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公开(公告)号：KR1020100043478A
公开(公告)日：2010-04-29
申请号：KR1020080102527
申请日：2008-10-20
Applicant: 삼성전기주식회사
IPC: H01L21/687
CPC classification number: H01L21/6831 , H01L21/67092
Abstract: PURPOSE: An electrostatic chuck and an apparatus for attaching a substrate using the same are provided to prevent the generation of voids between substrates, such as wafers. CONSTITUTION: An electrostatic chuck includes an elastic holder(152), an electrode and a support unit(154). The center of the one side of the elastic holder is convex shape. The elastic holder is charged by combining to the electrode. The support unit holds the other side of the elastic holder. A fluid is fills in the elastic holder. A pressure regulator controls the pressure of the fluid in order to control the pressure of the elastic holder.
Abstract translation: 目的：提供一种静电卡盘和用于安装使用其的基板的装置，以防止在诸如晶片的基板之间产生空隙。 构成：静电卡盘包括弹性保持器（152），电极和支撑单元（154）。 弹性保持器一侧的中心是凸形的。 弹性保持器通过组合电极而被充电。 支撑单元保持弹性保持器的另一侧。 流体填充弹性支架。 压力调节器控制流体的压力以便控制弹性保持器的压力。
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公开(公告)号：KR1020100043448A
公开(公告)日：2010-04-29
申请号：KR1020080102486
申请日：2008-10-20
Applicant: 삼성전기주식회사
Abstract: PURPOSE: An ink-jet head and a manufacturing method thereof are provided to manufacture the ink-jet head with an excellent anodic bonding mode by welding each processed layer, and to improve productivity of components. CONSTITUTION: A manufacturing method of an ink-jet head includes the following steps: interposing an insulating layer between a silicon layer and a lower silicon layer; preparing an SOI substrate in which the insulating layer is interposed; etching the lower silicon layer(23) to correspond on the top of a chamber(12), a restrictor(14), and a reservoir(13); etching an upper silicon layer(21); processing a first plate(30) made of a glass material; and processing a second plate(40) made of a silicon material.
Abstract translation: 目的：提供一种喷墨头及其制造方法，通过焊接每个处理层来制造具有优异阳极结合模式的喷墨头，并提高部件的生产率。 构成：喷墨头的制造方法包括以下步骤：在硅层和下硅层之间插入绝缘层; 制备其中插入绝缘层的SOI衬底; 蚀刻下部硅层（23）以在腔室（12），限制器（14）和储存器（13）的顶部上对应。 蚀刻上硅层（21）; 加工由玻璃材料制成的第一板（30）; 以及处理由硅材料制成的第二板（40）。
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公开(公告)号：KR1020100042162A
公开(公告)日：2010-04-23
申请号：KR1020080101323
申请日：2008-10-15
Applicant: 삼성전기주식회사
Abstract: PURPOSE: A manufacturing method of an inkjet head is provided to manufacture the inkjet head using a thin piezoelectric by easily controlling a thickness of the piezoelectric, and to improve economical efficiency of the inkjet head. CONSTITUTION: A manufacturing method of an inkjet head includes the following steps: forming an insulating layer on a lower electrode(S200); removing a part of the insulating layer to keep an edge of the insulating layer according to a location and a shape of a piezoelectric(S300); discharging piezoelectric element powdered ink with an inkjet mode(S400); forming a piezoelectric by sintering the piezoelectric element powdered ink(S500); forming the insulating layer according to a thickness of the piezoelectric.
Abstract translation: 目的：提供一种喷墨头的制造方法，通过容易地控制压电体的厚度来制造使用薄压电体的喷墨头，并且提高喷墨头的经济性。 构成：喷墨头的制造方法包括以下步骤：在下电极上形成绝缘层（S200）; 去除绝缘层的一部分以保持绝缘层的边缘根据压电体的位置和形状（S300）; 用喷墨模式排出压电元件粉末墨（S400）; 通过烧结压电元件粉末状墨水形成压电体（S500）; 根据压电体的厚度形成绝缘层。
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公开(公告)号：KR1020070000567A
公开(公告)日：2007-01-03
申请号：KR1020050056013
申请日：2005-06-28
Applicant: 삼성전기주식회사
IPC: G02B3/00
CPC classification number: G02B3/0062 , B29D11/00365 , G02B3/0012
Abstract: A bonding method for stacking wafer scale lenses and the wafer scale lens produced by the same are provided to secure optimal optical characteristic of the wafer scale lens by preventing the gap between lens elements from being changed in applying an adhesive agent by supplying the adhesive agent to the inside of a micro-channel. A bonding method for stacking wafer scale lenses includes steps of: forming a first lens body(100) having a first lens substrate(110), plural first lens elements(120) formed on the first lens substrate, and a lower barrier(130) installed on the first lens substrate and provided with a recessed micro-channel(131); forming a second lens body(200) comprising a second lens substrate(210) and plural second lens elements(220) formed on the second lens substrate; stacking the second lens body on the lower barrier of the first lens body; and bonding the first and second lens bodies to each other by injecting an adhesive agent(300) through the micro-channel of the lower barrier.
