公开(公告)号：US20020076140A1

公开(公告)日：2002-06-20

申请号：US09992531

申请日：2001-11-06

Applicant: Onix Microsystems, Inc.

Inventor： Boris Kobrin

IPC: G02B006/35

CPC classification number: G02B6/3518 ,  G02B6/3514 ,  G02B6/3546 ,  G02B6/3574 ,  G02B26/085

Abstract: A gas pulse is used to actuate the movable part (e.g. a rotatable mirror) of a MEMS device. The MEMS device generally comprises a substrate and one or more movable elements coupled to the substrate and means for pneumatic actuation of at least one of the one or more movable elements. The MEMS device may be in the form of an NXN optical crossbar switch. Pneumatic actuation eliminates the need for magnetic pads and electromagnets along with the disadvantages associated with MEMS devices having these components. Such pneumatic actuation may be incorporated into a MEMS optical switch having a substrate and one or more rotatable mirrors coupled for rotation with respect to the substrate.

Abstract translation: 使用气体脉冲来致动MEMS装置的可移动部件（例如，可旋转反射镜）。 MEMS器件通常包括衬底和耦合到衬底的一个或多个可移动元件和用于气动致动一个或多个可移动元件中的至少一个的装置。 MEMS器件可以是NXN光交叉开关的形式。 气动致动消除了对磁性垫和电磁体的需要以及与具有这些部件的MEMS装置相关联的缺点。 这种气动致动可以结合到具有衬底和耦合以相对于衬底旋转的一个或多个可旋转镜的MEMS光开关中。

公开(公告)号：WO0165294A3

公开(公告)日：2002-03-07

申请号：PCT/US0106659

申请日：2001-02-28

Applicant: ONIX MICROSYSTEMS INC

Inventor： CHAU KELVIN

IPC: G02B6/42 ,  G02B6/43 ,  H05K3/30 ,  H05K3/34

CPC classification number: G02B6/43 ,  G02B6/422 ,  G02B6/4231 ,  H05K3/303 ,  H05K3/305 ,  H05K3/3447 ,  H05K2201/10303 ,  H05K2201/10318 ,  H05K2201/10484 ,  Y02P70/613

Abstract: For any optically interconnected assembly, the packaging tasks include alignment of one or multiple optical devices (712), and attachement of aligned modules to a common substrate (702). The concept disclosed here is a packaging method to assemble pre-aligned optical modules (712) on a common structure called motherboard (702). The apparatus consists of two components: device carrier (704) or motherboard (702) with openings on the sides and adjustable plugs (706) in the form of pins or balls. The method and apparatus utilize plugs (706) as connection bridges between device carriers (704) and motherboard (702), allowing solid contacts and a rigid aligned structure among modules (712). The direct benefits include relaxation of dimensional tolerances on parts and elimination of the need for high-precision spacers.

Abstract translation: 对于任何光学互连组件，包装任务包括一个或多个光学装置（712）的对准，以及将对齐的模块附着到公共衬底（702）。 这里公开的概念是将预定对准的光学模块（712）组装在称为主板（702）的公共结构上的封装方法。 该装置由两部分组成：装置载体（704）或在侧面具有开口的主板（702）和以销或球形式的可调塞（706）。 该方法和装置利用插头（706）作为装置载体（704）和母板（702）之间的连接桥，允许模块之间的固体触点和刚性对准结构（712）。 直接的优点包括放宽零件的尺寸公差，消除对高精度垫片的需求。

公开(公告)号：US20020075551A1

公开(公告)日：2002-06-20

申请号：US09989905

申请日：2001-11-20

Applicant: Onix Microsystems, Inc

Inventor： Michael J. Daneman ,  Behrang Behin ,  Franklin Wall

IPC: G02F001/00

CPC classification number: B81B7/0067 ,  G02B26/0841 ,  G02B26/085

Abstract: An enclosure for sealing a MEMS optical device, a MEMS apparatus, a MEMS module, and a method for switching optical signals are disclosed. The enclosure includes one or more sidewalls and an optical element hermetically sealed to at least one of the sidewalls. Suitable optical elements include windows, lenses and lens arrays. The enclosure may be evacuated to improve the performance of the MEMS device enclosed within it. The MEMS apparatus includes a MEMS device enclosed by an enclosure of the type described above. The MEMS device may include a substrate and the enclosure may be bonded to the substrate. Alternatively, the MEMS device may include a substrate attached to a mount and the enclosure may be bonded to the mount. The MEMS module includes a mount and a MEMS device attached to the mount. One or more optical fibers are attached to the mount proximate the MEMS device. An enclosure, attached to the mount encloses the MEMS device. The fibers are located outside the enclosure. Optical signals may be coupled between the fibers and the MEMS device within the enclosure through an optical elements in the sidewall. The optical switching method proceeds by reducing a pressure of an atmosphere proximate the MEMS optical device and moving at least one of the optical elements from a first position to a second position. The optical element deflects an optical signal when it is in the second position.

