公开(公告)号：US20050017599A1

公开(公告)日：2005-01-27

申请号：US10855135

申请日：2004-05-27

Applicant: William Puskas

Inventor： William Puskas

IPC: B01J19/10 ,  B06B1/02 ,  B06B1/06 ,  B08B3/12 ,  G10K11/00 ,  H01L41/09

CPC classification number: G10K11/004 ,  B01J19/10 ,  B06B1/0269 ,  B06B1/0276 ,  B06B1/0284 ,  B06B1/0618 ,  B06B1/0622 ,  B06B2201/70 ,  B06B2201/71 ,  B06B2201/72 ,  B08B3/12 ,  B08B2203/002 ,  G10K11/006

Abstract: The invention utilizes a multiple frequency ultrasound generator driving a multiple frequency harmonic transducer array to improve cleaning and processing effects while eliminating damage to parts being cleaned. An AC switch and circuitry to modify the output of an ultrasound generator in combination with techniques such as random AM and FM signals are used to produce ultrasound waves that have no single frequency components which eliminates exciting parts being cleaned into resonance. Generator signals that increase cavitation efficiency and that have successive time periods with predominately stable cavitation and predominantly transient cavitation further improve the performance of the cleaning or processing systems.

Abstract translation: 本发明利用驱动多频谐波换能器阵列的多频超声波发生器来改善清洁和处理效果，同时消除对被清洁部件的损坏。 AC开关和用于修改超声波发生器的输出以及诸如随机AM和FM信号的技术的电路用于产生没有单一频率分量的超声波，其消除被清理成谐振的兴奋部分。 具有增加气蚀效率并且具有主要稳定的气蚀和主要是瞬时空化的连续时间段的发电机信号进一步改善了清洁或处理系统的性能。

公开(公告)号：US06822372B2

公开(公告)日：2004-11-23

申请号：US10178751

申请日：2002-06-24

Applicant: William L. Puskas

Inventor： William L. Puskas

IPC: H01L4108

CPC classification number: B06B1/0269 ,  B06B1/0284 ,  B06B2201/70 ,  B06B2201/71 ,  B06B2201/72 ,  B08B3/12

Abstract: The invention utilizes a multiple frequency ultrasound generator driving a multiple frequency harmonic transducer array to improve cleaning and processing effects while eliminating damage to parts being cleaned. An AC switch and circuitry to modify the output of an ultrasound generator in combination with techniques such as random AM and FM signals are used to produce ultrasound waves that have no single frequency components which eliminates exciting parts being cleaned into resonance.

Abstract translation: 本发明利用驱动多频谐波换能器阵列的多频超声波发生器来改善清洁和处理效果，同时消除对被清洁部件的损坏。 AC开关和用于修改超声波发生器的输出以及诸如随机AM和FM信号的技术的电路用于产生没有单一频率分量的超声波，其消除被清理成谐振的兴奋部分。

公开(公告)号：US20040174155A1

公开(公告)日：2004-09-09

申请号：US10359765

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: G01R019/00

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057

Abstract: A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.

Abstract translation: 产生RF的系统和方法包括RF发生器，可变直流电源和比较器。 RF发生器具有耦合到换能器的输入的RF输出。 可变直流电源具有耦合到RF发生器的控制输入和DC输出。 比较器包括耦合到设定点控制信号的第一输入，耦合到RF发生器RF输出的第二输入和耦合到可变直流电源上的电压控制输入的控制信号输出。

公开(公告)号：US20040157349A1

公开(公告)日：2004-08-12

申请号：US10360320

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: H01L021/00 ,  B08B003/12

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of providing RF to a transducer includes an oscillator, an RF generator, and a voltage phase detector. The oscillator has a frequency control input and an RF signal output. The RF generator has an input coupled to the oscillator RF signal output and an RF generator output coupled to the transducer. The voltage phase detector includes a first phase input coupled to the RF signal output of the oscillator, a second phase input coupled to the RF generator output, and a frequency control signal output coupled to the oscillator frequency control voltage input.

