마이크로리소그래피 투영 노광 장치
    151.
    发明公开
    마이크로리소그래피 투영 노광 장치 有权
    微波投影曝光装置

    公开(公告)号:KR1020130108279A

    公开(公告)日:2013-10-02

    申请号:KR1020137005681

    申请日:2010-08-06

    Abstract: 마이크로리소그래피 투영 노광 장치 순차적인 측정값들을 발생시킬 수 있는 측정 기기(54)와, 상기 측정값들을 처리하기 위한 프로세싱 유닛(48)을 갖는다. 이를 위해, 상기 프로세싱 유닛은 복수의 디지털 신호 처리기(DSP1, DSP2, DSP3)들을 포함하는 프로세싱 체인을 갖고, 상기 프로세싱 체인 내의 제 1 디지털 신호 처리기(DSP1)는 상기 순차적인 측정값들을 수취하기 위해 상기 측정 기기(54)에 연결된다. 또한, 상기 프로세싱 체인 내의 각각의 후속 디지털 신호 처리기(DSP2, DSP3)는 상기 프로세싱 체인 내의 개별 선행 디지털 신호 처리기(DSP1, DSP2)에 연결된다. 상기 디지털 신호 처리기(DSP1, DSP2, DSP3)들은, 각각의 디지털 신호 처리기(DSP1, DSP2, DSP3)가 측정값들 중 단지 일부만을 처리하여 그들로부터 처리 결과들을 발생시키며, 측정값들 중 나머지 부분을 처리를 위해 프로세싱 체인 내의 각각의 다음 디지털 신호 처리기(DSP2, DSP3)에 전송하도록, 프로그래밍된다.

    Abstract translation: 微光刻投影曝光装置具有测量装置,通过该测量装置可以产生一系列测量值,以及处理单元,用于处理测量值。 处理单元具有包括多个数字信号处理器的处理链。 处理链中的第一个数字信号处理器连接到测量装置以接收测量值序列。 处理链中的每个随后的数字信号处理器连接到处理链中的分别在前的数字信号处理器。 对数字信号处理器进行编程,使得每个数字信号处理器仅处理测量值的一部分,并从其中产生处理结果,并将测量值的剩余部分转发到处理链中的相应的下一个数字信号处理器进行处理。

    나노 웹 및 그 제조방법
    152.
    发明公开
    나노 웹 및 그 제조방법 无效
    纳米网及其制造方法

    公开(公告)号:KR1020110068008A

    公开(公告)日:2011-06-22

    申请号:KR1020090124823

    申请日:2009-12-15

    CPC classification number: D01D5/003 D01D5/0092 G01J3/00

    Abstract: PURPOSE: Nano web and a manufacturing method thereof are provided to improve functions of the nanoweb by forming the nanoweb with high porosity and voids of big structure. CONSTITUTION: A manufacturing method of nano web includes the following steps: manufacturing a polyelectrolyte solution; manufacturing nanofiber(1) thorugh electrospinning; manufacturing nano fiber aggregate from nano fiber; measuring a thickness of the nano fiber aggregate with a non-contact type method; and converting the polyamic acid nanofiber aggregate into the nano fiber aggregate. The nano fiber is manufactured in an electric file of 850-3500 V / cm.

    Abstract translation: 目的:提供纳米网及其制造方法,以通过形成具有高孔隙率和大结构的空隙的纳米网来改善纳米纤维网的功能。 构成:纳米纤维网的制造方法包括以下步骤:制造聚电解质溶液; 制造纳米纤维(1)静电纺丝; 从纳米纤维制造纳米纤维聚集体; 以非接触式方法测量纳米纤维聚集体的厚度; 并将聚酰胺酸纳米纤维聚集体转变成纳米纤维聚集体。 纳米纤维以850-3500V / cm的电文件制造。

    SYSTEM AND METHOD FOR DETERMINING A PARAMETER PROFILE

    公开(公告)号:US20180172554A1

    公开(公告)日:2018-06-21

    申请号:US15831801

    申请日:2017-12-05

    Abstract: A method for determining a multi-dimensional profile of at least one emission parameter corresponding to an exhaust emission of a combustion process is presented. The method includes emitting a laser beam in a plurality of directions through the exhaust emission. The laser beam includes a plurality of wavelengths and the exhaust emission is characterized by the plurality of emission parameters. The method further includes detecting a plurality of absorption spectrum signals for each of the plurality of directions and determining a plurality of single-dimensional profiles corresponding to the at least one emission parameter. Each of the plurality of single-dimensional profiles is determined based on the plurality of absorption spectrum signals corresponding to each respective direction of the plurality of directions. The method also includes generating the multi-dimensional profile corresponding to the at least one emission parameter based on the plurality of single-dimensional profiles.

    REAL-TIME DOUBLE-BEAM IN SITU INFRARED SPECTRUM SYSTEM AND METHOD THEREOF

    公开(公告)号:US20180088037A1

    公开(公告)日:2018-03-29

    申请号:US15711718

    申请日:2017-09-21

    CPC classification number: G01N21/35 G01J3/00 G01J3/42 G01N21/01 G01N21/3504

    Abstract: A real-time double-beam in situ infrared spectrum system and a method thereof. The system comprises two identical infrared spectrometers and a double-beam infrared reactor cell, wherein the double-beam infrared reactor cell is formed by connecting a sample cell and a reference cell which are identical, the sample cell and the reference cell are at the same level and respectively correspond to a sample spectrometer and a reference spectrometer, the two infrared spectrometers are synchronously controlled by computers, to synchronously collect spectrograms of sample beams and background beams in real time, so as to obtain real information about a species on the catalyst surface changing with the reaction time, and eliminate gas molecule vibration spectrum interference in a real-time state and transmission spectrum interference generated under a heating condition. The present invention makes a characterization result become more accurate and reliable, so that real-time information about an active center of the catalyst surface, an active phase and an intermediate species at different temperatures may be obtained under a changeable gas phase component condition.

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