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    Defect inspection method and device
    113.
    发明专利
    Defect inspection method and device 有权
    缺陷检查方法和设备

    公开(公告)号：JP2013108950A

    公开(公告)日：2013-06-06

    申请号：JP2011256483

    申请日：2011-11-24

    Applicant: Hitachi High-Technologies Corp ,  株式会社日立ハイテクノロジーズ

    Inventor： HONDA TOSHIFUMI ,  URANO YUTA ,  HATANO HIROSHI

    IPC: G01N21/956

    CPC classification number: G01N21/9501 ,  G01N21/8851 ,  G01N21/956 ,  G01N2201/06

    Abstract: PROBLEM TO BE SOLVED: To solve such problems that, since a detector having high gain is required for performing high speed inspection with weak defective scattered light in a defect inspection used in a step for manufacturing a semiconductor or the like, dark current noise becomes large and defect detection sensitivity is reduced in a general detector, typically a photomultiplier tube in accordance with an increase in gain.SOLUTION: A detection optical system for detecting reflective scattered light from a sample includes a plurality of detectors. A photon counting type detector having the small number of pixels is applied to a detector for detecting a weak amount of background scattered light, while a photon counting type detector having the large number of pixels is applied to a detector for a strong amount of background scattered light or an analog type detector, and furthermore non-linearity of detection intensity of scattered light generated by application of the photon counting type detector is corrected to correct a defective scattered light detection signal.

    Abstract translation: 解决的问题为了解决这样的问题，由于在用于制造半导体等的步骤中使用的缺陷检查中需要用弱的有缺陷的散射光进行高速检测的具有高增益的检测器，因此暗电流 根据增益的增加，通常检测器（通常是光电倍增管）的噪声变大并且缺陷检测灵敏度降低。 解决方案：用于检测来自样品的反射散射光的检测光学系统包括多个检测器。 将具有少量像素的光子计数型检测器应用于用于检测弱量的背景散射光的检测器，而具有大量像素的光子计数型检测器被应用于具有大量背景散射的检测器 光或模拟型检测器，并且通过应用光子计数型检测器产生的散射光的检测强度的非线性被校正，以校正有缺陷的散射光检测信号。 版权所有（C）2013，JPO＆INPIT

    ARRANGEMENTS AND SYSTEMS FOR OBTAINING INFORMATION ASSOCIATED WITH AN ANATOMICAL SAMPLE USING OPTICAL MICROSCOPY
    117.
    发明授权
    ARRANGEMENTS AND SYSTEMS FOR OBTAINING INFORMATION ASSOCIATED WITH AN ANATOMICAL SAMPLE USING OPTICAL MICROSCOPY 有权
    安排及制度与解剖样本相关信息获取利用光学显微镜

    公开(公告)号：EP1988825B1

    公开(公告)日：2016-12-21

    申请号：EP07763612.4

    申请日：2007-02-08

    Applicant: The General Hospital Corporation

    Inventor： YUN, Seok-Hyun

    IPC: A61B5/00 ,  G01N21/63 ,  G01J3/44 ,  G01N21/17

    CPC classification number: C07K14/70503 ,  A61B3/102 ,  A61B3/117 ,  A61B5/0059 ,  A61B5/0066 ,  A61B5/0073 ,  A61B5/0075 ,  A61B5/0084 ,  A61B5/0086 ,  A61B5/0095 ,  A61B5/0097 ,  A61B5/4088 ,  A61B5/412 ,  A61B5/413 ,  C07K2319/30 ,  C07K2319/32 ,  C07K2319/70 ,  G01B9/02091 ,  G01J3/4412 ,  G01N21/1717 ,  G01N21/4795 ,  G01N21/636 ,  G01N2021/1725 ,  G01N2021/638 ,  G01N2201/06 ,  G01N2201/0612 ,  G01N2800/042 ,  G01N2800/387 ,  G01N2800/7023 ,  G01N2800/7028 ,  G02B21/0052

