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    CONVOLUTION METHOD FOR MEASURING LASER BANDWIDTH
    173.
    发明公开
    CONVOLUTION METHOD FOR MEASURING LASER BANDWIDTH 审中-公开
    折叠式激光测量带宽方法

    公开(公告)号：EP1417462A1

    公开(公告)日：2004-05-12

    申请号：EP02752594.8

    申请日：2002-07-25

    Applicant: Cymer, Inc.

    Inventor： HAAS, Steven ,  SANDSTROM, Richard, L. ,  HOFMANN, Thomas ,  ERSHOV, Alexander, I.

    IPC: G01J3/18

    CPC classification number: G01J3/26 ,  G01J1/4257 ,  G01J3/02 ,  G01J3/027 ,  G01J3/12 ,  G01J3/1809 ,  G01J3/22 ,  G01J3/28 ,  G01J9/02

    Abstract: A simple, reliable, easy to use method for calculating bandwidth data of very narrow band laser beams based on bandwidth data obtained with a spectrometer in circumstances where the laser bandwidths are not large compared to the slit function of the spectrometer. The slit function of the spectrometer is determined (20). Spectral data of the laser beam is measured with the spectrometer to produce a measured laser beam spectrum which represents a convolution of the laser beam spectrum and the spectrometer slit function (76). This measured laser spectrum is then mathematically convolved with the slit function of the spectrometer to produce a doubly convolved spectrum. Bandwidth values representing true laser bandwidths are determined from measured laser spectrum and the doubly convolved spectrum. Preferably the true laser bandwidths are calculated by determining the difference between 'twice a measured laser bandwidth' and a corresponding 'doubly convolved bandwidth.' This method provides an excellent estimate of the true laser bandwidth because 'twice the measured laser bandwidth' represents two laser bandwidths and two spectrometer slit function bandwidths and the 'doubly convolved bandwidth' represents one laser bandwidth and two spectrometer slit function bandwidths. Thus, the difference is a representation of the true laser bandwidth. In a preferred embodiment the bandwidth parameters measured are the full width half-maximum bandwidth and the 95% integral bandwidth.

    ECHELLE-POLYCHROMATOR
    175.
    发明授权
    ECHELLE-POLYCHROMATOR 失效
    ECHELLE，多色

    公开(公告)号：EP0587683B1

    公开(公告)日：1995-02-22

    申请号：EP92911706.7

    申请日：1992-06-05

    Applicant: BODENSEEWERK PERKIN-ELMER GMBH

    Inventor： FLOREK, Stefan ,  BECKER-ROSS, Helmut

    IPC: G01J3/12 ,  G01J3/28 ,  G02B5/06

    CPC classification number: G01J3/14 ,  G01J3/1809 ,  G01J3/22 ,  G01J3/2803 ,  G01J2003/1208 ,  G01J2003/1286 ,  G01J2003/1828

    Abstract: A monochromator (14) with a prism (20) is disposed so that light passes through it before passing on to an echelle polychromator (50). The linear dispersion of the monochromator (14) can be changed by changing the angular dispersion of the prism (20). This makes it possible to investigate, at high resolution, using an echelle grating (54), a particular spectral position and the region close to it. Care is taken that, depending on the mean wavelength being observed, not only is the detector array (66) of the polychromator (50) completely used, but also interfering orders are kept away from the polychromator (50). The linear dispersion of the monchromator can be changed for this purpose.

    Abstract translation: 具有棱镜（20）的单色器（14）被设置成使得光在通过到中阶梯多色仪（50）之前穿过它。 单色器（14）的线性色散可以通过改变棱镜（20）的角色散来改变。 这使得可以在高分辨率下使用中阶梯光栅（54），特定的光谱位置和靠近它的区域进行研究。 注意的是，取决于观察到的平均波长，不仅多色仪（50）的检测器阵列（66）被完全使用，而且干扰顺序也远离多色仪（50）。 单色器的线性色散可以为此改变。

