公开(公告)号：KR1020030082655A

公开(公告)日：2003-10-23

申请号：KR1020020021061

申请日：2002-04-17

Applicant: 한국과학기술원

Inventor： 김수현 ,  유장우 ,  김대석

IPC: G01J3/36

CPC classification number: G01J3/36 ,  G01N21/3103 ,  G01N21/35 ,  G01N2021/3595

Abstract: PURPOSE: A near-infrared ray spectrophotometer having an acoustic-optical tunable filter is provided to stably achieve near-infrared ray information from various measuring points using one spectrophotometer. CONSTITUTION: A near-infrared ray spectrophotometer includes a light source(10) generating light having near-infrared ray band, a multi-channel optical fiber probe(20) for transferring light information to a spectrophotometer system(90), an acoustic-optical tunable filter(50) for simultaneously splitting light transmitted into the spectrophotometer system(90), and a sensor(70) for measuring split light. A tungsten-halogen lamp is used as the light source(10). The tungsten-halogen lamp is connected to the multi-channel optical fiber probe(20) by using an SMA connector(21). The acoustic-optical tunable filter(50) and the sensor(70) are driven by means of a frequency controller and a sensor amplifying circuit.

Abstract translation: 目的：提供一种具有声光可调谐滤光片的近红外线分光光度计，使用一台分光光度计从各种测量点稳定地获得近红外线信息。 构成：近红外线分光光度计包括产生具有近红外线光谱的光的光源（10），用于将光信息传送到分光光度计系统（90）的多通道光纤探针（20），声光 用于同时分离透射到分光光度计系统（90）中的光的可调滤光器（50），以及用于测量分光的传感器（70）。 使用卤钨灯作为光源（10）。 钨卤灯通过使用SMA连接器（21）连接到多通道光纤探头（20）。 声光可调滤波器（50）和传感器（70）通过频率控制器和传感器放大电路驱动。

公开(公告)号：KR100865870B1

公开(公告)日：2008-10-29

申请号：KR1020070050795

申请日：2007-05-25

Applicant: 한국과학기술원

Inventor： 오세백 ,  유장우 ,  류성윤 ,  이광천 ,  이형철 ,  김수현

IPC: G01J3/02 ,  G01J3/18

Abstract: A 3D refractive index distribution measuring device and method of a phase object utilizing the white beam spectral characteristics can measure the 3D refractive index distribution with the minimum rotational motion by making the light of the different wave length which is split by using first and second diffraction gratings incident to the specimen at various angles. A 3D refractive index distribution measuring device of a phase object utilizing the white beam spectral characteristics comprises a light source(2) which emits incident beam(24a) and reference beam(24b); a first diffraction grating(3) diffracting the incident beam emitted from the light source into the light of multiple orders; a specimen part(4) generating the phase delay about the diffracted light passing through the first diffraction grating; a second diffraction grating(5) focusing the light of each wavelength generated from the specimen part and dispersed; a spectrum part(6) collecting spot beam(53) focused by the second diffraction grating and the reference beam to produce white beam again and radiating measurement beam(63) of specific wavelength; a detection part(7) detecting interference signal about the specific wavelength from the measurement beam; and a signal processing and control part(8) storing the interference signal detected by the detection part as data and controlling the first diffraction grating, the specimen part, and the spectrum part.

Abstract translation: 利用白光束光谱特性的相位物体的3D折射率分布测量装置和方法可以通过使通过使用第一和第二衍射光栅分裂的不同波长的光来测量具有最小旋转运动的3D折射率分布 以不同的角度对样本进行事件。 利用白光束光谱特性的相位物体的3D折射率分布测量装置包括发射入射光束（24a）和参考光束（24b）的光源（2）。 第一衍射光栅（3）将从光源发射的入射光束衍射成多个光; 产生围绕穿过第一衍射光栅的衍射光的相位延迟的样本部分（4）; 第二衍射光栅（5），聚焦从样品部分产生的每个波长的光并分散; 收集由第二衍射光栅和参考光束聚焦的光束（53）的光谱部分（6），再次产生白光束并辐射特定波长的测量光束（63）; 检测部（7），从所述测量光束检测关于所述特定波长的干涉信号; 以及信号处理和控制部分（8），存储由检测部分检测的干扰信号作为数据并控制第一衍射光栅，样本部分和光谱部分。

公开(公告)号：KR1020040004825A

公开(公告)日：2004-01-16

申请号：KR1020020038873

申请日：2002-07-05

Applicant: 한국과학기술원

Inventor： 김수현 ,  김대석 ,  공홍진 ,  유장우

IPC: G02F1/11

CPC classification number: G02F1/11 ,  G02B3/0006 ,  G02B27/283

Abstract: PURPOSE: An apparatus for measuring a three-dimensional shape of a transparent thin film using an acoustic optics tunable filter is provided to independently extract thickness information and shape information about a multi-level structure. CONSTITUTION: An apparatus for measuring a three-dimensional shape of a transparent thin film includes a light source(10) for emitting monochromatic rays, the first and second beam splitters(20,32), a Michelson interferometer module(30), an acoustic optics tunable filter, a CCD sensor(70). The second beam splitter splits the monochromatic rays emitted from the light source to send a part of the rays to a reference plane(33) and send another part of the rays to a measurement unit(80). The Michelson interferometer module includes a block plate(34) that selectively blocks irradiation of the monochromatic rays on the reference plane. The acoustic optics tunable filter selects monochromatic rays of a specific wavelength band from monochromatic rays irradiated on the filter. The first beam splitter allows reflection and transmission of the monochromatic rays among the light source, the second beam splitter and the acoustic optics tunable filter to be sequentially carried out. The CCD sensor forms an image from the monochromatic rays.

Abstract translation: 目的：提供一种使用声光学可调滤波器测量透明薄膜的三维形状的装置，以独立地提取关于多层结构的厚度信息和形状信息。 构成：用于测量透明薄膜的三维形状的装置包括用于发射单色光的光源（10），第一和第二分束器（20,32），迈克逊逊干涉仪模块（30），声学 光学可调滤波器，CCD传感器（70）。 第二分束器分离从光源发射的单色光以将一部分光线发送到参考平面（33），并将另一部分光线发送到测量单元（80）。 迈克尔逊干涉仪模块包括块板（34），该块板选择性地阻挡参考平面上的单色光的照射。 声光学可调滤波器从在滤光片上照射的单色光线选择特定波段的单色光。 第一分束器允许顺序地执行光源，第二分束器和声学光学可调滤波器之间的单色光的反射和透射。 CCD传感器从单色光线形成图像。