中科微点-全球专利检索

  1. Login
  2. Sign Up

Search Results

143 records (took 0.025 seconds)

    Method for improving performance of a laser interferometer in the presence of wavefront distortion
    111.
    发明公开
    Method for improving performance of a laser interferometer in the presence of wavefront distortion 失效
    一种用于改善在波前变形的存在的激光干涉仪的性能的方法。

    公开(公告)号：EP0341960A2

    公开(公告)日：1989-11-15

    申请号：EP89304644.1

    申请日：1989-05-08

    Applicant: Hewlett-Packard Company

    Inventor： Wayne, Kenneth.J.

    IPC: G01J9/02 ,  G01B9/02

    CPC classification number: G01B9/02041 ,  G01B9/02059 ,  G01J9/02 ,  G01J2009/0234 ,  G01J2009/0261 ,  G01J2009/0284

    Abstract: Method and apparatus for obtaining an enhanced clearer measurement signal with improved fringe contrast from a laser interferometer. The interferometer sends a laser beam (12) through atmospheric air to a polarizing or nonpolarizing beamsplitter (13) that sends one laser beam portion (14,16) to a fixed reference retroreflector (15) and another portion (19,21) to a movable measurement retroreflector (20). Both beams, upon retroreflection go back to the beamsplitter and are recombined to produce a combined beam (22) that is then sent to an aperture (30) such that only a small selected portion of that combined beam passes through the aperture, attenuating the energy of the combined beam but increasing its fringe contrast. This portion is sent to a detector (32) and is subsequently amplified by a high-gain amplifier.

    Abstract translation: 用于与从激光干涉条纹改进造影增强的更清晰的测量信号的获取方法和装置。 干涉仪发送，通过大气的激光束（12）的偏振或非偏振分束器（13）没有在发送部分中的一个激光束（14,16），以固定的参考后向反射器（15）而另一部分（19,21）到 可动测量后向反射器（20）。 两个光束中，在回射返回到分束器和再结合以产生组合光束（22）并然后被发送到在孔（30）检测只做的并组合光束的小的选定部分通过所述开口部，衰减的能量 的组合波束的但增加其条纹对比度。 该部分被发送到检测器（32），并随后通过一个高增益放大器放大。

    Device for analyzing and correcting wavefront surfaces in real time using a polarization interferometer
    112.
    发明公开
    Device for analyzing and correcting wavefront surfaces in real time using a polarization interferometer 失效
    使用偏振干涉仪实时分析和校正波形表面的设备

    公开(公告)号：EP0165173A3

    公开(公告)日：1987-04-29

    申请号：EP85401109

    申请日：1985-06-05

    Applicant: Office National d'Etudes et de Recherches Aérospatiales (O.N.E.R.A.)

    Inventor： Philbert, Michel

    IPC: G01J09/02

    CPC classification number: G01J9/02 ,  G01J2009/0261

    Abstract: An optical system for analyzing and correcting wave fronts comprising a deformable mirror for correcting wave fronts and a system for analyzing and detecting phase distorsion, an interferometer with lateral duplication constituting the analyses system, receiving the wave front for analysis and duplicating it and deducing from two neighbouring wave fronts obtained signals to control deformation of the said deformable mirror, wherein this lateral duplication interferometer is a polorization interferometer consisting of a Wollaston double-refractive biprism with an angle 0, the two prisms being assembled head to tail and cut parallel to the crystallographic axis such that the respective axes are parallel and perpendicular to the edges of the prisms a polarizer and an anlayser on either side of the said biprism and an oscillating optical member on the path of the said biprism.

    SYSTEME INTERFEROMETRIQUE APOLARISE ET PROCEDE DE MESURE INTERFEROMETRIQUE APOLARISE
    115.
    发明公开
    SYSTEME INTERFEROMETRIQUE APOLARISE ET PROCEDE DE MESURE INTERFEROMETRIQUE APOLARISE 有权
    APOLARISIERTES干涉系统和APOLARISIERTES干涉仪系统

    公开(公告)号：EP2635883A1

    公开(公告)日：2013-09-11

    申请号：EP11799746.0

    申请日：2011-11-02

    Applicant: IXBLUE

    Inventor： LEFEVRE, Hervé ,  MOLUCON, Cédric ,  BONNEFOIS, Jean-Jacques ,  AUBRY, Karl

