公开(公告)号：EP1564571A4

公开(公告)日：2010-01-06

申请号：EP04746445

申请日：2004-06-25

Applicant: MURATA MANUFACTURING CO

Inventor： TAMURA MASAYA ,  KOBAYASHI SHINJI

IPC: G02B6/35 ,  H02N1/00 ,  G02B6/26 ,  G02B26/02

CPC classification number: G02B6/358 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/045 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0833 ,  H02N1/008

公开(公告)号：EP2006247A2

公开(公告)日：2008-12-24

申请号：EP08004446.4

申请日：2008-03-11

Applicant: JDS Uniphase Corporation

Inventor： Moidu, Abdul Jaleel K.

IPC: B81B3/00

CPC classification number: B81B3/004 ,  B81B2201/033

Abstract: A vertical comb electro-static actuator for rotating a micro-electro-mechanical micro-mirror device about a tilt axis or rotation. The rotor comb fingers of the comb drive extend from a sub-frame or the micro-mirror, which includes a prestressed layer for bending the rotor comb fingers at an angle to the substrate and mirrored platform, enabling the platform, the hinges, the rotor comb fingers and the stator comb fingers to be formed in the same layer, i.e. the same etching step.

Abstract translation: 用于围绕倾斜轴线旋转微机电微镜装置的垂直梳状静电致动器。 梳子驱动器的转子梳齿从子框架或微镜延伸，微镜包括用于使转子梳齿与基板和镜像平台成一定角度弯曲的预应力层，使平台，铰链，转子 梳指和定子梳指形成在相同的层中，即相同的蚀刻步骤。

公开(公告)号：EP1663850A1

公开(公告)日：2006-06-07

申请号：EP04773454.6

申请日：2004-09-21

Applicant: MATSUSHITA ELECTRIC WORKS, LTD.

Inventor： OKA, Naomasa, c/o Matsushita Electric Works, Ltd. ,  HARADA, Hiroshi, Matsushita Electric Works, Ltd. ,  OGIHARA, Jun, c/o Matsushita Electric Works, Ltd. ,  FUKSHIMA, Hiroshi, Matsushita Electric Works, Ltd. ,  NOGE, Hiroshi, c/o Matsushita Electric Works, Ltd. ,  SUZUKI, Yuji, c/o Matsushita Electric Works, Ltd. ,  KAWANO, Kiyohiko, Matsushita Electric Works, Ltd. ,  YOSHIHARA, Takaaki, Matsushita Electric Works, Ltd ,  SUZUMURA, Masahiko, Matsushita Electric Works, Ltd

IPC: B81B3/00 ,  G02B26/08 ,  B81C1/00

CPC classification number: G02B26/0816 ,  B81B3/0086 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00484 ,  B81C2201/0109 ,  B81C2201/019 ,  G02B6/3516 ,  G02B6/3518 ,  G02B6/3546 ,  G02B6/355 ,  G02B6/357 ,  G02B6/3584 ,  H02N1/008

Abstract: A process for fabricating a micro-electro-mechanical system (MEMS) composed of fixed components fixedly supported on a lower substrate and movable components movably supported on the lower substrate. The process utilizes an upper substrate separate from the lower substrate. The upper substrate is selectively etched in its top layer to form therein a plurality of posts which project commonly from a bottom layer of the upper substrate. The posts include the fixed components to be fixed to the lower substrate and the movable components which are resiliently supported only to one or more of the fixed components to be movable relative to the fixed components. The lower substrate is formed in its top surface with at least one recess. The upper substrate is then bonded to the top of the lower substrate upside down in such a manner as to place the fixed components directly on the lower substrate and to place the movable components upwardly of the recess. Finally, the bottom layer of the upper substrate is removed to release the movable components from the bottom layer for floating the movable components above the recess and allowing them to move relative to the lower substrate, while keeping the fixed components fixed to the top of the lower substrate.

公开(公告)号：EP1411024A3

公开(公告)日：2005-11-16

申请号：EP03255439.6

申请日：2003-09-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ko, Young-chul ,  Lee, Jin-ho

IPC: B81B3/00 ,  G02B26/08

CPC classification number: B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  B81C2201/019 ,  G02B26/0841 ,  H02N1/008

Abstract: An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support portion supports a seesaw motion of the stage. A base facing the stage under the stage at a predetermined interval is supported by the first support portion. A stage driving portion has a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages. A second support portion supports the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction. A first support portion driving portion has a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion.

