公开(公告)号：KR100371311B1

公开(公告)日：2003-02-07

申请号：KR1020000060088

申请日：2000-10-12

Applicant: 한국과학기술원

Inventor： 김수현 ,  임영모 ,  임형준

IPC: C25F3/02

Abstract: PURPOSE: A cleaning method of workpiece for electrochemical etching is provided which is capable of processing the electrodes in a uniformed shape by removing foreign materials on the surface without separation of electrodes while electrochemical etching is being performed. CONSTITUTION: In a method for performing cleaning while electrodes(1) and the cathode are electrolytic machined in an electrolyte, the cleaning method of workpiece for electrochemical etching comprises the steps of generating bubbles(10) by maintaining positions of the electrodes(1) into the electrolyte for a certain period of time after instantaneously changing an electric potential difference of the electrodes that are being electrolytic machined; and removing bubbles(10) adhered onto the electrodes by moving the electrodes(1) to the above the surface of the electrolyte, thereby standing by there for several seconds when generation of bubbles is completed, wherein cleaning of the workpiece is performed by one or more the above steps, wherein cleaning is performed by sequentially repeating generation of bubbles, removing of bubbles and etching processing for several times after performing etching process by dipping the bubble removed electrodes into the electrolyte again, and wherein the bubbles are generated under a voltage of zero volt by cutting off the power supply impressed to the electrodes.

Abstract translation: 目的：提供一种用于电化学蚀刻的工件的清洁方法，其能够在进行电化学蚀刻的同时通过去除表面上的不需要分离的表面上的异物来处理均匀形状的电极。 在电解液中电解加工电极（1）和阴极的同时进行清洗的方法中，用于电化学蚀刻的工件的清洗方法包括以下步骤：通过将电极（1）的位置保持为 在瞬间改变正在进行电解加工的电极的电位差之后的一段时间的电解液; 和通过将电极（1）移动到电解质表面的上方去除附着在电极上的气泡（10），由此在气泡的产生完成时在那里停留几秒钟，其中工件的清洁由一个 通过将除去气泡后的电极再次浸渍于电解液中进行蚀刻处理后，依次重复进行气泡的产生，气泡的除去及蚀刻处理，进行多次清洗，并且在电压为 通过切断施加在电极上的电源来实现零伏。

公开(公告)号：KR1020020087258A

公开(公告)日：2002-11-22

申请号：KR1020010026352

申请日：2001-05-15

Applicant: 한국과학기술원

Inventor： 김수현 ,  임영모 ,  임형준

IPC: B23H5/02

CPC classification number: B23H7/26 ,  B23H3/00 ,  B23H11/003 ,  B23H11/006

Abstract: PURPOSE: A method and an apparatus for an electrolysis-discharge process are provided to reduce an error range of a process by simultaneously performing an electrolysis process and a discharging process. CONSTITUTION: A movement of a three-dimensional tool moving device(20) is electrically controlled by a position controller(30). A tool(10) is fixed at a lower portion of the three-dimensional tool moving device(20). An electrode(80) have a pole opposite to the tool(10). A power controller(40) is electrically connected to the position controller(30) so as to apply power to the tool(10) and the electrode(80). The tool(10) and the electrode(80) are submerged in electrolyte(60), which is accommodated in an electrolyte container(70). A workpiece(50) is submerged in electrolyte(60).

Abstract translation: 目的：提供一种电解放电工艺的方法和装置，通过同时进行电解处理和放电处理来减少工艺的误差范围。 构成：三维工具移动装置（20）的移动由位置控制器（30）电控制。 工具（10）固定在立体工具移动装置（20）的下部。 电极（80）具有与工具（10）相对的极。 电力控制器（40）电连接到位置控制器（30），以向工具（10）和电极（80）施加电力。 工具（10）和电极（80）浸没在容纳在电解质容器（70）中的电解质（60）中。 工件（50）浸没在电解液（60）中。