公开(公告)号：US20090046293A1

公开(公告)日：2009-02-19

申请号：US11972586

申请日：2008-01-10

Applicant: John Cabaniss ,  Tom Chaffee

Inventor： John Cabaniss ,  Tom Chaffee

IPC: G01J3/45

CPC classification number: G01J9/02 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0234 ,  H04B10/676

Abstract: Optical communications can be performed using spectral interferometry. An incident transmission pulse or beam may be mixed with a locally generated beam or pulse to create an interference pattern that may be analyzed to extract the transmitted data. The incident transmission pulse or beam may also be split and mixed with itself to create an interference pattern.

Abstract translation: 可以使用光谱干涉测量来执行光通信。 入射传输脉冲或光束可以与本地生成的光束或脉冲混合，以产生可被分析以提取发射数据的干涉图案。 入射传输脉冲或光束也可以与其自身分离并混合以产生干涉图案。

公开(公告)号：US5220403A

公开(公告)日：1993-06-15

申请号：US954282

申请日：1992-09-30

Applicant: John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

Inventor： John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt

IPC: G01J3/42 ,  G01J3/44 ,  G01J9/02 ,  G01N21/35 ,  G01N21/95 ,  G02B3/00 ,  G02B21/00

CPC classification number: G01N21/9505 ,  G02B21/0016 ,  G02B3/00 ,  G01J2003/421 ,  G01J2009/0207 ,  G01J3/44 ,  G01N2021/1725 ,  G01N2021/1782 ,  G01N2021/8822 ,  G01N21/3563 ,  G01N21/359 ,  G01N2201/0638 ,  G01N2201/1087

Abstract: Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.

Abstract translation: 在半导体晶片的内部特征的近红外线中执行高分辨率光学成像的装置和方法使用由具有高折射率的材料制成的光学装置，并且保持非常靠近晶片。 光学器件可以是棱镜或平凸透镜。 平凸透镜可以保持与晶片接触或通过空气轴承或光耦合流体与晶片分离，以允许样品在透镜下面导航。 透镜可以用于许多光学仪器，例如明视野显微镜，Schlieren显微镜，暗视野显微镜，Linnik干涉仪，拉曼光谱仪和吸收光谱仪。

公开(公告)号：EP0503236A2

公开(公告)日：1992-09-16

申请号：EP92100744.9

申请日：1992-01-17

Applicant: International Business Machines Corporation

Inventor： Batchelder, John Samuel ,  Hobbs, Philip Charles Danby ,  Taubenblatt, Marc Alan

IPC: G01N21/55 ,  G02B21/00 ,  H01L21/66 ,  G01N21/88 ,  G02B3/00

CPC classification number: G01N21/9505 ,  G01J3/44 ,  G01J2003/421 ,  G01J2009/0207 ,  G01N21/3563 ,  G01N21/359 ,  G01N2021/1725 ,  G01N2021/1782 ,  G01N2021/8822 ,  G01N2201/0638 ,  G01N2201/1087 ,  G02B3/00 ,  G02B21/0016

Abstract: Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers (110) uses an optical device (112) made from a material having a high index of refraction and held in very close proximity to the wafer (110). The optical device (112) may either be a prism (130) or a plano-convex lens (112). The plano-convex lens (112) may be held in contact with the wafer (110) or separated from the wafer via an air bearing (112') or an optical coupling fluid (214) to allow the sample to be navigated beneath the lens (112). The lens (112) may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.

Abstract translation: 装置和用于在半导体的内部特征的近红外执行高分辨率光学成像（晶片（110）的方法，使用从具有折射指数高的材料制成并保持在非常靠近晶片光学装置（112） 110）。 所述光学装置（112）可以是任一棱镜（130）或一个平凸透镜（112）。 的平凸透镜（112）可以在与晶片（110）保持接触或经由空气轴承（112“）上或在光学耦合流体（214）从该晶片分离，以允许样品被导航透镜下方 （112）。 所述透镜（112）可以以多种光学仪器的使用：诸如亮视野显微镜，一个纹影显微镜，暗场显微镜，林尼克干涉仪，拉曼光谱仪，并吸收分光。

