公开(公告)号：KR1020080018294A

公开(公告)日：2008-02-28

申请号：KR1020060080171

申请日：2006-08-24

Applicant: 삼성전자주식회사 ,  삼성엔지니어링 주식회사

Inventor： 정인호 ,  황재동 ,  은성광 ,  최병문 ,  김선필 ,  허등윤

IPC: C02F1/44 ,  C02F1/20 ,  C02F1/66 ,  C02F1/76 ,  C02F9/00 ,  C02F1/42 ,  C02F103/34

CPC classification number: C02F1/441 ,  C02F1/20 ,  C02F1/66 ,  C02F1/76 ,  C02F9/00 ,  C02F2001/425 ,  C02F2103/346 ,  C02F2209/06 ,  C02F2303/04 ,  C02F2303/185

Abstract: A method of recycling wastewater is provided to reduce the manufacturing cost of semiconductor devices and solve environmental pollution caused by semiconductor wastewater by recycling semiconductor wastewater into industrial water for semiconductor processes, and an apparatus suitable for performing the method is provided. A method of recycling semiconductor wastewater comprises the steps of: injecting a first sodium hydroxide(NaOH) into semiconductor wastewater to provide the semiconductor wastewater with a hydrogen ion concentration ranging from 8.5 to 9.5 pH; passing the semiconductor wastewater through a weak acid cation ion-exchange resin to remove calcium(Ca) and magnesium(Mg) from the semiconductor wastewater; injecting hydrochloric acid(HCl) into the semiconductor wastewater to provide the semiconductor wastewater with a hydrogen ion concentration ranging from 2 to 3 pH; removing carbonic acid gas(CO3) from the semiconductor wastewater; injecting a second sodium hydroxide(NaOH) into the semiconductor wastewater to provide the semiconductor wastewater with a hydrogen ion concentration of at least 10 pH; and removing salts and organic carbons from the semiconductor wastewater by high efficiency reverse osmosis. Further, a step of adding NaOCl into the semiconductor wastewater before adding the first sodium hydroxide is additionally comprised.

Abstract translation: 提供回收废水的方法，以减少半导体器件的制造成本，并通过将半导体废水再循环到工业用于半导体工艺的水中来解决半导体废水造成的环境污染，并提供适合于执行该方法的装置。 回收半导体废水的方法包括以下步骤：将第一氢氧化钠（NaOH）注入到半导体废水中，为半导体废水提供8.5至9.5的氢离子浓度; 使半导体废水通过弱酸性阳离子交换树脂从半导体废水中除去钙（Ca）和镁（Mg）; 在半导体废水中注入盐酸（HCl），为半导体废水提供2〜3 pH的氢离子浓度; 从半导体废水中除去碳酸气体（CO3）; 将第二氢氧化钠（NaOH）注入到半导体废水中，以提供具有至少10个pH的氢离子浓度的半导体废水; 并通过高效反渗透从半导体废水中除去盐和有机碳。 此外，还包括在加入第一氢氧化钠之前将NaOCl加入到半导体废水中的步骤。

公开(公告)号：KR100735609B1

公开(公告)日：2007-07-04

申请号：KR1020010049481

申请日：2001-08-17

Applicant: 삼성전자주식회사

Inventor： 함창열 ,  김선필

IPC: H01L21/304

Abstract: 본 발명은 초순수 제조설비의 유기탄소(TOC)의 농도에 따라 UV램프의 조사량을 제어하는 UV램프 조사량 제어하는 기술이다.
본 발명의 초순수 제조설비에서 유브이 램프 조사량을 제어하기 위해, 공급되는 초순수(DI WATER) 중에 함유된 유기물질의 농도를 분석하고, 상기 분석된 유기물질의 농도값이 설정된 농도값이하일 시 노말상태에 따른 수질을 제어하기 위한 제어신호를 출력하며, 상기 노말상태에 따른 수질을 제어하기 위한 제어신호를 출력할 시 상기 유브이 램프를 30%점등시키도록 전원을 공급한다.

