公开(公告)号：US20170276615A1

公开(公告)日：2017-09-28

申请号：US15197408

申请日：2016-06-29

Applicant: FOGALE NANOTECH

Inventor： Gilles FRESQUET ,  Alain COURTEVILLE ,  Philippe GASTALDO

IPC: G01N21/95 ,  G01B11/06 ,  G01N21/88 ,  G01B11/02

CPC classification number: G01J3/0208 ,  G01B11/022 ,  G01B11/0608 ,  G01B11/22 ,  G01B11/245 ,  G01B2210/50 ,  G01B2210/56 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/453 ,  G01N21/8851 ,  G01N21/9501 ,  G01N21/956 ,  G01N2201/063 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B21/0064 ,  H01L22/12

Abstract: A method is provided for inspecting the surface of an object such as a wafer having tridimensional structures, using a confocal chromatic device with a plurality of optical measurement channels and a chromatic lens allowing optical wavelengths of a broadband light source to be focused at different axial distances defining a chromatic measurement range. The method includes a step of obtaining an intensity information corresponding to the intensity of the light actually focused on an interface of the object within the chromatic measurement range at a plurality of measurement points on the object by measuring a total intensity over the full spectrum of the light collected by at least some of the optical measurement channels in a confocal configuration.

公开(公告)号：US20170276544A1

公开(公告)日：2017-09-28

申请号：US15282305

申请日：2016-09-30

Applicant: FOGALE NANOTECH

Inventor： Philippe GASTALDO

IPC: G01J3/02 ,  G01J3/453 ,  G01J3/18

CPC classification number: G01N21/9501 ,  G01B11/022 ,  G01B11/0608 ,  G01B11/22 ,  G01B11/245 ,  G01B2210/50 ,  G01B2210/56 ,  G01J3/0208 ,  G01J3/0218 ,  G01J3/18 ,  G01J3/453 ,  G01N21/8851 ,  G01N21/956 ,  G01N2201/063 ,  G01N2201/0833 ,  G01N2201/105 ,  G02B21/0064 ,  H01L22/12

Abstract: A confocal chromatic device is provided, including at least one chromatic lens with an extended axial chromatism; at least one broadband light source; at least one optical detector; and at least one measurement channel with a planar Y-junction made with a planar waveguide optics technology, and arranged for transferring light from the at least one light source towards the at least one chromatic lens and for transferring light reflected back through the at least one chromatic lens towards the at least one optical detector.

公开(公告)号：US09726604B2

公开(公告)日：2017-08-08

申请号：US14924815

申请日：2015-10-28

Applicant: Hiroyoshi Sekiguchi ,  Shintaroh Kida ,  Kohji Oshikiri ,  Izumi Itoh

Inventor： Hiroyoshi Sekiguchi ,  Shintaroh Kida ,  Kohji Oshikiri ,  Izumi Itoh

IPC: G01N21/55 ,  B60Q1/08 ,  B60S1/08 ,  B60R16/023 ,  G01N21/552 ,  G01N21/94 ,  G01N21/958

CPC classification number: G01N21/55 ,  B60Q1/085 ,  B60R16/023 ,  B60S1/0844 ,  G01N21/552 ,  G01N21/94 ,  G01N2021/945 ,  G01N2021/9586 ,  G01N2201/061 ,  G01N2201/063 ,  G01N2201/064

Abstract: An adhering detection apparatus includes a light source to emit probe light to a light translucent object during an emission period, and to stop an emission of the probe light to the light translucent object during a non-emission period, a light receiver to receive light coming from the light translucent object during the emission period and the non-emission period of the light source, and an adhering detection processor to perform an adhering detection processing for detecting a substance adhering to the light translucent object based on light quantity of the light coming from the light translucent object and received by the light receiver, and to output a detection result of the adhering detection processing. The adhering detection processor selectively performs one or more processes depending on the light quantity of the light received by the light receiver during the non-emission period of the light source.

公开(公告)号：US09683947B2

公开(公告)日：2017-06-20

申请号：US15000715

申请日：2016-01-19

Applicant: NuFlare Technology, Inc.