公开(公告)号：US5493395A

公开(公告)日：1996-02-20

申请号：US436598

申请日：1995-05-08

Applicant: Masaru Otsuka

Inventor： Masaru Otsuka

IPC: G01B9/02 ,  G01J9/02 ,  G01J9/04 ,  H01S3/131

CPC classification number: G01J9/0246 ,  G01J2009/0207 ,  G01J9/04

Abstract: A wavelength variation measuring apparatus is disclosed. A light beam from a light source device capable of controlling an oscillation wavelength is divided into two light beams by a light divider. A predetermined optical path length difference is imparted to the divided light beams to synthesize the beams by a light synthesizer. A part of the synthesized light is used as detection light and the rest of the synthesized light is used as measuring light. A beat signal is detected from the detection light by a photodetector. A feedback control is effected to the light source device by use of the beat signal to thereby stabilize the oscillated wavelength of the light source device and to direct the measuring light to an object to be measured. The beat signal is rendered as a measurement data correction signal, and measurement data obtained by directing the measuring light to the object to be measured is corrected.

Abstract translation: 公开了一种波长变化测量装置。 来自能够控制振荡波长的光源装置的光束被分光器分成两束光束。 通过光合成器对划分的光束赋予预定的光程长度差以合成光束。 合成光的一部分用作检测光，其余的合成光用作测量光。 通过光检测器从检测光检测拍频信号。 通过使用拍频信号对光源装置进行反馈控制，从而稳定光源装置的振荡波长并将测量光引导到待测物体。 将拍频信号作为测量数据校正信号，并且通过将测量光指向待测量对象而获得的测量数据被校正。

公开(公告)号：US5208648A

公开(公告)日：1993-05-04

申请号：US667773

申请日：1991-03-11

Applicant: John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt ,  Douglas W. Cooper

Inventor： John S. Batchelder ,  Philip C. D. Hobbs ,  Marc A. Taubenblatt ,  Douglas W. Cooper

IPC: G01N21/88 ,  G01J3/42 ,  G01J3/44 ,  G01J9/02 ,  G01N21/35 ,  G01N21/95 ,  G01N21/956 ,  G01Q30/02 ,  G02B3/00 ,  G02B21/00 ,  G02B27/00 ,  H01L21/66

CPC classification number: G01N21/9505 ,  G02B21/0016 ,  G02B3/00 ,  G01J2003/421 ,  G01J2009/0207 ,  G01J3/44 ,  G01N2021/1725 ,  G01N2021/1782 ,  G01N2021/8822 ,  G01N21/3563 ,  G01N21/359 ,  G01N2201/0638 ,  G01N2201/1087

Abstract: Apparatus and a method for performing high resolution optical imaging in the near infrared of internal features of semiconductor wafers uses an optical device made from a material having a high index of refraction and held in very close proximity to the wafer. The optical device may either be a prism or a plano-convex lens. The plano-convex lens may be held in contact with the wafer or separated from the wafer via an air bearing or an optical coupling fluid to allow the sample to be navigated beneath the lens. The lens may be used in a number of optical instruments such as a bright field microscope, a Schlieren microscope, a dark field microscope, a Linnik interferometer, a Raman spectroscope and an absorption spectroscope.

公开(公告)号：US4764013A

公开(公告)日：1988-08-16

申请号：US28987

申请日：1987-03-23

Applicant: Roger G. Johnston

Inventor： Roger G. Johnston

IPC: G01J9/02 ,  G01J9/04 ,  G01N15/02 ,  G01N15/14 ,  G01N21/21 ,  G01B9/02

CPC classification number: G01N15/0205 ,  G01J2009/0207 ,  G01J9/04 ,  G01N15/0211 ,  G01N15/14 ,  G01N2021/4792 ,  G01N21/21

Abstract: Interferometric apparatus and method for detection and characterization of particles using light scattered therefrom. Differential phase measurements on scattered light from particles are possible using the two-frequency Zeeman effect laser which emits two frequencies of radiation 250 kHz apart. Excellent discrimination and reproducibility for various pure pollen and bacterial samples in suspension have been observed with a single polarization element. Additionally, a 250 kHz beat frequency was recorded from an individual particle traversing the focused output from the laser in a flow cytometer.

