스핀코터용 진공척
    11.
    发明授权
    스핀코터용 진공척 失效
    스핀코터용진공척

    公开(公告)号:KR100744102B1

    公开(公告)日:2007-08-01

    申请号:KR1020060033370

    申请日:2006-04-12

    Abstract: A vacuum chuck for a spin coater is provided to suck a wafer by distributing vacuum and deposit various sizes of waves by using one vacuum chuck. A plate-type vacuum suction plate(20) is provided on a rotary plate(10) which is fixed to a shaft of a vacuum chuck. The vacuum suction plate has at least one vacuum port(22) at its center portion, and a pair of auxiliary vacuum suction ports(24) penetrating the plate. A vacuum adjusting plate(30) is installed in the rotary plate to open/close an auxiliary suction port(24) of the vacuum suction plate. The vacuum adjusting plate has an opening surface(32), a first closing surface and a second closing surface(36).

    Abstract translation: 提供用于旋涂机的真空卡盘以通过使用一个真空吸盘分配真空并沉积各种尺寸的波来吸附晶片。 在固定在真空卡盘的轴上的旋转盘(10)上设置有板状的真空吸附板(20)。 真空吸板在其中心部分具有至少一个真空口(22),以及穿透该板的一对辅助真空抽吸口(24)。 真空调节板(30)安装在旋转板中以打开/关闭真空吸板的辅助吸入口(24)。 真空调节板具有开口表面(32),第一封闭表面和第二封闭表面(36)。

    태양전지모듈이 구비된 차량용 어닝
    12.
    发明公开
    태양전지모듈이 구비된 차량용 어닝 审中-实审
    充电太阳能电池模块

    公开(公告)号:KR1020160094041A

    公开(公告)日:2016-08-09

    申请号:KR1020150015099

    申请日:2015-01-30

    Abstract: 본발명은차량용어닝에대한것으로, 보다구체적으로는태양전지모듈을구비함으로써차양막으로서의역할뿐만아니라태양광발전을통한전기에너지생산이가능한차량용어닝에관한것이다. 본발명의태양전지모듈이구비된차량용어닝에의하면햇빛을차단하는차양막역할을수행함과함께, 태양광발전을통한전기에너지를생성할수 있어전기자동차등에전원을공급할수 있는효과가있다.

    Abstract translation: 本发明涉及一种用于车辆的遮篷。 更具体地说,车辆的遮阳篷具有太阳能电池模块,以便用作遮阳篷并通过太阳能发电产生电能。 根据具有太阳能电池模块的车辆的遮阳篷,本发明用作遮蔽太阳光的遮阳篷,并通过太阳能发电产生电能以向电动车辆供电。

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