公开(公告)号：US20040086171A1

公开(公告)日：2004-05-06

申请号：US10661633

申请日：2003-09-15

Inventor： Chung-Sam Jun ,  Sun-Yong Choi ,  Kwang-Soo Kim ,  Joo-Woo Kim ,  Jeong-Hyun Choi ,  Dong-Jin Park

IPC: G06K009/00

CPC classification number: H01L21/67253 ,  G01N21/9503 ,  G01N21/95607 ,  G01N2021/0162 ,  G01N2021/0187 ,  G01N2021/1736 ,  G01N2021/1772 ,  G01N2021/8411 ,  G01N2021/8896 ,  G01N2021/95615 ,  G01N2201/103 ,  G01N2201/1087

Abstract: An automated and integrated substrate inspecting apparatus for performing an EBR/EEW inspection, a defect inspection of patterns and reticle error inspection of a substrate includes a first stage for supporting a substrate; a first image acquisition unit for acquiring a first image of a peripheral portion of the substrate supported by the first stage; a second stage for supporting the substrate; a second image acquisition unit for acquiring a second image of the substrate supported by the second stage; a transfer robot for transferring the substrate between the first stage and the second stage; and a data processing unit, connected to the first image acquisition unit and the second image acquisition unit, for inspecting results of an edge bead removal process and an edge exposure process performed on the substrate using the first image, and for inspecting for defects of patterns formed on the substrate using the second image.

Abstract translation: 用于执行EBR / EEW检查的自动化和一体化的基板检查装置，对基板的图案和掩模版错误检查的缺陷检查包括用于支撑基板的第一阶段; 第一图像获取单元，用于获取由所述第一平台支撑的所述基板的周边部分的第一图像; 用于支撑衬底的第二阶段; 第二图像获取单元，用于获取由第二平台支撑的基板的第二图像; 用于在第一阶段和第二阶段之间转移衬底的传送机器人; 以及数据处理单元，连接到第一图像获取单元和第二图像获取单元，用于检查使用第一图像在基板上执行的边缘珠去除处理和边缘曝光处理的结果，并且用于检查图案的缺陷 使用第二图像在基板上形成。

公开(公告)号：US20040082252A1

公开(公告)日：2004-04-29

申请号：US10442054

申请日：2003-05-21

Inventor： Meng-Chieh Liao ,  Jiun-Haw Lee ,  Chi-Chung Chen

IPC: H01J009/50

CPC classification number: G01N21/95 ,  G01N21/94 ,  G01N2021/8864 ,  G01N2021/945 ,  G01N2021/9513 ,  G01N2201/103 ,  H01L2251/568

Abstract: A detection and repair system includes an optical microscope, an image-retrieving device, an emission detector, a data controller, and a laser beam generator. When detecting the location of a defect, the system charges a detected region of an organic electroluminescent device with a negative bias or low forward bias before the device is lighted on. Then, the emission detector detects the locations of defects, which generate emission such as photons, thermal or IR emission, in an enlarged image. The laser beam generator generates a laser beam, which is used to isolate one of the defects. Furthermore, this invention also discloses a method for detecting and repairing an organic electroluminescent device.

Abstract translation: 检测和修复系统包括光学显微镜，图像检索装置，发射检测器，数据控制器和激光束发生器。 当检测到缺陷的位置时，系统在器件点亮之前对具有负偏压或低正偏压的有机电致发光器件的检测区域进行充电。 然后，发射检测器检测在放大图像中产生诸如光子，热或IR发射的发射的缺陷的位置。 激光束发生器产生用于隔离缺陷之一的激光束。 此外，本发明还公开了一种用于检测和修复有机电致发光器件的方法。

公开(公告)号：US5127726A

公开(公告)日：1992-07-07

申请号：US354486

申请日：1989-05-19

Applicant: Kevin E. Moran

Inventor： Kevin E. Moran

IPC: G01B9/04 ,  G01B11/30 ,  G01B21/30 ,  G01N21/31 ,  G01N21/88 ,  G01N21/94 ,  G01N21/95 ,  G01N21/956 ,  G06T1/00 ,  H01L21/00 ,  H01L21/66 ,  H04N7/18