Abstract translation: 用于使用从其散射的光来检测和表征颗粒的干涉仪和方法。 使用双频塞曼效应激光器发射来自粒子的散射光的差分相位测量是可能的，其发射两个频率为250kHz的两个频率。 已经用单一的偏振元件观察到各种纯粹的花粉和细菌样品在悬浮液中的极好的辨别和再现性。 另外，在流式细胞仪中从穿过激光的聚焦输出的单个粒子记录250kHz拍频。

公开(公告)号：WO1988008519A1

公开(公告)日：1988-11-03

申请号：PCT/CH1988000070

申请日：1988-03-30

Applicant: WILD HEERBRUGG AG ,  DÄNDLIKER, René

Inventor： WILD HEERBRUGG AG

IPC: G01J09/04

CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02027 ,  G01B9/02067 ,  G01B2290/70 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0253 ,  G01J2009/0261

Abstract: The device comprises : a laser device (10, 20) for the frequency n1 (11) and the frequency n2 (21), each provided with a polarizing beam splitter (12, 22) for producing crossed polarized partial beams of frequency n1 (13, 14) and n2 (23, 24), respectively, with a modulator (18, 28) for shifting the frequency of each of the partial beams to the frequency f1 or f2, respectively, with a pair of deflecting mirrors (15, 17, 25, 27) and with a polarizing beam splitter (16, 26) for uniting (19, 29) the partial beams n1, n1+f1, n2, n2+f2; two photodetectors (35, 45) before each of which a polarizer (34, 44) is arranged; a Michelson interferometer; a non-polarizing beam splitter (30) for distributing each of the partial beams (19, 29) into a measurement light beam (32) or a reference light beam (33). The reference light beam is transmitted to the corresponding photodetector (35). The measurement light beam (32) is transmitted to the Michelson interferometer and then to the corresponding photodetector (45).The photodetector signals are modulated in function of the amplitude, and the phase difference between the two modulated signals is determined. This phase difference depends only on the position of the test object and the equivalent wavelenght of the difference, n1-n2. For stabilization or correction, the device can be executed in duplicate and one of the executions used as a reference. The corresponding process can be applied to determine positions or distances as the interval between two positions. Uncertainties can be eliminated by shifting the distance or changing the frequency with simultaneous integration of the phase difference over time.

Abstract translation: 该装置包括：用于频率n1（11）和频率n2（21）的激光装置（10,20），每个激光装置（10,20）设有偏振分束器（12,22），用于产生频率为n1的十字偏振分光束 ，14）和n2（23,24）分别具有用于将每个分光束的频率分别用一对偏转镜（15,17）移动到频率f1或f2的调制器（18,28） （25,27），以及用于将部分光束n1，n1 + f1，n2，n2 + f2联合（​​19,29）的偏振分束器（16,26） 在每个光电检测器（35,45）之前布置有偏振器（34,44）; 迈克尔逊干涉仪 用于将每个分光束（19,29）分配到测量光束（32）或参考光束（33）中的非偏振分束器（30）。 参考光束被传送到相应的光电检测器（35）。 将测量光束（32）传输到迈克尔逊干涉仪，然后传输到相应的光电检测器（45）。光电探测器信号由幅度调制，两个调制信号之间的相位差被确定。 该相位差仅取决于测试对象的位置和差值的等效波长n1-n2。 对于稳定或校正，设备可以重复执行，其中一个执行作为参考。 可以应用相应的过程来确定位置或距离作为两个位置之间的间隔。 通过移动距离或改变频率可以消除不确定性，同时整合相位差随时间的变化。

公开(公告)号：US07796268B2

公开(公告)日：2010-09-14

申请号：US11972586

申请日：2008-01-10

Applicant: John Cabaniss ,  Tom Chaffee

Inventor： John Cabaniss ,  Tom Chaffee

IPC: G01B9/02

CPC classification number: G01J9/02 ,  G01J9/04 ,  G01J2009/0207 ,  G01J2009/0234 ,  H04B10/676

Abstract: Optical communications can be performed using spectral interferometry. An incident transmission pulse or beam may be mixed with a locally generated beam or pulse to create an interference pattern that may be analyzed to extract the transmitted data. The incident transmission pulse or beam may also be split and mixed with itself to create an interference pattern.

Abstract translation: 可以使用光谱干涉测量来执行光通信。 入射传输脉冲或光束可以与本地生成的光束或脉冲混合，以产生可被分析以提取发射数据的干涉图案。 入射传输脉冲或光束也可以与其自身分离并混合以产生干涉图案。

公开(公告)号：US4907886A

公开(公告)日：1990-03-13

申请号：US297866

申请日：1989-02-06

Applicant: Rene Dandliker

Inventor： Rene Dandliker

IPC: G01B9/02 ,  G01J9/02 ,  G01J9/04

CPC classification number: G01B9/02007 ,  G01B9/02003 ,  G01B9/02027 ,  G01B9/02067 ,  G01J9/04 ,  G01B2290/70 ,  G01J2009/0207 ,  G01J2009/0253 ,  G01J2009/0261