유브이램프,

公开(公告)号：KR1020040066675A

公开(公告)日：2004-07-27

申请号：KR1020030003809

申请日：2003-01-20

Applicant: 삼성전자주식회사

Inventor： 김선필 ,  강혁 ,  신호수 ,  유호정 ,  함창열

IPC: C02F1/44

Abstract: PURPOSE: Provided are an ultra-pure water manufacturing device and a method for manufacturing ultra-pure water by using the same which recover treated water to a raw water supplying tank or automatically control the discharge amount of the supplied treated water and concentrated water when the salt removing rate is abnormal compared to the reference value. CONSTITUTION: The device(1) comprises a pre-treating filter(7) primarily filtering fine particles contained in raw water supplied from a raw water supplying tank(3), a first reverse osmotic membrane device(11) removing salts contained in the water filtered through the pre-treating filter, a second reverse osmotic membrane device(13) removing salts contained in the concentrated water separated by the first reverse osmotic membrane device, a salt removing rate tester(19) installed on a treated water supply line(15) to check the salt removing rate of the treated water, a treated water supply valve(21) equipped at the treated water supply line to switch on and off the treated water supply line, a return valve(25) opening and closing a return line(23) connected from the treated water supply line between the treated water supply valve and the second reverse osmotic membrane device to the raw water supply tank, a concentrated water control valve(29) equipped at a concentrated water discharge line(27) where the concentrated water separated by the second reverse osmotic membrane device passes through and a controller(31) comparing data regarding the salt removing rate checked by the salt removing rate tester to generate an opening and closing signal of the treated water supply valve, return valve and concentrated water control valve.

Abstract translation: 目的：提供一种超纯水制造装置和使用该超纯水的超纯水的制造方法，其将处理后的水回收至原水供给槽，或者当自动控制供给的处理水和浓缩水的排出量时 脱盐率与参考值相比是异常的。 构成：装置（1）包括预处理过滤器（7），其主要过滤从原水供应罐（3）供应的原水中所含的细颗粒，第一反渗透膜装置（11）去除包含在水中的盐 通过预处理过滤器过滤，第二反渗透膜装置（13），其去除由第一反渗透膜装置分离的浓缩水中所含的盐，安装在经处理的供水管线（15）上的去盐率测试器（19） ）检查处理水的去盐率，处理水供给阀（21），其配置在处理后的供水管路上以打开和关闭经处理的供水管线;打开和关闭返回管线的回流阀（25） （23），其从经处理供水管和第二反渗透膜装置之间的处理供水管连接到原水供给箱;浓缩水控制阀（29） 由第二反渗透膜装置分离的浓缩水通过的管线（27）和控制器（31），比较由除盐率检测器检查的盐去除率的数据，生成处理后的供水的开闭信号 阀门，回流阀和浓缩水控制阀。

公开(公告)号：KR1020040060439A

公开(公告)日：2004-07-06

申请号：KR1020020087236

申请日：2002-12-30

Applicant: 삼성전자주식회사

Inventor： 함창열 ,  김선필 ,  최승걸

IPC: H01L21/304

Abstract: PURPOSE: An ultra-pure water supply system is provided to supply the ultra-pure water of the high purity by removing impurities from the ultra-pure water. CONSTITUTION: An ultra-pure water supply system includes an ultra-pure water tank, a lamp disinfection bath, a polisher, a filter unit, a disinfection solution supply unit, and an acid wastewater tank. The ultra-pure water tank(11) is used for supplying or collecting the ultra-pure water to or from a semiconductor fabrication apparatus. The lamp disinfection bath(13,15) is used for removing bacteria from the ultra-pure water of the ultra-pure water tank. The polisher(17) is used for removing ions from the disinfected water of the lamp disinfection bath. The filter unit(19) is used for filtering impurities of the ultra-pure water of the polisher. The disinfection solution supply unit(20) supplies the disinfection solution to an ultra-pure water pipeline. The acid-wastewater tank(30) is used for storing the collected water.

Abstract translation: 目的：提供超纯水供应系统，通过从超纯水中除去杂质来提供高纯度的超纯水。 规定：超纯水供应系统包括超纯水箱，灯消毒浴，抛光机，过滤器单元，消毒溶液供应单元和酸性废水箱。 超纯水箱（11）用于向半导体制造设备供应或收集超纯水。 灯消毒浴（13,15）用于从超纯水罐的超纯水中除去细菌。 抛光机（17）用于从灯消毒浴的消毒水中除去离子。 过滤器单元（19）用于过滤抛光机超纯水的杂质。 消毒溶液供应单元（20）将消毒溶液供应给超纯水管道。 酸性废水箱（30）用于收集收集的水。

