公开(公告)号：EP1362829B1

公开(公告)日：2006-11-22

申请号：EP03008683.9

申请日：2003-04-16

Applicant: Hydro-Elektrik GmbH

Inventor： Bachhofer, Bruno

IPC: C01B13/11

CPC classification number: C01B13/11 ,  C01B2201/12 ,  C01B2201/34 ,  C01B2201/60 ,  C01B2201/76

公开(公告)号：EP1069071A3

公开(公告)日：2006-09-27

申请号：EP00114881.6

申请日：1995-04-25

Applicant: MITSUBISHI DENKI KABUSHIKI KAISHA

Inventor： Kuzumoto, Masaki, c/o Mitsubishi Denki K.K. ,  Tabata, Youichiro, c/o Mitsubishi Denki K.K. ,  Yagi, Shigenori, c/o Mitsubishi Denki K.K. ,  Yoshizawa, Kenji, c/o Mitsubishi Denki K.K. ,  Mukai, Masahiro, c/o Mitsubishi Denki K.K. ,  Ochi, Junji, c/o Mitsubishi Denki K.K. ,  Ozawa, Tateki, c/o Mitsubishi Denki K.K.

IPC: C01B13/11

CPC classification number: C01B13/11 ,  C01B2201/12 ,  C01B2201/22 ,  C01B2201/32 ,  C01B2201/60 ,  C01B2201/66 ,  C01B2201/74 ,  C01B2201/90

Abstract: An ozone generating apparatus comprising at least one ozone generating unit including: two electrodes (2,31) mutually opposed to generate discharge in response to high voltage applied therebetween; at least one dielectric (4) interposed between the electrodes; and a gas supply mechanism to supply an oxygen-containing gas between the electrodes so as to generate ozone by the discharge; wherein a discharge space (5) has a gas pressure of one atmosphere or more. The invention is characterised by a choice of discharge gap length (less than 0.4 or less than 0.6 mm) and by the product of the gas pressure and the discharge gap length.

公开(公告)号：EP1499934A1

公开(公告)日：2005-01-26

申请号：EP03733897.7

申请日：2003-04-25

Applicant: APPLIED SCIENCE AND TECHNOLOGY, INC.

Inventor： FITTKAU, Jens ,  SEIWERT, Johannes ,  GOTTSCHALK, Christine

IPC: G05D21/02

CPC classification number: G05D11/132 ,  B01F3/04496 ,  B01F5/0603 ,  B01F5/0606 ,  B01F2003/04886 ,  C01B13/10 ,  C01B13/11 ,  C01B2201/60 ,  C01B2201/64 ,  C02F1/78 ,  C02F2201/782 ,  C02F2209/40 ,  G05D11/139 ,  Y10S134/902 ,  Y10S261/42

Abstract: The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a frst process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.

公开(公告)号：EP1355852A1

公开(公告)日：2003-10-29

申请号：EP02718941.4

申请日：2002-01-30

Applicant: E. I. du Pont de Nemours and Company

Inventor： MORAN, Edward, F., Jr. ,  PIASECKI, Robert, V.

IPC: C01B13/11

CPC classification number: C01B13/11 ,  C01B2201/60

Abstract: Process for making ozone comprising passing substantially pure carbon dioxide between electrodes having a sufficient voltage difference between them to cause a corona discharge across them.

公开(公告)号：EP0717719B1

公开(公告)日：1997-10-08

申请号：EP94923961.0

申请日：1994-07-19

Applicant: Kamyr, Inc.

Inventor： KARLSON, Eskil, L. ,  CHAMBLEE, J., Wayne

IPC: C01B13/11

CPC classification number: C01B13/11 ,  C01B2201/14 ,  C01B2201/60 ,  C01B2201/70 ,  Y10S422/907

Abstract: Ozone is generated from an oxygen-containing gas utilizing a tube-type ozone generator at significantly greater power efficiency. The oxygen is introduced into the annular passageway between the electrodes of the tube-type ozone generator at an angle (e.g. about 45-90°) so that it swirls in a cyclonic flow path as it travels from one end of the annular passageway to the other. The amount of power consumed to produce a gas having about 8 % ozone is roughly half of the power needed if the same conditions are applied but the oxygen gas is introduced conventionally (without swirling action, so that it travels along the dimension of elongation of the passageway). The swirling action also allows a higher concentration of ozone (e.g. 10 % or more) to be achieved in the product gas compared to the same conditions when no swirling is employed. Cooling fluid, such as nitrogen gas, may be passed through an interior passageway and outside the outer electrode either co-current or countercurrent to the general direction of oxygen gas flow.

