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公开(公告)号：KR100431581B1
公开(公告)日：2004-05-17
申请号：KR1020020029546
申请日：2002-05-28
Applicant: 한국과학기술원
IPC: G02B26/08
CPC classification number: G02B26/0841
Abstract: Disclosed is a micromirror actuator that includes: a substrate provided with an insulating layer formed thereon; two lower columns spaced from each other by a designated distance, and formed on the insulating layer; a first torsion bar extending over upper surfaces of the lower columns; a second torsion bar formed so that the first and second torsion bars are orthogonal to each other; four electrodes, each disposed in four areas formed by the orthogonal crossing of the first and second torsion bars, formed on the insulating layer; two upper columns formed on an upper surface of the second torsion bar so that the upper surfaces of the upper columns are located at higher positions than the upper surfaces of the electrodes; and a micromirror located on the upper surfaces of the upper columns so that the micromirror is supported by the upper columns.
Abstract translation: 公开了一种微镜致动器，其包括：衬底，其上形成有绝缘层; 两个彼此间隔指定距离的下列，并形成在绝缘层上; 第一扭杆，其延伸越过下柱的上表面; 第二扭杆，其形成为使得第一扭杆和第二扭杆彼此正交; 四个电极，每个电极设置在由绝缘层上形成的由第一和第二扭杆的正交交叉形成的四个区域中; 两个上柱，其形成在第二扭杆的上表面上，使得上列的上表面位于比电极的上表面高的位置; 以及位于上列的上表面上的微镜，使得微镜由上列支撑。
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公开(公告)号：KR100372079B1
公开(公告)日：2003-02-14
申请号：KR1020000040630
申请日：2000-07-14
Applicant: 한국과학기술원
IPC: H03H9/00
CPC classification number: H03H11/0422 , G01F1/6845 , G01F1/696
Abstract: An electrothermal integrator and audio frequency filter utilizing an electrothermal structure fabricated by way of a micro-machining process. An electrothermal structure is a structure in which there is thermal interaction between its electrical components. It is possible to implement an audio frequency filter by properly integrating electrothermal structures fabricated by micro-machining technology and electrical circuitry, because thermal response is generally slower than electrical response. It is possible to implement a variety of filters by way of forming a Gm-C integrator utilizing an electrothermal structure and using this basic block of Gm-C integrator in general circuitry to form filters.
Abstract translation: 一种电热积分器和利用通过微加工工艺制造的电热结构的音频滤波器。 电热结构是其电部件之间存在热相互作用的结构。 通过适当地集成通过微加工技术和电子电路制造的电热结构，可以实现音频滤波器，因为热响应通常比电响应慢。 通过利用电热结构形成Gm-C积分器并在通用电路中使用该基本Gm-C积分器来形成滤波器，可以实现各种滤波器。
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Patent Agency Ranking
公开(公告)号：KR1020010046215A
公开(公告)日：2001-06-05
申请号：KR1019990049898
申请日：1999-11-11
Applicant: 주식회사 휴노테크놀로지 , 한국과학기술원
IPC: G06K9/00
Abstract: PURPOSE: A thermal semiconductor fingerprint sensor and a method for thermally recognizing a fingerprint thereof are provided to increase the reliability of a verification based on a fingerprint of a user by directly sensing a temperature of a fingerprint, thereby reducing the possibility of using the fingerprint by stealth. CONSTITUTION: A detection circuit(202) reads a resistance value of a thermal resistance layer(205) and detects a fingerprint image. A secondary metal layer(205) forms a connection line for transmitting the resistance value read from the thermal resistance layer(205) to the detection circuit(202). An insulation layer(204) is formed on the upper part of the secondary metal layer(203) using a silicone dioxide. The insulation layer(204) prevents a heat transmission between the thermal resistance layer(205) and the detection circuit(202). A passivation layer(206) protects the thermal resistance layer(205) from the external.
Abstract translation: 目的：提供一种热半导体指纹传感器和一种用于热识别其指纹的方法，以通过直接感测指纹的温度来增加基于用户指纹的验证的可靠性，从而降低使用指纹的可能性 隐身。 检测电路（202）读取热电阻层（205）的电阻值并检测指纹图像。 二次金属层（205）形成用于将从热阻层（205）读取的电阻值传送到检测电路（202）的连接线。 使用二氧化硅在二次金属层（203）的上部形成绝缘层（204）。 绝缘层（204）防止热电阻层（205）和检测电路（202）之间的热传递。 钝化层（206）保护热电阻层（205）免受外部的影响。
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公开(公告)号：KR100452112B1
公开(公告)日：2004-10-12
申请号：KR1020010043075
申请日：2001-07-18
Applicant: 한국과학기술원
IPC: H02N1/00
Abstract: Disclosed is an electrostatic actuator. A multi-layered auxiliary electrode is further arranged between main electrode and actuating body, and positive charge or negative charge is applied to main electrode, respective auxiliary electrodes, and actuating body such that electrostatic attractive force is generated between auxiliary electrodes adjacent to the main electrode, between adjacent auxiliary electrodes, and between auxiliary electrodes adjacent to the actuating body. According to the invention, distance between the induced charges is shortened, so that electrostatic attractive force therebetween increases, thereby capable of maintaining an actuating range equal to or larger than the conventional electrostatic actuator. The electrostatic actuator according to the present invention can be applied to various MEMS devices, such as an optical switch in which a mirror is formed in the actuator, a radio frequency (RF) switch, or a variable electrostatic capacitor, or the like.
