Abstract:
Disclosed are a vertical vacuum electronic device, an integrated device, and a method for manufacturing a vertical vacuum electronic device. The vertical vacuum electronic device according to an embodiment of the present invention comprises: a substrate; a cathode formed on the surface of the substrate to expose a predetermined region of the surface of the substrate; an emitter electrically connected to the cathode and formed on the cathode; an insulating material having a smaller area than the emitter and formed on the emitter; an anode formed on the insulating material; and a gate which is inserted into the insulating material, exposes a portion near the predetermined region, and is arranged to surround the predetermined region, wherein the predetermined region is determined by the pattern of the gate.