Abstract: An apparatus for measuring changes in a variable interference section of an interferometer comprises a laser source for producing beams of the frequency n.sub.1 and the frequency n.sub.2, polarizing beam splitters for producing cross-polarized partial beams of frequency n.sub.1 or n.sub.2, modulators for displacing the frequency of one of the partial beams by frequency f.sub.1 or f.sub.2, a pair of deflecting mirrors in each case and polarizing beam splitters for combining the partial beam n.sub.1, n.sub.1 +f.sub.1, n.sub.2, n.sub.2 +f.sub.2. The apparatus further includes two photodetectors, upstream of which are arranged a polarizer, a Michelson interferometer, a non-polarizing beam splitter for splitting the partial beams in each case into a measuring light beam or a reference light beam. The reference light beam passes to an associated photodetector. The measuring light beam passes into the Michelson interferometer and then to the associated photodetector. The signals of the photodetectors are demodulated according to the amplitude and the phase difference between the two demodulated signals is determined. This phase difference is only dependent on the position of a measurement object and the equivalent wavelength of the difference n.sub.1 -n.sub.2. A method for measuring changes by determining positions or distances is performed by the apparatus.

Abstract translation: PCT No.PCT / CH88 / 00070 Sec。 371日期1989年2月6日 102（e）日期1989年2月6日PCT PCT 3月30日PCT公布。 第WO88 / 08519号公报 用于测量干涉仪的可变干涉部分的变化的装置包括用于产生频率n1和频率n2的光束的激光源，用于产生频率为n1的交叉偏振分光束的偏振分束器或 n2，用于通过频率f1或f2移位部分光束中的一个的频率的调制器，每种情况下的一对偏转镜和用于组合部分光束n1，n1 + f1，n2，n2 + f2的偏振光束分离器。 该装置还包括两个光电检测器，其上游设置有偏振器，迈克尔逊干涉仪，用于将每个情况下的部分光束分成测量光束或参考光束的非偏振分束器。 参考光束传递到相关联的光电检测器。 测量光束进入迈克尔逊干涉仪，然后进入相关的光电检测器。 光电探测器的信号根据振幅进行解调，确定两个解调信号之间的相位差。 该相位差仅取决于测量对象的位置和差值n1-n2的等效波长。 通过确定位置或距离来测量变化的方法由该装置执行。

公开(公告)号：US4906095A

公开(公告)日：1990-03-06

申请号：US147468

申请日：1988-01-25

Applicant: Roger G. Johnston

Inventor： Roger G. Johnston

IPC: G01J9/02 ,  G01N21/17 ,  G01N21/19

CPC classification number: G01J9/02 ,  G01N21/171 ,  G01J2009/0207 ,  G01J2009/0261 ,  G01J2009/0269 ,  G01N21/19

Abstract: The present apparatus includes a two-frequency, Zeeman-effect laser and matched, doubly refracting crystals in the construction of an accurate interferometer. Unlike other interferometric devices, the subject invention exhibits excellent phase stability owing to the use of single piece means for producing parallel interferometer arms, making the interferometer relatively insensitive to thermal and mechanical instabilities. Interferometers respond to differences in optical path length between their two arms. Unlike many interferometric techniques, which require the measurement of the location of interference fringes in a brightly illuminated background, the present invention permits the determination of the optical path length difference by measuring the phase of an electronic sine wave. The present apparatus is demonstrated as a differential thermooptic spectrometer for measuring differential optical absorption simply and accurately which is but one of many applications therefor. The relative intensities of the heating beams along each arm of the interferometer can be easily adjusted by observing a zero phase difference with identical samples when this condition is obtained.

Abstract translation: 本设备包括一个双频塞曼效应激光器和匹配的双折射晶体，构建精确的干涉仪。 与其他干涉仪装置不同，本发明由于使用用于产生平行干涉仪臂的单件装置显示出优异的相位稳定性，使得干涉仪对热和机械不稳定性相对不敏感。 干涉仪响应两臂之间光程长度的差异。 与需要在明亮照明背景中测量干涉条纹的位置的许多干涉测量技术不同，本发明允许通过测量电子正弦波的相位来确定光程长度差异。 本装置被证明是用于简单且精确地测量差分光吸收的差分热光谱仪，其仅是许多应用之一。 当获得该条件时，可以通过观察相同样品的零相位差来容易地调节沿着干涉仪的每个臂的加热束的相对强度。