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公开(公告)号：JP2012032351A
公开(公告)日：2012-02-16
申请号：JP2010174174
申请日：2010-08-03
Applicant: Ace:Kk , 株式会社エー・シー・イー
Inventor： ISHIKAWA KYOICHI
IPC: G01M3/26
Abstract: PROBLEM TO BE SOLVED: To provide an apparatus and a leakage inspection method that shorten a time needed for leakage inspection when inspecting leakage of a work.SOLUTION: The apparatus measures the amount of gas leaking from the work by supplying the gas into the work whose content value is known from a pressure source, and is constituted using a first gas supply pipe which has one end side connected to the pressure source and the other end side constituting a connection port for the work, a second gas supply pipe which has one end side connected to the pressure source and the other end side connected to the first gas supply pipe and in which a flowmeter measuring the amount of gas flowing in a flow passage thereof is interposed, and an exhaust valve connected to the first gas supply pipe, and means of cutting off the supply of gas from the pressure source to the first gas supply pipe and the supply of gas from the pressure source to the second gas supply pipe respectively and substantially at the same time.
Abstract translation: 要解决的问题：提供一种在检查工件泄漏时缩短泄漏检查所需时间的装置和泄漏检查方法。 解决方案：该装置通过从压力源向已知含量值的工件供给气体来测量从工件泄漏的气体的量，并且使用第一气体供给管构成，该第一气体供给管的一端侧连接到 压力源，另一端侧构成作业用连接口，第二气体供给管的一端侧与压力源连接，另一端侧与第一气体供给管连接，其中，流量计测量量 介于其流动通道中的气体流动，并且连接到第一气体供应管的排气阀，以及从压力源向第一气体供应管切断气体供应和从压力供应气体的装置 分别并且基本上同时地输送到第二气体供给管。 版权所有（C）2012，JPO＆INPIT
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公开(公告)号：JP6763577B2
公开(公告)日：2020-09-30
申请号：JP2017253463
申请日：2017-12-28
Applicant: 株式会社エー・シー・イー
IPC: C23C16/455 , C23C16/44 , C30B25/16 , C30B29/38 , H01L21/205
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公开(公告)号：JP2019121629A
公开(公告)日：2019-07-22
申请号：JP2017253463
申请日：2017-12-28
Applicant: 株式会社エー・シー・イー
IPC: C23C16/455 , C23C16/44 , C30B25/16 , C30B29/38 , H01L21/205
Abstract: 【課題】原料ガスの利用効率を向上できる気相成長装置を提供する。 【解決手段】気相成長装置1は、異なる複数の原料ガスGnの化学反応を起こして基板S上に物質を形成する。気相成長装置1は、チャンバー3と、保持部5と、加熱部7とを備える。保持部5は、チャンバー3の内部に配置され、基板Sを保持する。加熱部7は、基板Sを加熱する。チャンバー3は、原料ガスGnをチャンバー3に導入する少なくとも1つの原料導入ポートGPnを含む。物質を基板S上に形成している期間の一部又は全部において、チャンバー3の内部から外部への原料ガスGnの流出が遮断される。 【選択図】図1
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公开(公告)号：JP2012053530A
公开(公告)日：2012-03-15
申请号：JP2010193595
申请日：2010-08-31
Applicant: Ace:Kk , 株式会社エー・シー・イー
Inventor： ISHIKAWA KYOICHI
CPC classification number: G05D7/005
Abstract: PROBLEM TO BE SOLVED: To provide an exhaust gas pressure controller which has high controllability, is compact in size, and is excellent in corrosion resistance and durability.SOLUTION: Damper control can be accurately performed by using a rubber expansion bulb for a drive part of an exhaust gas pressure controller. That is, the exhaust gas pressure controller is composed of: a bulb having a hard body having a penetration flow channel, an expansion member disposed in the penetration flow channel, and an air-tight cavity formed including the expansion member; pressure/flow rate measurement means for measuring the pressure and/or flow rate in the penetration flow channel; and supply and exhaust control means which supplies or exhausts control gas to or from the air-tight cavity, and changes the sectional area of the penetration flow channel to expand or contract the expansion member.
