公开(公告)号：US20080103037A1

公开(公告)日：2008-05-01

申请号：US11957855

申请日：2007-12-17

Applicant: Yasutomi IWAHASHI ,  Akio Koike

Inventor： Yasutomi IWAHASHI ,  Akio Koike

IPC: C03C3/04

CPC classification number: C03B19/1415 ,  C03B19/1461 ,  C03B2201/12 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/42 ,  C03C2203/40 ,  C03C2203/54

Abstract: A silica glass containing TiO2, which has a fictive temperature of at most 1,200° C., a F concentration of at least 100 ppm and a coefficient of thermal expansion of 0±200 ppb/° C. from 0 to 100° C. A process for producing a silica glass containing TiO2, which comprises a step of forming a porous glass body on a target quartz glass particles obtained by flame hydrolysis of glass-forming materials, a step of obtaining a fluorine-containing porous glass body, a step of obtaining a fluorine-containing vitrified glass body, a step of obtaining a fluorine-containing formed glass body and a step of carrying out annealing treatment.

Abstract translation: 含有TiO 2的二氧化硅玻璃，其具有至多1200℃的假想温度，至少100ppm的F浓度和0±200ppb /℃的热膨胀系数。 0至100℃。一种制备含有TiO 2的石英玻璃的方法，其包括在通过玻璃形成材料的火焰水解获得的目标石英玻璃颗粒上形成多孔玻璃体的步骤 ，获得含氟多​​孔玻璃体的步骤，获得含氟玻璃化玻璃体的步骤，获得含氟成形玻璃体的步骤和进行退火处理的步骤。

公开(公告)号：US20080004169A1

公开(公告)日：2008-01-03

申请号：US11821800

申请日：2007-06-26

Applicant: Adam James Ellison

Inventor： Adam James Ellison

IPC: C03C3/06 ,  C03C3/076

CPC classification number: G02B1/00 ,  C03C3/06 ,  C03C2201/11 ,  C03C2201/12 ,  C03C2201/23 ,  C03C2201/30 ,  C03C2201/32 ,  C03C2201/42 ,  C03C2201/50

Abstract: A low expansion silica-titania glass suitable for making extreme ultraviolet lithographic element, with the titania-containing silica glass having a titania content in the range of 5-10 wt. % and a including a further constituent of a viscosity reducing dopant having a content in the range of 0.001 to 1 wt %.

Abstract translation: 一种适用于制备极紫外光刻元件的低膨胀二氧化硅 - 二氧化钛玻璃，含二氧化钛的二氧化硅玻璃的二氧化钛含量为5-10wt。 ％，并且a包含含量在0.001至1重量％范围内的粘度降低掺杂剂的另一组分。

公开(公告)号：US20070130995A1

公开(公告)日：2007-06-14

申请号：US11305857

申请日：2005-12-14

Applicant: Daniel Hawtof ,  Michael Kelley ,  John Rosettie ,  Andrew Schermerhorn ,  Kashyap Shah ,  John Stone ,  Pushkar Tandon

Inventor： Daniel Hawtof ,  Michael Kelley ,  John Rosettie ,  Andrew Schermerhorn ,  Kashyap Shah ,  John Stone ,  Pushkar Tandon

IPC: C03B37/07 ,  C03B37/022 ,  C03C25/10

CPC classification number: C03B19/1423 ,  C03B19/1453 ,  C03B19/1476 ,  C03B2207/66 ,  C03C3/06 ,  C03C2201/23 ,  C03C2201/42

Abstract: Disclosed are process and apparatus for making high purity fused silica glass materials. The process involves depositing soot particles onto an essentially planar deposition supporting surface and modulation of motion of the soot-generating device relative to the deposition supporting surface to result in a low local soot density variation. The apparatus is designed to implement the planar deposition process. The invention makes it possible to produce fused silica glass without the use of potentially contaminating refractory bricks.

Abstract translation: 公开了制备高纯度熔融石英玻璃材料的方法和设备。 该方法包括将烟灰颗粒沉积到基本平坦的沉积支撑表面上，并且调节烟灰产生装置相对于沉积支撑表面的运动以导致低的局部烟灰密度变化。 该设备被设计成实现平面沉积过程。 本发明使得可以生产熔融石英玻璃而不使用潜在的污染耐火砖。

公开(公告)号：US07155936B2

公开(公告)日：2007-01-02

申请号：US10638004

申请日：2003-08-08

Applicant: Steven B. Dawes ,  Richard M. Fiacco ,  Kenneth E. Hrdina ,  Michael H. Wasilewski

Inventor： Steven B. Dawes ,  Richard M. Fiacco ,  Kenneth E. Hrdina ,  Michael H. Wasilewski

IPC: C03B21/00 ,  C03B23/04

CPC classification number: C03B19/06 ,  C03B19/02 ,  C03B19/12 ,  C03B2201/42 ,  C03C3/06 ,  C03C2201/42 ,  C03C2203/20

Abstract: The present invention provides doped titania-doped silica glass articles having low thermal expansions and low variations in thermal expansion. According to one embodiment of the invention, a titania-doped silica glass article has a titania content of between about 5 wt % and about 9 wt %; a coefficient of thermal expansion of between about −30 ppb/° C. and about +30 ppb/° C. at a temperature between 15° C. and 30° C.; and a variation in coefficient of thermal expansion of less than about 5 ppb/° C. at a temperature between 15° C. and 30° C.

