公开(公告)号：US12119273B2

公开(公告)日：2024-10-15

申请号：US18223498

申请日：2023-07-18

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor： Sheng He Huang ,  Chung-Pin Chou ,  Shiue-Ming Guo ,  Hsuan-Chia Kao ,  Yan-Cheng Chen ,  Sheng-Ching Kao ,  Jun Xiu Liu

IPC: H01L21/66 ,  G01N21/95 ,  G02B27/14

CPC classification number: H01L22/12 ,  G01N21/9501 ,  G01N2201/063 ,  G02B27/144

Abstract: In a method of inspection of a semiconductor substrate a first beam of light is split into two or more second beams of light. The two or more second beams of light are respectively transmitted onto a first set of two or more first locations on top of the semiconductor substrate. In response to the transmitted two or more second beams of light, two or more reflected beams of light from the first set of two or more first locations are received. The received two or more reflected beams of light are detected to generate two or more detected signals. The two or more detected signals are analyzed to determine whether a defect exists at the set of the two or more first locations.

公开(公告)号：US11937912B2

公开(公告)日：2024-03-26

申请号：US17236994

申请日：2021-04-21

Applicant: Hyperspectral Corp.

Inventor： David M. Palacios ,  Harry Hopper

IPC: A61B5/08 ,  A61B5/00 ,  A61B5/097 ,  A61B10/00 ,  G01J3/18 ,  G01J3/45 ,  G01N1/42 ,  G01N21/25 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/497

CPC classification number: A61B5/082 ,  A61B5/7282 ,  A61B10/00 ,  G01J3/18 ,  G01J3/45 ,  G01N1/42 ,  G01N21/255 ,  G01N21/3504 ,  G01N21/359 ,  G01N33/497 ,  A61B5/097 ,  A61B2010/0087 ,  G01N2033/4975 ,  G01N2201/063

Abstract: A method comprising at least one light source configured to generate a light of at least one wavelength and project the light over an optical path, a sample device, the device containing a sample obtained from exhalation of a person, a vortex mask configured to receive the light after the light passes through at least a portion of the sample device, the vortex mask including a series of concentric circles etched in a substrate, the vortex mask configured to provide destructive interference of coherent light received from the at least one light source, a detector configured to detect and measure wavelength intensities from the light in the optical path, the wavelength intensities being impacted by the light passing through the sample, the detector receiving the light that remained after passing through the vortex mask, and a processor configured to provide measurement results based on the wavelength intensities.

公开(公告)号：US20240004313A1

公开(公告)日：2024-01-04

申请号：US18039373

申请日：2021-11-16

Applicant: ASML Netherlands B.V.

Inventor： Coen Adrianus VERSCHUREN ,  Ferry ZIJP ,  Nitesh PANDEY ,  Alexander Prasetya KONIJNENBERG

IPC: G03F7/00 ,  G01B11/27 ,  G01N21/956 ,  G02B27/64

CPC classification number: G03F7/706851 ,  G03F7/70633 ,  G03F7/7065 ,  G01B11/272 ,  G01N21/956 ,  G02B27/646 ,  G01N2201/063

Abstract: Disclosed is an optical imaging system, and associated method, comprising a stage module configured to support an object such that an area of the object is illuminated by an illumination beam; an objective lens configured to collect at least one signal beam, the at least one signal beam originating from the illuminated area of the object; an image sensor configured to capture an image formed by the at least one signal beam collected by the objective lens; and a motion compensatory mechanism operable to compensate for relative motion of the stage module with respect to the objective lens during an image acquisition. The motion compensatory mechanism causes a compensatory motion of one or more of: said objective lens or at least one optical element thereof; said image sensor; and/or an optical element comprised within a detection branch and/or illumination branch of the optical imaging system.