CPC classification number: H01L21/67288 ,  G01N21/88 ,  G01N2021/8887 ,  G01N2021/9513 ,  G01N21/31 ,  G01N21/9501 ,  G01N2201/103 ,  H01L22/12

Abstract: The invention relates to an inspection system for inspecting the surfaces of wafers, LCD's and film substrates for flaws. The system includes a scanning laser inspection system for quickly inspecting the surface and identifying and locating the flaws. The system generates and displays a flaw map graphically illustrating the article surface and the respective locations of the flaws for subsequent optical inspection. The operator selects a flaw and an optical inspection system is positioned over the selected flaw to provide a magnified image of the flaw. The operator may optically inspect all or any number of the flaws. The invention also includes means for spectrometrically analyzing the reflected light to further identify the flaw.

公开(公告)号：US4902132A

公开(公告)日：1990-02-20

申请号：US205725

申请日：1988-06-13

Applicant: Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

Inventor： Martin J. Murphy, Jr. ,  Jack B. Stubbs ,  Thomas A. Leonard

IPC: C12M1/34 ,  G01N15/12 ,  G01N15/14 ,  G01N21/51

CPC classification number: G01N15/1468 ,  C12M23/16 ,  C12M41/36 ,  G01N15/12 ,  G01N21/51 ,  G01N2201/103 ,  G01N2201/1087

Abstract: A plurality of parallel spaced cylindrical capillary tubes contain single cells and/or cell colonies in a medium and gel-like agarose, and the tubes are carried by a frame-like holder supported by a motor driven X-Y translation stage of an automated microscope. The microscope also incorporates an electronic optical detector and an object lens located under the tube holder. The entire contents of each tube are internally illuminated by a precision light beam emitted from a helium-neon laser and reflected by a set of precisely positioned mirrors so that the beam extends axially through each tube when the tube extends across the vertical axis of the object lens. The contents of the tubes are sequentially scanned under the control of special software within a personal computer, and the intensity of the light reflected outwardly from each cell or cell colony is sensed by the detector and recorded in the computer along with the axial location of the reflecting cell or cell colony. Preferably, the laser light is pure red, the optical detector is sensitive to the red light, and the object lens is focused on the wall of the tube to maximize the signal-to-noise ratio and to obtain full field detection across each tube.

Abstract translation: 多个平行间隔开的​​圆柱形毛细管在培养基和凝胶状琼脂糖中含有单个细胞和/或细胞集落，并且管由由自动显微镜的电动机驱动的X-Y平移台支撑的框架状支架承载。 显微镜还包括位于管座下方的电子光学检测器和物镜。 每个管的整个内容物由从氦氖激光器发射并由一组精确定位的反射镜反射的精确光束内部照射，使得当管延伸穿过物体的垂直轴线时，光束轴向延伸穿过每个管 镜片。 在个人计算机内的特殊软件的控制下依次扫描管内容物，并且由每个细胞或细胞集落向外反射的光的强度由检测器检测并记录在计算机中以及 反映细胞或细胞集落。 优选地，激光是纯红色，光学检测器对红光敏感，并且物镜聚焦在管的壁上以最大化信噪比并且跨越每个管获得全场检测。

公开(公告)号：US4695157A

公开(公告)日：1987-09-22

申请号：US786609

申请日：1985-10-11

Applicant: Gary L. Schoenbaum ,  Lewis A. Latanzi ,  Stephen L. Hedrick ,  Harold V. Johnson

Inventor： Gary L. Schoenbaum ,  Lewis A. Latanzi ,  Stephen L. Hedrick ,  Harold V. Johnson

IPC: G01N21/47 ,  G01N21/88 ,  G01N21/956

CPC classification number: G01N21/8806 ,  G01N21/474 ,  G01N2021/4752 ,  G01N2021/8887 ,  G01N2021/95646 ,  G01N2201/103

Abstract: An optical unit for inspecting the soldered surface of a printed circuit board incorporates a thick-walled translucent concave diffuser dome with a hollow central cavity facing the surface under inspection, lamps directing illumination on the exterior of the dome, inspection portals spaced around the diffuser dome for video camera inspection of the board surface, and X-Y maneuvering control means governing the relative scanning repositioning of the board surface and the dome. A light baffle between each camera and its inspection portal, incorporating alternately white and black conically chamfered rings, produces improved imaging of the inspected surface, and a flexible translucent skirt extending from the dome rim to the inspected surface, preferably formed of a large plurality of white plastic bristles, blocks direct illumination and assures substantially uniform diffused illumination of the inspected surface.