    Abstract: Arrangements and methods are provided for obtaining information associated with an anatomical sample. For example, at least one first electro-magnetic radiation can be provided to the anatomical sample so as to generate at least one acoustic wave in the anatomical sample. At least one second electro-magnetic radiation can be produced based on the acoustic wave. At least one portion of at least one second electro-magnetic radiation can be provided so as to determine information associated with at least one portion of the anatomical sample. In addition, the information based on data associated with the second electro-magnetic radiation can be analyzed. The first electro-magnetic radiation may include at least one first magnitude and at least one first frequency. The second electro-magnetic radiation can include at least one second magnitude and at least one second frequency. The data may relate to a first difference between the first and second magnitudes and/or a second difference between the first and second frequencies. The second difference may be approximately between -100 GHz and 100 GHz, excluding zero.

    Abstract translation: 提供了用于获取与在解剖样品相关联的信息的装置和方法。 对于实施例，至少一个第一电磁辐射可被提供给所述解剖样品，以便产生所述解剖样品中的至少一个声波。 至少一个第二电磁辐射可基于声波产生。 至少一个第二电磁辐射中的至少一个部分可以以与解剖样品中的至少一个部分相关联的确定性矿信息来提供。 此外，基于与所述第二电磁辐射相关联的数据中的信息进行分析。 所述第一电磁辐射可包括至少一个第一量值和至少一个第一频率。 第二电磁辐射可以包括至少一个第二级和至少一个第二频率。 该数据可以涉及在第一和第二幅度和/或所述第一和第二频率之间的第二差值之间的第一差值。 第二差可以是大约-100 GHz和100千兆赫，但不包括零之间。

    UNIFORM EPI-ILLUMINATION OF PLANAR SAMPLES
    120.
    发明公开
    UNIFORM EPI-ILLUMINATION OF PLANAR SAMPLES 有权
    平面样本的均匀EPI照射

    公开(公告)号：EP2820676A1

    公开(公告)日：2015-01-07

    申请号：EP13755695.7

    申请日：2013-01-14

    Applicant: Bio-rad Laboratories, Inc.

    Inventor： HILLENDAHL, James W. ,  PEREZ, Evelio

    IPC: H01L27/00

    CPC classification number: F21V21/005 ,  F21V9/083 ,  F21V13/02 ,  G01N21/255 ,  G01N21/6452 ,  G01N21/6456 ,  G01N27/447 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2201/06 ,  G01N2201/0626 ,  G01N2201/0635

    Abstract: A planar sample, particularly of the type used in biological laboratories for detection and sometimes analysis of two-dimensional arrays of proteins, nucleic acids, or other biological species, is illuminated by epi-illumination using optically filtered line lights that are arranged along opposing parallel sides of a rectangle in which the sample array resides, with two coaxial line lights on each side of the rectangle, and the two on any given side being separated by a gap whose optimal width depends on the wavelength band transmitted by the optical filter. Surprisingly, the gap eliminates the peak in intensity at the center of the sample area and the decrease that occurs from the center outward that would otherwise occur with a single continuous filtered line light, producing instead a substantially uniform intensity along the direction parallel to the line lights.

    Abstract translation: 平面样品，特别是用于生物实验室中用于检测蛋白质，核酸或其他生物物种的二维阵列以及有时分析蛋白质，核酸或其他生物物种的二维阵列的类型的平面样品，使用光学滤波的线光照射，所述光学滤波的线光沿着相对平行 样本阵列所在的矩形的两侧，在矩形的每一侧上具有两个同轴线光源，并且在任何给定侧上的两个由间隙隔开，该间隙的最佳宽度取决于由光学滤波器传输的波长带。 令人惊讶的是，该间隙消除了样品区域中心处的强度峰值以及从中心向外发生的减少，否则将发生在单个连续的过滤后的线光下，而是沿平行于线的方向产生基本上均匀的强度 灯。

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