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    シリコンウェーハの表面処理方法
    2.
    发明专利
    シリコンウェーハの表面処理方法 审中-公开

    公开(公告)号：JP2017224698A

    公开(公告)日：2017-12-21

    申请号：JP2016118517

    申请日：2016-06-15

    Applicant: 株式会社エー・シー・イー

    Inventor： 吉川 和博

    IPC: H01L21/306 ,  H01L21/308

    Abstract: 【課題】混酸溶液を用いたウェットエッチングのようにNOxガスの発生がなく、ダメージレスのシリコンウェーハを得ることができるシリコンウェーハの表面処理方法、また、容易に薬液をリサイクルできるシリコンウェーハの表面処理方法を提供すること。 【解決手段】可逆的に酸化還元反応を行うポリオキソメタレートを溶解した薬液をシリコンウェーハ2の酸化膜形成やウエットエッチングなどの表面処理に用い、表面処理した後の薬液を回収し、回収した薬液の酸化還元電位から、酸化状態か還元状態かを測定し、測定された酸化還元電位によって、薬液を酸素、過酸化水素、又はオゾンによって酸化処理することを特徴とする。 【選択図】 図1

    Air micrometer
    6.
    发明专利
    Air micrometer 有权

    公开(公告)号：JP5276070B2

    公开(公告)日：2013-08-28

    申请号：JP2010204809

    申请日：2010-09-13

    Applicant: 東海挾範株式会社 ,  株式会社エー・シー・イー

    Inventor： 清太 小森 ,  智 遠藤 ,  正昭 梅谷 ,  亨一 石川

    IPC: G01B13/10

    Abstract: PROBLEM TO BE SOLVED: To provide an air micrometer capable of highly accurately measuring dimensions by a simple operation. SOLUTION: The air micrometer includes: a measurement part 1 configured by partitioning the upstream side and downstream side of an air channel 11 by a porous member 12; a first pressure sensor 3 for detecting the first pressure of air on the upstream side of the measurement part 1 and outputting the signal; a second pressure sensor 4 for detecting the second pressure of the air on the downstream side of the measurement part 1 and outputting the signal; and a temperature sensor 5 for detecting the temperature of the air inside the measurement part 1 and outputting the signal. The signals output from the first pressure sensor and the second pressure sensor are fetched, the opening of the control valve 6 of the air channel 11 is controlled so as to turn the second pressure of the second pressure sensor to a fixed value. A mass flow rate per unit time of the air jetted from a jetting hole 22 of a measurement head 2 is calculated on the basis of a pressure difference between the first pressure and the second pressure, the second pressure and the temperature of the air, and the dimension of a work is calculated on the basis of the mass flow rate. COPYRIGHT: (C)2012,JPO&INPIT

    Exhaust pressure/flow rate controller
    9.
    发明专利
    Exhaust pressure/flow rate controller 有权
    排气/流量控制器

    公开(公告)号：JP2014145451A

    公开(公告)日：2014-08-14

    申请号：JP2013015495

    申请日：2013-01-30

    Applicant: Ace:Kk ,  株式会社エー・シー・イー

    Inventor： ISHIKAWA KYOICHI

    IPC: F16K7/07 ,  F16L55/00

    Abstract: PROBLEM TO BE SOLVED: To provide an exhaust pressure/flow rate controller for controlling exhaust gas pressure and exhaust gas flow rate, which has high responsiveness and controllability, is small-sized and excellent in corrosion resistance and durability.SOLUTION: An exhaust pressure controller is formed by using: a valve body 11 having a through flow passage; an actuator 20 arranged in the through flow passage 13 and having an expansion member 23 and an airtight cavity 29 formed containing the expansion member; and an air supply and exhaust control means for increasing or decreasing an outer diameter of the actuator to change a flow passage cross-sectional area of the through flow passage by supplying or exhausting a control gas into or from the airtight cavity of the expansion member.

    Abstract translation: 要解决的问题：为了提供具有高响应性和可控性的用于控制排气压力和排气流量的排气压力/流量控制器，其尺寸小且耐腐蚀性和耐久性优异。解决方案：排气压力控制器 通过使用具有通流通道的阀体11形成; 布置在通流通道13中并具有膨胀构件23的致动器20和形成为容纳膨胀构件的气密腔29; 以及用于增加或减少致动器的外径的空气供给和排气控制装置，以通过向扩展构件的气密腔供给或排出控制气体来改变通过流路的流路横截面积。

    Air micrometer
    10.
    发明专利
    Air micrometer 有权
    空气微型机

    公开(公告)号：JP2012058213A

    公开(公告)日：2012-03-22

    申请号：JP2010204809

    申请日：2010-09-13

    Applicant: Ace:Kk ,  Tokai Kiyouhan Kk ,  東海挾範株式会社 ,  株式会社エー・シー・イー

    Inventor： KOMORI SEITA ,  ENDO SATOSHI ,  UMETANI MASAAKI ,  ISHIKAWA KYOICHI

    IPC: G01B13/10

    Abstract: PROBLEM TO BE SOLVED: To provide an air micrometer capable of highly accurately measuring dimensions by a simple operation.SOLUTION: The air micrometer includes: a measurement part 1 configured by partitioning the upstream side and downstream side of an air channel 11 by a porous member 12; a first pressure sensor 3 for detecting the first pressure of air on the upstream side of the measurement part 1 and outputting the signal; a second pressure sensor 4 for detecting the second pressure of the air on the downstream side of the measurement part 1 and outputting the signal; and a temperature sensor 5 for detecting the temperature of the air inside the measurement part 1 and outputting the signal. The signals output from the first pressure sensor and the second pressure sensor are fetched, the opening of the control valve 6 of the air channel 11 is controlled so as to turn the second pressure of the second pressure sensor to a fixed value. A mass flow rate per unit time of the air jetted from a jetting hole 22 of a measurement head 2 is calculated on the basis of a pressure difference between the first pressure and the second pressure, the second pressure and the temperature of the air, and the dimension of a work is calculated on the basis of the mass flow rate.

    Abstract translation: 要解决的问题：提供一种能够通过简单的操作高精度地测量尺寸的气流千分尺。 解决方案：气流千分尺包括：通过多孔构件12分隔空气通道11的上游侧和下游侧构造的测量部1; 第一压力传感器3，用于检测测量部件1的上游侧的空气的第一压力，并输出该信号; 第二压力传感器4，用于检测测量部件1的下游侧的空气的第二压力并输出该信号; 以及用于检测测量部分1内的空气的温度并输出信号的温度传感器5。 从第一压力传感器和第二压力传感器输出的信号被取出，空气通道11的控制阀6的打开被控制成将第二压力传感器的第二压力转换成固定值。 基于第一压力和第二压力，第二压力和空气的温度之间的压力差来计算从测量头2的喷射孔22喷射的空气的每单位时间的质量流量，以及 基于质量流量计算工作的尺寸。 版权所有（C）2012，JPO＆INPIT

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