公开(公告)号：US11815466B2

公开(公告)日：2023-11-14

申请号：US17367790

申请日：2021-07-06

Applicant: Hong Kong Applied Science and Technology Research Institute Company Limited

Inventor： Qi Lang ,  Jinbo Jiang ,  Changli Wu

IPC: G01N21/88 ,  G02B27/00 ,  G02B3/02 ,  G02B3/14 ,  G02F1/1335 ,  G02B27/10 ,  G02B5/18 ,  G01N21/95 ,  G02F1/13363

CPC classification number: G01N21/8806 ,  G01N21/95 ,  G02B3/02 ,  G02B3/14 ,  G02B5/1876 ,  G02B27/0025 ,  G02B27/1013 ,  G02F1/13363 ,  G02F1/133528 ,  G01N2021/9513 ,  G01N2201/063 ,  G01N2201/0683

Abstract: A display inspection system for inspecting a light beam emitted from a panel with pixels positioned at several focal planes is provided. The display inspection system includes a focus tunable lens adjustable in a focal distance for focusing at the panel, a first sensing unit for receiving the light beam, a reduced aberration optical system arranged between the focus tunable lens and the first sensing unit for focusing at the first sensing unit, and one or more optical elements placed within a back focal length of the reduced aberration optical system. The reduced aberration optical system comprises a first serial cascade lens group of a first aplanatic lens and a first doublet lens for correcting an optical aberration. The first aplanatic lens and the first doublet lens are co-configured that the back focal length is extended in a manner that the light beam is incident to the first sensing unit.

公开(公告)号：US20230360975A1

公开(公告)日：2023-11-09

申请号：US18223498

申请日：2023-07-18

Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.

Inventor： Sheng He HUANG ,  Chung-Pin CHOU ,  Shiue-Ming GUO ,  Hsuan-Chia KAO ,  Yan-Cheng CHEN ,  Sheng-Ching KAO ,  Jun Xiu LIU

IPC: H01L21/66 ,  G01N21/95

CPC classification number: H01L22/12 ,  G01N21/9501 ,  G01N2201/063 ,  G02B27/14

Abstract: In a method of inspection of a semiconductor substrate a first beam of light is split into two or more second beams of light. The two or more second beams of light are respectively transmitted onto a first set of two or more first locations on top of the semiconductor substrate. In response to the transmitted two or more second beams of light, two or more reflected beams of light from the first set of two or more first locations are received. The received two or more reflected beams of light are detected to generate two or more detected signals. The two or more detected signals are analyzed to determine whether a defect exists at the set of the two or more first locations.

公开(公告)号：US20190236887A1

公开(公告)日：2019-08-01

申请号：US16105759

申请日：2018-08-20

Applicant: Wavefront Technology, Inc.

Inventor： Christopher Chapman Rich ,  Joel Mikael Petersen ,  Roger Winston Phillips ,  John Michael Tamkin

IPC: G07D7/128 ,  G01N21/55 ,  G01N21/47 ,  G02B3/00 ,  G02B5/02 ,  B42D25/351 ,  B42D25/373 ,  B42D25/378 ,  B42D25/355 ,  B42D25/45

CPC classification number: G07D7/128 ,  B42D25/00 ,  B42D25/21 ,  B42D25/23 ,  B42D25/24 ,  B42D25/28 ,  B42D25/29 ,  B42D25/30 ,  B42D25/328 ,  B42D25/342 ,  B42D25/351 ,  B42D25/355 ,  B42D25/373 ,  B42D25/378 ,  B42D25/435 ,  B42D25/45 ,  G01N21/4738 ,  G01N21/55 ,  G01N2201/063 ,  G02B3/005 ,  G02B3/0056 ,  G02B5/0278 ,  G02B5/0284

Abstract: An optical device includes an array of lenses and a plurality of first and second segments disposed under the array of lenses. At a first viewing angle, the array of lenses presents a first image for viewing without presenting the second image for viewing, and at a second viewing angle different from the first viewing angle, the array of lenses presents for viewing the second image without presenting the first image for viewing. In some examples, individual ones of the first and second segments can comprise specular reflecting, transparent, diffusely reflecting, and/or diffusely transmissive features. In some examples, individual ones of the first and second segments can comprise transparent and non-transparent regions. Some examples can incorporate more than one region producing an optical effect.

