公开(公告)号：EP2661612A1

公开(公告)日：2013-11-13

申请号：EP11813417.0

申请日：2011-12-21

Applicant: Centre National de la Recherche Scientifique

Inventor： LONGEAUD, Christophe

IPC: G01J1/08

CPC classification number: G02B26/0816 ,  G01J1/08 ,  Y02E10/52

Abstract: The invention relates to a device for forming an interference grating on a sample, the device comprising a laser emitting a light beam of wavelength lambda, a beam splitter plate splitting the beam emitted by the laser into first and second beams (11, 14), the first beam (11) being deflected in a first direction, a first stationary deflection mirror for deflecting the first beam onto a point P of the sample at a first constant angle of incidence theta1, and at least one second stationary deflection mirror for deflecting the second beam along a final path (17) that reaches said point P of the sample at a second angle of incidence theta2 in order to form an interference grating on the sample at a pitch that depends on the angular difference theta between the first and second angles of incidence theta1 and theta2, the path of the second beam being characterized in that it includes a movable deflection mirror (7, 7') to direct and deflect the second beam from a plurality of first points of impact (71) from which the second beam (15) is directed towards a plurality of second points of impact (82) on a said second mirror (8, M2), thereby forming a plurality of pairs, each comprising first and second points of impact (71, 82), each of which corresponding to a said final path (17) of the second beam having a different value of the angle theta2, so as to cause the value of the angle of incidence theta2 to vary and thus vary the angular difference theta, and in that the first points of impact (71) are arranged on a linear or parabolic path extending from an upstream end remote from the sample where it is spaced apart from the direction of the beam (10) that is emitted by the laser in a direction opposite to the first direction and thus away from the segment (12) of the first beam that impacts said point P of the sample (ECH), said linear or parabolic path being reentrant towards said segment (12) of the first beam on going towards a downstream end closer to the sample (ECH) so as to compensate at least in part for optical path length variations of the second beam for the pairs of first and second points of impact (71, 82), each of which corresponds to a respective value of the angular difference theta.

公开(公告)号：EP2660574A1

公开(公告)日：2013-11-06

申请号：EP13158380.9

申请日：2013-03-08

Applicant: LayTec AG

Inventor： Zettler, Jörg-Thomas ,  Kaspari, Christian

IPC: G01J5/00 ,  G01J5/08 ,  G01J1/08 ,  G01J5/52

CPC classification number: G01J5/02 ,  G01J1/08 ,  G01J5/0007 ,  G01J5/0896 ,  G01J5/522 ,  H05B33/0854

Abstract: The present invention relates to a flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer.
It is an object of the present invention to provide a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit.
According to the present invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.

Abstract translation: 本发明涉及一种平面发光板，对于半导体晶片的温度校准高温计和一种方法用于确定性采矿由所述高温计的处理室内部的方法。 这是本发明的一个目的是提供一种用于通过冷源的手段校准高温计的所有其因此适用于具有窄缝处理腔室的方法。 。根据本发明，一台光用于模拟热辐射发射板设置，其包括由透明材料制成的主体，位于光用于发射光，至少一个发光板的上表面上的发光区域 源位于所述发光板的侧表面，位于所述发光板的侧表面的至少一个检测器，和用于调节由光源发射的光的强度的调节电路。

公开(公告)号：EP2551654A3

公开(公告)日：2013-08-28

申请号：EP12173296.0

申请日：2012-06-22

Applicant: Raytheon Company

Inventor： Silny, John F. ,  Schiller, Stephen J.

IPC: G01J1/08 ,  G01J1/42 ,  G01J3/28

CPC classification number: G01J1/4228 ,  G01J1/08 ,  G01J3/2803

Abstract: A method and a system for vicarious characterization of a remote sensing sensor are described. The system.

公开(公告)号：EP1949052B1

公开(公告)日：2013-03-20

申请号：EP06849825.2

申请日：2006-09-26

Applicant: OL Security Limited Liability Comapny

Inventor： CUTLIP, Hansford H.

IPC: G01J1/08 ,  G01J1/04

CPC classification number: G01J1/08 ,  G01J1/04 ,  G01J2001/0481 ,  G01N21/274 ,  G01N21/278 ,  G01N2201/065

公开(公告)号：EP2345089A1

公开(公告)日：2011-07-20

申请号：EP09821309.3

申请日：2009-10-16

Applicant: Atonometrics, Inc.

Inventor： GOSTEIN, Michael ,  STUEVE, William ,  DUNN, Lawrence, R.

