반도체 공정 챔버에 사용되는 금속 가스킷
    142.
    发明授权
    반도체 공정 챔버에 사용되는 금속 가스킷 失效
    반도체공정챔버에용용되는금속가스킷

    公开(公告)号:KR100456528B1

    公开(公告)日:2004-11-09

    申请号:KR1020010078160

    申请日:2001-12-11

    Abstract: A metal gasket for a semiconductor fabrication chamber capable of preventing base plate metal contamination in the chamber, wherein the metal gasket includes a diffusion barrier layer interposed between a base plate and an anti-corrosive coating layer, and wherein the diffusion barrier layer prevents elements of the base plate from being diffused to the anti-corrosive coating layer. Accordingly, the diffusion barrier layer prevents attack on the anti-corrosive coating layer.

    Abstract translation: 一种用于半导体制造室的金属衬垫,其能够防止室内的基板金属污染,其中所述金属衬垫包括介于基板和防腐蚀涂层之间的扩散阻挡层,并且其中所述扩散阻挡层防止 基板扩散到防腐蚀涂层。 因此,扩散阻挡层防止对抗腐蚀涂层的侵蚀。

    DISPOSITIF DE COMPRESSION ET COMPRESSEUR À SPIRALES UTILISANT UN TEL DISPOSITIF DE COMPRESSION
    145.
    发明公开
    DISPOSITIF DE COMPRESSION ET COMPRESSEUR À SPIRALES UTILISANT UN TEL DISPOSITIF DE COMPRESSION 审中-公开
    DISPOSITIF DE COMPRESSION ET COMPRESSEUR-SPIRALES UNTILISANT UN TEL DISPOSITIF DE COMPRESSION

    公开(公告)号:EP3194779A1

    公开(公告)日:2017-07-26

    申请号:EP15756959.1

    申请日:2015-07-01

    Inventor: MONET, Eric

    Abstract: The present invention relates to a compression device (1) including at least: - two interleaved scrolls (3, 5) each of which is made of an aluminum alloy, wherein one of the scrolls, referred to as the fixed scroll (3), is fixed and the other scroll, referred to as the orbiting scroll (5), moves eccentrically without rotating, and - anti-rotation means made of an aluminum alloy and suitable for allowing anti-rotation of the orbiting scroll (5), characterized in that it further comprises, at least: - a flat thrust bearing (7) suitable for axially retaining the orbiting scroll (5) and made of a material selected from a set of materials including aluminum alloys or grades of cast iron, and - coatings for promoting friction between the fixed scroll (3), the orbiting scroll (5), and the anti-rotation means and the flat thrust bearing (7).

    Abstract translation: 本发明涉及一种压缩装置(1),该压缩装置(1)至少包括: - 两个交错涡卷(3,5),每个涡卷由铝合金制成,其中一个涡卷称为固定涡卷(3) 被称为动涡旋盘(5)的另一个涡旋盘不偏心地运动而不旋转,以及 - 防转动装置,其由铝合金制成并适于允许动涡旋盘(5)的反转,其特征在于, 其进一步包括至少: - 适于轴向地保持绕动涡旋盘(5)并且由从包括铝合金或铸铁等级的一组材料中选择的材料制成的平坦推力轴承(7),以及 - 促使固定涡旋件3,动涡旋件5以及防转动装置与平坦推力轴承7之间的摩擦。

    COMPRESSOR
    150.
    发明授权
    COMPRESSOR 有权
    压缩机

    公开(公告)号:EP1584819B1

    公开(公告)日:2008-09-17

    申请号:EP03774015.6

    申请日:2003-11-13

    Abstract: A compressor used in a refrigerating cycle, wherein the bottom face side of a connected portion between the bottom surface and the inner peripheral surface of a housing is formed in an R-shape and the inner peripheral surface side thereof is formed in a tilted shape or an R-shape, and a tough material having a tensile strength of 800 N/mm or higher at the room temperature is used for at least one of those parts forming the housing and an internal mechanism, whereby the wall thickness of component parts can be designed thin while assuring the strengths thereof by properly selecting the materials used for the component parts and improving the shape of the housing so that the overall size, weight, and cost of the compressor can be reduced.

    Abstract translation: 1.一种冷冻循环用压缩机,其特征在于,底面与壳体内周面的连接部的底面侧形成为R字状,其内周面侧形成为倾斜状,或者 R形和在室温下具有800N / mm 2或更高拉伸强度的韧性材料用于形成壳体和内部机构的那些部件中的至少一个,由此组件的壁厚 可以通过适当选择用于构件的材料并改善壳体的形状来确保其强度,同时确保其强度,从而可以减小压缩机的整体尺寸,重量和成本。

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