Abstract translation: 公开了一种用于密封MEMS光学器件的壳体，MEMS装置，MEMS模块和用于切换光学信号的方法。 外壳包括一个或多个侧壁和与至少一个侧壁气密密封的光学元件。 合适的光学元件包括窗户，透镜和透镜阵列。 可以将外壳抽真空以改善封装在其内的MEMS装置的性能。 MEMS装置包括由上述类型的外壳包围的MEMS装置。 MEMS器件可以包括衬底，并且外壳可以结合到衬底。 或者，MEMS器件可以包括附接到安装件的基板，并且外壳可以结合到安装件。 MEMS模块包括安装件和附接​​到安装座的MEMS装置。 一个或多个光纤附接到靠近MEMS装置的安装座。 连接到安装架的外壳包围MEMS装置。 纤维位于外壳外部。 光信号可以通过侧壁中的光学元件耦合在外壳内的光纤和MEMS器件之间。 光学切换方法通过减小靠近MEMS光学装置的气氛的压力并将至少一个光学元件从第一位置移动到第二位置来进行。 当光信号处于第二位置时，光学元件偏转光信号。

公开(公告)号：US20020159707A1

公开(公告)日：2002-10-31

申请号：US10060067

申请日：2002-01-29

Applicant: Onix Microsystems, Inc.

Inventor： Kristofer Mortzheim ,  Kelvin Chau

IPC: G02B006/26

CPC classification number: G02B6/43 ,  G02B6/422 ,  G02B6/4231 ,  H05K3/303 ,  H05K3/305 ,  H05K3/3447 ,  H05K2201/10303 ,  H05K2201/10318 ,  H05K2201/10484 ,  Y02P70/613

Abstract: An apparatus and method for aligning one or more optical fibers is disclosed. The apparatus includes a carrier having one or more through holes and one or more plugs, each of which is sized to be received in one or more of the three or more through holes. The carrier is adapted to receive one or more waveguides. The waveguides may be aligned by inserting a plug into each of one or more through holes in a carrier; attaching a waveguide to the carrier; aligning the carrier to align the one or more waveguides with respect to an optical device attached to a substrate; and tacking one or more of the plugs to the substrate to maintain the alignment of the waveguides with respect to the optical device.

Abstract translation: 公开了一种用于对准一根或多根光纤的装置和方法。 该装置包括具有一个或多个通孔和一个或多个插头的载体，每个插头的尺寸被设计成容纳在三个或更多个通孔中的一个或多个中。 载体适于接收一个或多个波导。 波导可以通过将插头插入到载体中的一个或多个通孔中的每一个中而对准; 将波导附接到所述载体; 对准载体以使一个或多个波导相对于连接到基板的光学装置对准; 并且将一个或多个插头固定到基板以保持波导相对于光学装置的对准。

公开(公告)号：US20020093446A1

公开(公告)日：2002-07-18

申请号：US10012688

申请日：2001-10-30

Applicant: Onix Microsystems, Inc.

Inventor： David Horsley ,  William Clark ,  Robert Conant

IPC: H03M001/60

CPC classification number: G01R31/2829 ,  H02N1/002

Abstract: Methods and apparatus for varying and measuring the position of a micromachined electrostatic actuator using a pulse width modulated (PWM) pulse train are disclosed. One or more voltage pulses are applied to the actuator. In each of the pulses, a voltage changes from a first state to a second state and remains in the second state for a time tpulse before returning to the first state. The position of the actuator may be varied by varying the time nulltpulse. A position of the actuator may be determined by measuring a capacitance of the actuator when the voltage changes state, whether the time t is varied or not. An apparatus for varying the position of a MEMS device may include a pulse width modulation generator coupled to the MEMS device an integrator coupled to the MEMS device and an analog-to-digital converter coupled to the integrator. The integrator may measure a charge transferred during a transition of a pulse from the pulse generator. The integrator may include an amplifier, an integrator capacitor, a hold capacitor, a compensation voltage generator and three switches. The hold capacitor and integrator capacitor may be coupled to a MEMS device. The integrator capacitor, hold capacitor, and compensation voltage generator may be selectively coupled to the amplifier by two of the switches. The MEMS device and hold capacitor may be selectively coupled to ground by a third switch.