IPC: H01L31/048

CPC classification number: G01J1/02 ,  G01J1/0271 ,  G01J1/04 ,  G01J1/0414 ,  G01J1/0422 ,  G01J1/08 ,  G01J2001/4266 ,  G01R31/2642 ,  G01R31/2881

Abstract: An apparatus for performing UV light exposure testing of solar panels, also known as PV modules, with superior exposure uniformity, equipment throughput, and floor space requirements, consisting of a chamber including a plurality of UV lamps in a lamp array, at least one target plane, and reflective panels positioned within the chamber to redirect UV light to the target plane(s).

公开(公告)号：EP2213993A1

公开(公告)日：2010-08-04

申请号：EP09151729.2

申请日：2009-01-30

Applicant: X-Rite Europe GmbH

Inventor： Frick, Beat

IPC: G01J3/46 ,  H04N1/60 ,  G01J1/08

CPC classification number: G01J3/46 ,  G01J1/08 ,  G01J3/462 ,  G01J3/506

Abstract: Ein Notebook Rechner ist mit einem in seine Tastaturplatte (1) integrierten Lichtmesssensor (10) ausgestattet, welcher den Monitor (4) des Rechners im geschlossenen Zustand ausmessen kann. Der Lichtmesssensor wird (nach einer vorgängigen herstellerseitigen Linearisierung) im in den Notebook Rechner eingebauten Zustand auf den zuvor mittels eines externen Farbmessgeräts vollständig charakterisierten bzw. profilierten Monitor des Notebook Rechners kalibriert, die dabei erzeugten Kalibrierungsdaten werden nicht-flüchtig, vorzugsweise im Lichtmesssensor selbst angespeichert. Anhand der abgespeicherten Kalibrierungsdaten des Lichtmesssensors lassen sich die Sensor-Signale in X,Y,Z-Farbwerte umrechnen. Der an sich nur Leuchtdichten bzw. Helligkeiten messende Lichtmesssensor wird auf diese Weise zu einem Colorimeter, das in Kombination mit dem Monitor, auf den es kalibriert wurde, zuverlässige Ergebnisse liefert. Mit Hilfe des so kalibrierten Lichtmesssensors lässt sich jederzeit eine Neu-Kalibrierung (Profilierung) des Monitors durchführen.

Abstract translation: 该方法包括用各种刺激来控制LCD监视器（4）并用光测量传感器（10）测量相关联的传感器信号。 测量的传感器信号和与刺激相关联的X，Y，Z颜色值被馈送到一组方程式中，其组合了多个校准系数上的传感器信号与X，Y，Z颜色值。 根据非易失性并存储在光测量传感器中的校准系数求解方程组。

公开(公告)号：EP2177888A2

公开(公告)日：2010-04-21

申请号：EP10001202.0

申请日：1998-10-01

Applicant: Bright Solutions, Inc.

Inventor： Kalley, Terrence, D. ,  Cavestri, Richard, C. ,  Miniutti, Robert, L.

IPC: G01M3/22 ,  G01M3/38

CPC classification number: G01J1/08 ,  F21V15/01 ,  F21V15/04 ,  F21V29/15 ,  G01J3/10 ,  G01J3/4406 ,  G01M3/20 ,  G01M3/228 ,  G01M3/38

Abstract: A light source for examining leak detection sites in heating, ventilating, and air conditioning systems using a fluorescent dye is described. The light source can include a parabolic reflector (6) or a low voltage lamp (10).

Abstract translation: 描述了一种用于检查使用荧光染料的加热，通风和空调系统中的泄漏检测点的光源。 光源可以包括抛物面反射器（6）或低压灯（10）。

公开(公告)号：EP2063277A1

公开(公告)日：2009-05-27

申请号：EP07120773.2

申请日：2007-11-15

Applicant: Atomic Energy Council - Institute of Nuclear Energy Research

Inventor： Kuo, Hung-Zen ,  Chen, Chun-Yi ,  Shin, Hwa-Yuh ,  Hong, Hwen-Fen ,  Chen, Wen-Fu ,  Kuo, Cherng-Tsong

IPC: G01R31/26

CPC classification number: H01L31/0547 ,  G01J1/08 ,  H02S50/10 ,  Y02E10/52

Abstract: There is disclosed an apparatus for testing concentration-type solar cells. The apparatus includes a light source for emitting light, a focusing unit for focusing the light emitted from the light source and turning the same into a light beam, a testing unit for testing any one of solar cells of a wafer; and a wafer-positioning unit for moving the wafer horizontally and vertically, thus brining a targeted one of the solar cells into contact with the testing unit.