Abstract translation: 提供用于堆叠晶片鳞片透镜的接合方法和由其制造的晶片鳞片透镜，以通过防止透镜元件之间的间隙通过将粘合剂供应到粘合剂来施加粘合剂而确保晶片标尺透镜的最佳光学特性 微通道的内部。 一种用于层叠晶片鳞片透镜的接合方法包括以下步骤：形成具有第一透镜基板（110）的第一透镜体（100），形成在第一透镜基板上的多个第一透镜元件（120）和下屏障（130） 安装在第一透镜基板上并设置有凹入的微通道（131）; 形成包括形成在第二透镜基板上的第二透镜基板（210）和多个第二透镜元件（220）的第二透镜体（200） 将第二透镜体叠置在第一透镜体的下屏障上; 以及通过从所述下阻挡件的微通道注入粘合剂（300）将所述第一透镜体和所述第二透镜体彼此接合。
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公开(公告)号：KR100631989B1
公开(公告)日：2006-10-09
申请号：KR1020050058477
申请日：2005-06-30
Applicant: 삼성전기주식회사
IPC: G01B9/02
Abstract: A wafer lens alignment method using a moire pattern and a lens mold for the method are provided to arrange lens elements at less cost and hour by using a normal tip, and to improve lens alignment resolution by forming the section of a recessed groove into a curved line. A wafer lens alignment method using a moire pattern comprises a step of preparing a lens mold having a first alignment mark, which has a lens element molding unit formed to correspond to the shape of a lens element and a recessed groove recessed at the outer side of the lens element molding unit with a predetermined pattern to reflect the light projected from the upper side and to have a section shape collecting the light at a space(410); a step of preparing a lens base plate having a second alignment mark, which has a lens element mounting unit where the lens element is mounted and a brightness pattern formed at the outer side of the lens element mounting unit to generate the moire pattern by interacting with the first alignment mark of the lens mold(420); a step of placing the lens base plate on the lens mold and irradiating the light on the lens base plate(430); and a step of observing the moire pattern formed by the interaction of the first and second alignment marks and arranging the lens base plate and the lens mold(440).
Abstract translation: 提供了一种使用莫尔图案和用于该方法的透镜模具的晶片透镜对准方法，以通过使用普通尖端以较低的成本和小时排列透镜元件，并且通过将凹槽的截面形成为弯曲的 线。 一种使用莫尔图案的晶片透镜对准方法包括以下步骤：制备具有第一对准标记的透镜模具，该透镜模具具有形成为与透镜元件的形状对应的透镜元件成形单元和在外侧凹入的凹槽 所述透镜元件成型单元具有预定图案以反射从上侧投射的光并具有将光收集在空间（410）处的截面形状; 准备具有第二对准标记的透镜基板的步骤，该透镜基板具有安装透镜元件的透镜元件安装单元和形成在透镜元件安装单元的外侧的亮度图案，以通过与透镜元件安装单元相互作用而产生莫尔图案 镜片模具（420）的第一对准标记; 将透镜基板放置在透镜模具上并将光照射到透镜基板（430）上的步骤; 以及观察由第一和第二对准标记的相互作用形成的莫尔图案并布置透镜基板和透镜模具（440）的步骤。
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Patent Agency Ranking
公开(公告)号：KR101228725B1
公开(公告)日：2013-02-01
申请号：KR1020100086472
申请日：2010-09-03
Applicant: 삼성전기주식회사
IPC: G01N35/10 , G01N33/48 , G01N33/487
CPC classification number: B01L3/502715 , B01L3/0268 , B01L2200/027 , B01L2200/10 , B01L2400/0439 , B01L2400/0442 , Y10T137/0402
Abstract: 본 발명은 미세유체 토출장치 및 이의 제조방법에 관한 것으로, 본 발명에 따른 미세유체 토출장치는 미세유체가 유입되는 유입구, 상기 유입구와 연결되며 다수 개의 격벽에 의하여 구획되는 다수 개의 단위 챔버가 형성되는 가압 챔버, 및 상기 가압 챔버와 연결되며 상기 다수 개의 단위 챔버를 통과한 미세유체를 하나의 유로로 통합하여 토출하는 노즐을 포함하는 유로 플레이트; 및 다수 개의 상기 단위 챔버에 각각 대응하도록 상기 유로 플레이트의 상부에 각각 형성되며, 상기 가압 챔버에서 노즐로의 미세유체 토출의 구동력을 각각 제공하는 다수 개의 액추에이터를 포함한다. 본 발명에 따른 미세 유체 토출장치는 가압 챔버 내부의 압력 변화를 정밀하게 제어할 수 있어 미세유체의 토출 성능이 우수하다.
