公开(公告)号：KR1020070012577A

公开(公告)日：2007-01-26

申请号：KR1020050067050

申请日：2005-07-23

Applicant: 삼성전자주식회사

Inventor： 박영민 ,  박노정 ,  박휴림 ,  김동철 ,  남궁동훈

IPC: H01L21/68 ,  B65G43/00

CPC classification number: H01L21/67766 ,  H01L21/67259

Abstract: A method and an apparatus for transferring wafers are provided to reduce a centering time of the wafer transferring apparatus by compensating for a target position based on a detection position. An apparatus for transferring wafers transfers the waveform, which is extracted from a wafer cassette, to a reactor and includes a wafer transfer unit(40), at least three sensors, and a controller. The wafer transfer unit includes an arm, which supports the wafers and transfers the wafer to the reactor. The wafers are contained in the wafer cassette. The sensors are arranged to be apart from each other in a direction parallel to a transfer direction of the wafer. The sensors are arranged at an outlet hole of the wafer cassette. The controller determines whether a target position, which is calculated based on detection signals from the sensors and a transfer speed of the arm, is different from a detection position. The controller compensates for the target position based on the detection position of the wafer, such that the wafer is delivered to the reactor by the wafer transfer unit.

Abstract translation: 提供一种用于传送晶片的方法和装置，以通过基于检测位置补偿目标位置来减小晶片传送装置的定心时间。 用于传送晶片的装置将从晶片盒提取的波形传送到反应器，并且包括晶片传送单元（40），至少三个传感器和控制器。 晶片传送单元包括支撑晶片并将晶片传送到反应器的臂。 晶片被包含在晶片盒中。 传感器被布置成在平行于晶片的传送方向的方向上彼此分开。 传感器布置在晶片盒的出口孔处。 控制器确定基于来自传感器的检测信号计算的目标位置和臂的传送速度是否与检测位置不同。 控制器基于晶片的检测位置补偿目标位置，使得晶片由晶片传送单元输送到反应器。