Abstract translation: 公开了一种用于测试浓度型太阳能电池的装置。 该装置包括用于发射光的光源，用于聚焦从光源发射的光并将其转向光束的聚焦单元，用于测试晶片的任何一个太阳能电池的测试单元; 以及用于水平和垂直地移动晶片的晶片定位单元，从而使目标的一个太阳能电池与测试单元接触。

公开(公告)号：EP1974192A2

公开(公告)日：2008-10-01

申请号：EP07716380.6

申请日：2007-01-09

Applicant: Newport Corporation

Inventor： KASTURI, Prakash ,  NASTASE, Adrian

IPC: G01J1/02

CPC classification number: G01J1/02 ,  G01J1/0219 ,  G01J1/0228 ,  G01J1/0271 ,  G01J1/08 ,  G01J1/4257 ,  G01J11/00

Abstract: A machine (100) and methods (400) measure a characteristic of an optical signal (35) incident upon a detector (50) characterized by one or more dynamic response parameters. One method (400) receives (450) an output signal (60) from the detector (50) and compares (460) that output signal (60) and a computationally determined response (610, 710, 810, 910, 1110, 1210) of the detector (50) to a known optical signal incident upon the detector (50). The response (610, 710, 810, 910, 1110, 1210) is based on said one or more dynamic parameters. The method (400) determines (470) the characteristic based on a relationship between the output signal (60) and the computationally determined response (610, 710, 810, 910, 1110, 1210). Another method (400) observes (450) an output signal (60) from an optical detector (50) detecting one or more optical signals (35), accesses (410) a characteristic curve (610, 710, 810, 910, 1110, 1210) of detector response, compares (460) the observed output signal (60) to the characteristic curve (610, 710, 810, 910, 1110, 1210), and calculates (470) at least one characteristic of one or more optical signals (35) based on a relationship of the observed output signal (60) and the characteristic curve (610, 710, 810, 910, 1110, 1210).

公开(公告)号：EP1740883A4

公开(公告)日：2008-07-30

申请号：EP05758377

申请日：2005-04-25

Applicant: ADVANCED OPTICAL TECH INC

Inventor： RAINS JACK C JR ,  BROWN MATTHEW

IPC: F21V1/00 ,  B25B13/14 ,  B25B23/00 ,  B25B23/18 ,  F21V7/22 ,  F21V9/00 ,  F21V14/06 ,  G01J1/00 ,  G01J3/10 ,  G05D25/02 ,  H01L31/00

CPC classification number: F21S10/02 ,  F21S2/00 ,  F21S8/00 ,  F21V5/002 ,  F21V5/008 ,  F21V7/22 ,  F21V11/10 ,  F21V14/06 ,  F21V2200/13 ,  F21W2131/406 ,  F21Y2113/00 ,  F21Y2113/13 ,  F21Y2113/20 ,  F21Y2115/10 ,  G01J1/08 ,  G01J3/0254 ,  G01J3/0264 ,  G01J3/10 ,  G01J3/501 ,  G02B5/0252 ,  G02B5/0278 ,  G02B5/0284 ,  G02B6/0008 ,  G03B15/06 ,  G09F13/0404 ,  G09F13/06 ,  G09F13/14 ,  G09F13/22 ,  H05B33/0812 ,  H05B33/0842 ,  H05B33/0863 ,  H05B33/0869 ,  H05B33/0872 ,  H05B35/00 ,  Y02B20/343 ,  Y10S362/80 ,  Y10S362/812

Abstract: A system (10) provides white light having a selectable spectral characteristic (e.g. a selectable color temperature) using an optical integrating cavity (11) to combine energy of different wavelengths from different sources with white light. The cavity has a diffusively reflective interior surface and an aperture (17) for allowing emission of combined light. Control of the intensity of emission of the sources sets the amount of primary color light of each wavelength added to the substantially white input light output and thus determines a spectral characteristic of the white light output through the aperture. A variety of different elements may optically process the combined light output, such a deflector, a variable iris, and a lens a variable focusing lenses system, a collimator, a holographic diffuser and combinations thereof.

Abstract translation: 一种系统提供了具有使用在光学INTEGRA婷腔以不同波长的能量从与白光不同来源的组合的可选择的光谱特性（例如可选择的色温）的白光。 空腔具有漫反射内表面，并且在孔用于允许光组合的发射。 的源发射的强度的控制将加到输入基本上白色的光输出，从而bestimmt通过孔白色输出的光的光谱特性的每个波长的原色光量。 各种不同的元件可以光学地处理所述组合光输出，求一偏转器，可变光阑，透镜，可变焦距透镜系统中，一个准直器，全息漫射器以及它们的组合。