Abstract translation: 要解决的问题：提供具有高可控性，尺寸紧凑，耐腐蚀性和耐久性优异的排气压力控制器。 解决方案：通过使用用于排气压力控制器的驱动部件的橡胶膨胀球，可以准确地进行阻尼器控制。 也就是说，废气压力控制器由以下部分组成：具有贯通流路的硬质体的灯泡，设置在贯通流路中的膨胀部件和形成有膨胀部件的气密腔体; 用于测量穿透流动通道中的压力和/或流速的压力/流量测量装置; 以及供给排气控制装置，其将控制气体供给或排出气密腔，并且改变穿透流动通道的横截面积以膨胀或收缩膨胀构件。 版权所有（C）2012，JPO＆INPIT
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Patent Agency Ranking
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公开(公告)号：JP2010046609A
公开(公告)日：2010-03-04
申请号：JP2008213456
申请日：2008-08-22
Applicant: Ace:Kk , Iwatani Industrial Gases Corp , Iwatani Internatl Corp , 岩谷瓦斯株式会社 , 岩谷産業株式会社 , 株式会社エー・シー・イー
Inventor： TANI YOSHIKATSU , HASEGAWA KOJI , MIHIRA HIROSHI
Abstract: PROBLEM TO BE SOLVED: To provide a gas mixer without the need of any electric power source which maintains a high mixing accuracy, has a broad rangeability and has a small pressure loss.
SOLUTION: The gas mixer mixing a gas liquefied at the atmospheric temperature and a gas which is vapor at the atmospheric temperature comprises a concentration controller (2) and an automatic switching mechanism (3). The concentration controller (2) includes, a plurality of flow rate controllers (12) disposed in parallel in which respective laminar flow elements (6) (7) are disposed on a liquified gas introducing passage (4) and a compressed gas introducing passage (5); an equalizing valve (8) mounted on the compressed gas introducing passage (5) upstream of the laminar flow element (7) equalizes inflow pressures to bothe laminar flow elements (6)(7); and a liquified gas outflow passage (10) and a compressed gas outflow passage (11) downstream of the laminar flow passage (6)(7) are made to join through a check valve (9). In the automatic switching mechanism (3), automatic switching valves (14) are mounted in flow joining pipes (13) in the respective flow rate controllers (12), and the respective automatic switching valves (14) are switched by detecting a pressure downstream of the automatic switching valves (14).
COPYRIGHT: (C)2010,JPO&INPITAbstract translation: 要解决的问题：提供一种气体混合器，而不需要保持高混合精度的任何电源，具有宽的可变性并且具有小的压力损失。 混合在大气温度下液化的气体和在大气温度下蒸气的气体混合的气体混合器包括浓度控制器（2）和自动切换机构（3）。 集中控制器（2）包括多个平行设置的流量控制器（12），其中各个层流元件（6）（7）设置在液化气体导入通道（4）和压缩气体导入通道 5）; 安装在层流元件（7）上游的压缩气体导入通路（5）上的平衡阀（8）使流入元件（6）（7）的流入压力平衡。 并且通过止回阀（9）将液化气体流出通道（10）和层流通道（6）（7）下游的压缩气体流出通道（11）连接起来。 在自动切换机构（3）中，自动切换阀（14）安装在流量控制器（12）中的流动连接管（13）中，并且通过检测下游的压力来切换各自动切换阀（14） 的自动切换阀（14）。 版权所有（C）2010，JPO＆INPIT
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公开(公告)号：JP2007248320A
公开(公告)日：2007-09-27
申请号：JP2006073710
申请日：2006-03-17
Applicant: Ace:Kk , Soken Kogyo Kk , 創研工業株式会社 , 株式会社エー・シー・イー
Inventor： ISHIKAWA KYOICHI , TAKAHASHI TAKESHI , YAHAGI OSAMU , TAKEMOTO KIKUROU , UJIIE KAZUO
Abstract: PROBLEM TO BE SOLVED: To increase the differential pressure between the upstream and downstream sides on both sides of a laminar-flow generating part as large as possible, shorten the length of the laminar-flow generating part as short as possible, and detect the quantity of gas flow by eliminating the need for a capillary tube.
