigidity is first separated from the contact surface when the RF MEMS switch is turned off. The present invention has an advantage of easy separation of the switch from the contact surface, when the switch is turned off, due to the different rigidity of the springs located on the sides of the membrane.

Abstract translation: 具有不对称弹簧刚度的RF MEMS开关。 RF MEMS开关具有在基板上以一定间隔隔开的支撑构件，膜是由在膜的两侧延伸的多个弹簧构件悬挂的运动构件，底电极是位于膜的上表面上的接触表面 衬底面向膜的底表面，其中放置在膜的相对侧上的多个弹簧构件具有不对称的刚性，并且当RF MEMS开关在膜的另一侧具有更强的弹簧刚度的一部分首先与接触表面分离 已关闭 本发明的优点在于，当开关断开时，由于位于膜侧面的弹簧的刚度不同，开关与接触表面容易分离。

公开(公告)号：US20060091983A1

公开(公告)日：2006-05-04

申请号：US10536585

申请日：2003-11-27

Applicant: Philippe Robert

Inventor： Philippe Robert

IPC: H01H51/22

CPC classification number: H01H59/0009 ,  B81B3/001 ,  B81B2201/016 ,  B81B2203/04 ,  H01H2059/0018 ,  H01H2059/0072

Abstract: The invention relates to an electrostatic microswitch which is intended to connect electrically two strip conductors which are disposed on an insulating support (21), the two strip conductors are connected electrically by conducting means (38) which are provided in the central part of deformable means (28) which can be deformed in relation to the support under the effect of an electrostatic force generated by control electrodes (25, 48; 26, 58). The control electrodes are distributed facing one another on the deformable means and the support, such as to form capacitive means around the aforementioned conducting means. The control electrodes are associated with insulating stop elements (35, 36) which are provided in order to prevent a short circuit between electrodes of the capacitive means during the deformation of the deformable means. The distance between the deformable means and the ends of the strip conductors is less than or equal to the distance between the insulating stop elements associated with the control electrodes and the control electrodes located opposite.

Abstract translation: 本发明涉及一种静电微型开关，其用于将两个带状导体连接在电绝缘支撑件（21）上，两个带状导体通过导电装置（38）电连接，导电装置设置在可变形装置的中心部分 （28），其可以在由控制电极（25,48; 26,58）产生的静电力的作用下相对于支撑件变形。 控制电极在可变形装置和支撑件上彼此面对地分布，以形成围绕上述导电装置的电容装置。 控制电极与绝缘停止元件（35,36）相关联，绝缘止动元件（35,36）被设置以防止在变形装置变形期间电容性装置的电极之间的短路。 可变形装置与带状导体的端部之间的距离小于或等于与控制电极和控制电极相对的控制电极之间的距离。

公开(公告)号：US07012327B2

公开(公告)日：2006-03-14

申请号：US10835590

申请日：2004-04-30

Applicant: Michael A. Huff ,  Mehmet Ozgur

Inventor： Michael A. Huff ,  Mehmet Ozgur

IPC: H01L29/80

CPC classification number: B82Y30/00 ,  B81B7/0064 ,  B81B2201/016 ,  B81B2207/015 ,  B81B2207/092 ,  B81B2207/095 ,  B81B2207/096 ,  B81C2203/0118 ,  B81C2203/035 ,  H01G5/16 ,  H01G5/18 ,  H01G5/40 ,  H01H59/0009 ,  H01H2057/006 ,  H01H2059/0072 ,  H01L2224/16225 ,  H01L2924/15153 ,  H01P1/127 ,  H01P1/184 ,  H01Q1/38 ,  H01Q3/26 ,  H01Q15/0013 ,  H01Q15/004 ,  H01Q21/0087 ,  H05K1/0306 ,  H05K1/16

Abstract: A phased-array antenna system and other types of radio frequency (RF) devices and systems using microelectromechanical switches (“MEMS”) and low-temperature co-fired ceramic (“LTCC”) technology and a method of fabricating such phased-array antenna system and other types of radio frequency (RF) devices are disclosed. Each antenna or other type of device includes at least two multilayer ceramic modules and a MEMS device fabricated on one of the modules. Once fabrication of the MEMS device is completed, the two ceramic modules are bonded together, hermetically sealing the MEMS device, as well as allowing electrical connections between all device layers. The bottom ceramic module has also cavities at the backside for mounting integrated circuits. The internal layers are formed using conducting, resistive and high-k dielectric pastes available in standard LTCC fabrication and low-loss dielectric LTCC tape materials.

Abstract translation: 使用微机电开关（“MEMS”）和低温共烧陶瓷（“LTCC”）技术的相控阵天线系统和其它类型的射频（RF）装置和系统以及制造这种相控阵天线的方法 系统和其他类型的射频（RF）设备。 每个天线或其他类型的装置包括至少两个多层陶瓷模块和在其中一个模块上制造的MEMS装置。 一旦完成了MEMS器件的制造，就将两个陶瓷模块结合在一起，密封MEMS器件，并允许所有器件层之间的电连接。 底部陶瓷模块在背面还具有用于安装集成电路的空腔。 内部层使用标准LTCC制造和低损耗介电LTCC带材料中可用的导电，电阻和高k电介质浆料形成。

