公开(公告)号：JP4498724B2

公开(公告)日：2010-07-07

申请号：JP2003394015

申请日：2003-11-25

Applicant: 株式会社渡辺商行

Inventor： 晃 植原 ,  昌之 都田 ,  和久 金子

IPC: B65G51/03 ,  B65G47/64

公开(公告)号：JP4428610B2

公开(公告)日：2010-03-10

申请号：JP2002259340

申请日：2002-09-04

Applicant: 隆 杉野 ,  株式会社渡辺商行

Inventor： 隆 杉野 ,  優 梅田 ,  昌樹 楠原

IPC: H01J61/067

公开(公告)号：JP4358924B2

公开(公告)日：2009-11-04

申请号：JP8050999

申请日：1999-03-24

Applicant: 株式会社渡辺商行

Inventor： 優 梅田 ,  昌樹 楠原 ,  道雄 谷貝 ,  正之 辻村 ,  昌之 都田

IPC: B65D19/44 ,  B65G49/06 ,  B65D85/48 ,  B65D85/86 ,  H01L21/00 ,  H01L21/673

CPC classification number: B65G49/062 ,  B65G49/068 ,  B65G49/069

公开(公告)号：JP4355147B2

公开(公告)日：2009-10-28

申请号：JP2003052050

申请日：2003-02-27

Applicant: 隆 杉野 ,  株式会社渡辺商行

Inventor： 隆 杉野 ,  優 梅田 ,  昌樹 楠原

IPC: H01L21/28 ,  H01L21/314 ,  H01L21/283 ,  H01L21/331 ,  H01L21/335 ,  H01L21/768 ,  H01L23/522 ,  H01L29/12 ,  H01L29/20

CPC classification number: H01L29/66318 ,  H01L21/314 ,  H01L29/2003 ,  H01L29/66462

Abstract: A high performance semiconductor device that can realize surface protection and surface inactivation and is fabricated using a film formation method and technique that enable improvement of high frequency characteristics, and an electronic device for a communication system including the semiconductor device, are provided. The semiconductor device is characterized in that a film having boron, carbon, and nitrogen as main components and to which sulfur is added serves as a surface protection film, and at least part of a surface is covered.

公开(公告)号：JP4275769B2

公开(公告)日：2009-06-10

申请号：JP17316698

申请日：1998-06-19

Applicant: 株式会社渡辺商行

Inventor： 優 梅田 ,  昌樹 楠原 ,  道雄 谷貝 ,  昌之 都田

IPC: H01L21/677 ,  B65G49/07 ,  H01L21/00

CPC classification number: H01L21/67748 ,  H01L21/67017 ,  H01L21/67751 ,  Y10S414/135 ,  Y10S414/139

公开(公告)号：JP4274601B2

公开(公告)日：2009-06-10

申请号：JP19344098

申请日：1998-07-08

Applicant: 株式会社渡辺商行 ,  昌之 都田

Inventor： 優 梅田 ,  昌樹 楠原 ,  道雄 谷貝 ,  昌之 都田

IPC: B65G49/07 ,  H01L21/677 ,  B25J15/06 ,  G03F7/20 ,  H01L21/68 ,  H01L21/683

CPC classification number: H01L21/6835 ,  G03F7/7075 ,  H01L21/67778 ,  H01L21/67784 ,  H01L21/6838 ,  Y10S414/138

公开(公告)号：JP2008300871A

公开(公告)日：2008-12-11

申请号：JP2008210130

申请日：2008-08-18

Applicant: Masayuki Tsuda ,  Watanabe Shoko:Kk ,  株式会社渡辺商行 ,  昌之 都田

Inventor： TSUDA MASAYUKI ,  KUSUHARA MASAKI ,  DOI MIKIO ,  UMEDA MASARU ,  FUKAGAWA MITSURU ,  SUGANO YOICHI ,  UCHISAWA OSAMU ,  YAMAMOTO KOHEI ,  MEGURO TOSHIKATSU

IPC: H01L21/205 ,  C23C16/448

Abstract: PROBLEM TO BE SOLVED: To provide a vaporizer for MOCVD, which can obtain a vaporized gas in which a material solution is uniformly dispersed, and to provide a method for vaporizing the material solution.
SOLUTION: The vaporizer has: (1) a dispersion part 8 having a gas introducing port 4 for introducing a pressurized carrier gas 3 to a gas passage, a means for supplying a material solution 5a to the gas passage, and a gas exit 7 for sending the carrier gas containing the material solution to a vaporization part 22; (2) a vaporization part 22 including a vaporization tube 20, one end of which is connected to a reaction tube of an MOCVD system and the other end of which is connected to the gas exit 7, and a heating means for heating the vaporization tube 20, and for heating and vaporizing the carrier gas containing the material solution sent from the distribution part 8; and (3) the distribution part 8 having a main body 1 of the dispersion part having a cylindrical hollow part, a rod 10 having an outer diameter smaller than an inner diameter of the cylindrical hollow part, and a spiral groove 60 on the side of the vaporization part 22 in the periphery of the rod 10, wherein the rod 10 is inserted into the cylindrical hollow part.
COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种用于MOCVD的蒸发器，其可以获得材料溶液均匀分散的汽化气体，并提供用于蒸发材料溶液的方法。 蒸发器具有：（1）具有用于将加压载气3引入气体通道的气体引入口4的分散部分8，向气体通道供给材料溶液5a的装置和气体 出口7，用于将含有原料溶液的载气送至蒸发部分22; （2）蒸发部分22，其包括蒸发管20，其一端连接到MOCVD系统的反应管，另一端连接到气体出口7;以及加热装置，用于加热蒸发管 20，用于加热和蒸发从分配部分8发送的含有原料溶液的载气; 和（3）具有分散部分的主体1的分配部分8具有圆柱形中空部分，具有小于圆柱形中空部分的内径的外径的杆10和在圆柱形中空部分的侧面上的螺旋形槽60 在杆10周边的蒸发部分22，其中杆10插入到圆柱形中空部分中。 版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP2008294092A

