Abstract:
Die Erfindung betrifft ein Verfahren zum Herstellen einer Vielzahl plattenförmiger Mikrostrukturkörper aus Metall, bei dem durch wiederholtes Abformen eines die Mikrostrukturen aufweisenden Werkzeugs mit einer elektrisch isolierenden Abformmasse Negativformen der Mikrostrukturen erzeugt werden, die galvanisch mit einem Metall aufgefüllt werden, wonach die Negativform entfernt wird. Der vorliegenden Erfindung liegt die Aufgabe zugrunde, die mit einem Herstellungsverfahren nach dem Oberbegriff von Anspruch 1 verbundenen technischen und wirtschaftlichen Vorteile auch auf plattenförmige Mikrostrukturkörper zu übertragen, bei denen eine formschlüssige Verbindung der Formschicht mit einer als Handhabe bei der Entformung und als Galvanikelektrode geeigneten Abdeckplatte nicht oder nur mit erheblichem Aufwand möglich ist. Die Aufgabe wird dadurch gelöst, daß
a) ein elektrisch leitendes Material wieder lösbar auf die Stirnfläche der Mikrostruktur des Werkzeugs aufgebracht und im Zuge des Abformens auf die diesen Stirnflächen gegenüberliegenden Bereiche (Formboden der Abformmasse übertragen wird, oder daß b) die elektrisch isolierende Abformmasse mit einer weiteren Schicht aus elektrisch leitender Abformmasse verbunden wird, wobei die Dicke der elektrisch isolierenden Abformmasse der Höhe der Mikrostrukturen entspricht in der Weise, daß die elektrisch leitende Abformmasse im Zuge des Abformens die Stirnflächen der Mikrostrukturen des Werkzeugs berührt.
Abstract:
A microchip which comprises: a resinous base having a plurality of fine channels formed on one side thereof, one or more cylindrical parts disposed so as to protrude from the other side, and a through-hole which pierces each cylindrical part along the axis thereof and communicates with the fine channel so that the diameter of the inner wall of the through-hole gradually decreases from the tip end of the cylindrical part toward the fine channel at a first inclination angle; and a resinous covering member bonded to that side of the resinous base on which the fine channels have been formed. The microchip has been configured so that a liquid sample can be introduced from the tip end of each cylindrical part through the through-hole. The wall thickness of the cylindrical part on the end side where a liquid sample is to be introduced has been made smaller than the wall thickness thereof on the base side where the cylindrical part has been formed, by forming a step therebetween.
Abstract:
Embodiments of the present invention relate to a UV -curable polyurethane-methacrylate (PUMA) substrate for manufacturing microfluidic devices. PUMA is optically transparent, biocompatible, and has stable surface properties. Embodiments include two production processes that are compatible with the existing methods of rapid prototyping, and characterizations of the resultant PUMA microfluidic devices are presented. Embodiments of the present invention also relate to strategies to improve the production yield of chips manufactured from PUMA resin, especially for microfluidic systems that contain dense and high-aspect-ratio features. Described is a mold-releasing procedure that minimizes motion in the shear plane of the microstructures. Also presented are simple yet scalable methods for forming seals between PUMA substrates, which avoids excessive compressive force that may crush delicate structures. Two methods for forming interconnects with PUMA microfluidic devices are detailed. These improvements produce a microfiltration device containing closely spaced and high-aspect-ratio fins, suitable for retaining and concentrating cells or beads from a highly diluted suspension.
Abstract:
A microchip which comprises: a resinous base having a plurality of fine channels formed on one side thereof, one or more cylindrical parts disposed so as to protrude from the other side, and a through-hole which pierces each cylindrical part along the axis thereof and communicates with the fine channel so that the diameter of the inner wall of the through-hole gradually decreases from the tip end of the cylindrical part toward the fine channel at a first inclination angle; and a resinous covering member bonded to that side of the resinous base on which the fine channels have been formed. The microchip has been configured so that a liquid sample can be introduced from the tip end of each cylindrical part through the through-hole. The wall thickness of the cylindrical part on the end side where a liquid sample is to be introduced has been made smaller than the wall thickness thereof on the base side where the cylindrical part has been formed, by forming a step therebetween.
Abstract:
The present invention relates to a method of producing a gas sensor co-acting detector intended for the detection of electromagnetic waves, such as infrared light rays, that pass through a gas cell. The gas cell (2) includes a cavity (21), which functions to enclose a gas volume (G) for measuring of evaluating purposes. The surface or parts of the surface forming walls within the gas cell or the cavity is/are coated with one or more different metal layers (M1, M2) with the intention of providing a highly reflective surface for reflection of said electromagnetic waves. The detector (3) is comprised of a thermal element and is formed on a base structure (31). That part of the base structure that shall form said detector is comprised of one or more topographically structured surface regions. At least said surface region or surface regions is/are coated with a first and a second electrically conductive metal layer (M1 and M2 respectively) which are intended to form said thermocouple. The first metal layer (M1) is applied at a first angle other than 90°, and the second metal layer (M2) is applied at a second angle which is also other than 90° and which differs from the first angle. The topographical structure and/or configuration including the thus coated electrically conductive layers provides the function of one or more thermocouples, by virtue of the first and the second metal layers (M1, M2) overlapping each other within discrete detector-associated surface parts.
Abstract:
The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.
Abstract:
The invention relates to a method of manufacturing of a microneedle array comprising the steps of using a filler material for replicating a prefabricated master mold to produce the microneedle array with pre-defined geometry, wherein for the filler material a water or alcohol based ceramic or polymer-ceramic slurry is selected. The invention further relates to a microneedle array 16.
Abstract:
The invention relates to a method for making a 3D nanostructure having a nanosubstructure, comprising the steps of: i) providing a mold comprising at least one sharp concave corner; ii) conformational depositing at least one structural material in the sharp concave corner iii) isotropically removing structural material; iv) depositing at least one other structural material; v) removing earlier deposited structural material; vi) forming a nanosubstructure; and vii) removing the mold thereby providing the 3D nanostructure having the nanosubstructure.