Abstract:
A coating material having remarkably improved corrosion resistance in comparison with existing Al2O3, Y2O3 crystalloid coating materials and Al-Y-O and Al-Zr-O based ceramic amorphous coating materials, a method for preparing the coating material, and a coating method using the same are disclosed. The ceramic coating material according to an embodiment of the present invention satisfies the following chemical formula: Y2xZr1-xOx+2. The x is 0.19-0.83 and, more desirably, a composition ratio of the x is 0.35-0.69. According to the present invention, the coating material for a chamber of vacuum plasma processing equipment and the internal components, capable of improving the corrosion resistance of a protective coating film in a ceramic coating process and extending the service life of the components, can be prepared.
Abstract translation:与现有的Al 2 O 3,Y 2 O 3晶体涂层材料和Al-YO和Al-Zr-O系陶瓷无定形涂层材料相比,具有显着提高的耐腐蚀性的涂料,涂料的制备方法和使用该涂料的涂布方法 披露。 根据本发明实施方案的陶瓷涂料满足以下化学式:Y2xZr1-xOx + 2。 x为0.19-0.83,更理想的是x的组成比为0.35-0.69。 根据本发明,可以制备用于真空等离子体处理设备的室内涂料和能够提高陶瓷涂覆工艺中的保护涂膜的耐腐蚀性并延长组件的使用寿命的内部组件 。
Abstract:
PURPOSE: A biomaterial for MRI(Magnetic Resonance Imaging) diagnosis and a method of manufacturing the same are provided to relieve distortion of an image when a body is operated, diagnosed, or analyzed using an MRI. CONSTITUTION: A biomaterial for MRI diagnosis comprises at least one diamagnetic substance selected from a group consisting of a carbonaceous material and bismuth; and at least one paramagnetic substance selected from a group consisting of nitinol, niobium, titanium, and zirconium. The diamagnetic substance comprises a carbonaceous material. The carbonaceous material is graphite. The paramagnetic material comprises titanium. The amount of titanium is 70-90 vol%. [Reference numerals] (AA) Temperature(°C); (BB) TIC + Graphite