公开(公告)日：2008-12-04

申请号：JP2007135981

申请日：2007-05-22

Applicant: Watanabe Shoko:Kk ,  株式会社渡辺商行

Inventor： UEHARA AKIRA ,  TSUDA MASAYUKI ,  UMEDA MASARU

IPC: H01L21/02 ,  B65G49/07 ,  H01L21/677

CPC classification number: H01L21/67742 ,  H01L21/67126 ,  H01L21/6719 ,  H01L21/67748

Abstract: PROBLEM TO BE SOLVED: To provide a workpiece processor capable of holding a plurality of workpieces on the same axis under the state separating the workpieces in the vertical direction having little restrictions such as a mounting space orthogonal to the carrying direction (the horizontal direction) and capable of processing a large number of the workpieces at the same time. SOLUTION: The workpiece processor has a workpiece processing section 10 interiorly housing a lot 13 vertically supporting multiple workpieces W under a separated state and processing the workpieces under the multiple supporting state, a workpiece introducing section 20 connected to the upper or lower section of the workpiece processing section 10 and a workpieces discharging section 30 connected to the lower or upper section of the workpiece processing section 10. Shutter members 23 and 33 interrupting communication with the atmospheric side are fitted to an introducing port 22 and a discharge opening 32 formed to the workpiece introducing section 20 and the workpiece discharging section 30. COPYRIGHT: (C)2009,JPO&INPIT

Abstract translation: 要解决的问题：提供一种工件处理器，其能够在垂直于垂直于方向（垂直于水平方向的垂直方向的安装空间）上具有很小限制的分离工件的状态下在同一轴线上保持多个工件 方向），并且能够同时处理大量的工件。 解决方案：工件处理器具有在分离状态下垂直地支撑多个工件W并在多个支撑状态下处理工件的工件处理部10内部容纳多个工件13，连接到上部或下部的工件引入部20 的工件处理部10和与工件处理部10的下部或上部连接的工件排出部30.与大气侧连通的遮光部件23,33嵌合在形成的导入口22和排出口32中 到工件引入部20和工件排出部30.版权所有（C）2009，JPO＆INPIT

公开(公告)号：JP4132000B2

公开(公告)日：2008-08-13

申请号：JP23094398

申请日：1998-08-17

Applicant: 株式会社渡辺商行

Inventor： 昌樹 楠原 ,  道雄 谷貝 ,  正之 辻村 ,  昌之 都田

IPC: B65G51/03 ,  B65G49/06 ,  B65G49/07 ,  H01L21/677

CPC classification number: H01L21/67784 ,  B65G49/065 ,  B65G51/03 ,  B65G2249/02 ,  B65G2249/04 ,  B65G2249/045

公开(公告)号：JP2008179484A

公开(公告)日：2008-08-07

申请号：JP2008060264

申请日：2008-03-10

Applicant: Watanabe Shoko:Kk ,  株式会社渡辺商行

Inventor： TANIKAI MICHIO ,  TSUJIMURA MASAYUKI ,  TSUDA MASAYUKI ,  KUSUHARA MASAKI

IPC: B65G51/03 ,  B65G49/07 ,  H01L21/677

Abstract: PROBLEM TO BE SOLVED: To provide an electrostatic charge neutralization device for a floating carrying device capable of completely neutralizing electrostatic charge of a plate-like base body, when the plate-like base body is electrostatically charged by gas striking on the plate-like base body, when making the plate-like base body move, stop, stand still and directionally change in a floated state, by putting the plate-like base body in a floating state by jetting of the gas to the plate-like base body, and a floating carrying system.
SOLUTION: This electrostatic charge neutralization device for the floating carrying device is arranged in the floating carrying device for carrying the plate-like base body in a floated state by the gas jetting from a plurality of jetting holes 11 bored in a carrying surface 1A, and is provided with a groove part (a first storage part 31A, a quartz plate 31B and a second storage part 31C) arranged on the carrying surface 1A, and an electrostatic charge neutralization part (a UV lamp 32 and a control part 33) arranged in this groove part and outputting an electromagnetic wave for ionizing the gas toward a carrying space on the carrying surface 1A from the groove part.
COPYRIGHT: (C)2008,JPO&INPIT

Abstract translation: 要解决的问题：为了提供一种能够完全中和板状基体的静电荷的浮动运载装置的静电电荷中和装置，当板状基体被气体撞击在板上而被静电充电时 通过将板状基体通过将气体喷射到板状基底而使板状基体处于浮动状态，当使板状基体移动，停止，静止并定向地变化时， 身体和浮动携带系统。 解决方案：用于浮动运载装置的这种静电电荷中和装置设置在浮动运载装置中，用于通过从在承载表面上钻出的多个喷射孔11的气体喷射而将浮动状态的板状基体承载在浮动状态 并且设置有布置在承载表面1A上的槽部（第一存储部31A，石英板31B和第二存储部31C）和静电电荷中和部（UV灯32和控制部33 ），并且输出用于使气体从槽部向承载面1A的搬运空间离子化的电磁波。 版权所有（C）2008，JPO＆INPIT