Abstract:
A method for fabricating an LED with a photonic crystal is provided to improve light extraction efficiency by supplying an LED with a photonic crystal capable of being produced at low cost. A first clad layer(12), a light emitting layer(14) and a second clad layer(16) are sequentially formed. An aluminum layer is deposited on the second clad layer. An alumina layer pattern is formed on the deposited aluminum layer by an anodizing method, including holes disposed at regular intervals. By using the alumina layer pattern as an etch mask, a predetermined depth of the second clad layer is etched to form a photonic crystal lattice array. In the anodizing method, an electrolysis polishing process is performed and a DC voltage of 10~200 volts is applied in phosphoric acid solution, oxalic acid solution, sulfuric acid solution or composition solution thereof by using an aluminum electrode.
Abstract:
A laser diode having a nanoporous cladding layer and a method of fabricating the same are disclosed. The nanoporous cladding layer including pores, which are formed by electrochemically etching an n-GaN layer, is formed on at least one of a top and a bottom of an active layer. The nanoporous GaN layer having the pores formed by electrochemically etching the n-GaN layer of the nanoporous cladding GaN layer may be modified into an insulation layer through an oxidation process. Light confinement may be improved without reducing crystallization by the nanoporous GaN layer having a plurality of pores or by the insulation layer modified from the nanoporous GaN layer, so the laser diode may be easily operated in a single side mode. An area of a first electrode may be increased, and device resistance may be reduced since AlGaN having high resistance is removed. Also, an optical mode region may serve as a current injection region since the nanoporous GaN layer of the nanoporous cladding layer is modified into the insulation layer, and operating the current of a laser may be reduced by a reduction in leakage current.
Abstract:
본 발명은 n-GaN계열의 제1 반도체영역과 상기 제1 반도체영역과 다른 도핑 농도를 갖는 n-GaN계열의 제2반도체 영역을 포함하는 반도체 구조물을 양극으로 하고 전해액을 음극으로 하여 전해 에칭을 수행하여, 제1 반도체영역과 제2 반도체 영역의 에칭 속도가 서로 다르게 하여 반도체 영역의 선택적 식각방법 및 반도체소자를 기판으로부터 분리하는 방법을 제공한다. GaN, 기판 분리, 전해액, 전해에칭
Abstract:
PURPOSE: A method for selectively etching a semiconductor region and the method for separating a semiconductor device from a substrate are provided to discharge heat through a metal substrate by growing an optical element on a sapphire substrate and transferring the optical element to the metal substrate with high thermal conductivity. CONSTITUTION: A n-GaN based first semiconductor region(120) and a n-GaN based second semiconductor region(240) are prepared on a substrate. An electrolyte etching process is performed using the first semiconductor region and the second semiconductor region as an anode and an electrolyte as a cathode. An etching speed is differently controlled by controlling the doping density on the first and second semiconductor regions.
Abstract:
A method of selectively etching semiconductor region, a separation method of a semiconductor layer and a separation method of a semiconductor device from a substrate are provided to easily separate the semiconductor structure and transfer to the other substrate by using the electrolytic etching manner. The first semiconductor layer(230) of the N-type GaN series, and the second semiconductor layer(240) of the other conductive type GaN series and a semiconductor element portion(300) are successively formed on the first substrate(210). The semiconductor element portion is adhered to the second substrate(500). The etching is performed by using the electrolyte including the oxalic acid. The etching rate of the first semiconductor layer is greater than the etching rate of the second semiconductor layer. The semiconductor layer is etched more quickly than the second semiconductor.
Abstract:
본 발명은 기판 상부에 장벽층과 양자우물층이 교대로 형성되는 양자 우물 구조의 전기장 조절 구조에 있어서, 각 장벽층들 내부에는 소정 두께로 n형 또는 p형 도핑영역들이 구비되고, 상기 n형 도핑영역과 상기 p형 도핑영역은 적어도 하나의 양자우물층이 내부에 포함되는 구조로 형성되는 양자 우물의 전기장 조절 구조를 제공한다. 양자우물, 장벽층, 도핑
Abstract:
A nano structure is provided to embody a more beautiful color than ordinary pigments, and be surface-colored at low cost and in a simple manner. A method for manufacturing a nano structure for coloring the surface thereof includes the steps of: forming a first metal layer on the upper part of the surface; anodizing the metal layer to form a nano hole array structure(20) in which nano holes are formed in an array shape at regular intervals; forming a second metal layer(30) on the at least upper parts of the nano holes; and further forming a protective layer on the upper part on which the second metal layer is formed. The pitch(D) between nano holes is 20-500 nm.