Abstract:
평가 장치(1)에 있어서, 검광자(42)의 투과축의 방위가 편광자(32)의 투과축에 대해 90도±3도의 경사 각도가 되도록 검광자(42)를 회전시켜서, 각각의 조건으로 촬상 카메라(44)가 웨이퍼(10)의 정반사 이미지를 촬상하고, 화상 처리부(50)는 촬상 카메라(44)에 의해 촬상된 2장의 웨이퍼(10)의 화상에 기초해서, 반복 패턴의 형상을 평가하여 도즈 불량 및 포커스 불량을 검출하게 되어 있다.
Abstract:
본 발명은 기판에 도포된 층의 두께를 결정하기 위한 엘립소미터 측정장치에 관한것으로서, 상기 장치는 입사빔(9)을 보내는 광원(3)과, 편광된 입사빔(9)을 기판의 측정 포인트(P)에 유도하는 송신 광학 시스템과, 측정 포인트(P)에서 형성된 반사빔(10)를 광 수신기 장치(5.7, 5,8)로 유도하는 분석기(5.4)를 구비한 수신 광학 시스템을 포함하고 있으며, 또한 입사빔(9)과 분석기(5.4)의 편광방향이 시간에 따라 상대적으로 서로 변경되고, 이로 인해 발생된 강도변화가 평가장치(7)에 의해서 평가되어 층두께를 결정한다. 본 발명의 측정 장치는, 접근하기 어려우며 또한 곡률이 서로 다른 측정대상물에 대해서도 작업이 용이하며, 정밀하게 층 두께를 측정할 수 있다는 것을 특징으로 한다. 이를 위해서, 각도측정장치(5.7, 7.1)를 구비하고, 이 각도측정장치(5.7, 7.1)를 이용하여 측정 포인트(P)에서 기판(1)의 접평면에 대한 반사빔(10)의 각도(β)를 감지하며, 그리고 평가장치(7)를 이용하여 층두께를 감지된 각도(β)에 따라서 결정한다. 엘립소미터 측정장치, 입사빔, 측정 포인트, 반사빔, 광 수신기 장치
Abstract:
The invention concerns a support designed for observing between intersecting polarizers an object located in its vicinity in a medium (3) of index n0 with incident convergent incoherent illumination under an angle Theta0 at a wavelength lambda. Said support comprises a substrate (1) with complex refractive index n2 and a layer (2) of refractive index n 1 and thickness e1. According to the invention, the value of the thickness e1 of the layer (2) is at ±2 % such that d2/de211nISigmaI2 = 0with Sigma = Sigma01 + Sigma12(1 + pi01)e(-2jbeta 1) + Sigma01pi 12e(-4jbeta1)/1 + r01(p) + r12(p) e(-2jbeta1))(1 + r01(s)r12(s) e(-2jbeta1)). The invention also concerns observation devices incorporating such a support.
Abstract:
A process for reproducing hand and/or finger lines with a camera works without skin contact with the recording device. By using linearly or circularly polarized light in the paths of the illuminating and the reproducing light rays, it is possible to obtain separate representations of the patterns of the epidermis and the hypodermis. An image of the relief of the skin that is rich in contrast is obtained in this way, and it is possible to acquire information from the deeper disposed layers of the skin already supplied with blood. An algorithm searches the skin patterns of the palm of the hand for line elements of different strengths and directions (vectors). The computed numerical identification contains overall frequencies of vectors as well as amplitudes and phases of frequency components of projections of the vector image of both patterns. The process permits placing the person to be identified in a separate location from the measuring device, thereby offering complete protection of the system and enhanced security against fraud.
Abstract:
A process for the preparation of methyl-[2(2-thienyl)-ethylamino]-(2- halogenophenyl)-acetates of general formula (VI) starting from the acetamides of general formula (VII). There are valuable pharmaceutically active ingredients of antithrombotic effect among the compounds of general formula (VI).
Abstract:
Die Erfindung betrifft eine Quarzkontrollplatte zur Kalibrierung eines Polarimeters, bei dem im Inneren eines rohrformigen Körpers (1), einen definierten Drehwinkel vorgebende Quarzscheiben (4) angeordnet sind und der Quarzkontrollplatte ein die Temperatur messender Sensor (5) zugeordnet ist, dessen Messwerte von einem dem Sensor (5) zugeordneten Sender (3) auf einen unabhängig von dem Sensor (5) angeordneten Empfänger übertragbar sind. Der Sensor (5) und der Sender (3) sind in der Quarzkontrollplatte angeordnet und die Übertragung der Daten zwischen dem dem Sensor (5) zugeordneten Sender (3) und dem außerhalb der Quarzkontrollplatte angeordneten Empfänger erfolgt drahtlos.
Abstract:
Embodiments provide an integrated miniature polarimeter and spectrograph (IMPS) and associated methods for using an IMPS to determine Stokes parameters to describe a source beam. In one embodiment an IMPs is provided comprising a spectropolarimeter module. The spectropolarimeter module comprises a miniature optical bench; a slit component; a birefringent wedge; a dichroic prism; a spectral disperser; and a focal plane array. The slit component, birefringent wedge, dichroic prism, spectral disperser, and focal plane array are mounted to the miniature optical bench such that a beam incident on the slit component will be incident on (1) the birefringent wedge, (2) the dichroic prism, (3) the spectral disperser, and (4) the focal plane array, in that order.
Abstract:
A system is described that combines spectropolarimetry with scatterometry. The system uses an annular mirror and liquid crystal devices to control the angle of the incident light cone, the polarization and wavelength, an imaging setup and one or more video cameras so that spectroseopic- polarimetric-scatterometric images can be grabbed rapidly. The system is also designed to incorporate additional imaging modes such as interference, phase contrast, fluorescence and Raman spectropolarimetric imaging.