Inventor： Masatoshi Hirono ,  Riki Ogawa ,  Takeshi Fujiwara

IPC: G01N21/88 ,  G01N21/95 ,  G03F1/84 ,  G01N21/956

CPC classification number: G01N21/9501 ,  G01N21/956 ,  G01N2021/95676 ,  G01N2201/063 ,  G03F1/84

Abstract: According to one embodiment, a defect inspection device includes a first beam splitter configured to branch light into a first optical path and a second optical path, a first optical system on the first optical path, a second optical system on the second optical path, a first aperture configured to form an illumination field of an inspection sample by light from the first optical system, a second aperture configured to form an illumination field of the inspection sample by light from the second optical system, and a third optical system configured to illuminate, with a first illumination, an image of the first aperture on a first area of the inspection sample, and to illuminate, with a second illumination, an image of the second aperture on a second area of the inspection sample.

公开(公告)号：US09618531B2

公开(公告)日：2017-04-11

申请号：US14379744

申请日：2013-03-01

Applicant: California Institute of Technology ,  University of Rochester

Inventor： Oskar Painter ,  Martin Winger ,  Qiang Lin ,  Alexander Krause ,  Tim D. Blasius

IPC: G01P15/08 ,  G01P15/093 ,  B81B3/00 ,  B81C1/00 ,  B82Y99/00 ,  G01N21/55 ,  G01N21/59 ,  H01L21/02

CPC classification number: G01P15/093 ,  B81B3/0051 ,  B81B3/0067 ,  B81B3/0083 ,  B81B2201/0235 ,  B81C1/00015 ,  B82Y99/00 ,  G01N21/55 ,  G01N21/59 ,  G01N2201/06113 ,  G01N2201/063 ,  H01L21/02373

Abstract: Technologies are generally described for operating and manufacturing optomechanical accelerometers. In some examples, an optomechanical accelerometer device is described that uses a cavity resonant displacement sensor based on a zipper photonic crystal nano-cavity to measure the displacement of an integrated test mass generated by acceleration applied to the chip. The cavity-resonant sensor may be fully integrated on-chip and exhibit an enhanced displacement resolution due to its strong optomechanical coupling. The accelerometer structure may be fabricated in a silicon nitride thin film and constitute a rectangular test mass flexibly suspended on high aspect ratio inorganic nitride nano-tethers under high tensile stress. By increasing the mechanical Q-factors through adjustment of tether width and tether length, the noise-equivalent acceleration (NEA) may be reduced, while maintaining a large operation bandwidth. The mechanical Q-factor may be improved with thinner (e.g.,

公开(公告)号：US09562852B1

公开(公告)日：2017-02-07

申请号：US15062353

申请日：2016-03-07

Applicant: International Business Machines Corporation

Inventor： Tymon Barwicz ,  William M. Green ,  Yves C. Martin ,  Jason S. Orcutt ,  Lionel Tombez

IPC: G01N21/00 ,  G01N21/39 ,  G01N21/3504

CPC classification number: G01N21/39 ,  G01J3/0218 ,  G01J3/0256 ,  G01J3/42 ,  G01J2003/423 ,  G01N21/3504 ,  G01N21/552 ,  G01N2021/399 ,  G01N2201/06113 ,  G01N2201/063 ,  G01N2201/08 ,  G02B6/12004 ,  G02B6/12007 ,  G02B6/122 ,  G02B2006/12138 ,  G02B2006/1215

Abstract: A method of fabricating a gas sensor on a substrate and a gas sensor fabricated on a substrate that includes optical and electronic components are described. The method includes fabricating a laser to output light over a range of wavelengths within a waveguide, fabricating a splitter to split the light output by the laser to a reference waveguide and to a detection waveguide, fabricating a reference cell to house the reference waveguide and a reference gas. An output of the reference waveguide is coupled to a first optical detector and an output of the detection waveguide is coupled to a second optical detector to identify or quantify an ambient gas.