Abstract translation: 向换能器提供RF的系统和方法包括振荡器，RF发生器和电压相位检测器。 振荡器具有频率控制输入和RF信号输出。 RF发生器具有耦合到振荡器RF信号输出的输入端和耦合到换能器的RF发生器输出。 电压相位检测器包括耦合到振荡器的RF信号输出的第一相位输入，耦合到RF发生器输出的第二相输入和耦合到振荡器频率控制电压输入的频率控制信号输出。

公开(公告)号：US06640637B2

公开(公告)日：2003-11-04

申请号：US10230285

申请日：2002-08-29

Applicant: Seung Taek Baek

Inventor： Seung Taek Baek

IPC: G01P1500

CPC classification number: D06F37/203 ,  B06B1/045 ,  B06B2201/71 ,  G01H11/02

Abstract: A vibration detecting apparatus includes a bobbin having a moving path of desired length in an inner periphery of the bobbin; a core movable along the moving path in the inner periphery of the bobbin by vibration applied from exterior or vibration applied to the bobbin; and a coil wound on an outer periphery of the bobbin, the inductance of which being changed in accordance with the shift of the core.

公开(公告)号：US06378536B1

公开(公告)日：2002-04-30

申请号：US09708173

申请日：2000-11-07

Applicant: Shen-Tai Liaw ,  Chien-Rong Huang

Inventor： Shen-Tai Liaw ,  Chien-Rong Huang

IPC: B08B310

CPC classification number: B08B3/12 ,  B06B2201/71 ,  G01H3/00 ,  G01V1/001 ,  Y10S134/902

Abstract: An ultrasonic cleaning device fault detector, comprising an ultrasonic wave converter, an amplifier, a band-pass filter, and an integrator. The ultrasonic wave converter operates at the same central frequency as the ultrasonic cleaning device and is able to sense the intensity of ultrasonic waves generated by the ultrasonic cleaning device and to produce an analog signal therefrom. The amplifier amplifies the analog signal generated by the ultrasonic wave converter. The band-pass filter filters out noise in the analog signal, eliminating electric noise and other external noise that are sensed by the ultrasonic wave converter. The integrator converts the analog signal cleaned in the band-pass filter into an electric voltage digital signal output, thereby indicating whether the vibrating device of the ultrasonic cleaning device is working properly.

Abstract translation: 一种超声波清洗装置故障检测器，包括超声波转换器，放大器，带通滤波器和积分器。 超声波转换器以与超声波清洗装置相同的中心频率工作，能够感测超声波清洗装置产生的超声波的强度，并从其产生模拟信号。 放大器放大由超声波转换器产生的模拟信号。 带通滤波器滤除模拟信号中的噪声，消除由超声波变换器感测到的电噪声和其他外部噪声。 积分器将在带通滤波器中清洁的模拟信号转换为电压数字信号输出，从而指示超声波清洗装置的振动装置是否正常工作。

公开(公告)号：US20020043893A1

公开(公告)日：2002-04-18

申请号：US10029751

申请日：2001-10-29

Inventor： William L. Puskas

IPC: H01L041/04

CPC classification number: B06B1/0269 ,  B06B2201/71 ,  B08B3/12

Abstract: The invention utilizes multiple frequency sound in liquids to improve the cleaning or processing effect. The sound frequencies are produced in two or more non-overlapping continuous frequency ranges. The sound frequencies are controlled to change frequency within the frequency ranges and the sound frequencies are programmed by a digital code to jump amongst the frequency ranges. The sound frequencies may change continuously within the frequency ranges, and the sound frequencies may jump discontinuously from one frequency range to another. The frequency ranges may also be within different, non-contiguous and non-overlapping frequency bands.