Abstract translation: 公开了使用脉冲宽度调制（PWM）脉冲串来改变和测量微加工静电致动器的位置的方法和装置。 一个或多个电压脉冲被施加到致动器。 在每个脉冲中，电压从第一状态改变到第二状态，并且在返回到第一状态之前保持在第二状态一段时间t脉冲。 致动器的位置可以通过改变时间DELTA脉冲来改变。 致动器的位置可以通过在电压改变状态时测量致动器的电容，时间t是否变化来确定。 用于改变MEMS器件的位置的装置可以包括耦合到MEMS器件的耦合到MEMS器件的积分器和耦合到积分器的模数转换器的脉宽调制发生器。 积分器可以测量在来自脉冲发生器的脉冲的转变期间传送的电荷。 积分器可以包括放大器，积分电容器，保持电容器，补偿电压发生器和三个开关。 保持电容器和积分电容器可以耦合到MEMS器件。 积分器电容器，保持电容器和补偿电压发生器可以通过两个开关选择性地耦合到放大器。 MEMS器件和保持电容器可以通过第三开关选择性地耦合到地。

公开(公告)号：US20010050801A1

公开(公告)日：2001-12-13

申请号：US09810336

申请日：2001-03-14

Applicant: ONIX MICROSYSTEMS, INC.

Inventor： Behrang Behin ,  Satinderpall Pannu

IPC: H01L041/08

CPC classification number: G02B6/357 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/358 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers are substantially interdigitated according to a predetermined engagement. A rotating element may be attached to a rotatable flexure disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimbaled structure bi-axial rotating actuators and position sensors may be constructed. The combdrive devices of the present invention can be employed in a broad range of applications, including biomedical devices, optical devices for tracking and display, telecommunication devices such as fiber-optic switches, inertial sensors, and magnetic disk drives.

Abstract translation: 描述了包括使用梳齿的致动器和位置传感器的旋转装置。 提供由单层制造的梳齿驱动器的一种设计，使得在标称状态下，两组梳指根据预定的接合基本上互相指向。 旋转元件可以附接到沿着轴线设置的可旋转的弯曲部，并且与附接到旋转元件的偏压元件一起耦合到梳齿，以使梳齿与旋转元件一起经受来自初始接合的受控角位移 并且响应于来自感测可移动或旋转元件的位置的反馈。 可以在梳齿之间施加电压，使得旋转元件以预定的方式围绕轴进行进一步的旋转。 或者，可以在旋转元件上施加时变偏压力，使得第一梳指与旋转元件一起以预定方式围绕轴进行进一步旋转。 梳齿装置可用作旋转执行器和位置传感器。 通过在万向结构中布置两个这样的梳齿可以构造双轴旋转致动器和位置传感器。 本发明的梳状驱动装置可以用于广泛的应用，包括生物医学装置，用于跟踪和显示的光学装置，诸如光纤开关，惯性传感器和磁盘驱动器之类的电信装置。

公开(公告)号：WO0177735A3

公开(公告)日：2002-05-16

申请号：PCT/US0111047

申请日：2001-04-04

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  DANEMAN MICHAEL J ,  KIANG MENG-HSIUNG ,  LAU KAM-YIN ,  BEERLING TIMOTHY J

IPC: G02B6/35 ,  G02B26/02 ,  G02B26/08

CPC classification number: G02B6/358 ,  G02B6/3512 ,  G02B6/3546 ,  G02B6/357 ,  G02B6/359

Abstract: Disclosed is an apparatus and method for detecting whether rotatable MEMS elements are in the "on" or "off" position. Embodiments of the invention have application in devices switches that employ mirrors that move between an "on" or "off" position, wherein they reflect light from an input fiber into an output fiber in the "on" position, and allow the light to pass in the "off" position. Electrodes are positioned in the device such that the mirrors are close to, and therefor capacitively coupled to, a different electrode depending on whether they are in the "on" or "off" position. This invention is especially useful for switches that already employ electrodes for electrostatic clamping of mirrors in one or more positions, since those same electrodes can be used both to electrostatically clamp the mirrors and to sense their position. The method described in this invention comprises sensing of the capacitance between the mirrors and the one or more electrodes used to clamp the mirrors in its one or more positions in order to detect which of the positions the mirrors are clamped in. Furthermore, the magnitude of the capacitances can be monitored to detect improper clamping.

