Three-dimensional copper nanostructure and fabrication method thereof
    164.
    发明授权
    Three-dimensional copper nanostructure and fabrication method thereof 有权
    三维铜纳米结构及其制备方法

    公开(公告)号:US09139914B2

    公开(公告)日:2015-09-22

    申请号:US14259628

    申请日:2014-04-23

    Abstract: This invention relates to a method of fabricating a three-dimensional copper nanostructure, including manufacturing a specimen configured to include a SiO2 mask; performing multi-directional slanted plasma etching to form a three-dimensional etching structure layer on the specimen; performing plating so that a multi-directional slanted plasma etched portion of the specimen is filled with a metal; removing an over-plated portion and the SiO2 mask from the metal layer; and removing a portion of a surface of the specimen other than the metal which is the three-dimensional etching structure layer. In this invention, a uniform copper nanostructure array can be obtained by subjecting a large-area specimen disposed in a Faraday cage to multi-directional slanted plasma etching using high-density plasma, forming a copper film on the etched portion of the specimen, and removing an over-plated copper film and the SiO2 mask, and the diameter of the copper nanostructure can be arbitrarily adjusted, thus attaining high applicability.

    Abstract translation: 本发明涉及一种制造三维铜纳米结构的方法,包括制造被配置为包括SiO 2掩模的试样; 执行多方向倾斜等离子体蚀刻以在样本上形成三维蚀刻结构层; 进行电镀,使得样品的多方向倾斜等离子体蚀刻部分被金属填充; 从金属层去除过镀层部分和SiO 2掩模; 除去除了作为三维蚀刻结构层的金属以外的试样的表面的一部分。 在本发明中,通过对设在法拉第笼中的大面积试样进行多层倾斜等离子体蚀刻,使用高密度等离子体,在试样的蚀刻部分上形成铜膜,可以得到均匀的铜纳米结构体, 去除过镀铜膜和SiO 2掩模,并且可以任意调整铜纳米结构的直径,从而获得高适用性。

    FORMATION OF A MICROFLUIDIC ARRAY
    165.
    发明申请
    FORMATION OF A MICROFLUIDIC ARRAY 审中-公开
    形成微流感阵列

    公开(公告)号:US20140183044A1

    公开(公告)日:2014-07-03

    申请号:US14138514

    申请日:2013-12-23

    CPC classification number: C25D1/12 B81C99/009 B81C2201/034

    Abstract: The invention relates to a method of forming a microfluidic array comprising at least one channel of semi-circular section, comprising the following steps: bringing into contact a first liquid (7) with an array of electrodes (3) of a microfluidic chip (1) comprising at least one pair of substantially parallel and coplanar electrodes (3a, 3b) arranged on a substrate (4), activating said array of electrodes so as to actuate by liquid dielectrophoresis LDEP said first liquid to form a fluidic structure (9) comprising at least one fluidic finger (9a), and using said fluidic structure as a mould to form said microfluidic array by solidification or hardening of a second liquid (11) deposited on the microfluidic chip and hugging the shape of said fluidic structure.

    Abstract translation: 本发明涉及一种形成包括至少一个半圆形截面通道的微流体阵列的方法,包括以下步骤:使第一液体(7)与微流体芯片(1)的电极阵列(3)接触 )包括布置在基板(4)上的至少一对基本上平行和共面的电极(3a,3b),激活所述电极阵列以便通过液体介电电泳LDEP所述第一液体致动以形成流体结构(9),所述流体结构(9)包括 至少一个流体指(9a),并且使用所述流体结构作为模具以通过凝固或固化沉积在所述微流体芯片上的第二液体(11)形成所述微流体阵列并且拥抱所述流体结构的形状。

    Method of forming nanostructures
    168.
    发明授权
    Method of forming nanostructures 有权
    形成纳米结构的方法

    公开(公告)号:US08394224B2

    公开(公告)日:2013-03-12

    申请号:US12974404

    申请日:2010-12-21

    CPC classification number: B32B27/00 B81B2207/056 B81C1/00357 B81C2201/034

    Abstract: Layered nanostructures are constructed by imprinting material with a mold, while selectively modifying and removing a portion of the mold. The mold, which includes a pattern of features, is modified so that the portion of the mold that includes the features is made chemically and/or physically distinct from the rest of the mold. That portion of the mold that includes the features is retained while the rest of the mold is removed. The retained portion of the mold provides mechanical support for any adjoining layer or layers.

    Abstract translation: 层状纳米结构通过用模具压印材料构成,同时选择性地修改和去除模具的一部分。 包括特征图案的模具被改进,使得包括特征的模具部分在化学和/或物理上与模具的其余部分不同。 包括特征的模具的该部分在模具的其余部分被移除的同时被保留。 模具的保留部分为任何相邻的层提供机械支撑。

    METHOD OF FORMING NANOSTRUCTURES
    170.
    发明申请
    METHOD OF FORMING NANOSTRUCTURES 有权
    形成纳米结构的方法

    公开(公告)号:US20120152448A1

    公开(公告)日:2012-06-21

    申请号:US12974404

    申请日:2010-12-21

    CPC classification number: B32B27/00 B81B2207/056 B81C1/00357 B81C2201/034

    Abstract: Layered nanostructures are constructed by imprinting material with a mold, while selectively modifying and removing a portion of the mold. The mold, which includes a pattern of features, is modified so that the portion of the mold that includes the features is made chemically and/or physically distinct from the rest of the mold. That portion of the mold that includes the features is retained while the rest of the mold is removed. The retained portion of the mold provides mechanical support for any adjoining layer or layers.

    Abstract translation: 层状纳米结构通过用模具压印材料构成,同时选择性地修改和去除模具的一部分。 包括特征图案的模具被改进,使得包括特征的模具部分在化学和/或物理上与模具的其余部分不同。 包括特征的模具的该部分在模具的其余部分被移除的同时被保留。 模具的保留部分为任何相邻的层提供机械支撑。

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