Abstract translation: 公开了一种静电致动器。 在主电极和致动体之间还设置有多层辅助电极，并且正电荷或负电荷被施加到主电极，相应的辅助电极和致动体，使得在与主电极相邻的辅助电极之间产生静电引力 在相邻的辅助电极之间以及在与致动体相邻的辅助电极之间。 根据本发明，感应电荷之间的距离缩短，从而它们之间的静电吸引力增加，从而能够将致动范围保持为等于或大于常规静电致动器。 根据本发明的静电致动器可以应用于各种MEMS器件，例如其中在致动器中形成镜子的光学开关，射频（RF）开关或可变静电电容器等。
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公开(公告)号：KR100411328B1
公开(公告)日：2003-12-18
申请号：KR1020010082553
申请日：2001-12-21
Applicant: 한국과학기술원
IPC: G02B5/20
Abstract: PURPOSE: A variable optical filter is provided to vary the wavelength under a low voltage by using the Lorenz force applied to a conductive wire within the magnetic field. CONSTITUTION: A variable optical filter includes a substrate(101), the first reflective body(110), the second reflective body(130), a support body(121), a spring(122), a conductive wire(123), a current supply portion, and a magnetic field supply portion. The first reflective body is formed on the substrate. The second reflective body is formed in parallel to the first reflective body. The support body is used for supporting the second reflective body. The spring is used for connecting the support body with the first reflective body. The conductive wire is formed on the support body and the spring. The current supply portion supplies the current to the conductive wire. The magnetic field supply portion applied the magnetic field to the conductive wire. An effective optical path of an interval between the first reflective body and the second reflective body corresponds to 1/4 of wavelength of an incident ray to a filter.
Abstract translation: 目的：提供一种可变光学滤波器，通过使用施加于磁场内导线的洛伦兹力，在低电压下改变波长。 一种可变光学滤波器，包括基板（101），第一反射体（110），第二反射体（130），支撑体（121），弹簧（122），导线（123）， 电流供应部分和磁场供应部分。 第一反射体形成在基板上。 第二反射体与第一反射体平行地形成。 支撑体用于支撑第二反射体。 弹簧用于将支撑体与第一反射体连接。 导线形成在支撑体和弹簧上。 电流供应部分向导线提供电流。 磁场供应部分向导线施加磁场。 第一反射体和第二反射体之间的间隔的有效光路对应于入射到滤波器的光线波长的1/4。
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公开(公告)号：KR1020170086783A
公开(公告)日：2017-07-27
申请号：KR1020160006214
申请日：2016-01-19
Applicant: 한국과학기술원
IPC: H02S40/38 , H02S50/00 , H01L31/04 , G01R22/10 , G01R21/06 , G01R19/165 , G05F1/67 , H01L35/00 , H01L41/08
CPC classification number: Y02E10/50
Abstract: 태양광에너지를수집하는태양광셀, 및태양광셀의전압을기초로타겟장치의동작모드를제어함으로써타겟장치에정전압을제공하는전력관리유닛을포함하는태양광에너지수확장치및 태양광에너지수확장치를포함하는전자장치를제공할수 있다.
Abstract translation: 太阳gwangsel用于通过基于所述太阳能gwangsel控制，其包括一个电源管理单元提供恒定电压施加到所述目标设备的目标设备的操作模式的电压收集太阳能，以及太阳能收集装置，以及太阳能收集装置， 等等。
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公开(公告)号：KR100652904B1
公开(公告)日：2006-12-01
申请号：KR1020050039803
申请日：2005-05-12
Applicant: 한국과학기술원
Abstract: 센서 시스템에 관하여 개시한다. 본 발명의 센서 시스템은, 배선 및 배선과 연결된 연결선이 형성된 유연성 재질의 기판과, 배선과 연결되도록 부착된 IC를 포함하여 이루어지는 회로모듈과; 배선 및 배선과 연결된 연결선이 형성된 유연성 재질의 기판과, 배선과 연결되도록 부착된 센서를 포함하여 이루어지는 센서모듈이 구비되며, 회로모듈의 연결선과 센서모듈의 연결선이 연결됨으로써 회로모듈과 센서모듈은 전기적으로 연결되는 것을 특징으로 한다. 본 발명에 의하면, 유연성이 있고 구현 및 확장이 용이하며 센서모듈에 어떤 센서를 사용하느냐에 따라 다양한 용도로 응용이 가능하다.
센서 시스템, 회로모듈, 센서모듈, 유연성, 배선, 연결선, IC
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