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公开(公告)号：KR101198007B1
公开(公告)日：2012-11-05
申请号：KR1020100130715
申请日：2010-12-20
Applicant: 삼성전기주식회사
CPC classification number: B01L3/0268 , A61M37/0015 , A61M2037/003 , B01L3/5025 , B01L3/50273 , B01L9/527 , B01L2300/0816
Abstract: There is provided a micro-ejecting apparatus. The micro-ejecting apparatus includes: an ejector including a channel therein and a driving part for ejecting a fluid to the outside; a body including a plurality of mounting parts on which the ejector is mounted; and guiding members fixed on the body and corresponding to the plurality of mounting parts so as to determine the positions of the plurality of mounting parts in the body.
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公开(公告)号：KR1020110058422A
公开(公告)日：2011-06-01
申请号：KR1020090115210
申请日：2009-11-26
Applicant: 삼성전기주식회사
CPC classification number: B41J2/14233 , B41J2002/14419
Abstract: PURPOSE: An inkjet head is provided to more stably discharge ink droplets even in a high-frequency region by minimizing crosstalk. CONSTITUTION: An inkjet head(100) comprises a plurality of discharging cells which are connected to a common reservoir(11) for supplying ink. Columns(30) are arranged at regular intervals inside the common reservoir as being extended from bottom to top to support the top surface of the common reservoir and dissipate pressure wave delivered in the common reservoir.
Abstract translation: 目的：提供一种喷墨头，以便通过最小化串扰来即使在高频区域也能更稳定地排出墨滴。 构成：喷墨头（100）包括多个放电单元，其连接到用于供应墨水的公共储存器（11）。 列（30）在公共储存器内以规则的间隔布置成从底部延伸到顶部以支撑公共储存器的顶表面并消散在公共储存器中传送的压力波。
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公开(公告)号：KR1020110050205A
公开(公告)日：2011-05-13
申请号：KR1020090107085
申请日：2009-11-06
Applicant: 삼성전기주식회사
Abstract: PURPOSE: An ink-jet head manufacturing method is provided to prevent the inflow of foreign materials flowing in a head body in an etching process for patterning an upper electrode. CONSTITUTION: An ink-jet head manufacturing method comprises the following steps. A head body which is formed with a vibration plate on the top thereof is prepared. The upper side of the vibration plate is coated with a lower electrode(S110). Photoresist is patterned so that an open area is formed on the upper part of the vibration plate(S120). The open area is filled with the piezoelectric(S130). The upper side of the piezoelectric and the upper side of the photoresist are coated with a conductive layer(S140). The photoresist is etched, a part of a conductive layer coated on the photoresist is removed, and an upper electrode is patterned on the upper side of the piezoelectric(S150).
Abstract translation: 目的：提供喷墨头制造方法，以防止在用于图案化上电极的蚀刻工艺中在头本体中流动的异物的流入。 构成：喷墨头制造方法包括以下步骤。 准备在其顶部形成有振动板的头体。 振动板的上侧涂有下电极（S110）。 对光刻胶进行图案化，使得在振动板的上部形成开放区域（S120）。 开放区域用压电体填充（S130）。 压电体的上侧和光致抗蚀剂的上侧涂覆有导电层（S140）。 蚀刻光致抗蚀剂，去除涂覆在光致抗蚀剂上的导电层的一部分，并且在压电体的上侧对上电极进行图案化（S150）。
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公开(公告)号：KR101020850B1
公开(公告)日：2011-03-09
申请号：KR1020080101323
申请日：2008-10-15
Applicant: 삼성전기주식회사
Abstract: 잉크젯 헤드 제조방법이 개시된다. 잉크가 수용되는 챔버와, 일측에 챔버의 위치에 상응하여 형성되는 압전체와, 압전체와 챔버 사이에 개재되는 하부전극 및 압전체 상에 형성되는 상부전극을 포함하는 잉크젯 헤드를 제조하는 방법으로서, 하부전극 상에 절연층을 형성하는 단계, 압전체의 위치와 형상에 따라 절연층의 가장자리가 잔존하도록 절연층의 일부를 제거하는 단계, 절연층의 가장자리 내에 압전소자분말잉크를 잉크젯 방식으로 토출하는 단계, 및 압전소자분말잉크를 소결하여 압전체를 형성하는 단계를 포함하는 잉크젯 헤드 제조방법은, 압전체의 두께 제어를 보다 용이하게 할 수 있어 박형화 된 압전체를 구동부로 하는 잉크젯 헤드를 제조할 수 있다.
잉크젯 헤드, 압전체, PZT, 구동부
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