Abstract:
A system includes a computational system to receive a design of an integrated computational element (ICE) including specification of a substrate and a plurality of layers, their respective target thicknesses and complex indices, such that a notional ICE fabricated based on the ICE design is related to a characteristic of a sample. Additionally, the system includes a deposition chamber including a deposition source to provide a deposition plume having a plume spatial profile, and a support to support a plurality of instances of the substrate during fabrication of a plurality of instances of the ICE. The support is spaced apart from the deposition source and has a shape that corresponds to the plume spatial profile, such that when the supported instances of the substrate are distributed over the support, thicknesses of instances of each of the deposited layers are substantially uniform across the plurality of instances of the ICE.
Abstract:
A lithography method and apparatus is disclosed herein. In a described embodiment, the method comprises (i) providing a first mask 316 having an exposure pattern 332,334 for forming a three dimensional structure; (ii) exposing the first mask 316 to radiation to form the exposure pattern 332,334 on a radiation-sensitive resist 314; the exposure pattern 332,334 defined by irradiated areas 336 and non-irradiated areas 337 of the resist 314; (ii) providing a second mask 328; and (iii) during exposure, changing relative positions (arrows B and C) between the first mask 316 and the second mask 328 to shield selected portions of the irradiated areas 336 from radiation to enable varying depth profiles to be created in the three dimensional structure.
Abstract:
A spectroscopic detector (110) includes a spectroscopic element (11) for dispersing light, a photodetector (12) for detecting the light dispersed by the spectroscopic element and a condensing optical system (13) for condensing the dispersed light to the photodetector and compensating for a deviation in a detected wavelength deriving from nonlinearity of the angle of emergence generated in the spectroscopic element through chromatic aberration of magnification.
Abstract:
Es wird ein differentieller Meßkopf für photoakustische Messungen zur Verfügung gestellt, der zwei oder mehrere Meßzellen enthält und wobei intensitätsmoduliertes Licht gleicher Wellenlängen in jeweils zwei benachbarten Meßzellen eingestrahlt wird. Die Vorteile der Erfindung liegen in einer höheren Empfindlichkeit für die zu messende Größe bei gleichzeitiger Immunität gegen Störungen von außen, in der Festellung und Kompensation von Inhomogenitäten in der Probenoberfläche z.B. in der Haut des Menschen und in einem vergrößerten Dynamikbereich.
Abstract in simplified Chinese:本文揭示一种微影方法与设备。在所述实施例中,该方法包含以下步骤:(i)提供第一遮罩316,第一遮罩316具有暴露图样332、334用于形成三维结构;(ii)将第一遮罩316暴露于辐射以在辐射敏感性光阻剂314上形成暴露图样332、334;暴露图样332、334由光阻剂314之受照射区336及非受照射区337所界定;(iii)提供第二遮罩328;以及(iv)于暴露期间,改变第一遮罩316与第二遮罩328之间的相对位置(箭头B及箭头C),以屏蔽受照射区336之选定部分免于辐射,使能于三维结构中创造变化的深度轮廓。