公开(公告)号：US20100259130A1

公开(公告)日：2010-10-14

申请号：US12310620

申请日：2007-08-29

Applicant: Gerald Eckstein ,  Ingo Kühne

Inventor： Gerald Eckstein ,  Ingo Kühne

IPC: H02N2/18 ,  H01L41/053

CPC classification number: H01L41/1138 ,  B81B3/0021 ,  B81B2201/032 ,  B81B2203/0127

Abstract: An apparatus, in particular a microsystem, includes a device for energy conversion. The device for energy conversion has a piezoelectric, mechanically vibrating diaphragm structure for converting mechanical energy into electrical energy and/or vice versa, the diaphragm structure being arranged encapsulated in an environment which has a predetermined pressure which is, in particular, lower than an isostatic pressure.

Abstract translation: 一种装置，特别是微系统，包括用于能量转换的装置。 用于能量转换的装置具有用于将机械能转换成电能的压电机械振动膜结构和/或反之亦然，所述隔膜结构被封装在具有预定压力的环境中，所述预定压力尤其低于等静压 压力。

公开(公告)号：US20100231652A1

公开(公告)日：2010-09-16

申请号：US12786268

申请日：2010-05-24

Applicant: Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

Inventor： Gregory John McAvoy ,  Vincent Patrick Lawlor ,  Kia Silverbrook

IPC: B41J2/05

CPC classification number: B41J2/14427 ,  B41J2002/14435 ,  B41J2202/03 ,  B41J2202/15 ,  B81B3/0024 ,  B81B2201/032 ,  B81B2201/052

Abstract: An inkjet nozzle assembly comprises: a nozzle chamber having a nozzle opening and an ink inlet; and a thermal bend actuator for ejecting ink through the nozzle opening. The actuator comprises: an active beam for connection to drive circuitry; a first passive beam fused to the active beam; and a second passive beam fused to the second first passive beam. The first passive beam is sandwiched between the active beam and the second passive beam such that when a current is passed through the active beam, the active beam expands relative to the passive beams, resulting in bending of the actuator and ejection of ink through the nozzle opening.

Abstract translation: 喷墨喷嘴组件包括：具有喷嘴开口和墨入口的喷嘴室; 以及用于通过喷嘴开口喷射墨水的热弯曲致动器。 致动器包括：用于连接到驱动电路的主动梁; 与激活光束融合的第一被动束; 和与第二第一无源光束融合的第二无源光束。 第一无源光束夹在有源光束和第二无源光束之间，使得当电流通过有源光束时，有源光束相对于被动光束扩展，导致致动器弯曲并通过喷嘴喷射墨水 开放

公开(公告)号：US07758979B2

公开(公告)日：2010-07-20

申请号：US12155015

申请日：2008-05-29

Applicant: Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

Inventor： Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

IPC: B32B9/00

CPC classification number: B81B3/0021 ,  B81B2201/0271 ,  B81B2201/032 ,  H01L41/0815 ,  H01L41/094 ,  H01L41/1136 ,  H01L41/187 ,  H01L41/316 ,  H03H9/02015 ,  H03H9/02574 ,  H03H9/173

Abstract: A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has.

Abstract translation: 本发明的压电薄膜包括含有钪的氮化铝薄膜。 假设钪原子的总数和铝原子数为100原子％，则氮化铝薄膜中的钪的含有比例为0.5原子％〜50原子％。 根据该结构，本发明的压电薄膜能够在保持氮化铝薄膜的弹性波传播速度，Q值和频率 - 温度系数的特性的同时提高压电响应。

公开(公告)号：US20090251027A1

公开(公告)日：2009-10-08

申请号：US12363284

申请日：2009-01-30

Applicant: Yuji KUDOH

Inventor： Yuji KUDOH

IPC: H01L41/04 ,  B32B37/12 ,  H01L41/22

CPC classification number: F03G7/005 ,  B81B3/0075 ,  B81B2201/032 ,  B81B2203/0118 ,  Y10S310/80 ,  Y10T29/42

Abstract: Adhesive properties between an electrically conductive polymer membrane and a solid electrolyte membrane to each other are improved, and thus the operation of an electrically conductive polymer actuator which effects a bending motion is ensured.An electrically conductive polymer actuator having a laminated structure including: a solid electrolyte membrane constituted with a mixture of an ionic liquid, and an organic polymer that contains at least one or more of a vinylidene fluoride/hexafluoropropylene copolymer [P(VDF/HFP)], polyvinylidene fluoride (PVDF), a perfluorosulfonic acid/PTFE copolymer, polymethyl methacrylate (PMMA), polyethylene oxide (PEO) and polyacrylonitrile (PAN); and an electrically conductive polymer membrane constituted with a mixture of polystyrene sulfonic acid (PSS) and polyethylenedioxythiophene (PEDOT) on at least one face of the solid electrolyte membrane, characterized in that polyethylene glycol is included in the electrically conductive polymer membrane.