Abstract translation: 本发明提供了具有低热膨胀和低膨胀变化的掺杂二氧化钛掺杂二氧化硅玻璃制品。 根据本发明的一个实施方案，二氧化钛掺杂的石英玻璃制品的二氧化钛含量为约5重量％至约9重量％; 在15℃和30℃之间的温度下，热膨胀系数在约-30ppb /℃和约+ 30ppb /℃之间。 和在15℃至30℃之间的温度下热膨胀系数的变化小于约5ppb /℃。

公开(公告)号：US20060279220A1

公开(公告)日：2006-12-14

申请号：US10570440

申请日：2004-08-20

Applicant: Simon Flink ,  Simon Krijnen ,  Sebatianus Cuppen ,  Gerbrand Swart ,  Willem Wage ,  Frank Van Der Meulen

Inventor： Simon Flink ,  Simon Krijnen ,  Sebatianus Cuppen ,  Gerbrand Swart ,  Willem Wage ,  Frank Van Der Meulen

IPC: H01J19/78

CPC classification number: C03C4/085 ,  C03C3/06 ,  C03C2201/32 ,  C03C2201/3423 ,  C03C2201/42 ,  H01J61/302 ,  H01J61/34 ,  H01J61/50 ,  H01K1/28

Abstract: The invention relates to an electric lamp provided with a light source in a light-transmitting lamp vessel which is closed in a vacuumtight manner, which light source has an envelope of light-transmitting, UV-absorbing quartz glass which comprises silicon oxide, aluminum oxide and cerium oxide, characterized in that the quartz glass of the envelope comprises the aluminum oxide and cerium oxide in a molar ratio of between 0.30 and 0.48. The invention further relates to the quartz glass which is used for said lamp.

Abstract translation: 本发明涉及一种在透光灯容器中设置有光源的电灯，其以真空密封的方式封闭，该光源具有包含氧化硅，氧化铝的透光，紫外线吸收石英玻璃的外壳 和氧化铈，其特征在于，外壳的石英玻璃包含氧化铝和氧化铈，摩尔比为0.30-0.48。 本发明还涉及用于所述灯的石英玻璃。

公开(公告)号：US20060179879A1

公开(公告)日：2006-08-17

申请号：US11316293

申请日：2005-12-21

Applicant: Adam Ellison ,  Kenneth Hrdina ,  Sabyasachi Sen

Inventor： Adam Ellison ,  Kenneth Hrdina ,  Sabyasachi Sen

IPC: C03B19/06 ,  C03B25/00

CPC classification number: C03C3/06 ,  C03B19/1415 ,  C03B19/143 ,  C03B19/1453 ,  C03B2201/12 ,  C03B2201/20 ,  C03B2201/23 ,  C03B2201/30 ,  C03B2201/31 ,  C03B2201/32 ,  C03B2201/34 ,  C03B2201/40 ,  C03B2201/42 ,  C03B2207/30 ,  C03B2207/32 ,  C03C4/0085 ,  C03C2201/42

Abstract: The invention is directed to ultra-low expansion glasses to which adjustments have been made to selected variables in order to improve the properties of the glasses, and particularly to lower the expansivity of the glasses. The glasses are titania-doped silica glasses. The variables being adjusted include an adjustment in β-OH level; an adjustment to the cooling rate of the molten glass material through the setting point; and the addition of selected dopants to impact the CTE behavior.

Abstract translation: 本发明涉及对所选择的变量进行调整的超低膨胀玻璃，以改善玻璃的性能，特别是降低玻璃的膨胀性。 眼镜是二氧化钛掺杂的二氧化硅玻璃。 调整的变量包括β-OH水平的调整; 调整熔融玻璃材料通过凝固点的冷却速度; 并添加选定的掺杂剂以影响CTE行为。

公开(公告)号：US07053017B2

公开(公告)日：2006-05-30

申请号：US10378391

申请日：2003-03-03

Applicant: Kenneth E. Hrdina ,  John E. Maxon ,  Brent R. Mclean

Inventor： Kenneth E. Hrdina ,  John E. Maxon ,  Brent R. Mclean

IPC: C03C3/06 ,  C03C3/076 ,  G21K1/06 ,  G02B5/08 ,  G02B5/10

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  C03B19/1446 ,  C03B19/1484 ,  C03B2201/42 ,  C03B2207/62 ,  C03B2207/66 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/42 ,  C03C2203/40 ,  G03F1/24 ,  G03F7/70958

Abstract: Titania-containing silica glass bodies and extreme ultraviolet elements having low levels of striae are disclosed. Methods and apparatus for manufacturing and measuring striae in glass elements and extreme ultraviolet elements are also disclosed.

