公开(公告)号：KR101466967B1

公开(公告)日：2014-12-15

申请号：KR1020120063326

申请日：2012-06-13

Applicant: 한국과학기술연구원

Inventor： 석현광 ,  김유찬 ,  최은영 ,  백경호 ,  변경훈 ,  정훈

IPC: C23C4/10 ,  C23C4/12 ,  C01F17/00 ,  C01G25/00

CPC classification number: C09D5/084 ,  C23C4/11 ,  C23C4/134 ,  C23C28/32 ,  C23C28/3455 ,  C23C28/36 ,  Y10T428/2982

Abstract: 내식성이대폭개선된코팅물질, 코팅물질을제조하는방법및 이를이용한코팅방법이개시된다. 본발명의일 실시예에따른열용사용코팅물질은 YZrO의화학식을가지며상기 x는 0.19~0.83이고더욱바람직하게는상기 x는 0.35~0.69의조성비를갖는다. 본발명에의하면, 세라믹용사코팅시보호코팅막의내석성이향상되고부품의수명을연장시킬수 있는진공플라즈마공정장비의챔버및 그내부부품용코팅물질을제조할수 있다.

公开(公告)号：KR1020130139665A

公开(公告)日：2013-12-23

申请号：KR1020120063326

申请日：2012-06-13

Applicant: 한국과학기술연구원

Inventor： 석현광 ,  김유찬 ,  최은영 ,  백경호 ,  변경훈 ,  정훈

IPC: C23C4/10 ,  C23C4/12 ,  C01F17/00 ,  C01G25/00

CPC classification number: C09D5/084 ,  C23C4/11 ,  C23C4/134 ,  C23C28/32 ,  C23C28/3455 ,  C23C28/36 ,  Y10T428/2982

Abstract: A coating material having remarkably improved corrosion resistance in comparison with existing Al2O3, Y2O3 crystalloid coating materials and Al-Y-O and Al-Zr-O based ceramic amorphous coating materials, a method for preparing the coating material, and a coating method using the same are disclosed. The ceramic coating material according to an embodiment of the present invention satisfies the following chemical formula: Y2xZr1-xOx+2. The x is 0.19-0.83 and, more desirably, a composition ratio of the x is 0.35-0.69. According to the present invention, the coating material for a chamber of vacuum plasma processing equipment and the internal components, capable of improving the corrosion resistance of a protective coating film in a ceramic coating process and extending the service life of the components, can be prepared.

Abstract translation: 与现有的Al 2 O 3，Y 2 O 3晶体涂层材料和Al-YO和Al-Zr-O系陶瓷无定形涂层材料相比，具有显着提高的耐腐蚀性的涂料，涂料的制备方法和使用该涂料的涂布方法 披露。 根据本发明实施方案的陶瓷涂料满足以下化学式：Y2xZr1-xOx + 2。 x为0.19-0.83，更理想的是x的组成比为0.35-0.69。 根据本发明，可以制备用于真空等离子体处理设备的室内涂料和能够提高陶瓷涂覆工艺中的保护涂膜的耐腐蚀性并延长组件的使用寿命的内部组件 。