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111.发明专利
公开(公告)号：JPH04137330A
公开(公告)日：1992-05-12
申请号：JP25681390
申请日：1990-09-28
Applicant: CANON KK
Inventor： MISHINA SHINYA , ONO HARUTO , NOMURA ICHIRO , SUZUKI HIDETOSHI , KANEKO TETSUYA
Abstract: PURPOSE:To prevent deterioration in the yield of products caused by misalignment, etc., and contribe a longer life of an element, the thinner film of an insulation layer and the low-voltage drive of a modulating electrode by integrally forming the modulating electrode and an electron emission element on a board without providing the modulating electrode directly under the electron emission section. CONSTITUTION:A resist pattern is formed on an insulation board 1. After Ti as under-coating material and Ni as modulating material are evaporated all over, a modulating electrode pattern 2 with a hole 2' is formed using a lift-off technique. A SiO2 film as an insulation layer 5 is given mask-deposition on the partial upper faces of the electrode 2 and the board 1. An element electrode pattern 3 of SCE with a gap is formed above the hole 2' in the electrode 2. Cr is evaporated all over. A resist pattern for removing only Cr near the electron emission section 4 is formed to remove desired Cr with etching. Organic palladium as emission material is formed all over to etch out patterning Cr.
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公开(公告)号：JPH04133238A
公开(公告)日：1992-05-07
申请号：JP25610090
申请日：1990-09-25
Applicant: CANON KK
Inventor： NOMURA ICHIRO , ONO HARUTO , SUZUKI HIDETOSHI , KANEKO TETSUYA , MISHINA SHINYA
Abstract: PURPOSE:To simplify fabricating processes, give a sufficient amount of electron emission, and eliminate variation or unevenness in modulation by laminating electron emitting elements and modulation electrode one over another with an insulative base body interposed, and designing so that, the thickness of these elements or the distance from electrode to the electron emitting part lies within a certain range. CONSTITUTION:In an electron beam generating device, electron emitting elements 2, 3 as source of electron beam and a modulation electrode 4, which modulates electron beam emitted by these elements 2, 3, are laminated one over another with insulative base body 1 interposed, wherein the thickness T of the elements 2, 3 or the distance from electrode 4 to the electron emitting part 3 of the elements 2, 3 lies within the range 0.01-200mum. This facilitates alignment of the electrode 4 with element 2, 3, simplifies fabrication, and gives a sufficient amount of electron emission compared with conventional arrangement. Further, this improves remarkably the modulational unevenness between a plurality of electron beams or undeliberate variation of the amount of electron emission at the time of driving, and also provides an excellent modulation efficiency.
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公开(公告)号：JPH04133236A
公开(公告)日：1992-05-07
申请号：JP25170490
申请日：1990-09-25
Applicant: CANON KK
Inventor： ONO HARUTO , NOMURA ICHIRO , MISHINA SHINYA , SUZUKI HIDETOSHI , KANEKO TETSUYA
Abstract: PURPOSE:To facilitate alignment of an electron emitting element with modulation electrodes and accomplish a high grade image at low cost by laminating the modulation electrodes an insulation layer, and the electron emitting element one over another on an insulated base board, taking away part of the insulation layer, and exposing the modulation electrodes. CONSTITUTION:From an electroconductive material a group of linearly shaped modulation electrodes 32 are formed on a glass base board 31 by means of evaporation and photo-lithographic technique. Then an insulation layer 33 is attached by evaporation process with SiO2, and further an element electrode 35 and an element wiring electrode 34 are fabricated from Ni material through evaporation and etching technique. A super-particulate film of Pd is provided between electrodes mating with each other by the gas deposition process, and thus an electron emission part 35 is formed. A layer 33 in the neighborhood of the element electrode 35 is removed rectangularly by means of photo-lithographic and etching techniques to accomplish an electron beam generating device. Element part 36 and electrodes 32 are laminated with this layer 33 interposed, and thus a display can be provided cheaply, which is easy to have alignment and is equipped with a large screen and highly fine picture.