Abstract translation: 导电性高分子膜与固体电解质膜之间的粘合性能提高，能够确保实现弯曲动作的导电性聚合物致动器的动作。 一种具有叠层结构的导电聚合物致动器，包括：由离子液体和含有至少一种或多种偏二氟乙烯/六氟丙烯共聚物[P（VDF / HFP）]的混合物的混合物构成的固体电解质膜， ，聚偏二氟乙烯（PVDF），全氟磺酸/ PTFE共聚物，聚甲基丙烯酸甲酯（PMMA），聚环氧乙烷（PEO）和聚丙烯腈（PAN）; 以及在所述固体电解质膜的至少一个面上由聚苯乙烯磺酸（PSS）和聚亚乙基二氧噻吩（PEDOT）的混合物构成的导电性聚合物膜，其特征在于，在所述导电性高分子膜中包含聚乙二醇。

公开(公告)号：US07471184B1

公开(公告)日：2008-12-30

申请号：US11866154

申请日：2007-10-02

Applicant: Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

Inventor： Vladimir Anatolyevich Aksyuk ,  Flavio Pardo ,  Maria Elina Simon

IPC: H01H61/01 ,  H01L23/58 ,  H01L31/04 ,  H01L21/00

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01H61/04 ,  H01H2061/006 ,  H01H2061/008

Abstract: An apparatus comprising a microelectromechanical system (MEMS) device. The MEMS device includes a substrate having an anchoring pad thereon and a structural element. The structural element has a beam that includes a first part and a second part. The first part is attached to both the anchoring pad and to the second part. The second part is movable with respect to the substrate and made of an electrically conductive material. Additionally, at least one of the following conditions hold: the first part is made of a material having: a first yield stress that is greater than a second yield stress of the electrically conductive material of the second part; a fatigue resistance that is greater than a second fatigue resistance of the electrically conductive material of the second part; or, a creep rate that is less than a second creep rate of the electrically conductive material of the second part.

Abstract translation: 一种包括微机电系统（MEMS）装置的装置。 MEMS器件包括其上具有锚定垫的衬底和结构元件。 结构元件具有包括第一部分和第二部分的梁。 第一部分连接到锚固垫和第二部分。 第二部分可相对于基板移动并由导电材料制成。 另外，以下条件中的至少一个成立：第一部分由具有第二部分的导电材料的第二屈服应力的第一屈服应力的材料制成; 大于第二部分的导电材料的第二耐疲劳性的耐疲劳性; 或者小于第二部分的导电材料的第二蠕变速率的蠕变速率。

公开(公告)号：US20080296529A1

公开(公告)日：2008-12-04

申请号：US12155015

申请日：2008-05-29

Applicant: Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

Inventor： Morito Akiyama ,  Toshihiro Kamohara ,  Naohiro Ueno ,  Kazuhiko Kano ,  Akihiko Teshigahara ,  Yukihiro Takeuchi ,  Nobuaki Kawahara

IPC: H01L41/187 ,  B05D5/12

CPC classification number: B81B3/0021 ,  B81B2201/0271 ,  B81B2201/032 ,  H01L41/0815 ,  H01L41/094 ,  H01L41/1136 ,  H01L41/187 ,  H01L41/316 ,  H03H9/02015 ,  H03H9/02574 ,  H03H9/173

Abstract: A piezoelectric thin film of the present invention includes an aluminum nitride thin film that contains scandium. A content ratio of scandium in the aluminum nitride thin film is 0.5 atom % to 50 atom % on the assumption that a total amount of the number of scandium atoms and the number of aluminum atoms is 100 atom %. According to this arrangement, the piezoelectric thin film of the present invention can improve a piezoelectric response while keeping characteristics of elastic wave propagation speed, Q value, and frequency-temperature coefficient that the aluminum nitride thin film has.