SOLUTION: An apparatus for controlling the quantity of gas flow is consituted of a laminar-flow element 30 made of a porous member partitioning a channel into the upstream and downstream sides; means 17 and 26 for detecting the differential pressure ΔP between the upstream and downstream sides of the laminar-flow element 30; a means 26 for detecting pressure P2 on the downstream side; and a means 32 for computing a volume flow rate Q on the basis of the differential pressure ΔP and the relation that Q=A*ΔP*(ΔP+2*P2+B)(wherein, A is a shape factor of the porous member; and B is a correction value to the compressibility of the gas).
COPYRIGHT: (C)2007,JPO&INPITAbstract translation: 要解决的问题：为了尽可能地增加层流产生部件两侧的上游侧和下游侧之间的压差，尽可能地缩短层流产生部的长度，并且 通过消除对毛细管的需要来检测气体流量。 解决方案：一种用于控制气体流量的装置由由将通道分隔成上游侧和下游侧的多孔构件制成的层流元件30构成; 用于检测层流元件30的上游侧和下游侧之间的压差ΔP的装置17和26; 用于检测下游侧的压力P2的装置26; 以及用于基于压差ΔP和Q = A *ΔP*（ΔP+ 2 * P2 + B）的关系计算体积流量Q的装置32（其中，A是多孔构件的形状因子 ; B是对气体的压缩性的校正值）。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP2007239008A
公开(公告)日：2007-09-20
申请号：JP2006061971
申请日：2006-03-08
Applicant: Ace:Kk , Soken Kogyo Kk , 創研工業株式会社 , 株式会社エー・シー・イー
Inventor： ISHIKAWA KYOICHI , TAKAHASHI TAKESHI , YAHAGI OSAMU , TAKEMOTO KIKUROU , UJIIE KAZUO
IPC: C23C16/448 , C30B25/14 , H01L21/205
Abstract: PROBLEM TO BE SOLVED: To provide a bubbler provided with a monitoring apparatus where the stability in the amount of the objective material to be fed by bubbling can be monitored. SOLUTION: A mass flow rate controlling means 13 and a first stop valve 18 are connected in order from the upstream side between the introduction port of a bubbler and a carrier gas source, further, a second stop valve 19 and a sonic nozzle 1 are connected in order from the upstream side between the leading-out port of the bubbler and a consumption apparatus, further, the inflow side of the first stop valve 18 and the outflow side of the second stop valve 19 are connected by a third stop valve 20, and the pressure on the inflow side of the sonic nozzle 1 is monitored, thus the content of the objective material is detected. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：提供一种设置有监测装置的起泡器，其中可以监测通过鼓泡进料的目标材料的量的稳定性。 解决方案：质量流量控制装置13和第一截止阀18从起泡器的引入口和载气源之间的上游侧依次连接，第二截止阀19和声波喷嘴 1从起泡器的引出口和消耗装置之间的上游侧依次连接，另外，第一截止阀18的流入侧和第二截止阀19的流出侧通过第三止动件 阀20，并且监测声波喷嘴1的流入侧的压力，从而检测目标材料的含量。 版权所有（C）2007，JPO＆INPIT
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公开(公告)号：JP6727608B2
公开(公告)日：2020-07-22
申请号：JP2016118517
申请日：2016-06-15
Applicant: 株式会社エー・シー・イー
Inventor： 吉川 和博
IPC: H01L21/306 , H01L21/308
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