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公开(公告)号:KR1020120050257A
公开(公告)日:2012-05-18
申请号:KR1020100111679
申请日:2010-11-10
IPC: H01S3/10
CPC classification number: H01S3/101 , G02B27/283 , H01S3/1051
Abstract: PURPOSE: A laser beam attenuator in a laser lift-off apparatus and a laser beam irradiation apparatus having the same are provided to prevent an optical device from being damaged by preventing the unnecessary exposure of laser beams. CONSTITUTION: A laser beam attenuator(100) includes a transparent flat panel(110), a rotating unit(130), a controller, and a housing(150). The transparent flat panel is arranged on a route of laser beams to control the transmission amount of laser beams. The transparent flat panel is arranged on the route of the laser beams emitted from a laser generating unit. The transparent flat panel changes the transmission amount depending on a material. The controller controls an angle of the rotating unit according to preset attenuation. The housing accepts the transparent flat panel and the rotating unit.
Abstract translation: 目的:提供一种激光剥离装置中的激光束衰减器和具有该激光剥离装置的激光束照射装置,以防止激光束的不必要的曝光而损坏光学装置。 构成:激光束衰减器(100)包括透明平板(110),旋转单元(130),控制器和壳体(150)。 透明平板布置在激光束的路径上以控制激光束的透射量。 透明平板布置在从激光发生单元发射的激光束的路线上。 透明平板根据材料改变透射量。 控制器根据预设的衰减控制旋转单元的角度。 外壳接受透明平板和旋转单元。
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公开(公告)号:KR100656942B1
公开(公告)日:2006-12-13
申请号:KR1020050050751
申请日:2005-06-14
Applicant: (주)큐엠씨
Inventor: 김승규
IPC: H01L21/50
Abstract: An apparatus for sorting a semiconductor chip is provided to transmit driving power of a rotatory motor to a rotatory arm by using a pair of eccentric cams and a link for connecting the pair of eccentric cams. A rotatory arm(42) includes a picker(41) formed at one end thereof. A rotatory motor(46) provides rotatory power for rotating the rotatory power so that the picker is moved repeatedly between the wafer and an empty block. The rotatory arm is connected with the rotatory arm by using a pair of eccentric cams and a link connected with the pair of eccentric cams. The pair of eccentric cams include a first eccentric cam(43) connected with a center shaft of the rotatory motor and a second eccentric cam(45) connected with the rotatory arm. The eccentric distance of the first eccentric cam is different from the eccentric distance of the second eccentric cam.
Abstract translation: 提供了一种用于分拣半导体芯片的装置,以通过使用一对偏心凸轮和用于连接该对偏心凸轮的连杆将旋转马达的驱动力传递到旋转臂。 旋转臂(42)包括在其一端形成的拾取器(41)。 旋转马达(46)提供旋转动力以旋转旋转动力,使得拾取器在晶片和空块之间重复移动。 旋转臂通过使用一对偏心凸轮和与该对偏心凸轮连接的连杆与旋转臂连接。 一对偏心凸轮包括与旋转电机的中心轴连接的第一偏心凸轮(43)和与旋转臂连接的第二偏心凸轮(45)。 第一偏心凸轮的偏心距离不同于第二偏心凸轮的偏心距离。
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