수직형 진공 전자 소자, 그 제조방법 및 집적 소자
    11.
    发明授权
    수직형 진공 전자 소자, 그 제조방법 및 집적 소자 有权
    垂直真空电子设备,其方法和集成设备

    公开(公告)号:KR101438733B1

    公开(公告)日:2014-09-05

    申请号:KR1020130048200

    申请日:2013-04-30

    Abstract: Disclosed are a vertical vacuum electronic device, an integrated device, and a method for manufacturing a vertical vacuum electronic device. The vertical vacuum electronic device according to an embodiment of the present invention comprises: a substrate; a cathode formed on the surface of the substrate to expose a predetermined region of the surface of the substrate; an emitter electrically connected to the cathode and formed on the cathode; an insulating material having a smaller area than the emitter and formed on the emitter; an anode formed on the insulating material; and a gate which is inserted into the insulating material, exposes a portion near the predetermined region, and is arranged to surround the predetermined region, wherein the predetermined region is determined by the pattern of the gate.

    Abstract translation: 公开了垂直真空电子装置,集成装置和垂直真空电子装置的制造方法。 根据本发明实施例的垂直真空电子器件包括:衬底; 阴极,形成在所述衬底的表面上以暴露所述衬底的表面的预定区域; 电连接到阴极并形成在阴极上的发射极; 绝缘材料,具有比发射极小并形成在发射极上的面积; 形成在绝缘材料上的阳极; 并且插入到绝缘材料中的栅极暴露预定区域附近的部分,并且被布置成围绕预定区域,其中预定区域由栅极的图案确定。

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