公开(公告)号：US20050206243A1

公开(公告)日：2005-09-22

申请号：US11050482

申请日：2005-02-03

Applicant: Guillaume Bouche

Inventor： Guillaume Bouche

IPC: B81B3/00 ,  H01H1/00 ,  H01H5/18 ,  H01H50/00 ,  H01H57/00 ,  H01H59/00

CPC classification number: B81B3/0054 ,  B81B2201/016 ,  H01G5/16 ,  H01H1/0036 ,  H01H50/005 ,  H01H57/00 ,  H01H59/0009 ,  H01H2001/0042 ,  H01H2057/006 ,  H01H2061/006 ,  Y10T307/74

Abstract: A microelectromechanical system includes separate conducting elements. An electromechanically deformable element can be switched between a first stable position and a second stable position. Contact elements allow for electrical continuity to be established between the separate conducting elements. Switch control elements ensure that the first deformable element switches so as to establish electrical continuity between the separate conducting elements in the second stable position, by contact between the contact elements, and to break electrical continuity by separating the contact elements in the first stable position. The separate conducting elements and the contact elements are carried by the deformable element.

Abstract translation: 微机电系统包括单独的导电元件。 机电可变形元件可以在第一稳定位置和第二稳定位置之间切换。 接触元件允许在单独的导电元件之间建立电连续性。 开关控制元件确保第一可变形元件切换以便通过接触元件之间的接触在第二稳定位置中的分开的导电元件之间建立电连续性，并且通过在第一稳定位置分离接触元件来断开电连续性。 单独的导电元件和接触元件由可变形元件承载。

公开(公告)号：US06911891B2

公开(公告)日：2005-06-28

申请号：US10052667

申请日：2002-01-18

Applicant: Jin Qiu ,  Alexander H. Slocum ,  Jeffrey H. Lang ,  Ralf Struempler ,  Michael P. Brenner ,  Jian Li

Inventor： Jin Qiu ,  Alexander H. Slocum ,  Jeffrey H. Lang ,  Ralf Struempler ,  Michael P. Brenner ,  Jian Li

IPC: B81B3/00 ,  H01H1/00 ,  H01H1/24 ,  H01H50/00 ,  H01H59/00 ,  H01H61/00 ,  H01H37/52 ,  H01H37/54

CPC classification number: B81B3/0051 ,  B33Y70/00 ,  B33Y80/00 ,  B81B2201/016 ,  B81B2203/0109 ,  B81B2203/051 ,  H01H1/0036 ,  H01H1/24 ,  H01H50/005 ,  H01H59/0009 ,  H01H61/00 ,  H01H2001/0042 ,  H01H2061/006

Abstract: A bistable structure provided by the invention is characterized as including a deflection element that has mechanically constrained end points and a compliant span between the end points that is substantially free to deflect between two stable positions when a force is applied at a point along the span. The deflection element span is provided, as-fabricated, curved in one of the two stable positions and in a mechanically unstressed condition along the length of the span. The as-fabricated curve of the deflection element span includes a curve maxima at a point along the span length that is at least about ¼ of the span length from the end points of the span. The deflection element span is constrained to substantially prohibit development of a second bending mode that is characteristic for the span as the element deflects between the two stable positions.

Abstract translation: 由本发明提供的双稳态结构的特征在于包括一个偏转元件，该偏转元件具有机械约束的端点和端点之间的顺应跨度，当在沿跨度的点施加力时，基本上自由地在两个稳定位置之间偏转。 偏转元件跨度设置成沿着跨度的长度在两个稳定位置中的一个中并且以机械无应力状态弯曲。 偏转元件跨度的制造曲线包括沿着跨度长度的点处的曲线最大值，其距离跨度端点的跨度长度的至少约1/4。 偏转元件跨度被限制为基本上禁止当元件在两个稳定位置之间偏转时跨度的特征的第二弯曲模式的发展。

公开(公告)号：US20040188783A1

公开(公告)日：2004-09-30

申请号：US10806405

申请日：2004-03-23

Inventor： Hideyuki Funaki

IPC: H01L021/00 ,  H02N001/00 ,  H01H057/00 ,  H01L029/82

CPC classification number: H03H9/462 ,  B81B3/0021 ,  B81B2201/016 ,  B81B2201/0271 ,  B81B2203/0109 ,  B81B2203/051 ,  H01H13/80 ,  H01H59/0009 ,  H01H2001/0078 ,  H01H2201/008 ,  H03H3/0072

Abstract: A micromechanical switch comprises a substrate, at least one pair of support members fixed to the substrate, at least one pair of beam members placed in proximity and parallel to each other above the substrate, and connected to one of the support members, respectively, each of the beam members having a moving portion which is movable with a gap with respect to the substrate, and a contact portion provided on the moving portion, and a driving electrode placed on the substrate between the pair of beam members to attract the moving portions of the beam members in a direction parallel to the substrate with electrostatic force so that the contact portions of the beam members which are opposed to each other are short-circuited.

Abstract translation: 微机械开关包括基板，固定到基板的至少一对支撑构件，至少一对梁构件，其彼此靠近并平行放置在基板上方并分别连接到支撑构件之一 所述梁构件具有可相对于所述基板间隙移动的移动部分和设置在所述移动部分上的接触部分，以及设置在所述一对梁构件之间的所述基板上的驱动电极，以吸引所述移动部分的移动部分 梁构件在与静电力平行的方向上使得梁构件彼此相对的接触部分短路。