System for detection of wafer defects
    133.
    发明授权
    System for detection of wafer defects 有权
    晶圆缺陷检测系统

    公开(公告)号:US07961763B2

    公开(公告)日:2011-06-14

    申请号:US11476342

    申请日:2006-06-28

    Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

    Abstract translation: 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测,晶片的一部分在成像系统的视场内移动,并将移动的晶片成像到 焦平面组件,在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 持续移动的晶片被持续时间明显短于像素停留时间的激光脉冲照亮,使得在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度,以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统,用于晶片成像系统的自动聚焦的方法,以及通过傅立叶平面去除图像的重复特征的新颖方法 过滤,以便更容易地检测晶片缺陷。

    Enhanced instrumentation and method for optical measurement of samples
    134.
    发明授权
    Enhanced instrumentation and method for optical measurement of samples 有权
    增强了样品光学测量仪器和方法

    公开(公告)号:US07843568B2

    公开(公告)日:2010-11-30

    申请号:US12692758

    申请日:2010-01-25

    Applicant: Petri Kivela

    Inventor: Petri Kivela

    Abstract: The present invention relates generally to the field of biochemical laboratory instrumentation for different applications of measuring properties of samples on e.g. microtitration plates and corresponding sample supports. The object of the invention is achieved by providing an optical measurement instrumentation wherein a sample (281-285) is activated (212AS, 218AS) and the emission is detected (291, 292), wherein between the activation and detection phases of measuring the sample, a shift is made in the relative position between the sample and means (218) directing the activation radiation to the sample as well as in the relative position between the sample and the means (293) receiving the emission radiation from the sample. This can be implemented e.g. by moving (299) the sample assay plate and/or a measuring head between the activation and emission phases of a sample. The invention allows a simultaneous activation of a first sample and detecting emission from a second sample thus enhancing efficiency of the measurement.

    Abstract translation: 本发明一般涉及生物化学实验室仪器的领域,用于不同应用样品的测量性质。 微量滴定板和相应的样品支架。 本发明的目的是通过提供一种光学测量仪器实现的,其中样品(281-285)被激活(212AS,218AS)并且检测到发射(291,292),其中在测量样品的激活和检测阶段之间 在样品和将激活辐射指向样品的装置(218)之间的相对位置以及样品和接收来自样品的发射辐射的装置(293)之间的相对位置进行位移。 这可以被实现。 通过在样品的活化和发射阶段之间移动(299)样品测定板和/或测量头。 本发明允许同时激活第一样品并检测来自第二样品的发射,从而提高测量的效率。

    System And Method For Time-Division Multiplexed Optical Sensing Of Biosensors
    135.
    发明申请
    System And Method For Time-Division Multiplexed Optical Sensing Of Biosensors 有权
    用于生物传感器的时分复用光学感测的系统和方法

    公开(公告)号:US20100230614A1

    公开(公告)日:2010-09-16

    申请号:US12722446

    申请日:2010-03-11

    Abstract: A measurement system for use with fluorescent chemosensors has multiple stimulus light sources each coupled to at least one sensor. Multiple sensors each receiving light from a different light source connect to each of one or more photodetectors. A processing device drives the light sources in a time-division multiplexed manner, and reads the photodetector at an appropriate time for each sensor. The processing device calibrates the sensor readings and provides them in a way that is identified to the associated sensor.

    Abstract translation: 用于荧光化学传感器的测量系统具有多个激励光源,每个激光光源耦合到至少一个传感器。 各自接收来自不同光源的光的多个传感器连接到一个或多个光电检测器中的每一个。 处理装置以时分复用的方式驱动光源,并且在每个传感器的适当时间读取光电检测器。 处理装置校准传感器读数并以对相关传感器识别的方式提供它们。

    Open and covert detection mechanisms for materials at locations of interest

    公开(公告)号:US07786860B1

    公开(公告)日:2010-08-31

    申请号:US12399967

    申请日:2009-03-08

    Abstract: An optical receiving and data communications system for sensing materials of interest (e.g., drugs and/or explosives) in transportation systems such as buses, trucks, cars, trains, aircraft, and ships, and checkpoints such as building entrances, roadblocks, passenger boarding areas, and the like. The system can be included in the transportation system, and includes a fiber optic frontend that focuses and/or concentrates light reflected from a target into the fiber filament for communication to an optical sensor. When the target is illuminated at a predetermined wavelength, a vapor plume and/or particulate matter associated therewith is energized such that change information is caused to occur and be received into the fiber system. The change information is communicated over a fiber communications network to a remote processing and analysis system for processing and analysis to determine its chemical components.

    Biological information measuring apparatus and biological information measuring method
    138.
    发明申请
    Biological information measuring apparatus and biological information measuring method 审中-公开
    生物信息测量仪和生物信息测量方法

    公开(公告)号:US20080287809A1

    公开(公告)日:2008-11-20

    申请号:US12081924

    申请日:2008-04-23

    Abstract: A biological information measuring apparatus measures information of a living body by irradiating the living body with light. The apparatus includes: a first light source irradiating the living body with light; a second light source irradiating the living body with light; and a light receiving section constituted by a plurality of light receiving elements that receives reflected light reflected by the living body or transmitting light transmitting through the living body, during light irradiation of the living body. In the biological information measuring apparatus, the first light source and the second light source are disposed so that a first distance between the light receiving section and the first light source is different from a second distance between the light receiving section and the second light source.

    Abstract translation: 生物信息测量装置通过用光照射生物来测量生物体的信息。 该装置包括:用光照射生物体的第一光源; 用光照射生物体的第二光源; 以及受光部,其由在生物体的光照射期间接收由所述生物体反射的反射光或透射通过所述生物体的光的多个受光元件构成。 在生物信息测量装置中,第一光源和第二光源被设置成使得光接收部分和第一光源之间的第一距离不同于光接收部分和第二光源之间的第二距离。

    Analyzer
    140.
    发明申请
    Analyzer 有权
    分析仪

    公开(公告)号:US20080158552A1

    公开(公告)日:2008-07-03

    申请号:US12005694

    申请日:2007-12-27

    Abstract: An analyzer is provided with a light irradiation device. The light irradiation device includes a light source, and a rotatable filter section, which has a plurality of optical filters having different light transmission characteristics, and irradiates an analyzing object with light that passed through the optical filters arranged in a path of the light from the light source while the filter section is rotating, by successively switching the optical filters by rotating the filter section. The analyzer is also provided with an analyzing means for analyzing characteristics of the analyzing object, based on optical information obtained from the analyzing object irradiated with the light by the light irradiation device while the filter section is rotating.

    Abstract translation: 分析仪设有光照射装置。 光照射装置包括光源和可旋转滤光器部分,其具有多个具有不同透光特性的滤光器,并且利用通过布置在来自光源的光的路径中的滤光器的光照射分析对象 过滤器部分旋转时,通过旋转过滤器部分依次切换光学滤光器。 分析仪还具有分析装置,用于根据从过滤器部分旋转时由光照射装置照射光的分析对象获得的光学信息,分析分析对象的特性。

Patent Agency Ranking