Abstract translation: 描述了在衬底上制造气体传感器的方法和制造在包括光学和电子部件的衬底上的气体传感器。 该方法包括制造激光器以在波导内的波长范围上输出光，制造分离器以将由激光器输出的光分成参考波导和检测波导，制造参考单元以容纳参考波导和 参考气体 参考波导的输出耦合到第一光学检测器，并且检测波导的输出耦合到第二光学检测器以识别或定量环境气体。

公开(公告)号：US20160131885A1

公开(公告)日：2016-05-12

申请号：US14996717

申请日：2016-01-15

Applicant: NIKON CORPORATION

Inventor： Hiroaki NAKAYAMA ,  Yumiko OUCHI

IPC: G02B21/06 ,  G02B21/16 ,  G01N21/64

CPC classification number: G02B21/06 ,  G01N21/64 ,  G01N21/6428 ,  G01N2021/6439 ,  G01N2201/063 ,  G01N2201/0638 ,  G02B21/0032 ,  G02B21/0076 ,  G02B21/16 ,  G02B21/367 ,  G02B27/58

Abstract: A structured illumination device includes: a diffraction unit that diffracts light beams of a plurality of wavelengths that are emitted simultaneously or sequentially by a light source into a plurality of diffracted beams; and an optical system that forms interference fringes on a surface of a sample using the plurality of diffracted beams diffracted by the diffraction unit, the optical system including a first optical system and a second optical system that focuses the plurality of diffracted beams at positions on or near a pupil plane of the first optical system, and a magnification characteristic dY(λ) of the second optical system satisfying the condition of (fo·nw−afλ/P)≦dY(λ)≦(fo·NA−afλ/P), where a=1 (for M=1, 2) or a=2 (for M=3).

Abstract translation: 结构化照明装置包括：衍射单元，将由光源同时或顺序地发射的多个波长的光束衍射成多个衍射光束; 以及光学系统，其使用由衍射单元衍射的多个衍射光束在样品的表面上形成干涉条纹，所述光学系统包括第一光学系统和第二光学系统，所述第一光学系统和第二光学系统将所述多个衍射光束聚焦在或 在第一光学系统的光瞳面附近，满足条件（fo·nw-afλ/ P）＆nlE; dY（λ）＆nlE;（fo·NA-afλ）的第二光学系统的放大特性dY（λ） / P），其中a = 1（对于M = 1,2）或a = 2（对于M = 3）。

公开(公告)号：US20160131579A1

公开(公告)日：2016-05-12

申请号：US14924815

申请日：2015-10-28

Applicant: Hiroyoshi SEKIGUCHI ,  Shintaroh KIDA ,  Kohji OSHIKIRI ,  Izumi ITOH

Inventor： Hiroyoshi SEKIGUCHI ,  Shintaroh KIDA ,  Kohji OSHIKIRI ,  Izumi ITOH

IPC: G01N21/55 ,  B60Q1/08 ,  B60S1/08 ,  B60R16/023

CPC classification number: G01N21/55 ,  B60Q1/085 ,  B60R16/023 ,  B60S1/0844 ,  G01N21/552 ,  G01N21/94 ,  G01N2021/945 ,  G01N2021/9586 ,  G01N2201/061 ,  G01N2201/063 ,  G01N2201/064

Abstract: An adhering detection apparatus includes a light source to emit probe light to a light translucent object during an emission period, and to stop an emission of the probe light to the light translucent object during a non-emission period, a light receiver to receive light coming from the light translucent object during the emission period and the non-emission period of the light source, and an adhering detection processor to perform an adhering detection processing for detecting a substance adhering to the light translucent object based on light quantity of the light coming from the light translucent object and received by the light receiver, and to output a detection result of the adhering detection processing. The adhering detection processor selectively performs one or more processes depending on the light quantity of the light received by the light receiver during the non-emission period of the light source.