Abstract translation: 本发明利用液体中的多频声音来改善清洗或处理效果。 声音频率在两个或多个不重叠的连续频率范围内产生。 控制声音频率以在频率范围内改变频率，并通过数字代码对声音频率进行编程，以在频率范围内跳转。 声音频率可能在频率范围内连续变化，声音频率可能从一个频率范围不连续地跳跃到另一个频率范围。 频率范围也可以在不同的，不连续的和不重叠的频带内。

公开(公告)号：US5462604A

公开(公告)日：1995-10-31

申请号：US199646

申请日：1994-02-22

Applicant: Yoshihide Shibano ,  Tsutou Saito

Inventor： Yoshihide Shibano ,  Tsutou Saito

IPC: B06B1/02 ,  B08B3/12

CPC classification number: B06B1/0284 ,  B08B3/12 ,  B06B2201/71

Abstract: An ultrasonic vibrator has a single natural frequency for radiating ultrasonic energy into a cleaning solution to clean and deburr workpieces that are immersed in the cleaning solution. A plurality of oscillating signals having respective different frequencies which are integral multiples of the natural frequency of the ultrasonic vibrator are generated, and successively outputted for respective periods of time thereby to generate a composite signal which is composed of a time series of the oscillating signals. The composite signal is applied as a drive signal to the ultrasonic oscillator to oscillate the ultrasonic vibrator. The oscillating signals may be outputted successively for said respective periods of time or intermittently with quiescent periods inserted therebetween.

Abstract translation: 超声波振动器具有单一的固有频率，用于将超声波能量散发到清洁溶液中以清洁和去除浸入清洁溶液中的工件。 产生具有作为超声波振动器的固有频率的整数倍的各个不同频率的多个振荡信号，并且连续地输出各个时间段，从而产生由振荡信号的时间序列组成的复合信号。 将复合信号作为驱动信号施加到超声波振荡器以振荡超声波振动器。 振荡信号可以连续地输出所述各个时间段，或间歇地以插入其间的静止时段输出。

公开(公告)号：US5109174A

公开(公告)日：1992-04-28

申请号：US440988

申请日：1989-11-22

Applicant: Robert E. Shewell

Inventor： Robert E. Shewell

IPC: B06B1/02 ,  B08B3/12

CPC classification number: B06B1/0276 ,  B08B3/12 ,  B06B2201/71

Abstract: An improved ultrasonic cleaner is disclosed. Transducers are attached to a tank to vibrate liquid within the tank. A drive circuit is linked with the transducers to cause the transducers to oscillate at ultrasonic frequencies. The drive circuit includes an oscillator and a counter. The oscillator produces an ultrasonic signal. The counter divides the ultrasonic signal and feeds divided signals back into the oscillator to modulate the amplitude of the ultrasonic signal within a square-wave envelope and to step the frequency of the ultrasonic signal at discrete values about the center frequency.

公开(公告)号：US4081706A

公开(公告)日：1978-03-28

申请号：US734385

申请日：1976-10-21

Applicant: Leon F. Edelson

Inventor： Leon F. Edelson

IPC: B06B1/02 ,  H01L41/04

CPC classification number: B06B1/0253 ,  B06B2201/55 ,  B06B2201/71

Abstract: An improved oscillatory circuit in which the output of a radio frequency transformer is coupled from a half bridge squarewave amplifier to piezoelectric ultrasonic transducers through a serially connected feedback network. The feedback network employs a resistance connected in parallel with the serially connected combination of a capacitance, a feedback inductance and a feedback transformer. The improved feedback network provides a variable phase shift in feedback current to the half bridge squarewave amplifier tending to hold the frequency generated therein at a target frequency above anti-resonance.

Abstract translation: 一种改进的振荡电路，其中射频变压器的输出通过串联连接的反馈网络从半桥方波放大器耦合到压电超声换能器。 反馈网络采用与电容，反馈电感和反馈变压器的串联组合并联连接的电阻。 改进的反馈网络向半桥方波放大器提供反馈电流的可变相移，倾向于将其中产生的频率保持在高于抗共振的目标频率处。