Abstract translation: 本发明的压电薄膜包括含有钪的氮化铝薄膜。 假设钪原子的总数和铝原子数为100原子％，则氮化铝薄膜中的钪的含有比例为0.5原子％〜50原子％。 根据该结构，本发明的压电薄膜能够在保持氮化铝薄膜的弹性波传播速度，Q值和频率 - 温度系数的特性的同时提高压电响应。

公开(公告)号：US07449818B2

公开(公告)日：2008-11-11

申请号：US11710531

申请日：2007-02-26

Applicant: Midori Kato ,  Masayoshi Ishibashi

Inventor： Midori Kato ,  Masayoshi Ishibashi

IPC: H01L41/08

CPC classification number: F03G7/06 ,  B81B3/0021 ,  B81B2201/032 ,  Y10S310/80 ,  Y10T29/42

Abstract: An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is high in safety and durability and can be easily fabricated, as well as a method of manufacturing the same.An actuator has a structure such that a striped internal stress distribution is induced within a plane of a bending type actuator of a laminate structure, thereby allowing the actuator to bend so as to constitute a part of a cylindrical shape whose central axis is parallel to the striped direction.

Abstract translation: 本发明的目的是提供一种薄且轻质的致动器模块结构，其包括多层结构，例如可以形成任意形状并在任意方向上变形的双压电晶片或单压电晶片结构，其高度 安全性和耐久性，并且可以容易地制造，以及其制造方法。 致动器具有这样的结构，使得在层压结构的弯曲型致动器的平面内引起条纹的内应力分布，从而允许致动器弯曲，以便构成中心轴线平行于其的圆柱形的一部分 条纹方向。

公开(公告)号：US20080074006A1

公开(公告)日：2008-03-27

申请号：US11686731

申请日：2007-03-15

Applicant: Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki

Inventor： Takashi Kawakubo ,  Toshihiko Nagano ,  Michihiko Nishigaki

IPC: H01L41/047

CPC classification number: B81B3/0072 ,  B81B2201/032 ,  H01G5/16 ,  H01G5/18 ,  H01L41/0946 ,  H01L41/0953

Abstract: A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.

Abstract translation: 微机电装置包括第一压电致动器和第二压电致动器。 第一压电致动器包括固定在基板上的第一光束和从第一连接端到第一工作端平行于第一光束延伸的第二光束。 第二压电致动器包括固定在基板上的与第一光束间隔开的第三光束和从第二连接端到第二工作端平行于第三光束延伸的第四光束。 第二工作端在与基板的表面垂直的方向上面向第一工作端。

公开(公告)号：US20070241641A1

公开(公告)日：2007-10-18

申请号：US11710531

申请日：2007-02-26

Applicant: Midori Kato ,  Masayoshi Ishibashi

Inventor： Midori Kato ,  Masayoshi Ishibashi

IPC: H02N2/04 ,  H01L41/22

CPC classification number: F03G7/06 ,  B81B3/0021 ,  B81B2201/032 ,  Y10S310/80 ,  Y10T29/42

Abstract: An object of the present invention is to provide a thin and light-weight actuator module structure comprising a multi-layer structure such as a bimorph or unimorph structure that can be formed in an arbitrary shape and deformed in an arbitrary direction, which is high in safety and durability and can be easily fabricated, as well as a method of manufacturing the same. An actuator has a structure such that a striped internal stress distribution is induced within a plane of a bending type actuator of a laminate structure, thereby allowing the actuator to bend so as to constitute a part of a cylindrical shape whose central axis is parallel to the striped direction.

Abstract translation: 本发明的目的是提供一种薄且轻质的致动器模块结构，其包括多层结构，例如可以形成任意形状并在任意方向上变形的双压电晶片或单压电晶片结构，其高度 安全性和耐久性，并且可以容易地制造，以及其制造方法。 致动器具有这样的结构，使得在层压结构的弯曲型致动器的平面内引起条纹的内应力分布，从而允许致动器弯曲，以便构成中心轴线平行于其的圆柱形的一部分 条纹方向。

公开(公告)号：US20070241635A1

公开(公告)日：2007-10-18

申请号：US11279954

申请日：2006-04-17

Applicant: Scott Hunter ,  Gregory Simelgor

Inventor： Scott Hunter ,  Gregory Simelgor

IPC: H02N10/00

CPC classification number: H02N11/006 ,  B81B3/0024 ,  B81B2201/032

Abstract: A thermal bimorph that exhibits improved layer adhesion and an enhanced bending response is disclosed. The thermal bimorph incorporates corrugations that extend fully through the bimorph to its two major surfaces. In some embodiments, the thermal bimorph is asymmetrically corrugated.

Abstract translation: 公开了一种具有改进的层粘合性和增强的弯曲响应的热双压电晶片。 热双压电晶片包括完全穿过双压电晶片到其两个主要表面的波纹。 在一些实施例中，热双压电晶片是不对称的波纹状的。