    IPC: G01J9/02

    CPC classification number: G01B9/02055 ,  G01J9/0246 ,  G01J2009/023 ,  G01J2009/0261 ,  G01J2009/0288

    Abstract: The present invention relates to an interferometric system which includes a polarization separation means (10), a first polarization conversion means (11), a Mach-Zehnder interferometer (2) including a first (4) and second (5) arm connected to one another by a first (6) and second (7) end in order for a first and second beam (20, 21) having the same polarization to pass through the interferometer in a reciprocal manner in opposite directions of propagation, respectively, so as to form a first and second interferometric beam (22, 23), a second polarization conversion means (11) for obtaining an interferometric beam (24), the polarization of which is converted, a polarization-combining means (10), and a detection means (8) suitable for detecting an output beam (25).

    Wavelength dispersion measuring apparatus and polarization dispersion measuring apparatus
    116.
    发明公开
    Wavelength dispersion measuring apparatus and polarization dispersion measuring apparatus 有权
    设备，用于测量的波长色散和偏振色散测量装置

    公开(公告)号：EP0937973A3

    公开(公告)日：2002-07-17

    申请号：EP99103133.7

    申请日：1999-02-17

    Applicant: ANRITSU CORPORATION ,  Nippon Telegraph and Telephone Corporation

    Inventor： Otani, Akihito ,  Otsubo, Toshinobu ,  Takara, Hidehiko c/o Nippon Telegr. & Tele. Corp. ,  Kawanishi, Satoki c/o Nippon Telegr. & Tele. Corp. ,  Yamabayashi, Yoshiaki c/o Nippon Telegr.& Tel.Cor.

    IPC: G01J9/02 ,  G01M11/00

    CPC classification number: G01M11/336 ,  G01J4/00 ,  G01J7/00 ,  G01J2009/0261 ,  G01M11/332 ,  G01M11/335

    Abstract: A first tunable wavelength pulse light source (22) is driven by a reference signal to emit a first optical pulse. An optical demultiplexer (24) demultiplexes a first optical pulse emitted from the first pulse light source (22) into a reference optical pulse and an incident optical pulse to be sent into an object to be measured. An optical multiplexer (26) multiplexes the reference optical pulse and an outgoing optical pulse passing through the object to output multiplexed light. A second pulse light source (23) generates a second optical pulse which is synchronous with the first optical pulse and delays a predetermined time for each period of the first optical pulse. A sampling unit (27, 27a, 27b) receives the multiplexed light and the second optical pulse to obtain an optical pulse train signal proportional to the intensity of the multiplexed light obtained in synchronism with the second optical pulse. From the optical pulse train signal from the sampling unit (27, 27a, 27b), a signal processor (37) obtains an envelope formed by peaks of individual optical pulses forming the optical pulse train. The wavelength dispersion of the object is obtained by measuring the delay time of the outgoing optical pulse passing through the object on the basis of intervals between the peaks of the envelope.

    Abstract translation: 第一波长可调谐脉冲光源（22）由一个参考信号驱动以发射第一光脉冲。 光解复用器（24）解复用从第一脉冲光源（22）转换成参照光脉冲，并射入光脉冲发射的第一光脉冲在物体被发送到要被测量。 光复用器（26）复用该参照光脉冲和出射光脉冲通过对象传递到输出多路复用的光。 第二脉冲光源（23）基因速率的第2光脉冲的所有这是同步于所述第一光脉冲，并延迟一个预定时间的第1光脉冲的每个周期。 取样单元（27，27A，27B）接收多路复用的光以及第2光脉冲，以获得在光脉冲串信号正比于同步获得了与第2光脉冲的复用的光的强度。 从采样单元的光脉冲列信号（27，27A，27B），信号处理器（37）获取通过形成光脉冲列单独的光学脉冲的波峰形成的包络线。 对象的波长分散是通过测量穿过物体通过包络线的峰之间的间隔的基础上，输出光脉冲的延迟时间而获得。

    Inspection method and apparatus
    117.
    发明公开
    Inspection method and apparatus 失效
    Verfahren undGerätzur Inspektion。

