Work processing unit
    2.
    发明专利

    公开(公告)号:JP5291300B2

    公开(公告)日:2013-09-18

    申请号:JP2007135981

    申请日:2007-05-22

    Abstract: Provided is a work processing device which can hold a plurality of works arranged coaxially and apart from one another in the vertical direction which orthogonally intersects the work convey direction (horizontal direction), which requires few constrains for an installation space. The work processing device includes: a work processing unit (10) which has a lot (13) for multi-mounting works (W) apart from one another in the vertical direction and processes the works in the multi-supported state; a work introduction unit (20) connected to the upper or lower portion of the work processing unit (10); and a work discharge unit (30) connected to the lower or upper portion of the work processing unit (10). Shutter members (23, 33) which shut off the communication state with the atmosphere side are arranged at an introduction opening (22) and a discharge opening (32) provided in the work introduction unit (20) and the work discharge unit (30).

    Levitation conveying device
    3.
    发明专利

    公开(公告)号:JP5336707B2

    公开(公告)日:2013-11-06

    申请号:JP2007135978

    申请日:2007-05-22

    CPC classification number: H01L21/67784 B65G51/03

    Abstract: A levitation transportation device that do not damage a workpiece and that can easily cope with a large-sized workpiece or a thin workpiece. A workpiece processing stage (300) is placed below a transportation surface of a transportation route along which a workpiece is levitated and transported by pressurized gas jetted in a predetermined direction. Above the workpiece processing stage (300) is placed a slide jet table (403) forming a part of the transportation route in an advanceable and retreatable manner. Further, the stage (300) has a jet section for jetting the pressurized gas upward from a gap in the jet table (403). When a workpiece is levitated and transported to above the stage (300), the jet table (403) located above the stage (300) receives the workpiece while causing it to levitate, retreats from above the stage (300), and delivers the workpiece to the stage (300) by operation of the jet section. When processing by the stage (300) is completed, the workpiece is levitated to a position above the transportation surface by operation of the jet section. After that, the jet table (403) receives the workpiece while causing it to levitate and then delivers it to the transportation route.

    Levitation conveying device
    5.
    发明专利

    公开(公告)号:JP5336708B2

    公开(公告)日:2013-11-06

    申请号:JP2007135982

    申请日:2007-05-22

    CPC classification number: B65G51/03 B65G2201/022

    Abstract: A levitation transportation device that contributes to a reduction in weight of a device body and that has increased strength. A plate-shaped body is transported in a predetermined direction while being levitated by pressurized gas jetted from the tips of nozzles (22d) formed on nozzle members (22) arranged on the device body. Each nozzle member (22) exposed on a top plate (31) having a honeycomb pattern is formed as a circular column body rotatable within a horizontal plane. Further, the outer wall of the nozzle member (22) is placed to be in contact with the inner wall of a honeycomb shape, and this prevents displacement between the nozzle members during transportation etc. of the device body.

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