Abstract translation: 用于检查印刷电路板的焊接表面的光学单元包括厚壁的半透明的凹形扩散器圆顶，其具有面向被检查表面的中空中心腔，在圆顶的外部引导照明的灯，围绕漫射器圆顶间隔开的检查入口 用于电路板表面的摄像机检查，以及XY操纵控制装置，用于控制板表面和圆顶的相对扫描重新定位。 每个摄像机与其检查门口之间的光挡板，并入交替的白色和黑色锥形倒角环，产生被检查表面的改进的成像，以及从圆顶边缘延伸到被检查表面的柔性半透明裙部，优选地由多个 白色塑料刷毛，阻挡直接照明并确保被检查表面的基本均匀的漫射照明。

公开(公告)号：WO2017144619A1

公开(公告)日：2017-08-31

申请号：PCT/EP2017/054244

申请日：2017-02-23

Applicant: SINGLE TECHNOLOGIES AB

Inventor： STUBBE, Raoul ,  SAHLGREN, Bengt ,  STRÖMQUIST, Johan

IPC: G01N21/64 ,  G01N21/47 ,  G02B21/00 ,  G02B21/33 ,  G02B21/26

CPC classification number: G01N21/6458 ,  G01N21/474 ,  G01N21/6486 ,  G01N2021/6419 ,  G01N2021/6471 ,  G01N2021/6478 ,  G01N2021/6482 ,  G01N2021/6484 ,  G01N2201/0833 ,  G01N2201/103 ,  G02B19/0019 ,  G02B19/0057 ,  G02B21/0032 ,  G02B21/0036 ,  G02B21/0064 ,  G02B21/0076 ,  G02B21/26 ,  G02B21/33 ,  G02B27/1006 ,  G02B27/141

Abstract: Apparatus for imaging a sample (109), said apparatus comprising: illumination means (101, 102, 103, 104, 105, 106, 107, 108) for illuminating said sample (109) simultaneously in a line focus or an array of foci; and detection means (108, 107, 106b, 111, 112, 113) for detecting photons emitted or scattered from a sample (109) simultaneously in an array of fields of view; wherein an array of sub-observation volumes in a sample (109), from which photons are emitted or scattered during imaging, is defined by the volumes in space where the line focus or array of foci from the illumination means (101, 102, 103, 104, 105, 106, 107, 108) overlap with the corresponding array of field of views of the detection means (108, 107, 106b, 111, 112, 113); a sample holder (110, 110a), preferably a cylindrical sample holder (110, 110a), configured to hold the sample (109) at a surface thereof, said sample holder (110, 110a) being rotatably arranged such that at least a portion of said sample (109) can be transported through at least one of said sub-observation volumes by rotating the sample holder (110, 110a).

Abstract translation: （109）成像的设备，所述设备包括：照明装置（101,102,103,104,105,106,107,108），用于同时照亮所述样品（109）和所述样品 线焦点或焦点阵列; 和检测装置（108,107,106b，111,112,113），用于同时在一个视场阵列中检测从样本（109）发射或散射的光子; 其中在成像过程中从其发射或散射光子的样本（109）中的子观察体积的阵列由空间体积限定，其中来自照明装置（101,102,103）的线焦点或焦点阵列 ，104,105,106,107,108）与所述检测装置（108,107,106b，111,112,113）的所述视场的对应阵列重叠。 样品保持器（110,110a），优选圆柱形样品保持器（110,110a），被配置为将样品（109）保持在其表面处，所述样品保持器（110,110a）可旋转地布置成使得至少一部分 可以通过旋转样本保持器（110,110a）将所述样本（109）的至少一个传送通过所述子观察容积中的至少一个。

公开(公告)号：WO2016142153A1

公开(公告)日：2016-09-15

申请号：PCT/EP2016/053584

申请日：2016-02-19

Applicant: KONINKLIJKE PHILIPS N.V.

