公开(公告)号：WO2008140926A2

公开(公告)日：2008-11-20

申请号：PCT/US2008/061812

申请日：2008-04-28

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  SAMPSELL, Jeffrey, Brian ,  GALLY, Brian, James ,  FLOYD, Philip, Don

Inventor： SAMPSELL, Jeffrey, Brian ,  GALLY, Brian, James ,  FLOYD, Philip, Don

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  B81B3/007 ,  B81B2201/042 ,  B81B2207/07 ,  B81B2207/092 ,  G02B5/284 ,  G02B26/001 ,  H01L31/04 ,  Y10T29/49126

Abstract: Methods of fabricating a microelectromechanical systems (MEMS) device with reduced masking and MEMS devices formed by the same are disclosed. In one embodiment, a MEMS device (900) is fabricated by laminating a front substrate (910) and a carrier (950), each of which has components preformed thereon. The front substrate (910) is provided with stationary electrodes formed thereover. A carrier (950) including movable electrodes (1360) formed thereover is attached to the front substrate (910). The carrier (3500) of some embodiments is released after transferring the movable electrodes (3510) to the front substrate (3570). In other embodiments, the carrier (3450) stays over the front substrate (3410), and serves as a backplate for the MEMS device (3400). Features are formed by deposition and patterning, by embossing, or by patterning and etching. In some embodiments in which the MEMS device (5200) serves as an interferometric modulator, the front substrate (5010) is also provided with black masks (5220) to prevent or mitigate bright areas in the actuated state of the MEMS device. Static interferometric modulators (5400) can also be formed by shaping or preformation and lamination. The methods not only reduce the manufacturing costs, but also provide a higher yield. The resulting MEMS devices can trap smaller volumes between laminated substrates and are less susceptible to pressure variations and moisture leakage.

Abstract translation: 公开了制造具有减小的掩蔽的微机电系统（MEMS）装置和由其形成的MEMS装置的方法。 在一个实施例中，MEMS器件（900）通过层压前基板（910）和载体（950）而制造，每个基板具有在其上预成型的部件。 前基板（910）上设有固定电极。 包括在其上形成的可动电极（1360）的载体（950）附接到前基板（910）。 一些实施例的载体（3500）在将可移动电极（3510）转移到前基板（3570）之后被释放。 在其它实施例中，载体（3450）停留在前基板（3410）上，并且用作MEMS装置（3400）的背板。 特征通过沉积和图案化，通过压花或通过图案化和蚀刻形成。 在其中MEMS器件（5200）用作干涉式调制器的一些实施例中，前基板（5010）还具有黑色掩模（5220），以防止或减轻MEMS器件的致动状态下的亮区。 静态干涉式调制器（5400）也可以通过成形或预形成和层压形成。 该方法不仅降低了制造成本，而且提供了更高的产量。 所得到的MEMS器件可以在层压基板之间捕获更小的体积，并且不易受压力变化和水分泄漏的影响。

公开(公告)号：WO2006036450A1

公开(公告)日：2006-04-06

申请号：PCT/US2005/031237

申请日：2005-09-01

Applicant: IDC, LLC ,  FLOYD, Philip D.

Inventor： FLOYD, Philip D.

IPC: G02B26/00

CPC classification number: G02B26/0841 ,  G02B7/008

Abstract: Various embodiments of the invention relate to methods and systems for thermal compensation of a MEMS device. In certain embodiments, an interferometric modulator includes a first electrode and a flexible second electrode situated on a substrate. The flexible second electrode is a movable layer that can comprise aluminum or an aluminum-containing material, while the substrate can comprise glass. When the interferometric modulator undergoes a temperature change, the difference in thermal expansion rates results in a decrease in the tensile strain on the movable layer. Embodiments of the present invention provide a film configured to compensate for the thermal expansion. The film has a thermal expansion coefficient less than the substrate so as to compensate for expansion of the movable layer with respect to the substrate when the MEMS is exposed to thermal energy. The film compensates for mismatch in thermal expansion between the materials of the substrate and movable layer so as to inhibit undesirable optical characteristics.