公开(公告)号：EP1591824A2

公开(公告)日：2005-11-02

申请号：EP05008890.5

申请日：2005-04-22

Applicant: MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.

Inventor： Kurozuka, Akira ,  Mushika, Yoshihiro ,  Kajino, Osamu

IPC: G02B26/08 ,  H02N1/00

CPC classification number: G02B26/0841 ,  B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/053 ,  B81B2203/058 ,  H02N1/008

Abstract: There has been a trade-off between the rigidity and the mass of a movable section of a microactuator, and also between the rigidity of the movable section and the electrostatic force. A microactuator 100 includes: a base 1; a first comb electrode 2 supported by the base 1; a movable section 6 having a second comb electrode 8 opposing the first comb electrode 2, and at least one reinforcement rib 9 protruding toward the base 1; and an elastic supporting member 3 for supporting the movable section 6 so as to allow the movable section 6 to be displaced with respect to the base 1. The height of the second comb electrode 8 is different from the height of the at least one reinforcement rib 9.

Abstract translation: 在微型致动器的可动部的刚性和质量之间以及可动部的刚性与静电力之间存在权衡。 微致动器100包括：基座1; 由基座1支撑的第一梳状电极2; 具有与第一梳状电极2相对的第二梳状电极8的可动部6和朝向基部1突出的至少一个加强肋9; 以及用于支撑可动部分6以便允许可动部分6相对于基座1移位的弹性支撑部件3.第二梳状电极8的高度与至少一个加强肋的高度不同 9。

公开(公告)号：EP1564571A1

公开(公告)日：2005-08-17

申请号：EP04746445.8

申请日：2004-06-25

Applicant: Murata Manufacturing Co., Ltd.

Inventor： TAMURA, Masaya, Murata Manufacturing Co., Ltd. ,  KOBAYASHI, Shinji, Murata Manufacturing Co., Ltd.

IPC: G02B6/26 ,  G02B26/02

CPC classification number: G02B6/358 ,  B81B3/0051 ,  B81B2201/033 ,  B81B2201/045 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/357 ,  G02B6/3572 ,  G02B6/3584 ,  G02B26/0833 ,  H02N1/008

Abstract: In order to improve the reliability, a connecting section of a supporting beam is provided with a rotatable supporter for allowing a movable member to be stably maintained at one of switch positions.
A substrate 2, stationary members 6, rotatable supporters 8, and supporting beams 7 support a movable member 4 in a shiftable manner in a y-axis direction, such that the movable member 4 can be shifted between first and second switch positions. Moreover, the rotatable supporters 8 are each provided with arm portions 9, 10, and 11 which extend in a radial fashion and support the corresponding supporting beam 7 in a rotatable manner. When the movable member 4 is being shifted, each supporting beam 7 can be rotated without having to bend a corresponding end 7A by a significant amount. Thus, a large barrier ΔE of potential energy of the movable member 4 is set between the first and second switch positions. The movable member 4 can therefore be stably maintained at each of the switch positions even when electric power is not supplied to electrodes 12 to 15. Furthermore, each arm portion 10 prevents the movable member 4 from being displaced in an x-axis direction.

Abstract translation: 为了提高可靠性，支撑梁的连接部设置有用于允许可动构件稳定地保持在开关位置之一的可旋转支撑件。 基板2，固定构件6，旋转支撑件8和支撑梁7以可移动的方式在y轴方向上支撑可动构件4，使得可动构件4能够在第一和第二开关之间移动 位置。 此外，旋转支撑件8各自设置有臂部分9,10和11，其以径向方式延伸并以可旋转的方式支撑相应的支撑梁7。 当可移动部件4移动时，可以使支撑梁7旋转，而不必使对应的端部7A弯曲大量。 因此，在第一和第二开关位置之间设置有可动构件4的势能的大屏障DELTA E. 因此，即使在不向电极12〜15供电的情况下，可动构件4也能够稳定地保持在各开关位置。此外，各臂部10防止可动构件4沿x轴方向位移。

公开(公告)号：EP1411024A2

公开(公告)日：2004-04-21

申请号：EP03255439.6

申请日：2003-09-01

Applicant: SAMSUNG ELECTRONICS CO., LTD.

