公开(公告)号：KR1020090018223A

公开(公告)日：2009-02-19

申请号：KR1020097001486

申请日：2005-10-18

Applicant: 도쿄엘렉트론가부시키가이샤

Inventor： 야스무로아키라 ,  이이즈카하치시로

IPC: H01L21/205

CPC classification number: C23C16/4481 ,  C23C16/409 ,  C23C16/4485 ,  C23C16/52 ,  C30B25/14 ,  G01F23/2962 ,  G01F23/2968 ,  Y10T137/2931

Abstract: Semiconductor manufacturing equipment includes containers (Xb, Ab, Bb, Cb) for storing a liquid material. The semiconductor manufacturing equipment is provided with a liquid material supplying part for supplying the liquid material from the containers; a liquid vaporizing part for vaporizing the liquid material supplied from the liquid material supplying part and generating a gas; a processing part for performing film forming process by using the gas supplied from the liquid vaporizing part; an exhaust part for exhausting the processing part; and liquid level detectors (Xs, As, Bs, Cs) arranged at a bottom part of the container for detecting the liquid level of the liquid material by an acoustic wave.

Abstract translation: 半导体制造设备包括用于储存液体材料的容器（Xb，Ab，Bb，Cb）。 半导体制造设备设置有用于从容器供应液体材料的液体材料供应部件; 液体蒸发部分，用于蒸发从液体材料供应部分供应的液体材料并产生气体; 用于通过使用从液体蒸发部供应的气体进行成膜处理的处理部分; 用于排出处理部的排气部; 以及液体检测器（Xs，As，Bs，Cs），其布置在容器的底部，用于通过声波检测液体材料的液面。