Abstract translation: 公开了一种用于检测可旋转MEMS元件是处于“开”还是“关”位置的装置和方法。 本发明的实施例可应用于使用在“开”或“关”位置之间移动的反射镜的装置开关中，其中它们将来自输入光纤的光反射到处于“开”位置的输出光纤，并允许光通过 在“关”位置。 电极被定位在设备中，使得反射镜接近并由此电容耦合到不同的电极，这取决于它们是处于“开”还是“关”位置。 本发明对于已经使用用于在一个或多个位置中的反射镜的静电夹持的电极的开关特别有用，因为这些相同的电极可以用于静电夹紧反射镜并感测其位置。 本发明描述的方法包括感测反射镜之间的电容和用于将反射镜夹持在其一个或多个位置中的一个或多个电极，以便检测反射镜被夹住的位置。此外， 可以监控电容以检测不正确的夹紧。

公开(公告)号：WO0165300A3

公开(公告)日：2003-01-16

申请号：PCT/US0106961

申请日：2001-03-02

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  LAM KAM Y ,  KIANG MENG-HSIUNG ,  DANEMAN MICHAEL J

IPC: G02B6/35 ,  G02B26/00

CPC classification number: G02B6/3582 ,  G02B6/3512 ,  G02B6/3546

Abstract: An optical crossbar switch having refractive or reflective components for equalizing beam spreading and diffraction in all the connections. The optical fibers or waveguides coupled to the switch are not staggered, but are parallel as in a conventional fiber array. The refractive component is disposed between the switch and the input optical fibers. Preferably, a similar refractive component is disposed between the output optical fibers and the switch. The refractive component can be a stairstep block made of glass, silicon or silica. Light from each input fiber travels through a well-defined thickness of the stairstep block. Since the block has a refractive index greater than the surrounding atmosphere, the wavelength is reduced within the block, and beam spreading and diffraction are reduced. For switch connections that have a long optical path, a long optical path through the block is required. The dimensions of the block must be designed according to the path length differences of the different switch connections. Optionally, a prism is used instead of the stairstep block. In this case, the optical fibers must be aligned at an angle to the switch. Furthermore, a series of small optical deflectors can be used instead of the stairstep structure.

Abstract translation: 具有用于均衡所有连接中的光束扩散和衍射的折射或反射分量的光学交叉开关。 耦合到开关的光纤或波导不是交错的，而是像传统的光纤阵列那样平行。 折射分量设置在开关和输入光纤之间。 优选地，在输出光纤和开关之间设置类似的折射分量。 折射分量可以是由玻璃，硅或二氧化硅制成的稳态块。 来自每个输入光纤的光线穿过明显的厚度的步态块。 由于该块具有大于周围大气的折射率，所以在该块内波长减小，并且光束扩散和衍射减小。 对于具有长光路的开关连接，需要通过该块的长光路。 块的尺寸必须根据不同开关连接的路径长度差设计。 可选地，使用棱镜代替步骤块。 在这种情况下，光纤必须与开关成一定角度对齐。 此外，可以使用一系列小的光学偏转器来代替稳态结构。

公开(公告)号：WO0173936A3

公开(公告)日：2002-04-18

申请号：PCT/US0109554

申请日：2001-03-23

Applicant: ONIX MICROSYSTEMS INC

Inventor： BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: G02B6/35 ,  G02B26/08 ,  H02N1/00

