公开(公告)号：US20070053487A1

公开(公告)日：2007-03-08

申请号：US11510615

申请日：2006-08-28

Applicant: Kwon-ha Yoon ,  Kyong-woo Kim

Inventor： Kwon-ha Yoon ,  Kyong-woo Kim

IPC: G21K7/00

CPC classification number: G21K7/00 ,  G21K2201/06 ,  H05G2/008

Abstract: A soft X-ray microscope includes a table (10); a housing (20) installed to the upper side of the table (10) and having a partition (22); a light source chamber (30) installed lower than the partition (22) of the housing (20) to project a light to liquid jetted under a high pressure to generate plasma; a mirror chamber (40), installed above the partition (22) of the housing (20), in which first and second mirror (410 and 430) are respectively installed to upper and lower sides of a holder (420) for storing a living sample, the soft X-ray generated by the plasma generated in the light source chamber (30) illuminates the living sample, and the soft X-ray penetrated the living sample is amplified to obtain an image in an image capturing chamber; and an image capturing chamber (50) installed to the upper side of the housing (20) to amplify a light image signal amplified through the mirror chamber (40) and to capture the light image on an external screen to allow distinguishing the light image from exterior.

Abstract translation: 软X射线显微镜包括台（10）; 安装在所述工作台（10）的上侧并具有隔板（22）的壳体（20）; 光源室（30），其安装在所述壳体（20）的隔板（22）的下方，以将在高压下喷射的液体投射到液体中以产生等离子体; 安装在所述壳体（20）的隔板（22）上方的反射镜室（40），其中第一和第二反射镜（410和430）分别安装在用于储存活体的保持器（420）的上侧和下侧 样品中，由光源室（30）中产生的等离子体产生的软X射线照射活体样品，并且穿透活体样品的软X射线被放大，以在摄像室中获得图像; 以及安装到所述壳体（20）的上侧的图像捕获室（50），用于放大通过所述镜室（40）放大的光图像信号，并将所述光图像捕获到外部屏幕上以允许将所述光图像与 外观。

公开(公告)号：US20070030948A1

公开(公告)日：2007-02-08

申请号：US11581053

申请日：2006-10-13

Applicant: Wolfgang Singer ,  Joachim Hainz ,  Hans-Joachim Frasch ,  Johannes Wangler ,  Joachim Wietzorrek ,  Jorg Schultz

Inventor： Wolfgang Singer ,  Joachim Hainz ,  Hans-Joachim Frasch ,  Johannes Wangler ,  Joachim Wietzorrek ,  Jorg Schultz

IPC: G21K5/00

CPC classification number: G03F7/7015 ,  G03F7/70083 ,  G21K2201/06

Abstract: This invention relates to an illumination system for scanning lithography especially for wavelengths ≦193 nm, particularly EUV lithography, for the illumination of a slit, comprising at least one field mirror or at least one field lens and being characterized in that at least one of the field mirror(s) or the field lens(es) has (have) an aspheric shape.

Abstract translation: 本发明涉及一种用于扫描光刻的照明系统，特别是用于照射狭缝的波长<= 193nm，特别是EUV光刻，其包括至少一个场反射镜或至少一个场透镜，其特征在于，至少一个 场反射镜或场透镜具有非球面形状。

公开(公告)号：US20070019310A1

公开(公告)日：2007-01-25

申请号：US10563701

申请日：2004-07-08

Applicant: Andreas Seifert ,  Frank Melzer ,  Andreas Heisler ,  Heinz Mann ,  Gerhard Romeyn

Inventor： Andreas Seifert ,  Frank Melzer ,  Andreas Heisler ,  Heinz Mann ,  Gerhard Romeyn

IPC: G02B5/08

CPC classification number: G03F7/70075 ,  G02B5/08 ,  G02B5/09 ,  G03F7/70141 ,  G03F7/702 ,  G03F7/70825 ,  G21K2201/06

Abstract: In a method for producing mirror facets (1) for facet mirrors in illuminating devices or projection exposure machines in microlithography by using radiation in the extreme ultraviolet range, individual tilting angles are recessed into an optical surface (2) of the mirror facet (1), preferably a surface with tilting angles relative to a reference surface of the mirror facet (1) is machined into or on said optical surface.