Abstract translation: 公开了含有二氧化钛的二氧化硅玻璃体和具有低水平条纹的极紫外线元件。 还公开了用于制造和测量玻璃元件和极紫外元件中的条纹的方法和装置。

公开(公告)号：US20060055300A1

公开(公告)日：2006-03-16

申请号：US10937947

申请日：2004-09-10

Applicant: Alan Janos ,  Malcolm Pack ,  Mohammad Kamarchi ,  Michael Colson

Inventor： Alan Janos ,  Malcolm Pack ,  Mohammad Kamarchi ,  Michael Colson

IPC: H01J1/50 ,  H01J23/10 ,  H01J3/20 ,  H01J29/76 ,  H01J3/32

CPC classification number: H01J65/044 ,  C03C3/06 ,  C03C4/0085 ,  C03C2201/11 ,  C03C2201/21 ,  C03C2201/23 ,  C03C2201/42 ,  H01J61/302

Abstract: An electrodeless lamp and process for emitting ultraviolet and/or vacuum ultraviolet radiation comprises an envelope formed of an ultra-pure and/or low-defect quartz material and an ultraviolet and/or vacuum ultraviolet emissive material disposed in the interior region of the envelope. The electrodeless lamp formed of the ultra-pure and/or low-defect quartz material minimizes degradation during use.

Abstract translation: 用于发射紫外线和/或真空紫外线辐射的无电极灯和方法包括由超纯和/或低缺陷石英材料形成的外壳和设置在外壳的内部区域中的紫外线和/或真空紫外线发射材料。 由超纯和/或低缺陷石英材料形成的无电极灯在使用过程中使降解最小化。

公开(公告)号：US20050215413A1

公开(公告)日：2005-09-29

申请号：US11087885

申请日：2005-03-23

Applicant: Jochen Alkemper ,  Joerg Schuhmacher ,  Hrabanus Hack ,  Oliver Sohr

Inventor： Jochen Alkemper ,  Joerg Schuhmacher ,  Hrabanus Hack ,  Oliver Sohr

IPC: C03B19/01 ,  C03B32/00 ,  C03C3/04 ,  C03C3/06 ,  C03C4/00

CPC classification number: C03C3/06 ,  C03C2201/21 ,  C03C2201/42 ,  C03C2203/44 ,  C03C2203/50

Abstract: The invention discloses an SiO2—TiO2 glass, which is preferably made by flame-hydrolysis and which distinguishes itself by increased resistance to radiation, especially in connection with EUV lithography. By purposefully reducing the hydrogen content, clearly improved resistance to radiation and reduced shrinking is achieved.

Abstract translation: 本发明公开了一种SiO 2 -TiO 2 SiO 2玻璃，其优选通过火焰水解制备，并且通过增加的耐辐射性，特别是与EUV光刻相关联来自身区分。 通过有目的地降低氢含量，实现了明显改善的耐辐射性和减少的收缩。

公开(公告)号：US06841242B2

公开(公告)日：2005-01-11

申请号：US10481895

申请日：2002-07-03

Applicant: Laurent Molins

Inventor： Laurent Molins

IPC: C03C13/02 ,  C03C3/06 ,  C03C13/00 ,  D01F9/08 ,  D03D15/12 ,  D02G3/00 ,  C08B19/08

CPC classification number: C03C13/00 ,  C03C3/06 ,  C03C2201/32 ,  C03C2201/42 ,  D01F9/08 ,  Y10T428/29 ,  Y10T428/2933

Abstract: The invention relates to a silica yarn and to woven or nonwoven fabrics produced from said yarn, which comprises 30 to 1500 ppm by weight of aluminum and 10 to 200 ppm by weight of titanium in oxidized form, the sum of the mass of the chemical elements different from Si and O being less than 5000 ppm by weight, the following elements being absent or present in a very small quantity: boron, sodium, calcium, potassium and lithium. The fabrics comprising this silica yarn have an excellent high-temperature withstand and thus retain their flexibility for a long time at above 600° C. They are useful especially in uses requiring good high-temperature flexibility, such as for furnace seals.

Abstract translation: 本发明涉及一种二氧化硅丝以及由所述纱线制成的机织或非织造织物，其包含30至1500重量ppm的铝和10至200重量ppm的氧化形式的钛，化学元素的质量之和 不同于Si和O的重量比小于5000ppm，以下元素不存在或以非常少的量存在：硼，钠，钙，钾和锂。 包含该二氧化硅纱线的织物具有优异的耐高温性，因此在600℃以上长时间保持其柔韧性。它们特别适用于要求良好的高温柔韧性的用途，例如炉密封。