CPC classification number: G02B6/357 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3524 ,  G02B6/3584 ,  G02B6/359 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: Rotating devices including actuators and position sensors that employ combdrives are described. One design of a combdrive fabricated from a single layer is provided such that, in a nominal state, the two sets of comb fingers (702, 712) are substantially interdigitated according to a predetermined engagement. A rotating element (700) may be attached to a rotatable flexure (711) disposed along an axis and coupled to the comb fingers along with a biasing element attached to the rotating element to cause the comb fingers along with the rotating element to undergo a controlled angular displacement from the initial engagement and in response to feedback (780) from sensing the position of the movable or rotating element. A voltage may be applied between comb fingers to cause the rotating element to undergo further rotation about the axis in a predetermined manner. Alternatively, a time-vary biasing force may be exerted on the rotating element, causing the first comb fingers along with the rotating element to undergo further rotation about the axis in a predetermined manner. The combdriven device can serve as both rotating actuators and position sensor. By arranging two such combdrives in a gimballed structure bi-axial rotating actuators and position sensors may be constructed. The combdrive devices of the present invention can be employed in a broad range of applications, including biomedical services, optical devices for tracking and display, telecommunication devices such as fiber-optic switches, inertial sensors, and magnetic disk drives.

Abstract translation: 描述了包括使用梳齿的致动器和位置传感器的旋转装置。 提供由单层制造的梳齿驱动器的一个设计，使得在标称状态下，两组梳指（702,712）根据预定的接合基本上是交错的。 旋转元件（700）可以附接到沿着轴线设置的可旋转的弯曲部（711），并且与附接到旋转元件的偏置元件一起耦合到梳齿，以使梳齿与旋转元件一起受到控制 来自初始接合的角位移和响应于来自感测可移动或旋转元件的位置的反馈（780）。 可以在梳齿之间施加电压，使得旋转元件以预定的方式围绕轴进行进一步的旋转。 或者，可以在旋转元件上施加时变偏压力，使得第一梳指与旋转元件一起以预定方式围绕轴进一步旋转。 梳齿装置可用作旋转执行器和位置传感器。 通过将两个这样的梳齿机布置在结构结构中，可以构造双轴旋转致动器和位置传感器。 本发明的梳状驱动装置可以用于广泛的应用，包括生物医学服务，用于跟踪和显示的光学装置，诸如光纤开关，惯性传感器和磁盘驱动器之类的电信设备。

公开(公告)号：WO0171409A3

公开(公告)日：2002-11-21

申请号：PCT/US0109456

申请日：2001-03-23

Applicant: ONIX MICROSYSTEMS INC

Inventor： DANEMAN MICHAEL J ,  BEHIN BEHRANG ,  PANNU SATINDERPALL S

IPC: B81B3/00 ,  B81C99/00 ,  G02B6/35 ,  G02B26/08 ,  G02B26/10 ,  H02N1/00 ,  G02B26/02

CPC classification number: G02B6/3556 ,  B81B3/0021 ,  B81B2201/033 ,  B81B2201/045 ,  B81B2203/0181 ,  B81B2203/058 ,  B81B2207/07 ,  B81C1/00214 ,  G02B6/3512 ,  G02B6/3518 ,  G02B6/3542 ,  G02B6/3546 ,  G02B6/356 ,  G02B6/357 ,  G02B6/3584 ,  G02B26/0833 ,  G02B26/085 ,  G02B26/0858 ,  G02B26/0866 ,  H02N1/008

Abstract: A beam steering module and switching system. The steering module is composed of an NxM array of single axis mirrors able to rotate about a particular axis (X-axis), a second NxM array of single axis mirrors able to rotate about an axis orthogonal to that of the first NxM array of mirrors (Y-axis), and a relay lens designed to image the first mirror array onto the second mirror array such that the beam angle may be controlled in both the X and Y-axis by adjusting the angle of the appropriate mirrors in the X and Y mirror arrays. Two steering modules may be combined to form a switching system. With two such steering modules, it is possible to completely determine, at the plane of the output fiber array, the position and angle of an optical beam emerging from any of the input fibers.

Abstract translation: 光束转向模块和开关系统。 转向模块由能够围绕特定轴线（X轴）旋转的单轴镜的N×M阵列组成，能够围绕与第一N×M阵列阵列正交的轴线旋转的单轴镜的第二N×M阵列 （Y轴）和设计成将第一反射镜阵列成像到第二反射镜阵列上的中继透镜，使得可以通过调整X中的适当反射镜的角度来控制X和Y轴两者的光束角度，以及 Y镜阵列。 可以组合两个转向模块以形成切换系统。 使用两个这样的转向模块，可以在输出光纤阵列的平面处完全确定从任何输入光纤出射的光束的位置和角度。