Inventor： BOAMFA, Marius, Iosif ,  RAS, Arnoldus, Johannes, Martinus, Jozeph ,  HADDEMAN, Theodoor, Bastiaan, Johannes

IPC: G02B21/08 ,  G01N21/64 ,  G02B21/36 ,  G02B5/02

CPC classification number: G02B21/364 ,  G01N21/251 ,  G01N21/64 ,  G01N2201/103 ,  G02B5/0236 ,  G02B5/0278 ,  G02B21/086 ,  G02B21/365

Abstract: The present invention relates to digital pathology, and relates in particular to a digital pathology scanner illumination unit. In order to provide digital pathology scanning with improved illumination, a digital pathology scanner illumination unit (10) is provided that comprises a light source (12), a light mixing chamber (14), and a light diffuser (16). The light source comprises a plurality of light elements (18) that are arranged longitudinally along a linear extension direction. The mixing chamber comprises a transparent volume (22) providing a mixing distance (DM) between the plurality of the light elements and the light diffuser such that light with a uniform intensity is provided at a downstream edge (26) of the mixing chamber; and the mixing chamber is arranged, in terms of light propagation, between the plurality of the light elements and the light diffuser. Further, the light diffuser comprises a diffusing material such that the light is transformed into light that has uniformity at different angles, in particular low angles.

Abstract translation: 本发明涉及数字病理学，特别涉及数字病理扫描仪照明单元。 为了提供具有改进的照明的数字病理扫描，提供了包括光源（12），光混合室（14）和光扩散器（16）的数字病理扫描器照明单元（10）。 光源包括沿着线性延伸方向纵向布置的多个光元件（18）。 混合室包括透明体积（22），其提供多个光元件和光漫射体之间的混合距离（DM），使得在混合室的下游边缘（26）处设置具有均匀强度的光; 并且混合室在光传播方面被布置在多个光元件和光扩散器之间。 此外，光扩散器包括漫射材料，使得光被转换成具有不同角度，特别是低角度的均匀性的光。

公开(公告)号：WO2015142975A1

公开(公告)日：2015-09-24

申请号：PCT/US2015/021131

申请日：2015-03-18

Applicant: CORNING INCORPORATED

Inventor： CITRINITI, Joseph Henry ,  HARIHARA, Parasuram Padmanabhan

IPC: B28B17/00 ,  B05C5/02 ,  B05D1/26 ,  B29C47/00 ,  B29C47/02 ,  B28B19/00 ,  G01B7/06 ,  B28C7/02 ,  B28C7/04 ,  B28C5/12 ,  B28C5/14 ,  B65G47/91 ,  G05D11/00 ,  G01N21/952

CPC classification number: B28B19/0023 ,  B01D46/2418 ,  B01D2279/30 ,  B28B17/0072 ,  B28B19/0038 ,  C04B38/0006 ,  C04B41/009 ,  C04B41/5076 ,  C04B41/85 ,  G01N21/8422 ,  G01N21/8914 ,  G01N21/95 ,  G01N21/952 ,  G01N21/95692 ,  G01N2201/06113 ,  G01N2201/103

Abstract: An in situ inspection system and method to inspect a honeycomb body (122) skin in a skinning system. The inspection system includes a line illuminator (148) to generate a line illumination on the skin (136) perpendicular to an axial direction (112) of the honeycomb body travel, and a detector (152) to detect the line illumination scattered from the skin (136) and generate a signal based on the detected line illumination. A controller (184) is configured to receive the signal generated by the detector (152), compare the received signal to a previously stored defect free signal in real-time, and control at least one skinning process parameter based on the comparison. The method includes in situ inspecting the skin (136) and controlling at least one skinning process parameter based on the inspection. In the method, the in situ inspection includes illuminating a line of the skin (136) perpendicular to the axial direction (112) and detecting the illuminated line scattered from the skin (136).

