Abstract:
The invention relates to a device for forming an interference grating on a sample, the device comprising a laser emitting a light beam of wavelength lambda, a beam splitter plate splitting the beam emitted by the laser into first and second beams (11, 14), the first beam (11) being deflected in a first direction, a first stationary deflection mirror for deflecting the first beam onto a point P of the sample at a first constant angle of incidence theta1, and at least one second stationary deflection mirror for deflecting the second beam along a final path (17) that reaches said point P of the sample at a second angle of incidence theta2 in order to form an interference grating on the sample at a pitch that depends on the angular difference theta between the first and second angles of incidence theta1 and theta2, the path of the second beam being characterized in that it includes a movable deflection mirror (7, 7') to direct and deflect the second beam from a plurality of first points of impact (71) from which the second beam (15) is directed towards a plurality of second points of impact (82) on a said second mirror (8, M2), thereby forming a plurality of pairs, each comprising first and second points of impact (71, 82), each of which corresponding to a said final path (17) of the second beam having a different value of the angle theta2, so as to cause the value of the angle of incidence theta2 to vary and thus vary the angular difference theta, and in that the first points of impact (71) are arranged on a linear or parabolic path extending from an upstream end remote from the sample where it is spaced apart from the direction of the beam (10) that is emitted by the laser in a direction opposite to the first direction and thus away from the segment (12) of the first beam that impacts said point P of the sample (ECH), said linear or parabolic path being reentrant towards said segment (12) of the first beam on going towards a downstream end closer to the sample (ECH) so as to compensate at least in part for optical path length variations of the second beam for the pairs of first and second points of impact (71, 82), each of which corresponds to a respective value of the angular difference theta.
Abstract:
The present invention relates to a flat light emitting plate, a method for calibrating a pyrometer and a method for determining the temperature of a semiconducting wafer inside a processing chamber by said pyrometer. It is an object of the present invention to provide a method for calibrating a pyrometer by means of a cold source which is also applicable to processing chambers with a narrow slit. According to the present invention, a flat light emitting plate for simulating thermal radiation is provided, comprising a main body made of a transparent material, a light emission area located on an upper surface of the light emitting plate for emitting light, at least one light source located on a lateral surface of the light emitting plate, at least one detector located on a lateral surface of the light emitting plate, and a regulating circuit for adjusting the intensity of light emitted by the light sources.
Abstract:
An apparatus for performing UV light exposure testing of solar panels, also known as PV modules, with superior exposure uniformity, equipment throughput, and floor space requirements, consisting of a chamber including a plurality of UV lamps in a lamp array, at least one target plane, and reflective panels positioned within the chamber to redirect UV light to the target plane(s).
Abstract:
Ein Notebook Rechner ist mit einem in seine Tastaturplatte (1) integrierten Lichtmesssensor (10) ausgestattet, welcher den Monitor (4) des Rechners im geschlossenen Zustand ausmessen kann. Der Lichtmesssensor wird (nach einer vorgängigen herstellerseitigen Linearisierung) im in den Notebook Rechner eingebauten Zustand auf den zuvor mittels eines externen Farbmessgeräts vollständig charakterisierten bzw. profilierten Monitor des Notebook Rechners kalibriert, die dabei erzeugten Kalibrierungsdaten werden nicht-flüchtig, vorzugsweise im Lichtmesssensor selbst angespeichert. Anhand der abgespeicherten Kalibrierungsdaten des Lichtmesssensors lassen sich die Sensor-Signale in X,Y,Z-Farbwerte umrechnen. Der an sich nur Leuchtdichten bzw. Helligkeiten messende Lichtmesssensor wird auf diese Weise zu einem Colorimeter, das in Kombination mit dem Monitor, auf den es kalibriert wurde, zuverlässige Ergebnisse liefert. Mit Hilfe des so kalibrierten Lichtmesssensors lässt sich jederzeit eine Neu-Kalibrierung (Profilierung) des Monitors durchführen.
Abstract:
A light source for examining leak detection sites in heating, ventilating, and air conditioning systems using a fluorescent dye is described. The light source can include a parabolic reflector (6) or a low voltage lamp (10).
Abstract:
There is disclosed an apparatus for testing concentration-type solar cells. The apparatus includes a light source for emitting light, a focusing unit for focusing the light emitted from the light source and turning the same into a light beam, a testing unit for testing any one of solar cells of a wafer; and a wafer-positioning unit for moving the wafer horizontally and vertically, thus brining a targeted one of the solar cells into contact with the testing unit.
Abstract:
A machine (100) and methods (400) measure a characteristic of an optical signal (35) incident upon a detector (50) characterized by one or more dynamic response parameters. One method (400) receives (450) an output signal (60) from the detector (50) and compares (460) that output signal (60) and a computationally determined response (610, 710, 810, 910, 1110, 1210) of the detector (50) to a known optical signal incident upon the detector (50). The response (610, 710, 810, 910, 1110, 1210) is based on said one or more dynamic parameters. The method (400) determines (470) the characteristic based on a relationship between the output signal (60) and the computationally determined response (610, 710, 810, 910, 1110, 1210). Another method (400) observes (450) an output signal (60) from an optical detector (50) detecting one or more optical signals (35), accesses (410) a characteristic curve (610, 710, 810, 910, 1110, 1210) of detector response, compares (460) the observed output signal (60) to the characteristic curve (610, 710, 810, 910, 1110, 1210), and calculates (470) at least one characteristic of one or more optical signals (35) based on a relationship of the observed output signal (60) and the characteristic curve (610, 710, 810, 910, 1110, 1210).
Abstract:
A system (10) provides white light having a selectable spectral characteristic (e.g. a selectable color temperature) using an optical integrating cavity (11) to combine energy of different wavelengths from different sources with white light. The cavity has a diffusively reflective interior surface and an aperture (17) for allowing emission of combined light. Control of the intensity of emission of the sources sets the amount of primary color light of each wavelength added to the substantially white input light output and thus determines a spectral characteristic of the white light output through the aperture. A variety of different elements may optically process the combined light output, such a deflector, a variable iris, and a lens a variable focusing lenses system, a collimator, a holographic diffuser and combinations thereof.