Abstract translation: 本发明的各种实施例涉及用于MEMS装置的热补偿的方法和系统。 在某些实施例中，干涉式调制器包括位于衬底上的第一电极和柔性第二电极。 柔性第二电极是可以包括铝或含铝材料的可移动层，而基底可以包括玻璃。 当干涉式调制器经历温度变化时，热膨胀率差导致可移动层上的拉伸应变减小。 本发明的实施例提供了构造成补偿热膨胀的膜。 该膜的热膨胀系数小于衬底，以便当MEMS暴露于热能时补偿可移动层相对于衬底的膨胀。 该膜补偿基板和可移动层的材料之间的热膨胀失配，从而抑制不期望的光学特性。

公开(公告)号：WO2012094656A1

公开(公告)日：2012-07-12

申请号：PCT/US2012020570

申请日：2012-01-07

Applicant: QUALCOMM INC ,  KARMI YAIR ,  FLOYD PHILIP D ,  WORTHINGTON ERIC J

Inventor： KARMI YAIR ,  FLOYD PHILIP D ,  WORTHINGTON ERIC J

IPC: G06F3/048

CPC classification number: G06F3/04883 ,  G06F2203/04803 ,  G06F2203/04808

Abstract: A method of presenting multiple frames on a touch screen is disclosed. In a particular embodiment, the method includes detecting multiple touch locations on a touch screen of an electronic device for at least an activation time. The method also includes splitting a display area of the touch screen into a first frame and a second frame based on the multiple touch locations.

Abstract translation: 公开了一种在触摸屏上呈现多个帧的方法。 在一个特定实施例中，该方法包括检测电子设备的触摸屏上的至少一个激活时间的多个触摸位置。 该方法还包括基于多个触摸位置将触摸屏的显示区域分割成第一帧和第二帧。

公开(公告)号：WO2011133345A1

公开(公告)日：2011-10-27

申请号：PCT/US2011/031810

申请日：2011-04-08

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  GOVIL, Alok ,  KAO, Tsongming ,  MIGNARD, Marc, M. ,  GANTI, Suryaprakash ,  FLOYD, Philip, D. ,  KOTHARI, Manish

Inventor： GOVIL, Alok ,  KAO, Tsongming ,  MIGNARD, Marc, M. ,  GANTI, Suryaprakash ,  FLOYD, Philip, D. ,  KOTHARI, Manish

IPC: G09G3/34

CPC classification number: G09G3/3466 ,  G09G2300/0809 ,  G09G2300/0828 ,  G09G2300/0838 ,  G09G2320/0209 ,  G09G2360/18

Abstract: A display device includes an array of display elements, (Do) each display element configurable into one of a plurality of states upon application of one of a plurality of voltages, and an array of voltage shifters, (510) each voltage shifter associated with one or more of the display elements and configured to receive at least one input voltage from a display driver circuit and output at least one output voltage different than the input voltage to the associated one or more display elements. The voltage shifters can include, for example, at least one of an amplifier, a differential amplifier, an operational amplifier, a charge pump, a level shifter and a digital - to - analog converter.

Abstract translation: 显示装置包括显示元件阵列（Do），每个显示元件在施加多个电压中的一个时被配置为多个状态中的一个状态，以及一组电压移位器，（510）每个电压移位器与一个 或更多的显示元件，并且被配置为从显示驱动器电路接收至少一个输入电压，并将不同于输入电压的至少一个输出电压输出到相关联的一个或多个显示元件。 电压转换器可以包括例如放大器，差分放大器，运算放大器，电荷泵，电平转换器和数模转换器中的至少一个。

公开(公告)号：WO2006036421A1

公开(公告)日：2006-04-06

申请号：PCT/US2005/030526

申请日：2005-08-26

Applicant: IDC, LLC ,  FLOYD, Philip, D.

Inventor： FLOYD, Philip, D.

IPC: G02B26/00 ,  G02F1/21

CPC classification number: G02B26/001

Abstract: Various embodiments of the invention relate to methods and systems for generating the color white in displays created from interferometric modulators and more specifically, to the generation of the color white through the use of reflected light at two wavelengths. In one embodiment, a display device displays the color white. The color white is generated by reflecting light from two pluralities of interferometric modulator types. The first modulator type reflects colored light at a specific wavelength. The second modulator type reflects colored light selected to be at a wavelength complementary to the first. The combined light reflected from the two types appears white in the display.

Abstract translation: 本发明的各种实施例涉及在由干涉式调制器产生的显示器中产生彩色白色的方法和系统，更具体地说，涉及通过使用两个波长的反射光产生白色。 在一个实施例中，显示装置显示白色。 彩色白色是通过反射来自两个干涉式调制器类型的光产生的。 第一调制器类型反射特定波长的彩色光。 第二调制器类型反射被选择为与第一个波长互补的波长的彩色光。 从两种类型反射的组合光在显示屏上显示为白色。

公开(公告)号：WO2012094656A9

公开(公告)日：2012-07-12

申请号：PCT/US2012/020570

申请日：2012-01-07

Applicant: QUALCOMM INCORPORATED ,  KARMI, Yair ,  FLOYD, Philip D. ,  WORTHINGTON, Eric J.