Abstract translation: 一种在皮肤系统中检测蜂窝体（122）皮肤的原位检查系统和方法。 该检查系统包括：垂直于蜂窝体行进的轴向（112）的皮肤（136）上产生线条照明的线照明器（148），以及检测器（152），用于检测从皮肤散射的线照明 （136），并且基于检测到的线照明产生信号。 控制器（184）被配置为接收由检测器（152）产生的信号，将接收的信号与先前存储的无缺陷信号进行实时比较，并且基于该比较来控制至少一个剥皮处理参数。 该方法包括基于检查原位检查皮肤（136）并控制至少一个剥皮过程参数。 在该方法中，原位检查包括照射垂直于轴向方向（112）的皮肤线（136）并检测从皮肤（136）散射的照明线。

公开(公告)号：WO2015120030A1

公开(公告)日：2015-08-13

申请号：PCT/US2015/014430

申请日：2015-02-04

Applicant: NSK AMERICAS, INC.

Inventor： MORRISON, George ,  BROWN, Ty, Alan ,  ROOD, Timothy, Brian

IPC: G01N21/952 ,  G01B11/24

CPC classification number: G01N21/9515 ,  B62D65/02 ,  G01B5/0025 ,  G01B11/00 ,  G01N21/952 ,  G01N2021/888 ,  G01N2201/06113 ,  G01N2201/103

Abstract: An apparatus (110) (and associated method) for inspecting a steering column assembly (10) including a motor (114a) driven drive sleeve (128) supported in a headstock (114) and having a longitudinal axis, and being adapted for receiving and engaging a portion of the steering column assembly, and at least one optical scanning device (160a, 160b, 160c) adapted to optically scan a feature of interest of the steering column assembly (10) while the shaft of the steering column assembly (10) is rotated for gathering data for identifying one or more deviations from one or more predetermined values for the feature of interest.

Abstract translation: 一种用于检查转向柱组件（10）的装置（110）（和相关联的方法），所述转向柱组件包括支撑在主轴箱（114）中并具有纵向轴线的马达（114a）驱动的驱动套筒（128），并且适于接收和 接合转向柱组件的一部分，以及适于在转向柱组件（10）的轴处光学扫描转向柱组件（10）的特征的至少一个光学扫描装置（160a，160b，160c） 旋转以收集用于识别关于感兴趣特征的一个或多个预定值的一个或多个偏差的数据。

公开(公告)号：WO2014073254A1

公开(公告)日：2014-05-15

申请号：PCT/JP2013/072386

申请日：2013-08-22

Applicant: シャープ株式会社

Inventor： 渡邉　由紀夫

IPC: G01N21/64 ,  G01J1/04 ,  G02B3/04 ,  G02B3/08

CPC classification number: G01J1/0411 ,  G01J1/0422 ,  G01J1/0488 ,  G01N21/645 ,  G01N21/6456 ,  G01N21/6486 ,  G01N2021/6478 ,  G01N2201/06113 ,  G01N2201/0638 ,  G01N2201/10 ,  G01N2201/103 ,  G02B17/08 ,  G02B19/0028

Abstract: 　光検出装置は、測定対象物(１６)からの光を集光する対物レンズ素子(１７)と、上記対物レンズ素子(１７)によって集光された光を検出する光検出素子とを備え、上記対物レンズ素子(１７)は、屈折によって光を集光する中央部分(２８)と、この中央部分(２８)の周辺に位置して反射によって光を集光する周辺部分(２９)とを含んでいる。こうして、通常の凸レンズでは集光できないような大きな放射角度の光をも集めることができ、集光効率を高めて上記光検出素子による感度アップを図ることができる。

Abstract translation: 该光检测装置设置有：收集来自被测量对象物（16）的光的物镜元件（17）。 以及光检测元件，其检测通过物镜元件（17）收集的光。 物镜元件（17）包括通过折射收集光的中心部分（28）和通过位于中心部分（28）周边的反射而收集光的外围部分（29） ）。 因此，可以收集不能通过普通凸透镜收集的光，因此可以通过光检测元件提高采光效率，从而提高发光角度大，灵敏度高的光。