Abstract:
The invention features an apparatus and a method for supplying ozonated water to more than one process tool. Ozonated water of a first concentration received from an ozonated water generator and water received from a source are mixed to produce ozonated water of a second concentration. The ozonated water of a second concentration is supplied to a first process tool. Ozonated water from the ozonated water generator is supplied to a second process tool while supplying the ozonated water of the second concentration to the first process tool.
Abstract:
A starting circuit for an electric discharge lamp providing an electric current to a lamp having a first and a second filament. The circuit measures a lamp current and a filament temperature and then compares these against a reference voltage. When the lamp current is below a set threshold value, a relay contact disposed between the first and second filament is closed to direct the electric current through the first and second filaments to initiate pre-heating of the lamp. Once the filament temperature exceeds a set threshold, the relay contact is opened and the electric current passes through heated gas inside the lamp.
Abstract:
A starting circuit for an electric discharge lamp providing an electric current to a lamp having a first and a second filament. The circuit measures a lamp current and a filament temperature and then compares these against a reference voltage. When the lamp current is below a set threshold value, a relay contact disposed between the first and second filament is closed to direct the electric current through the first and second filaments to initiate pre-heating of the lamp. Once the filament temperature exceeds a set threshold, the relay contact is opened and the electric current passes through heated gas inside the lamp.
Abstract:
To enable to reduce a manufacturing cost and to generate high-concentration ozone gas, in a plate-type discharge cell for ozonizer. To improve ozone concentration without depending on reduction of a gap amount in a discharge gap. Dispose dielectric bodies between a high-voltage electrode and a low-voltage electrode to form a discharge gap. On a back surface side of the high-voltage and the low-voltage electrodes, a high-voltage insulating plate and a low-voltage insulating plate are disposed, respectively, for insulating the electrodes and from cooling water. A thickness of the high-voltage insulating plate is set to not less than 0.5 times and not more than 3.5 times the total thickness of the dielectric bodies, which are disposed between the high-voltage and the low-voltage electrodes. Opposed surfaces of the dielectric bodies, which contact the discharge gap, are smoothed such that a roughness Ra thereof is not larger than 2 μm.
Abstract:
A method and apparatus for improving the yield of ozone gas in a closed ozone generator unit. In a closed ozone generator unit, oxygen gas is transformed into ozone gas by means of alternating current, the oxygen gas being substantially pressurized before entry into the unit. The unit is exposed to an external pressure substantially equal to or higher than the pressure of the oxygen gas.
Abstract:
An ozone generator for producing ozone at pressures of up to 10,000 psi from oxygen or oxygen containing gas, which contains two electrodes for forming a corona discharge through the input gas, the first electrode being cooled by a first cooling fluid and the second electrode being cooled by a second cooling fluid, which further contains flexible barrier means for equalizing the pressure between the cooling fluids and the input gas.
Abstract:
A three phase power ozonator system in which the head of an ozonator cell containing multiple cylindrical type elements is tri-partitioned to define three sectors in the cell each of which contains a portion of the total number of cylindrical type dielectric elements. The partitions are made of insulating material such as polyvinyl chloride. Each sector is distinct and each sector is adapted to be operated with single phase electrical power. As a result the ozonator cell as a whole is able to operate using three phase electrical power. This arrangement allows for the operation of the ozonator cell in a system having any number of other three phase electrically operated components of equal or smaller electrical load than the ozonator cell in such a way that a balanced electrical load is maintained throughout the system.An electrical supply and control sub-system including a three phase power transformer, current sensors for each electrical sector and voltage sensor for one sector, current and voltage comparators and a variable transformer driven by a reversible electric motor, provides current to the electrodes in all sectors, monitors the current in all phases and turns off the electrical supply if significant imbalances among the sectors are detected.
Abstract:
An improved ozone generator includes a cryogenically cooled reaction chamber in which gaseous oxygen well below the boiling point of ozone is subjected to a corona discharge and forms liquid ozone. The discharge portion of the reaction chamber holds a body of liquid ozone to block the flow of unreacted oxygen from the reaction chamber. A bed of glass particles within the body of liquid helps to suppress explosive decomposition of the ozone. A temperature gradient across the discharge portion of the reaction chamber permits the ozone to volatilize to a gas and exit the reaction chamber in a smooth, controllable manner.
Abstract:
A device for generating ozone from oxygen-containing gas by silent electric discharge, the device including an electrode arrangement having at least one high-voltage electrode and at least one annular ground electrode. An annular dielectric is arranged between the at least one high-voltage electrode and the at least one ground electrode. The at least one high-voltage electrode is surrounded by at least one annular heat pipe.
Abstract:
A water treatment device includes a grounding electrode having a planar flowing water portion that causes treatment target water to flow, a multiple of wire form high voltage electrodes provided parallel with the flowing water portion in a position distanced from the flowing water portion of the grounding electrode and to extend in a direction intersecting a flow direction of the treatment target water, and a blowing device that forms a gas flow that intersects an extension direction of the high voltage electrode and intersects an extension direction of an electrical discharge. This kind of configuration is such that even when water droplets adhere to the high voltage electrode, the water droplets are blown away by a pressure of the gas flow formed by the blowing device, and a spark discharge is restricted.