Abstract translation: 在通过使用在极紫外线范围内的辐射的微照相中的用于在照明装置或投影曝光机中制造用于刻面镜的镜面（1）的方法中，各个倾斜角度凹入到镜面（1）的光学表面（2）中， 优选地，相对于镜面（1）的参考表面具有倾斜角度的表面被加工到所述光学表面中或所述光学表面上。

公开(公告)号：US20070018122A1

公开(公告)日：2007-01-25

申请号：US11512822

申请日：2006-08-30

Applicant: Alexander Ershov ,  William Partlo

Inventor： Alexander Ershov ,  William Partlo

IPC: G01J3/10

CPC classification number: G03F7/70925 ,  B82Y10/00 ,  G03F7/70033 ,  G03F7/70166 ,  G03F7/70916 ,  G21K2201/06 ,  H05G2/001

Abstract: Systems and methods are disclosed for protecting an EUV light source plasma production chamber optical element surface from debris generated by plasma formation. In one aspect of an embodiment of the present invention, a shield is disclosed which comprises at least one hollow tube positioned between the optical element and a plasma formation site. The tube is oriented to capture debris while allowing light to pass through the tube's lumen via reflection at relatively small angles of grazing incidence. In another aspect of an embodiment of the present invention, a shield is disclosed which is heated to a temperature sufficient to remove one or more species of debris material that has deposited on the shield. In yet another aspect of an embodiment of the present invention, a system is disclosed which a shield is moved from a light source plasma chamber to a cleaning chamber where the shield is cleaned.

公开(公告)号：US20070001541A1

公开(公告)日：2007-01-04

申请号：US11173080

申请日：2005-06-30

Applicant: Robert Baker

Inventor： Robert Baker

IPC: B64D45/00 ,  G21H1/00

CPC classification number: B64G1/409 ,  F03H99/00 ,  G21K2201/06

Abstract: A gravitational wave generating device comprising an energizing means such as magnetrons, which act upon energizable elements such as film bulk acoustic resonators or FBARs. A computer that controls the magnetrons' phase. A gravitational wave generation device that exhibits directivity and forms a gravitational-wave beam. The utilization of a medium in which the gravitational wave speed is reduced in order to effect refraction of the gravitational wave and be a gravitational wave lens. A gravitational wave generator device that can be directed in order to propel an object by its momentum or by changing the gravitational field nearby the object to urge it in a preferred direction and be a propulsion means.

Abstract translation: 引力波发生装置包括诸如磁控管的激励装置，其作用在诸如薄膜体声共振器或FBAR之类的可激励元件上。 控制磁控管相位的计算机。 一种显示方向性并形成重力波束的引力波发生装置。 利用其中引力波速度降低的介质来实现引力波的折射，并且是重力波透镜。 引力波发生器装置，其可以被引导以通过其动量来推动物体，或者通过改变物体附近的重力场以推动其在优选的方向上并且是推进装置。

公开(公告)号：US20060262435A1

公开(公告)日：2006-11-23

申请号：US11132783

申请日：2005-05-19

Applicant: Paul Denham

Inventor： Paul Denham

IPC: G02B7/182

CPC classification number: G02B7/1821 ,  G02B5/0891 ,  G02B26/101 ,  G03F7/70058 ,  G03F7/701 ,  G03F7/702 ,  G03F7/70825 ,  G03F7/70841 ,  G21K2201/06

Abstract: A compact and vacuum compatible magnetic-coil driven tiltable stage that is equipped with a high efficiency reflective coating can be employed as a scanner in EUV applications. The drive electronics for the scanner is fully in situ programmable and rapidly switchable.

Abstract translation: 具有高效率反射涂层的紧凑且真空兼容的电磁线圈驱动可倾斜平台可用作EUV应用中的扫描仪。 扫描仪的驱动电子设备完全可原地编程并可快速切换。

公开(公告)号：US20060193438A1

公开(公告)日：2006-08-31

申请号：US11347668

申请日：2006-02-03

Applicant: Ian Radley ,  Michael Moore ,  Mark Fitzgerald

Inventor： Ian Radley ,  Michael Moore ,  Mark Fitzgerald

IPC: H05G2/00 ,  G21G4/00 ,  H01J35/00

CPC classification number: H05G1/36 ,  G21K2201/06 ,  H01J2235/1291 ,  H05G1/025

Abstract: An x-ray source assembly includes an anode having a spot upon which electrons impinge based on power level supplied to the assembly, and an optic coupled to receive divergent x-rays generated at the spot and transmit output x-rays from the assembly. A control system is provided for maintaining intensity of the output x-rays dynamically during operation of the x-ray source assembly, notwithstanding a change in at least one operating condition of the x-ray source assembly, by changing the power level supplied to the assembly. The control system may include at least one actuator for effecting the change in the power level supplied to the assembly, by, e.g., controlling a power supply associated with the assembly. The control system may also change the temperature and/or the position of the anode to maintain the output intensity.

