Mems device using stressed material and shape memory material and its manufacturing method
    122.
    发明专利
    Mems device using stressed material and shape memory material and its manufacturing method 有权
    使用应力材料和形状记忆材料的MEMS器件及其制造方法

    公开(公告)号:JP2006055991A

    公开(公告)日:2006-03-02

    申请号:JP2005235102

    申请日:2005-08-15

    Abstract: PROBLEM TO BE SOLVED: To realize a two-way multiple time actuation type MEMS (Micro Electronic Mechanical System) device.
    SOLUTION: At least a layer of a shape memory material layer including at least one kind of shape memory material such as a SMA (shape memory alloy) film 110 and at least a layer of a stressed material layer including at least one kind of stressed material such as a stressed metal film 120 are arranged side by side as just neighbors, for instance. Specific stress or stress gradient is imparted to the stressed metal film 120 at the time of the formation. A device or system 100 is biased to an initial deformation state by the stress or stress gradient specific to the stressed metal film 120. Young's modulus and yield strength of the SMA film 110 are increased by martensite austenite phase transition when a temperature rises, mechanical bias by the stressed metal film 120 is overcome, and a distal end is displaced.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:实现双向多时间致动型MEMS(微电子机械系统)装置。 解决方案:至少一层形状记忆材料层,其包括至少一种形状记忆材料如SMA(形状记忆合金)膜110和至少一层包括至少一种类型的应力材料层 例如应力金属膜120等受压材料作为邻接地并列排列。 在形成时赋予应力金属膜120特定的应力或应力梯度。 装置或系统100通过对应力金属膜120特有的应力或应力梯度偏压到初始变形状态。当温度升高时,SMA膜110的杨氏模量和屈服强度由马氏体奥氏体相变增加,机械偏置 通过应力金属膜120被克服,并且远端被移位。 版权所有(C)2006,JPO&NCIPI

    Sliding device
    125.
    发明专利
    Sliding device 有权
    滑动装置

    公开(公告)号:JP2006307724A

    公开(公告)日:2006-11-09

    申请号:JP2005130573

    申请日:2005-04-27

    Abstract: PROBLEM TO BE SOLVED: To provide a sliding device 1 superior in seizure resistance more than a conventional sliding device. SOLUTION: This sliding device 1 is composed of a swash plate 3 rotated by interlocking with a rotary shaft 2 and a plurality of semispherical shoes 4 for sliding with this swash plate 3. The semispherical shoe 4 is composed of an iron-based material, and the swash plate 3 is manufactured by using high strength brass as a material. On the sliding surface 4A of the shoe 4, a large number of microscopic annular swelling parts 7' are formed by laser quenching, and a lubricating oil passage 10' composed of a mesh-like recessed part is formed. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供比常规滑动装置更好的耐咬住性的滑动装置1。 解决方案:该滑动装置1由与旋转轴2联动旋转的斜盘3和与该斜盘3滑动的多个半球形鞋4组成。半球形鞋4由铁基 材料,并且通过使用高强度黄铜作为材料制造斜盘3。 在鞋4的滑动面4A上,通过激光淬火形成大量微观的环状隆起部7',形成由网状凹部构成的润滑油路10'。 版权所有(C)2007,JPO&INPIT

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