Inventor： Ko, Young-chul ,  Lee, Jin-ho

IPC: B81B3/00

CPC classification number: B81B3/0062 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/058 ,  B81C2201/019 ,  G02B26/0841 ,  H02N1/008

Abstract: An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support portion supports a seesaw motion of the stage. A base facing the stage under the stage at a predetermined interval is supported by the first support portion. A stage driving portion has a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages. A second support portion supports the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction. A first support portion driving portion has a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion.

Abstract translation: 驱动部分具有分别布置在载物台（100）的下表面和基座（110）的上表面的驱动和固定梳状电极（120,130）。 另一个驱动部分具有设置在支撑部分（200）处的驱动梳状电极（410）和对应于驱动梳状电极（120）定位的固定梳状电极（420），以产生支撑部分（200）的跷跷板运动。 还包括用于制造致动器的方法的独立权利要求。

公开(公告)号：EP1273094A2

公开(公告)日：2003-01-08

申请号：EP01920721.6

申请日：2001-03-23

Applicant: Onix Microsystems Inc.

Inventor： BEHIN, Behrang ,  PANNU, Satinderpall, S.

IPC: H02N1/00 ,  B81B3/00 ,  B81B5/00

CPC classification number: G02B6/357 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2201/045 ,  B81B2203/0136 ,  B81B2203/0181 ,  B81B2203/058 ,  B81C1/0015 ,  B81C1/00214 ,  B81C1/00396 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  H02N1/008 ,  Y10T29/49005 ,  Y10T29/49126 ,  Y10T29/49155 ,  Y10T29/49156

Abstract: A multi-layer vertical comb-drive actuator includes a first comb structure having a plurality of first comb fingers (14) and a second comb structure having a plurality of second comb fingers (24), wherein the first and second comb fingers are substantially interdigitated. The first and second comb fingers may include two or more stacked conductive layers electrically isolated from each other by an insulating layer or an air gap. Alternatively, either the first or second comb fingers may include only one conductive layer. An application of a voltage (15) between the first and second comb fingers causes the second comb structure to move relative to the first comb structure. The present invention includes a 2D-gimble configuration to rotate a movable element along two axes.

公开(公告)号：EP1208403A1

公开(公告)日：2002-05-29

申请号：EP00962031.1

申请日：2000-08-01

Applicant: ADC Telecommunications, Inc.

Inventor： ZHANG, Nan

IPC: G02B26/02 ,  H02N1/00 ,  B81B3/00 ,  G02B6/26

CPC classification number: G02B6/357 ,  B81B2201/033 ,  B81B2201/045 ,  B81C1/00182 ,  B81C2201/0109 ,  B81C2203/0136 ,  G02B6/3514 ,  G02B6/3518 ,  G02B6/3544 ,  G02B6/3584 ,  H02N1/008

Abstract: A MEMS-based optical switch (100) having improved characteristics and methods for manufacturing the same are provided. In accordance with one embodiment, an optical switch includes a single comb (122) drive actuator (104) having a deflecting beam structure (124) and a mirror (102) coupled to the actuator. The mirror is capable of being moved between an extended position interposed between waveguide channels (106) and a retracted position apart from the waveguide channels. The actuator applies a force capable of deflecting the beam structure and moving the mirror to one of the extended positions or the retracted position and the beam structure returns the mirror to the other of the extended position or the retracted position in the absence of the application of force.

公开(公告)号：US20240111148A1

公开(公告)日：2024-04-04

申请号：US18537100

申请日：2023-12-12

Applicant: Preciseley Microtechnology Corp.

Inventor： Tiansheng ZHOU

IPC: G02B26/08 ,  B81C1/00

CPC classification number: G02B26/085 ,  B81C1/00603 ,  G02B26/0841 ,  B81B2201/033 ,  B81B2201/042 ,  B81B2203/0136

Abstract: A micromirror which comprises a mirror pivotally attached to a mount by a first pivoting structure that permits pivotal movement of the mirror relative to the mount about a first axis; a first comb drive which has a first position fixed relative to the mirror and second portion fixed relative to the mount. The first comb drive being for actuating the mirror about the first axis. A weight connected to the mirror, and the weight and mirror being on opposite sides of a fulcrum of the first pivoting structure. The first axis is non-parallel to a longitudinal axis extending through the weight and the mirror.