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公开(公告)号：KR101139845B1
公开(公告)日：2012-04-30
申请号：KR1020100040101
申请日：2010-04-29
Applicant: 한국화학연구원
IPC: H01L31/18 , H01L31/042
CPC classification number: H01L31/182 , C30B11/002 , C30B11/003 , C30B17/00 , C30B28/06 , C30B29/06 , Y02E10/546 , Y02P70/521
Abstract: 본 발명은 태양전지용 고 생산성 다결정 실리콘 잉곳 제조 장치에 관한 것으로, 더욱 상세하게는 진공챔버 내부에서 원료 실리콘을 가열하여 용융시킨 후, 냉각시켜 다결정 실리콘 잉곳을 제조하는 장치에 있어서, 상기 진공챔버 내부에 수평방향으로 상호 이격되도록 배열되며, 원료 실리콘이 각각 담겨져 다결정 실리콘 잉곳이 제조되는 다수의 도가니, 상기 각 도가니를 가열시켜 담겨진 원료 실리콘을 용융시키도록 상기 각 도가니의 외측에 구비되는 히터수단, 및 상기 히터수단에 의해 용융된 실리콘을 냉각시켜 다결정 잉곳으로 성장시키기 위해 상기 도가니를 냉각시키는 냉각수단을 포함하여 이루어진다.
상기와 같은 본 발명에 의하면, 외부히터와 내부히터로 구성된 히터수단의 각 온도를 제어하여 다수의 도가니를 가열시킬 수 있음에 따라 종래와 유사한 제조시간에 다수의 잉곳을 동시에 생산할 수 있어 제품의 질은 물론, 대량생산이 가능하며, 또한 비상 시 액상 실리콘의 누출 방지를 위한 보호판의 설치에 의해 장비 파손 및 폭발의 위험을 방지함과 더불어, 실리콘 응고열의 일방향성 제어를 통해 고효율 태양전지 제조에 적합한 잉곳의 주상구조 분율을 극대화 할 수 있다.-
公开(公告)号：KR1020110130067A
公开(公告)日：2011-12-05
申请号：KR1020100049509
申请日：2010-05-27
Applicant: 한국화학연구원
CPC classification number: Y02E10/50 , Y02P70/521 , H01L31/18 , H01L31/04
Abstract: PURPOSE: A poly-crystal silicon ingot manufacturing device for a solar battery is provided to manufacture a high capacity and high quality silicon ingot by uniformly growing silicon crystal from a lower direction to an upper direction. CONSTITUTION: A susceptor is installed in the outer side of a crucible and covers the crucible. A support stand(400) is installed in the lower side of the crucible and the susceptor and supports the crucible and the susceptor. A main heater part is formed into an insulating material which secludes a heat and is installed in a main heater and outer side of the main heater. A sub heater part(600) comprises a pair of sub heaters, a pair of Insulation boards, a pair of insulating plates, and a pair of rotated electrodes. A cooling part(700) is installed in the lower side of the sub heater part and eliminates the heat of solidification of a silicon material which is dissolved. The cooling part manufactures a silicon ingot by coagulating the silicon material which is dissolved by approaching to the crucible after passing through an opening part.
Abstract translation: 目的：提供一种太阳能电池用多晶硅锭制造装置，通过从下方向上方均匀生长硅晶体，制造高容量，高质量的硅锭。 构成：将基座安装在坩埚的外侧并覆盖坩埚。 支撑架（400）安装在坩埚和基座的下侧，并支撑坩埚和基座。 主加热器部分形成为隔热的绝缘材料，并且安装在主加热器和主加热器的外侧。 副加热器部件（600）包括一对副加热器，一对绝缘板，一对绝缘板和一对旋转电极。 冷却部（700）安装在副加热器部分的下侧，并消除溶解的硅材料的凝固热。 冷却部件通过使通过开口部的坩埚接近而溶解的硅材料凝结而制造硅锭。
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公开(公告)号：KR1020110120617A
公开(公告)日：2011-11-04
申请号：KR1020100040101
申请日：2010-04-29
Applicant: 한국화학연구원
IPC: H01L31/18 , H01L31/042
CPC classification number: H01L31/182 , C30B11/002 , C30B11/003 , C30B17/00 , C30B28/06 , C30B29/06 , Y02E10/546 , Y02P70/521
Abstract: PURPOSE: An apparatus for manufacturing a high productive poly-crystal silicon ingot is provided to prevent an apparatus from being damaged or exploded by maintaining silicon to be safe by the end of a process with the separation of the silicon, which is flown out, in the lower part of a damaged crucible and. CONSTITUTION: A vacuum chamber(100) includes a crucible in which a poly-crystal silicon ingot is formed. The crucible is arranged to a horizontal direction to be separated. A susceptor(500) is fixed in the vacuum chamber by a support stand. A heating device(300) is included in the outside of each crucible and transfers radiant heat to the crucible. A cooling device(400) is included to cool the crucible.