公开(公告)号：KR100421052B1

公开(公告)日：2004-03-04

申请号：KR1020020004151

申请日：2002-01-24

Applicant: 삼성전자주식회사

Inventor： 김선필 ,  최승걸

IPC: C02F1/44

CPC classification number: B01D65/10 ,  B01D61/022 ,  B01D61/12 ,  B01D65/02 ,  B01D2321/00 ,  C02F1/441

Abstract: An apparatus and method for manufacturing deionized water is provided. Water is supplied to a first conduit. A plurality of reverse osmotic pressure vessels are connected to the first conduit. A filtering experimental vessel is connected to the first conduit, the filtering experimental vessel is separated from the plurality of reverse osmotic pressure vessels. A second conduit is connected to the plurality of reverse osmotic pressure vessels and the filtering experimental vessel for outputting the deionized water. A third conduit is connected to the plurality of reverse osmotic pressure vessels and the filtering experimental vessel for outputting concentrated ion water. The plurality of reverse osmotic pressure vessels and the filtering experimental vessel concurrently or independently separates the supplying water into the deionized water and the concentrated ion water.

Abstract translation: 提供了一种制造去离子水的装置和方法。 水被供应到第一导管。 多个反渗透压力容器连接到第一导管。 过滤实验容器连接到第一导管，过滤实验容器与多个反渗透压力容器分离。 第二导管连接到多个反渗透压力容器和用于输出去离子水的过滤实验容器。 第三导管连接到多个反渗透压力容器和过滤实验容器以输出浓缩离子水。 多个反渗透压力容器和过滤实验容器同时或独立地将供水分离成去离子水和浓缩离子水。

公开(公告)号：KR1020030015639A

公开(公告)日：2003-02-25

申请号：KR1020010049481

申请日：2001-08-17

Applicant: 삼성전자주식회사

Inventor： 함창열 ,  김선필

IPC: H01L21/304

Abstract: PURPOSE: A method and apparatus controlling irradiation capacity of UV lamp for deionized water recovery device are provided to extend the lifetime of the ultraviolet lamp by selectively turning on/off the ultraviolet lamp according to the density of total organic carbon(TOC). CONSTITUTION: The ultraviolet lamp eliminates a low polymer organic material out of deionized water. The supplied deionized water is stored in a lamp water bath. A water quality analyzer analyzes the density of the organic material contained in the supplied deionized water. A water quality control unit receives an analyzed value from the water quality analyzer and outputs a control signal for controlling a water quality according to a normal state or abnormal state. A power supply unit receives the control signal from the water quality control unit and controls the power supply for turning on/off the ultraviolet lamp by 30 percent or 100 percent.

Abstract translation: 目的：提供一种控制去离子水回收装置的紫外灯的照射能力的方法和装置，通过根据总有机碳（TOC）的密度选择性地打开/关闭紫外线灯，延长紫外灯的寿命。 构成：紫外灯消除了去离子水中的低聚合物有机物质。 将供应的去离子水储存在灯水浴中。 水质分析仪分析供给的去离子水中含有的有机物质的密度。 水质控制单元从水质分析器接收分析值，并根据正常状态或异常状态输出用于控制水质的控制信号。 电源单元接收来自水质控制单元的控制信号，并将紫外线灯的开/关电源控制30％或100％。

公开(公告)号：KR1020020049217A

公开(公告)日：2002-06-26

申请号：KR1020000078331

申请日：2000-12-19

Applicant: 삼성전자주식회사

Inventor： 최승걸 ,  김선필

IPC: C02F9/02

Abstract: PURPOSE: A method of manufacturing ultrapure water by using acid-treated activated carbon in the first step of manufacturing is provided to prevent increasing of TOC which is occurred when pH is increased of disposed water as change of activated carbon. CONSTITUTION: In manufacturing of ultrapure water, acid-treated activated carbon or ordinary activated carbon rinsed with acid water needs at the first step of manufacturing. The pH of acid-treated activated carbon is 3-7. The acid water that rinses activated carbon is made by mixing withdrawal water and raw water.

Abstract translation: 目的：提供在第一制造步骤中通过使用酸处理的活性炭制造超纯水的方法，以防止随着活性炭的变化而提高pH而增加pH时的TOC增加。 构成：在超纯水的制造中，酸处理的活性炭或用酸水漂洗的普通活性炭需要在制造的第一步。 酸处理的活性炭的pH值为3-7。 冲洗活性炭的酸水是通过混合提取水和原水制成的。