Abstract translation: x射线源组件包括阳极，阳极基于提供给组件的功率电平而撞击电子的点，以及光耦合以接收在该点处产生的发散的x射线，并从组件传输输出x射线。 提供了一种控制系统，用于在x射线源组件的操作期间动态地保持输出x射线的强度，尽管通过改变提供给X射线源组件的功率电平，尽管x射线源组件的至少一个操作状态发生变化 部件。 控制系统可以包括至少一个致动器，用于通过例如控制与组件相关联的电源来实现提供给组件的功率水平的变化。 控制系统还可以改变阳极的温度和/或位置以维持输出强度。

公开(公告)号：US20060141168A1

公开(公告)日：2006-06-29

申请号：US11357663

申请日：2006-02-16

Applicant: Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

Inventor： Takahiro Okura ,  Kazuya Shimizu ,  Masakazu Takei

IPC: C23C8/00

CPC classification number: C23C14/081 ,  C23C14/0021 ,  C23C14/0694 ,  C23C14/08 ,  C23C14/083 ,  C23C14/10 ,  C23C14/14 ,  C23C14/32 ,  C30B23/02 ,  C30B29/02 ,  G02B5/0858 ,  G21K1/06 ,  G21K2201/06 ,  Y10T428/12174 ,  Y10T428/12736 ,  Y10T428/12896 ,  Y10T428/12993 ,  Y10T428/31678

Abstract: The metal film of the present invention is a dense film of a single crystal that has very low surface roughness and very good crystal orientation because an arithmetic mean roughness of the surface is not larger than 2 nm and a (111) peak intensity of X-ray diffraction is not less than 20 times the sum of all other peaks. Also the metal oxide film of the present invention is a dense film that includes less oxygen defects and almost no voids therein because a content of a non-oxidized metal is not higher than 1 mole % of a metal component that constitutes the metal oxide and a packing density is 0.98.or higher.

Abstract translation: 本发明的金属膜是具有非常低的表面粗糙度和非常好的晶体取向的单晶的致密膜，因为表面的算术平均粗糙度不大于2nm，并且（111）的X-射线衍射峰强度， X射线衍射不小于所有其他峰的总和的20倍。 另外，本发明的金属氧化物膜是由于非氧化金属的含量不高于构成金属氧化物的金属成分的1摩尔％而含有氧缺陷少，几乎无空隙的致密膜， 包装密度为0.98或更高。

公开(公告)号：US06754304B1

公开(公告)日：2004-06-22

申请号：US09937286

申请日：2001-09-25

Applicant: Muradin Abubekirovich Kumakhov

Inventor： Muradin Abubekirovich Kumakhov

IPC: G01N2322

CPC classification number: G01N23/223 ,  G01N2223/076 ,  G21K2201/06

Abstract: A method and device for producing visually sensed images of the internal structure of, particularly, a biological object. When used for diagnostic purposes in medicine the x-ray dosage of tissues surrounding the spot that is being examined is decreased.

Abstract translation: 一种用于产生特别是生物体的内部结构的视觉感测图像的方法和装置。 当用于医学诊断时，减少正在检查的斑点周围组织的x射线剂量。

公开(公告)号：US06469827B1

公开(公告)日：2002-10-22

申请号：US09631617

申请日：2000-08-04

Applicant: William C. Sweatt ,  Daniel A. Tichenor ,  Luis J. Bernardez

Inventor： William C. Sweatt ,  Daniel A. Tichenor ,  Luis J. Bernardez

IPC: G02B508

CPC classification number: G03F7/70158 ,  G02B27/30 ,  G03F7/70066 ,  G03F7/70191 ,  G03F7/702 ,  G03F7/70575 ,  G03F7/70875 ,  G21K1/06 ,  G21K1/10 ,  G21K2201/06 ,  G21K2201/064 ,  G21K2201/067

Abstract: A condenser system for generating a beam of radiation includes a source of radiation light that generates a continuous spectrum of radiation light; a condenser comprising one or more first optical elements for collecting radiation from the source of radiation light and for generating a beam of radiation; and a diffractive spectral filter for separating first radiation light having a particular wavelength from the continuous spectrum of radiation light. Cooling devices can be employed to remove heat generated. The condenser system can be used with a ringfield camera in projection lithography.

Abstract translation: 用于产生辐射束的聚光器系统包括产生连续的辐射光谱的辐射光源; 冷凝器，包括用于收集来自辐射源的辐射并用于产生辐射束的一个或多个第一光学元件; 以及用于将具有特定波长的第一辐射光与辐射光的连续光谱分离的衍射光谱滤波器。 可以使用冷却装置来除去产生的热量。 冷凝器系统可与投影光刻中的环形相机一起使用。