    公开(公告)号：EP0567701A1

    公开(公告)日：1993-11-03

    申请号：EP92305510.7

    申请日：1992-06-16

    Applicant: CANON KABUSHIKI KAISHA

    Inventor： Tsuji, Toshihiko, c/o Canon Kabushiki Kaisha ,  Nose, Noriyuki, c/o Canon Kabushiki Kaisha ,  Yoshii, Minoru, c/o Canon Kabushiki Kaisha ,  Miyazaki, Kyoichi, c/o Canon Kabushiki Kaisha ,  Takeuchi, Seiji, c/o Canon Kabushiki Kaisha

    IPC: G01N21/88 ,  G01J9/04

    CPC classification number: G03F7/70616 ,  G01J9/04 ,  G01J2009/0261 ,  G01N21/88 ,  G01N21/8806 ,  G01N21/94 ,  G03F7/7065 ,  G03F7/70916

    Abstract: An inspection method and apparatus is disclosed, wherein a laser beam from a laser source is separated into two orthogonal, linearly polarized lights which are then modulated at different shift frequencies and are projected on the same spot on a surface to be inspected. Scattered light resulting in response to impingement of one laser beam and resulting from depolarization attributable to a particle or fault on the surface, and zero-th order diffraction light resulting from the other laser beam, are caused to interfere with each other. The resultant interference light is detected through heterodyne detecting method, whereby a beat signal is detected only on the basis of the light depolarized by the particle or fault. This assures precise inspection of a high S/N ratio to a particle or fault on the surface.

    Abstract translation: 公开了一种检查方法和装置，其中将来自激光源的激光束分成两个正交的线偏振光，然后以不同的移动频率进行调制，并将其投影在待检测的表面上的同一点上。 导致响应于一个激光束的冲击并由归因于表面上的颗粒或故障引起的去极化以及由另一个激光束产生的零级衍射光的散射光彼此干涉。 通过外差检测方法检测合成的干涉光，由此仅根据由粒子或故障去极化的光检测拍频信号。 这确保了对表面上的颗粒或故障的高S / N比的精确检查。

    ZWEI-WELLENLÄNGEN-INTERFEROMETRIE MIT OPTISCHEM HETERODYNVERFAHREN
    118.
    发明授权
    ZWEI-WELLENLÄNGEN-INTERFEROMETRIE MIT OPTISCHEM HETERODYNVERFAHREN 失效
    具有光学异质性过程的双波长干涉

    公开(公告)号：EP0314709B1

    公开(公告)日：1992-03-11

    申请号：EP88902383.4

    申请日：1988-03-30

    Applicant: Leica Heerbrugg AG

    Inventor： DÄNDLIKER, René

    IPC: G01J9/04 ,  G01B9/02

    CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02027 ,  G01B9/02067 ,  G01B2290/70 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0253 ,  G01J2009/0261

    Abstract: The device comprises : a laser device (10, 20) for the frequency n1 (11) and the frequency n2 (21), each provided with a polarizing beam splitter (12, 22) for producing crossed polarized partial beams of frequency n1 (13, 14) and n2 (23, 24), respectively, with a modulator (18, 28) for shifting the frequency of each of the partial beams to the frequency f1 or f2, respectively, with a pair of deflecting mirrors (15, 17, 25, 27) and with a polarizing beam splitter (16, 26) for uniting (19, 29) the partial beams n1, n1+f1, n2, n2+f2; two photodetectors (35, 45) before each of which a polarizer (34, 44) is arranged; a Michelson interferometer; a non-polarizing beam splitter (30) for distributing each of the partial beams (19, 29) into a measurement light beam (32) or a reference light beam (33). The reference light beam is transmitted to the corresponding photodetector (35). The measurement light beam (32) is transmitted to the Michelson interferometer and then to the corresponding photodetector (45).The photodetector signals are modulated in function of the amplitude, and the phase difference between the two modulated signals is determined. This phase difference depends only on the position of the test object and the equivalent wavelenght of the difference, n1-n2. For stabilization or correction, the device can be executed in duplicate and one of the executions used as a reference. The corresponding process can be applied to determine positions or distances as the interval between two positions. Uncertainties can be eliminated by shifting the distance or changing the frequency with simultaneous integration of the phase difference over time.

Patent Agency Ranking