公开(公告)号：NO921991A

公开(公告)日：1993-02-02

申请号：NO921991

申请日：1992-05-20

Applicant: UNION CAMP PATENT HOLDING

Inventor： JOSEPH JAMES ,  PIKULIN MICHAEL A ,  FRIEND WILLIAM H

IPC: C01B13/10 ,  B01D53/62 ,  B30B9/20 ,  C01B13/11 ,  D21C9/153 ,  D21C9/18

CPC classification number: D21C9/153 ,  B01D53/62 ,  C01B13/11 ,  C01B2201/60 ,  Y02C10/04 ,  Y02P20/152 ,  Y02P70/24

公开(公告)号：EP2748113B1

公开(公告)日：2018-08-08

申请号：EP12775337.4

申请日：2012-08-24

Applicant: Electrolytic Ozone Inc.

Inventor： LUTZ, Carl, David ,  BOOTH, Jeffrey, D. ,  BOUDREAU, Donald, J. ,  LAUDER, Nicholas, R. ,  ZARRIN, Hossein ,  ROSTER, William ,  FEDERICO, Richard, A.

IPC: C02F1/461

CPC classification number: C02F1/4672 ,  C01B13/11 ,  C01B2201/60 ,  C02F1/008 ,  C02F1/46104 ,  C02F1/78 ,  C02F2201/782 ,  C02F2201/784 ,  C02F2303/04 ,  C02F2307/02 ,  C02F2307/04 ,  C02F2307/10 ,  C25B1/13 ,  C25B15/02

Abstract: An apparatus has a tank with an interior for containing water, a nozzle for directing ozonated water out of the spray apparatus, and an electrolytic cell located between the nozzle and the tank. The electrolytic cell is configured to ozonate water as the water flows from the tank to the nozzle. The apparatus also includes a power source for providing electric potential to the electrolytic cell. The tank, nozzle, and electrolytic cell all are part of a single spray bottle or dispenser (e.g., like a soap dispenser).

公开(公告)号：EP2597938A4

公开(公告)日：2014-10-29

申请号：EP11809506

申请日：2011-06-13

Applicant: PANASONIC CORP

Inventor： SANEMATSU WATARU

IPC: H05H1/24 ,  A45D27/46 ,  A61L2/14 ,  A61L2/18 ,  A61L2/20 ,  B08B3/08 ,  B08B3/10 ,  B08B7/00 ,  C01B13/11 ,  C02F1/72 ,  C02F1/78 ,  H01J37/32 ,  H05H1/46 ,  H05H1/48

CPC classification number: H05H1/48 ,  A45D27/46 ,  A45D27/48 ,  B08B3/10 ,  B08B7/00 ,  C01B13/11 ,  C01B2201/60 ,  C01B2201/64 ,  C02F1/72 ,  C02F1/78 ,  C02F2305/02 ,  H01J37/32082 ,  H01J37/32091 ,  H05H1/2406 ,  H05H2001/2412 ,  H05H2001/466

公开(公告)号：EP1870974A4

公开(公告)日：2011-09-07

申请号：EP06729235

申请日：2006-03-16

Applicant: MITSUBISHI ELECTRIC CORP

Inventor： WADA NOBORU ,  KUZUMOTO MASAKI ,  NAKATANI HAJIME ,  IGEHARA HIROYUKI ,  ESAKI NORIMITSU ,  MINE SHINGO ,  TAMIDA TAICHIRO

IPC: H01T19/00 ,  C01B13/11

CPC classification number: H01T19/00 ,  C01B13/11 ,  C01B2201/12 ,  C01B2201/14 ,  C01B2201/22 ,  C01B2201/24 ,  C01B2201/32 ,  C01B2201/34 ,  C01B2201/60 ,  C01B2201/64 ,  C01B2201/76 ,  C01B2201/90

公开(公告)号：EP1962165A1

公开(公告)日：2008-08-27

申请号：EP08009291.9

申请日：2003-04-25

Applicant: MKS Instruments, Inc.

Inventor： Fittkau, Jens ,  Seiwert, Johannes ,  Gottschalk, Christine

IPC: G05D21/02

CPC classification number: G05D11/132 ,  B01F3/04496 ,  B01F5/0603 ,  B01F5/0606 ,  B01F2003/04886 ,  C01B13/10 ,  C01B13/11 ,  C01B2201/60 ,  C01B2201/64 ,  C02F1/78 ,  C02F2201/782 ,  C02F2209/40 ,  G05D11/139 ,  Y10S134/902 ,  Y10S261/42

Abstract: A method for mixing fluids for process tools comprises: receiving a first fluid having a first flow and a first concentration to be supplied to a first process tool; receiving a second fluid having a second flow and second concentration; and mixing the first and the second fluid to produce a third fluid having a third flow and third concentration to be supplied to a second process tool.

Abstract translation: 一种混合用于加工工具的流体的方法包括：接收具有第一流和第一浓度的第一流体供给第一加工工具; 接收具有第二流量和第二浓度的第二流体; 以及混合第一和第二流体以产生具有第三流量和第三浓度的第三流体，以供给第二加工工具。