Abstract translation: 目的：提供一种用于制造高生产率多晶硅锭的装置，用于通过在流出的硅分离之后将硅保持在安全状态，以防止装置被损坏或爆炸 损坏的坩埚的下部和。 构成：真空室（100）包括其中形成多晶硅锭的坩埚。 坩埚布置成水平方向分离。 基座（500）通过支撑架固定在真空室中。 在每个坩埚的外部包括加热装置（300），并将辐射热传递到坩埚。 包括冷却装置（400）以冷却坩埚。
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公开(公告)号：KR101598560B1
公开(公告)日：2016-02-29
申请号：KR1020140098204
申请日：2014-07-31
Applicant: 한국화학연구원
Abstract: 본발명은밸브조립체에관한것으로서, 유체를이송하는이송유로를구비하는본체; 상기이송유로와연결되어상기유체를외부로배출하는배출구; 상기배출구와접촉되어상기배출구를밀폐하거나또는상기배출구로부터이격되어상기배출구를개방하는개폐밸브; 및상기개폐밸브를상기배출구에접촉또는이격되도록왕복이송하는이송유닛을포함하며; 상기개폐밸브는, 상기배출구와접촉되어상기배출구를밀폐하며, 상기배출구에접촉될때 상기개폐밸브와상기배출구사이에상기유체에포함된이물질이끼지않도록상기이물질을절단하면서상기배출구와접촉되는접촉/절단부를포함하는것을특징으로한다. 따라서, 본발명은고형또는점성액체로이루어지며유체에포함되는이물질을절단할수 있는절단부를개폐밸브에마련하여, 개폐밸브를이용하여선택적으로밀폐하고자하는밸브조립체의배출구와개폐밸브에사이에이물질이끼어유체가누출될수 있는유격이발생하는것을방지하며, 다량의이물질을포함한유체에대하여도사용가능한밸브조립체를제공할수 있다.
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公开(公告)号：KR101401255B1
公开(公告)日：2014-05-30
申请号：KR1020120137716
申请日：2012-11-30
Applicant: 한국화학연구원
IPC: C30B28/06 , C30B29/06 , H01L31/042 , H01L21/02
CPC classification number: Y02E10/50 , C30B28/06 , C30B21/02 , C30B29/06 , F27B2014/0837 , H01L21/02 , H01L31/042
Abstract: A device for producing an ingot according the present invention produces a semiconductor or metal oxide ingot by sequentially performing a liquid to solid phase transition on a liquid raw material in a vacuum chamber in order to have a solidification direction. The device includes a unit body that comprises: a crucible that uses the height of the device as a length direction and a direction which is vertical to the length direction as a width direction so that a semiconductor or metal oxide raw material is dipped; a cooling means that is equipped to be separated from the crucible at a particular distance in a length direction; a heating means that includes a first heating means equipped to be separated from the crucible at a particular distance in a width direction so as to surround the edge surface of the crucible and also includes a second heating means equipped to be separated from the crucible at a particular distance in a length direction so as to be opposed to the cooling means in a length direction with the crucible between the second heating means and the cooling means; and an insulating member that is disposed in a length direction between the crucible and the cooling means and is moved by means of a moving unit. A virtual surface is formed to cross the center of an internal spatial part included in the vacuum chamber, and the unit body is equipped in each section that is divided in the internal spatial part by means of the virtual surface.