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公开(公告)号：JPH04132135A
公开(公告)日：1992-05-06
申请号：JP25169490
申请日：1990-09-25
Applicant: CANON KK
Inventor： NOMURA ICHIRO , ONO HARUTO , SUZUKI HIDETOSHI , KANEKO TETSUYA , MISHINA SHINYA
IPC: G03G15/04 , H01J1/30 , H01J1/316 , H01J3/08 , H01J29/04 , H01J29/46 , H01J29/52 , H01J29/62 , H01J31/12
Abstract: PURPOSE:To facilitate the positioning of electron discharge elements and modulating electrodes and facilitate the alignment of modulating electrodes and electron discharge portions and make the manufacture simple, by accumulating in order and layers modu lating electrodes and insulation layers and electron discharge elements on an insulation base, and making the area of a modulating electrode larger than that of an electron discharge element. CONSTITUTION:As for an electron discharge element 35, one which is used as the electronic source of an image display device, is desired, and a cold cathode is preferable, and one which is called a surface conduction form discharge element, is more preferable. Also, the thickness of the thicker one of either of an element electrode 35 and an electron discharge portion 36 is preferred to be 0.1-200mum. The size of a modulating electrode 32 is preferred to be more than five times the size of an element, and the optimum is more than ten times. At this electron beam generator, the variation of an unintentional electron discharge quantity and modulation unevenness between plural electron beams are remarkably corrected, and an image display device using this, is superior in image contrast and has high brilliance, and the unevenness of brilliance is reduced.
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公开(公告)号：JPH0320941A
公开(公告)日：1991-01-29
申请号：JP29097989
申请日：1989-11-10
Applicant: CANON KK
Inventor： NOMURA ICHIRO , KANEKO TETSUYA , ONO HARUTO , SUZUKI HIDETOSHI
Abstract: PURPOSE:To display a high-precision image on a large screen at a low cost by integrally forming modulating electrodes and surface conductive type electron emitting elements via an insulator. CONSTITUTION:Surface conductive type electron emitting elements with less power consumption are used for an electron generating source. A line-shaped modulating electrode 32 group is formed on a glass substrate 31, and an insulator film 33 is formed on it. Element electrodes 35 and element wiring electrodes 34 are formed on the insulator film 33 at the high-precision mutual positional relationship required with modulating electrodes 32. An electron emitting section 36 formed between parallel element electrodes, e.g. 34-a and 34-b, maintains the high-precision positional relationship with the corresponding modulating electrode, and a large screen with no irregularity can be formed.
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Patent Agency Ranking
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公开(公告)号：JPS63150836A
公开(公告)日：1988-06-23
申请号：JP29768186
申请日：1986-12-16
Applicant: CANON KK
Inventor： SUZUKI AKIRA , TSUKAMOTO TAKEO , SHIMIZU AKIRA , SUGATA MASAO , SHIMODA ISAMU , OKUNUKI MASAHIKO
Abstract: PURPOSE:To improve positioning accuracy and control emitted electrons by providing a control electrode on an electron emitting source via an insulating layer. CONSTITUTION:An electrode 2 is formed on a substrate 1, a P-type semiconductor layer 3 and an N-type semiconductor layer 4 are laminated on it to form an electron emitting element. A work function reduced material region 8 is provided on the electron emitting section 7 of this layer 4. An insulating layer 5 having an electron emitting port 9 is formed on the layer 4, and a control electrode 6 is formed on the side and upper section of the emitting port 9 of the layer 5. This electrode 6 is provided on the layer 4 via the layer 5, the positioning accuracy is determined by the error when the emitting section 7 and the emitting port 9 are manufactured, thus positional accuracy can be improved. The voltage applied to the electrode 6 thus provided is controlled, thereby the ON-OFF of the electrons emitted from the emitting section 7 is controlled.
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公开(公告)号：IL231716A
公开(公告)日：2020-05-31
申请号：IL23171614
申请日：2014-03-26
Applicant: ELBIT SYSTEMS LTD , RON SCHNEIDER , ZOHAR EYAL
Inventor： RON SCHNEIDER , ZOHAR EYAL
IPC: H01J3/08
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公开(公告)号：AT346373T
公开(公告)日：2006-12-15
申请号：AT99903470
申请日：1999-01-29
Applicant: NANO PROPRIETARY INC
Inventor： YANIV ZVI , ROBINDER RONALD CHARLES
IPC: H01J3/30 , H01J1/304 , H01J1/316 , H01J3/02 , H01J3/08 , H01J3/18 , H01J29/04 , H01J29/46 , H01J29/52 , H01J29/62 , H01J29/74 , H01J31/12 , H01J1/46 , H01J1/62 , H01J63/04 , H01J29/48
Abstract: A plurality of field emission device cathodes each generate emission of electrons, which are then controlled and focused using various electrodes to produce an electron beam. Horizontal and vertical deflection techniques, similar to those used within a cathode ray tube, operate to scan the individual electron beams onto portions of a phosphor screen in order to generate images. The use of the plurality of field emission cathodes provides for a flatter screen depth than possible with a typical cathode ray tube.
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