    Optical system for spectral analysis
    176.
    发明公开
    Optical system for spectral analysis 失效
    Optisches System zur Spektralanalyse。

    公开(公告)号：EP0403228A1

    公开(公告)日：1990-12-19

    申请号：EP90306390.7

    申请日：1990-06-12

    Applicant: FISONS plc

    Inventor： Baranne, Andre ,  Pilloud, Francis

    IPC: G01J3/18

    CPC classification number: G01J3/02 ,  G01J3/0208 ,  G01J3/0229 ,  G01J3/1804 ,  G01J3/1809 ,  G01J2003/1278 ,  G01J2003/1814

    Abstract: An optical device for the spectral analysis of a light source comprises

    a) a spectrograph assembly (1,2,31,32) including a dispersive element (32), and
    b) a classical collimator (3),
    the device being characterised in that the spectrograph assembly (1,2,31,32) supplies a complete intermediate spectrum at the object focus of the classical collimator and the classical collimator (3) reforms, at its image focus, an image of the dispersive element (32).
    The spectrograph assembly (1,2,31,32) is preferably a Czerny-Turner or other type of spectrograph comprising an entry slit (31), two juxtaposed concave mirrors (1,2) of the same focal length and a dispersive element (32) placed strictly in the common focal plane of the two mirrors (1,2). Most preferably, the classical collimator (3) is the first mirror of a second, similar spectrograph assembly (3,4,34).
    The device is most advantageous in that it is readily useable for both simultaneous and sequential spectroscopy.

    Abstract translation: 用于光源的光谱分析的光学装置包括a）包括分散元件（32）的光谱仪组件（1,2,31,32）和b）经典准直器（3），该装置的特征在于： 光谱仪组件（1,2,31,32）在经典准直仪的物体焦点处提供完整的中间光谱，经典的准直仪（3）在其图像焦点处改变色散元件（32）的图像。 光谱仪组件（1,2,31,32）优选地是Czerny-Turner或其它类型的光谱仪，其包括入口狭缝（31），相同焦距的两个并置的凹面镜（1,2）和分散元件（ 32）严格放置在两个镜子（1,2）的公共焦平面上。 最优选地，经典准直器（3）是第二类似的光谱仪组件（3,4,34）的第一反射镜。 该装置是最有利的，因为其易于用于同步和顺序光谱学。

    Detector for a spectrometer
    177.
    发明公开
    Detector for a spectrometer 失效
    Detektorfürein Spektrometer。

    公开(公告)号：EP0316802A2

    公开(公告)日：1989-05-24

    申请号：EP88118828.8

    申请日：1988-11-11

    Applicant: THE PERKIN-ELMER CORPORATION

    Inventor： Barnard, Thomas W.

    IPC: G01J3/28 ,  H01L27/14

    CPC classification number: G01J3/1809 ,  G01J3/2803

    Abstract: A novel solid state array detector is useful in an optical spectrometer of the type that includes a crossed dispersion system receptive of radiation for producing a pair of two dimensional displays of spectral lines characteristic of at least one atomic element. One display is ultraviolet and the other is visible. A solid-state chip has on the front surface a two dimensional array of photosensitive pixels receptive of radiation of selected spectral lines and proximate background radiation. The pixels are arranged in a plurality of sub-arrays with each sub-array consisting of at least one of the pixels and are positioned at a projection location on the front surface of at least one of the chip among the sub-arrays are operatively connected to the pixels for producing readout signals correlating with intensities of the selected spectral lines.

    Abstract translation: 一种新颖的固态阵列检测器可用于包括接受辐射的交叉色散系统的类型的光谱仪，用于产生至少一个原子元素特征的光谱线的一对二维显示器。 一个显示器是紫外线，另一个是可见的。 固态芯片在前表面上具有接受所选光谱线和近背景辐射的辐射的感光像素的二维阵列。 像素被布置在多个子阵列中，其中每个子阵列由至少一个像素组成并且位于子阵列中的至少一个芯片的前表面上的投影位置处可操作地连接 到用于产生与所选频谱线的强度相关的读出信号的像素。

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