Abstract translation: 根据本发明的用于制造锭的装置通过在真空室中的液体原料上依次进行液相至固相转变来制造半导体或金属氧化物锭，以具有凝固方向。 该装置包括：单元主体，其包括：坩埚，其使用所述装置的高度作为长度方向和与所述长度方向垂直的方向作为宽度方向，使得半导体或金属氧化物原料被浸渍; 冷却装置，其被设置成在长度方向上以特定距离与坩埚分离; 加热装置，其包括第一加热装置，其被配备为在坩埚上沿宽度方向以特定距离与坩埚分离以包围坩埚的边缘表面，并且还包括第二加热装置，其被配备为在坩埚中与 在第二加热装置和冷却装置之间的坩埚之间沿长度方向在长度方向上与冷却装置相对的特定距离; 以及在坩埚和冷却装置之间沿长度方向设置并通过移动单元移动的绝缘构件。 虚拟表面形成为穿过包括在真空室中的内部空间部分的中心，并且在通过虚拟表面在内部空间部分中分割的每个部分中装备单位体。
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Patent Agency Ranking
公开(公告)号：KR1020130024396A
公开(公告)日：2013-03-08
申请号：KR1020110087826
申请日：2011-08-31
Applicant: 한국화학연구원
CPC classification number: Y02E10/50 , C30B29/06 , C30B28/06 , H01L31/042
Abstract: PURPOSE: An apparatus for manufacturing a silicon ingot having an anti-leakage system of liquid silicon is provided to improve the safety of an ingot manufacturing experiment. CONSTITUTION: An insulation layer(110) is installed between a heater unit(300) and a cooling unit(400). A silicon blocking unit(800) surrounds a susceptor(500). The silicon blocking unit prevents the leak of liquid silicon. A silicon storage chamber(900) is installed to the lower part of the insulation layer. The silicon storage chamber accommodates leaked silicon.
Abstract translation: 目的：提供一种具有液态硅防漏系统的硅锭制造装置，以提高锭生产实验的安全性。 构成：在加热器单元（300）和冷却单元（400）之间安装绝缘层（110）。 硅阻挡单元（800）围绕基座（500）。 硅阻挡单元防止液态硅的泄漏。 硅绝缘层（900）安装在绝缘层的下部。 硅储存室容纳泄漏的硅。
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公开(公告)号：KR1020120057732A
公开(公告)日：2012-06-07
申请号：KR1020100095938
申请日：2010-10-01
Applicant: 한국화학연구원 , 주식회사 실리콘밸류
IPC: B01J8/18 , C01B33/027
CPC classification number: B01J8/1872 , B01J8/1836 , B01J19/02 , B01J2208/00398 , B01J2208/00415 , B01J2208/00495 , B01J2208/00902 , B01J2208/00991 , B01J2219/00247 , B01J2219/00252 , B01J2219/0209 , B01J2219/0218 , B01J2219/0227 , C01B33/027
Abstract: PURPOSE: A fluidized bed reactor is provided to prevent the contamination of poly-crystalline silicon by alternately arranging the interfacing parts of pieces forming each plate inside the plate. CONSTITUTION: A fluidized bed reactor includes a head(100), a first body part(200), a second body part(300), and a bottom part(400). The first body part is arranged under the head and is in connection with the head. A first reacting pipe is arranged in the first body part. The second body part is arranged under the first body part and is in connection with the first body part. A second reacting pipe is arranged in the second body part. The bottom part is arranged under the second body part and is in connection with the second body part. A flow gas supplying nozzle(600), a reaction gas supplying nozzle(650), a heater(700), and an electrode(800) are assembled at the bottom part.
