公开(公告)号：US20040157348A1

公开(公告)日：2004-08-12

申请号：US10360316

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： Thomas W. Anderson ,  Andras Kuthi

IPC: H01L021/00 ,  H01L021/302

CPC classification number: H01L21/67253 ,  H01L21/67057

Abstract: A system and method of generating RF includes a supply voltage source, an oscillator, an output amplifier, a load network, a peak voltage detector and a comparator circuit. The oscillator has a control signal input and an RF signal output. The output amplifier is coupled to the oscillator output. The load network is coupled between an output of the output amplifier and an output of the RF generator. The peak voltage detector is coupled across the output amplifier. The comparator circuit includes a first input coupled to the supply voltage source, a second input coupled to an output of the peak voltage detector, and a comparator output coupled to the oscillator control signal input.

Abstract translation: 产生RF的系统和方法包括电源电压源，振荡器，输出放大器，负载网络，峰值电压检测器和比较器电路。 振荡器具有控制信号输入和RF信号输出。 输出放大器耦合到振荡器输出。 负载网络耦合在输出放大器的输出端和RF发生器的输出端之间。 峰值电压检测器跨输出放大器耦合。 比较器电路包括耦合到电源电压源的第一输入端，耦合到峰值电压检测器的输出端的第二输入端和耦合到振荡器控制信号输入的比较器输出端。

公开(公告)号：US20040154637A1

公开(公告)日：2004-08-12

申请号：US10360322

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： John Boyd ,  Andras Kuthi ,  Michael G. R. Smith ,  Thomas W. Anderson ,  William Thie

IPC: B08B007/00 ,  H01L021/00

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/10 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of cleaning a substrate includes a megasonic chamber that includes a transducer and a substrate. The transducer is being oriented toward the substrate. A variable distance d separates the transducer and the substrate. The system also includes a dynamically adjustable RF generator that has an output coupled to the transducer.

Abstract translation: 清洁衬底的系统和方法包括包括换能器和衬底的兆声波室。 换能器朝向基板。 可变距离d分离换能器和基板。 该系统还包括具有耦合到换能器的输出的动态可调的RF发生器。

公开(公告)号：US20040174155A1

公开(公告)日：2004-09-09

申请号：US10359765

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: G01R019/00

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057

Abstract: A system and method of generating RF includes an RF generator, a variable DC power supply, and a comparator. The RF generator has an RF output coupled to an input of the transducer. The variable DC power supply has a control input and a DC output coupled to the RF generator. The comparator includes a first input coupled to a set point control signal, a second input coupled to the RF generator RF output, and a control signal output coupled to a voltage control input on the variable DC power supply.

Abstract translation: 产生RF的系统和方法包括RF发生器，可变直流电源和比较器。 RF发生器具有耦合到换能器的输入的RF输出。 可变直流电源具有耦合到RF发生器的控制输入和DC输出。 比较器包括耦合到设定点控制信号的第一输入，耦合到RF发生器RF输出的第二输入和耦合到可变直流电源上的电压控制输入的控制信号输出。

公开(公告)号：US20040157349A1

公开(公告)日：2004-08-12

申请号：US10360320

申请日：2003-02-06

Applicant: LAM RESEARCH CORPORATION

Inventor： Thomas W. Anderson ,  Robert Knop

IPC: H01L021/00 ,  B08B003/12

CPC classification number: H01L21/67253 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/12 ,  H01L21/67057 ,  Y10S134/902

Abstract: A system and method of providing RF to a transducer includes an oscillator, an RF generator, and a voltage phase detector. The oscillator has a frequency control input and an RF signal output. The RF generator has an input coupled to the oscillator RF signal output and an RF generator output coupled to the transducer. The voltage phase detector includes a first phase input coupled to the RF signal output of the oscillator, a second phase input coupled to the RF generator output, and a frequency control signal output coupled to the oscillator frequency control voltage input.

Abstract translation: 向换能器提供RF的系统和方法包括振荡器，RF发生器和电压相位检测器。 振荡器具有频率控制输入和RF信号输出。 RF发生器具有耦合到振荡器RF信号输出的输入端和耦合到换能器的RF发生器输出。 电压相位检测器包括耦合到振荡器的RF信号输出的第一相位输入，耦合到RF发生器输出的第二相输入和耦合到振荡器频率控制电压输入的频率控制信号输出。