公开(公告)号：US20190234852A1

公开(公告)日：2019-08-01

申请号：US16340881

申请日：2017-09-22

Applicant: Malvern Panalytical Limited

Inventor： Richard SCULLION ,  Jason CORBETT

IPC: G01N15/02 ,  G01N15/14 ,  G01N21/49

CPC classification number: G01N15/0211 ,  G01N15/1434 ,  G01N15/1456 ,  G01N21/49 ,  G01N2015/0222 ,  G01N2015/1454 ,  G01N2021/4707 ,  G01N2021/4709 ,  G01N2201/063 ,  G01N2201/0635

Abstract: A particle characterisation instrument, comprising a light source, a sample cell, an optical element between the light source and sample cell and a detector. The optical element is configured to modify light from the light source to create a modified beam, the modified beam: a) interfering with itself to create an effective beam in the sample cell along an illumination axis and b) diverging in the far field to produce a dark region along the illumination axis that is substantially not illuminated at a distance from the sample cell. The detector is at the distance from the sample cell, and is configured to detect light scattered from the effective beam by a sample in the sample cell, the detector positioned to detect forward or back scattered light along a scattering axis that is at an angle of 0° to 10° from the illumination axis.

公开(公告)号：US20180275055A1

公开(公告)日：2018-09-27

申请号：US15992182

申请日：2018-05-30

Applicant: SHENZHEN UNIVERSITY

Inventor： Yonghong SHAO

IPC: G01N21/552

CPC classification number: G01N21/554 ,  G01N21/553 ,  G01N2201/063 ,  G01N2201/10

Abstract: The present invention provides a surface plasmon resonance (SPR) detection system and method. This system utilizes a detection light path to form a detection image containing incident angle information and wavelength information. During testing, full-spectrum scan is performed first to obtain a resonance wavelength of a sample. Then, partial-spectrum scanning is performed by continuously tracking the resonance wavelength, and the number of scanning points in each scanning cycle is controlled according to specific situation to shorten the scanning time, thereby obtaining the resonance wavelength of the sample in real time. When the refractive index of the sample changes, the corresponding resonance wavelength changes as well; by obtaining the change of the resonance wavelength, variation of the reflective index of the sample is calculated, which is rapid SPR detection of wavelength modulation.

公开(公告)号：US20180265908A1

公开(公告)日：2018-09-20

申请号：US15760348

申请日：2016-06-22

Applicant: HAMAMATSU PHOTONICS K.K.

Inventor： Tadashi FUKAMI ,  Hidenao YAMADA

IPC: C12Q1/04 ,  G01N21/45 ,  G02B21/36

CPC classification number: C12Q1/04 ,  C12M41/38 ,  G01N15/1434 ,  G01N15/1468 ,  G01N21/41 ,  G01N21/45 ,  G01N33/5073 ,  G01N2015/1006 ,  G01N2015/1454 ,  G01N2201/063 ,  G01N2400/00 ,  G02B21/00 ,  G02B21/361 ,  G02B21/365

Abstract: The present invention relates to a cell determination method for determining a cell type based on a content of glycogen in a cell, including: an acquisition step of acquiring optical path length data by measuring an optical path length of the cell; a calculation step of calculating an optical path length indicator correlated with the optical path length of the cell from the obtained optical path length data; a comparison step of comparing the calculated optical path length indicator with a threshold; and a determination step of determining whether the cell is a cell type having a high glycogen content in the cell or a cell type having a low glycogen content in the cell, based on the comparison result.

公开(公告)号：US20180180551A1

公开(公告)日：2018-06-28

申请号：US15853074

申请日：2017-12-22

Applicant: Nuctech Company Limited

Inventor： Jianhong Zhang ,  Ankai Wang ,  Hongqiu Wang ,  Rui Fan ,  Huacheng Feng

IPC: G01N21/65 ,  G01J5/00 ,  G01N21/01 ,  G05B19/4065 ,  G01J3/44

CPC classification number: G01N21/65 ,  G01J3/44 ,  G01J3/4412 ,  G01J5/0003 ,  G01N21/01 ,  G01N2201/06113 ,  G01N2201/063 ,  G02B27/141 ,  G05B19/4065 ,  G05B2219/49353

Abstract: A Raman spectrum inspection apparatus and a security monitoring method for a Raman spectrum inspection apparatus are provided. The Raman spectrum inspection apparatus includes: a laser device configured to emit an exciting light; an optical device configured to guide the exciting light to an object to be detected and collect a light signal from the object; a spectrometer configured to split the collected light signal to generate a Raman spectrum of the object; and a security detector configured to detect an infrared light emitted from the object.