Inventor： KARMI, Yair ,  FLOYD, Philip D. ,  WORTHINGTON, Eric J.

IPC: G06F3/048

Abstract: A method of presenting multiple frames on a touch screen is disclosed. In a particular embodiment, the method includes detecting multiple touch locations on a touch screen of an electronic device for at least an activation time. The method also includes splitting a display area of the touch screen into a first frame and a second frame based on the multiple touch locations.

公开(公告)号：WO2011133693A3

公开(公告)日：2012-01-05

申请号：PCT/US2011033290

申请日：2011-04-20

Applicant: QUALCOMM MEMS TECHNOLOGIES INC ,  GOVIL ALOK ,  KAO TSONGMING ,  MIGNARD MARC M ,  GANTI SURYAPRAKASH ,  FLOYD PHILIP D ,  KOTHARI MANISH

Inventor： GOVIL ALOK ,  KAO TSONGMING ,  MIGNARD MARC M ,  GANTI SURYAPRAKASH ,  FLOYD PHILIP D ,  KOTHARI MANISH

IPC: G09G3/34

CPC classification number: G09G3/3466 ,  G09G5/395 ,  G09G2300/0809 ,  G09G2300/0842 ,  G09G2340/12

Abstract: This disclosure provides methods, systems and apparatus for storing and processing image data at the pixel using augmented active matrix pixels. Some implementations of a display device may include a substrate, an array of display elements associated with the substrate and configured to display an image, an array of processor units associated with the substrate, wherein each processor unit is configured to process image data for a respective portion of the display elements and an array of memory units associated with the array of processor units, wherein each memory unit is configured to store data for a respective portion of the display elements. Some implementations may enable color processing image data at the pixel, layering of image data at the pixel or temporal modulation of image data at the pixel. Further, in some implementations, the display element may be an interferometric modulator (IMOD). Some other implementations may additionally include a display, a processor configured to communicate with the display and a memory device that is configured to communicate with the processor.

Abstract translation: 本公开提供了使用增强的有源矩阵像素在像素处存储和处理图像数据的方法，系统和装置。 显示设备的一些实施方式可以包括衬底，与衬底相关联并被配置为显示图像的显示元件的阵列，与衬底相关联的处理器单元的阵列，其中每个处理器单元被配置为处理相应的图像数据 显示元件的一部分和与处理器单元阵列相关联的存储器单元的阵列，其中每个存储器单元被配置为存储用于显示元件的相应部分的数据。 一些实施方式可以实现在像素处的图像数据的颜色处理，像素处的图像数据的分层或像素处的图像数据的时间调制。 此外，在一些实现中，显示元件可以是干涉式调制器（IMOD）。 一些其它实现可以另外包括显示器，被配置为与显示器通信的处理器和被配置为与处理器通信的存储器设备。

公开(公告)号：WO2011133700A1

公开(公告)日：2011-10-27

申请号：PCT/US2011/033298

申请日：2011-04-20

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  GOVIL, Alok ,  KAO, Tsongming ,  MIGNARD, Marc, Maurice ,  GANTI, Suryaprakash ,  FLOYD, Philip, D. ,  KOTHARI, Manish

Inventor： GOVIL, Alok ,  KAO, Tsongming ,  MIGNARD, Marc, Maurice ,  GANTI, Suryaprakash ,  FLOYD, Philip, D. ,  KOTHARI, Manish

IPC: G09G3/34

CPC classification number: G09G3/3466 ,  G09G3/2044 ,  G09G2300/0809 ,  G09G2300/0842 ,  Y10T29/49117

Abstract: This disclosure provides systems, methods and apparatus for parallel dithering images are disclosed. In one aspect, a display device (40) includes: a front substrate (110); a backplate (120) opposing the front substrate (110); an array of display elements (D 11 -D 33 ) associated with the front substrate (110); and an array of processing units (PU 11 -PU 33 ) associated with the backplate (120). Each of the processing units (PUn-PU 33 ) is configured to process data for one or more of the display elements (D 11 -D 33 ) for dithering an image. Each of the processing units (PU 11 -PU 33 ) is spatially arranged to correspond to the one or more display elements (D 11 -D 33 ) for which it is configured to process data. The array of processing units (PU 11 -PU 33 ) can perform a faster dithering process than a single processor sequentially performing all computation for dithering. Further, the position of the array of processing units (PU 11 -PU 33 ) allows effective image data processing in an active-matrix type display device while utilizing the space of the backplate thereof.