Abstract translation: 附着检测装置包括在发光期间将探测光发射到光半透明物体的光源，并且在非发光期间停止将探测光发射到光半透明物体;光接收器，用于接收光 在光源的发光期间和非发光期间的光半透明物体，以及附着检测处理器，其基于来自光源的光的光量进行用于检测附着在所述光半透明物体上的物质的附着检测处理 该光半透明物体并由光接收器接收，并输出粘附检测处理的检测结果。 粘附检测处理器根据在光源的非发光时段期间由光接收器接收的光的光量来选择性地执行一个或多个处理。

公开(公告)号：US20160084751A1

公开(公告)日：2016-03-24

申请号：US14786144

申请日：2014-04-20

Applicant: MOBILEODT LTD

Inventor： David Levitz ,  Ariel Be'ery

IPC: G01N21/21

CPC classification number: G01N21/21 ,  G01N21/956 ,  G01N2201/063

Abstract: A polarized light imaging apparatus is provided. In an embodiment, the apparatus comprises a light source for producing light beams; an illumination optic coupled to the light source for guiding the light beams towards the sample; a linear polarizer coupled to the illumination optic and configured to produce a linearly polarized light towards the sample respective of the light beams; a TIR birefringent polarizing prism (BPP) coupled to the sample to maximize a refraction difference between ordinary waves and extraordinary waves of light returning from the sample; and a detection optic unit coupled to the non-TIR BPP for guiding the light waves returning from the sample towards a single polarization sensitive sensor element (SE), the SE is configured to capture at least one frame of the sample respective of the light waves returning from the superficial single-scattering layer of the sample apart from the deeper diffuse layer.

Abstract translation: 提供了一种偏振光成像装置。 在一个实施例中，该装置包括用于产生光束的光源; 耦合到光源的照明光学器件，用于将光束引向样品; 耦合到所述照明光学器件并且被配置为朝向所述光束的所述样本产生线偏振光的线性偏振器; 耦合到样品的TIR双折射偏振棱镜（BPP），以最大化普通波和从样品返回的非常波的波之间的折射差; 以及耦合到非TIR BPP的检测光学单元，用于将从样品返回的光波导向单个偏振敏感传感器元件（SE），所述SE被配置为捕获相应于所述光波的样本的至少一个帧 从样品的表面单散射层离开较深的漫射层返回。

公开(公告)号：US09217718B2

公开(公告)日：2015-12-22

申请号：US14587271

申请日：2014-12-31

Applicant: HITACHI HIGH-TECHNOLOGIES CORPORATION

Inventor： Yuko Otani ,  Takehiro Tachizaki ,  Masahiro Watanabe ,  Shunichi Matsumoto

IPC: G01N21/88 ,  G01N21/95 ,  G01N21/21 ,  G01N21/47 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/21 ,  G01N21/47 ,  G01N21/94 ,  G01N21/9501 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/8822 ,  G01N2021/8848 ,  G01N2201/06113 ,  G01N2201/063

Abstract: The disclosed device, which, using an electron microscope or the like, minutely observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, can reliably insert a defect to be observed into the field of an electron microscope or the like, and can be a device of a smaller scale. The electron microscope, which observes defects detected by an optical appearance-inspecting device or by an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a spatial filter and a distribution polarization element are inserted at the pupil plane when making dark-field observations using this optical microscope. The electron microscope, which observes defects detected by an optical appearance-inspecting device or an optical defect-inspecting device, has a configuration wherein an optical microscope that re-detects defects is incorporated, and a distribution filter is inserted at the pupil plane when making dark-field observations using this optical microscope.

Abstract translation: 所公开的使用电子显微镜等精细观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的装置可以将观察到的缺陷可靠地插入电子显微镜领域或 喜欢，可以是一个规模较小的设备。 观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的电子显微镜具有结合了重新检测缺陷的光学显微镜，并且插入空间滤光器和分布偏振元件 在使用该光学显微镜进行暗视场观察时在瞳孔平面上。 观察由光学外观检查装置或光学缺陷检查装置检测到的缺陷的电子显微镜具有结合了重新检测缺陷的光学显微镜，并且在制造时将分配滤波器插入瞳孔平面 使用该光学显微镜进行暗场观测。