Abstract translation: 目的：提供流化床反应器，以通过交替地将形成每个板的块的接合部分交替地布置在板内来防止多晶硅的污染。 构成：流化床反应器包括头部（100），第一主体部分（200），第二主体部分（300）和底部部分（400）。 第一主体部分布置在头部下方并与头部连接。 第一反应管布置在第一主体部分中。 第二主体部分布置在第一主体部分下方并且与第一主体部分连接。 第二反应管布置在第二主体部分中。 底部布置在第二主体部分下方并与第二主体部分连接。 在底部组装有流动气体供给喷嘴（600），反应气体供给喷嘴（650），加热器（700）和电极（800）。
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公开(公告)号：KR101116235B1
公开(公告)日：2012-03-09
申请号：KR1020100049509
申请日：2010-05-27
Applicant: 한국화학연구원
CPC classification number: Y02E10/50 , Y02P70/521
Abstract: 본발명은일체형단열-히터를구비한태양전지용다결정실리콘잉곳제조장치에관한것으로, 해결하고자하는기술적과제는고상의실리콘원료를측면또는상부에서가열함과동시에하부에서추가가열하여공정시간을줄일수 있고, 용해된실리콘원료의응고열을도가니하부방향으로만효과적으로제거시켜실리콘결정을하부에서상부방향으로균일하게성장시킴으로써대면적, 대용량의고품질실리콘잉곳을제조할수 있는일체형단열-히터를구비한태양전지용다결정실리콘잉곳제조장치를제공하는데있다.이를위해본 발명에따른일체형단열-히터를구비한태양전지용다결정실리콘잉곳제조장치는실리콘원료를충진하는도가니, 상기도가니의외부에설치되어도가니를커버하는써셉터, 상기도가니및 써셉터의하부에설치되어도가니및 써셉터를지지하는지지대, 상기써셉터의외부에설치되어상기도가니내의실리콘원료를용해시키는메인히터및 상기메인히터의외부에설치되어열을차단하는단열재로이루어지는메인히터부, 상기지지대의하부에상기지지대와서로이격공간을가지며설치되어상기도가니내의실리콘원료를용해시키는한 쌍의서브히터와상기서브히터의하부에설치되어열을차단하는한 쌍의단열판과상기서브히터와단열판사이에설치되되상기서브히터와단열판을일체로연결시키는한 쌍의절연판및 상기서브히터를관통하며설치되되자체회전으로상기서브히터를개별적으로회전시키는한 쌍의회전전극이구비된서브히터부및 상기서브히터부의하측에설치되되상기도가니에접근하여용해된실리콘원료의응고열을제거하는냉각부를포함하되, 상기서브히터는상기회전전극의회전으로하부로대응하게회전하여상기지지대하부에개방부를형성하고, 상기냉각부는상부로이동하되상기개방부를지나상기도가니에접근하여용해된실리콘원료를응고시켜실리콘잉곳을제조하는것을특징으로한다.
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公开(公告)号：KR101854422B1
公开(公告)日：2018-05-03
申请号：KR1020160128976
申请日：2016-10-06
Applicant: 한국화학연구원
Abstract: 본발명은연속고압반응기의반응부내로섬유질바이오매스를연속적이고안정적으로공급할수 있는방법과이를이용한연속식고압전처리방법에관한것으로, 보다상세하게는연속적으로공급되는목질계바이오매스의신속한수화와마찰식분쇄로섬유질의바이오매스수화물을제조하여연속고압반응기에연결되는바이오매스수화압축물공급부의일축스크루로공급하고, 공급되는바이오매스수화물에주기적으로압축공기를분사함으로써고압반응부로바이오매스를공급하는일축스크루에균일하게분산분포시킨후 바이오매스수화물을스크루로압축하여고압반응부로이송하는것을특징으로하는목질계바이오매스전처리용연속고압반응기및 이를이용한목질계바이오매스의연속식고압전처리방법에관한것이다.
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公开(公告)号：KR1020180038193A
公开(公告)日：2018-04-16
申请号：KR1020160128976
申请日：2016-10-06
Applicant: 한국화학연구원
CPC classification number: B01J4/007 , B01F7/08 , B01J19/0066 , B01J19/24
Abstract: 본발명은연속고압반응기의반응부내로섬유질바이오매스를연속적이고안정적으로공급할수 있는방법과이를이용한연속식고압전처리방법에관한것으로, 보다상세하게는연속적으로공급되는목질계바이오매스의신속한수화와마찰식분쇄로섬유질의바이오매스수화물을제조하여연속고압반응기에연결되는바이오매스수화압축물공급부의일축스크루로공급하고, 공급되는바이오매스수화물에주기적으로압축공기를분사함으로써고압반응부로바이오매스를공급하는일축스크루에균일하게분산분포시킨후 바이오매스수화물을스크루로압축하여고압반응부로이송하는것을특징으로하는목질계바이오매스전처리용연속고압반응기및 이를이용한목질계바이오매스의연속식고압전처리방법에관한것이다.
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