Abstract translation: 本公开提供了用于并行抖动图像的系统，方法和装置。 一方面，显示装置（40）包括：前基板（110）; 与所述前基板（110）相对的背板（120）; 与前基板（110）相关联的显示元件阵列（D11-D33）; 以及与背板（120）相关联的处理单元（PU11-PU33）的阵列。 每个处理单元（PUn-PU33）被配置为处理用于抖动图像的一个或多个显示元件（D11-D33）的数据。 处理单元（PU11-PU33）中的每一个在空间上布置成对应于被配置为处理数据的一个或多个显示元件（D11-D33）。 处理单元（PU11-PU33）的阵列可以执行比单个处理器顺序执行所有抖动计算的更快的抖动处理。 此外，处理单元阵列（PU11-PU33）的位置允许在有源矩阵型显示装置中有效的图像数据处理，同时利用其背板的空间。

公开(公告)号：WO2009036215A8

公开(公告)日：2009-08-20

申请号：PCT/US2008076077

申请日：2008-09-11

Applicant: QUALCOMM MEMS TECHNOLOGIES INC ,  YAN XIAOMING ,  HO CHOK ,  HEALD DAVID ,  GOUSEV EVGENI ,  HERTZLER BENJAMIN W ,  FLOYD PHILIP ,  SASAGAWA TERUO ,  LONDERGAN ANA ,  BITA ION ,  ZION TODD

Inventor： YAN XIAOMING ,  HO CHOK ,  HEALD DAVID ,  GOUSEV EVGENI ,  HERTZLER BENJAMIN W ,  FLOYD PHILIP ,  SASAGAWA TERUO ,  LONDERGAN ANA ,  BITA ION ,  ZION TODD

IPC: H01L21/311 ,  B01D53/68 ,  H01L21/3213

CPC classification number: H01L21/32135 ,  B01D53/002 ,  B01D2257/11 ,  B01D2257/2027 ,  H01L21/31116

Abstract: A method of fabricating an electromechanical device which comprises a step of etching a sacrificial layer with an etchant comprising a noble gas fluoride, e.g. xenon difluoride (XeF2). The efficiency of the etching process may be increased in various ways, and the cost of an etching process may be decreased. Unused etchant may be isolated and recirculated during the etching process. Etching byproducts may be collected and removed from the etching system during the etching process. Components of the etchant may be isolated and used to general additional etchant. Either or both of the etchant or the layers being etched may also be optimized for a particular etching process.

Abstract translation: 一种制造机电装置的方法，其包括用包括惰性气体氟化物的蚀刻剂蚀刻牺牲层的步骤，例如， 氙二氟化物（XeF2）。 可以以各种方式提高蚀刻工艺的效率，并且可以降低蚀刻工艺的成本。 未蚀刻的蚀刻剂可以在蚀刻过程中被隔离并再循环。 蚀刻副产物可以在蚀刻过程中从蚀刻系统中收集和去除。 蚀刻剂的组分可以被分离并用于一般的另外的蚀刻剂。 蚀刻剂或被蚀刻的层中的任一个或两者也可以针对特定的蚀刻工艺进行优化。

公开(公告)号：WO2009006162A3

公开(公告)日：2009-01-08

申请号：PCT/US2008/068205

申请日：2008-06-25

Applicant: QUALCOMM MEMS TECHNOLOGIES, INC. ,  HEALD, David, L. ,  ZHONG, Fan ,  FLOYD, Philip, Don

Inventor： HEALD, David, L. ,  ZHONG, Fan ,  FLOYD, Philip, Don

IPC: B81B3/00

Abstract: Disclosed is a microelectromechanical system (MEMS) device and method of manufacturing the same. In one aspect, MEMS such as an interferometric modulator include one or more elongated interior posts and support rails supporting a deformable reflective layer, where the elongated interior posts are entirely within an interferometric cavity and aligned parallel with the support rails. In another aspect, the interferometric modulator includes one or more elongated etch release holes formed in the deformable reflective layer and aligned parallel with channels formed in the deformable reflective layer defining parallel strips of the deformable reflective layer.